JP2016073164A - リニアモータ - Google Patents

リニアモータ Download PDF

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Publication number
JP2016073164A
JP2016073164A JP2014203613A JP2014203613A JP2016073164A JP 2016073164 A JP2016073164 A JP 2016073164A JP 2014203613 A JP2014203613 A JP 2014203613A JP 2014203613 A JP2014203613 A JP 2014203613A JP 2016073164 A JP2016073164 A JP 2016073164A
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JP
Japan
Prior art keywords
linear motor
support
magnetic
support component
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014203613A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016073164A5 (enrdf_load_stackoverflow
Inventor
康明 青山
Yasuaki Aoyama
康明 青山
勝彦 白石
Katsuhiko Shiraishi
勝彦 白石
大輔 海老澤
Daisuke Ebisawa
大輔 海老澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2014203613A priority Critical patent/JP2016073164A/ja
Priority to PCT/JP2015/064670 priority patent/WO2016051855A1/ja
Publication of JP2016073164A publication Critical patent/JP2016073164A/ja
Publication of JP2016073164A5 publication Critical patent/JP2016073164A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP2014203613A 2014-10-02 2014-10-02 リニアモータ Pending JP2016073164A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014203613A JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ
PCT/JP2015/064670 WO2016051855A1 (ja) 2014-10-02 2015-05-22 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014203613A JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ

Publications (2)

Publication Number Publication Date
JP2016073164A true JP2016073164A (ja) 2016-05-09
JP2016073164A5 JP2016073164A5 (enrdf_load_stackoverflow) 2017-09-07

Family

ID=55629911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014203613A Pending JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ

Country Status (2)

Country Link
JP (1) JP2016073164A (enrdf_load_stackoverflow)
WO (1) WO2016051855A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12065319B2 (en) 2020-10-29 2024-08-20 Canon Kabushiki Kaisha Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (ja) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd リニアモ−タ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
JP2011223697A (ja) * 2010-04-07 2011-11-04 Hitachi Metals Ltd リニアモータ
WO2014065308A1 (ja) * 2012-10-24 2014-05-01 株式会社日立製作所 リニアモータ及びリニアモータ駆動システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (ja) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd リニアモ−タ
JP2005287185A (ja) * 2004-03-30 2005-10-13 Hitachi Ltd リニアモータ
JP2011223697A (ja) * 2010-04-07 2011-11-04 Hitachi Metals Ltd リニアモータ
WO2014065308A1 (ja) * 2012-10-24 2014-05-01 株式会社日立製作所 リニアモータ及びリニアモータ駆動システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12065319B2 (en) 2020-10-29 2024-08-20 Canon Kabushiki Kaisha Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article
JP7538691B2 (ja) 2020-10-29 2024-08-22 キヤノン株式会社 搬送装置、真空装置、加工システム及び物品の製造方法

Also Published As

Publication number Publication date
WO2016051855A1 (ja) 2016-04-07

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