JP2016072437A - Expansion device, and breaking method for adhesive sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an expansion device capable of applying an appropriate external force to a workpiece.SOLUTION: An expansion device includes: first holding means (14) and second holding means (24) which face each other while interposing a workpiece (11) therebetween in a first direction (D1) that is parallel to a first surface (11a) of the workpiece and hold an expand sheet (13) therebetween; third holding means (34) and fourth holding means (44) which face each other while interposing the workpiece therebetween in a second direction (D2) parallel to the first surface and orthogonal to the first direction and hold the expand sheet therebetween; moving means (12, 22, 32 and 42) for separating the first holding means and the second holding means from each other in the first direction and separating the third holding means and the fourth holding means from each other in the second direction; and expansion cancel member attaching/detaching means (50) for sticking a tabular expansion cancel member (60) to the expand sheet between the holding means and the workpiece or exfoliating the expansion cancel member from the expand sheet.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an expansion device that expands an expanded sheet adhered to a plate-shaped workpiece, and a method for breaking an adhesive sheet using the expansion device.

  In order to divide a plate-like workpiece typified by a semiconductor wafer into a plurality of chips, a dividing blade is formed using a cutting blade, a laser beam, or the like, and then an external force is applied. Has been put to practical use. In this division method, for example, an expand sheet is attached to the workpiece and expanded, thereby applying an external force necessary for the division to the workpiece.

  By the way, in order to maintain the space | interval of the chip | tip which expanded and expanded the expanded sheet as mentioned above, the expansion apparatus which can fix the expanded sheet after expansion to a flame | frame is proposed (for example, refer patent document 1).

  If the expandable sheet expanded by the expansion device is fixed to the frame, the expandable sheet is difficult to contract, so that the interval between the chips does not narrow even if time elapses. Thereby, in the case of the pick-up etc. which remove a chip | tip from an expanded sheet, the contact of chips | tips can be prevented.

JP 2004-22382 A

  In the expansion device described above, a large space is secured between the clamping mechanism for clamping the expanded sheet and the workpiece so that the frame can be attached to the expanded expanded sheet. However, with this configuration, when an adhesive sheet such as DAF (Die Attach Film) that can be broken by a large external force that works instantaneously is stuck to the workpiece, the external sheet (expansion force) is insufficient and the adhesive sheet is suitable. Sometimes failed to break.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an expansion device capable of applying an appropriate external force to a workpiece, and a method for breaking an adhesive sheet using the expansion device. It is.

  According to the present invention, a work piece in which a division start point is formed along a plurality of intersecting scheduled lines or a work piece divided into individual chips along a plurality of intersecting scheduled lines is pasted. An expansion device for expanding a worn expanded sheet, wherein the expand sheet is opposed to each other with the workpiece sandwiched in a first direction parallel to the first surface of the workpiece, and the expand sheet is positioned outside the workpiece. A first sandwiching means and a second sandwiching means for sandwiching a sheet and facing each other with the workpiece sandwiched in a second direction parallel to the first surface and perpendicular to the first direction; The third clamping means and the fourth clamping means for clamping the expanded sheet in the outer region, the first clamping means and the second clamping means are separated along the first direction, The third clamping means and the fourth clamping means are connected to the second direction. And a plate-like expansion canceling member that partially suppresses expansion of the expanded sheet and is attached to the area of the expanded sheet positioned between each clamping means and the workpiece. Or an expansion canceling member attaching / detaching means that peels from the region.

  In this invention, it is preferable that this expansion cancellation member sticking means sticks this expansion cancellation member arrange | positioned adjacent to each other to this expanded sheet so that this workpiece may be surrounded.

  Further, according to the present invention, a workpiece in which a division start point is formed along a plurality of intersecting scheduled lines, or a workpiece divided into individual chips along a plurality of intersecting scheduled lines. A method for breaking an adhesive sheet that expands an expanded sheet attached to an adhesive sheet and breaks the adhesive sheet, wherein the workpiece is bonded in a first direction parallel to the first surface of the workpiece. Using the first clamping means and the second clamping means that are sandwiched and opposed to each other, the expanded sheet is clamped in a region outside the workpiece, and is parallel to the first surface and orthogonal to the first direction. A sandwiching step of sandwiching the expanded sheet in a region outside the workpiece using a third sandwiching means and a fourth sandwiching means facing each other with the workpiece sandwiched in two directions; and Expansion An expansion canceling member adhering step for adhering a plate-like expansion canceling member to be suppressed to an area of the expanded sheet located between each clamping means and the workpiece, and the expansion canceling member adhering step After the first holding means, the first holding means and the second holding means are separated along the first direction, and the third holding means and the fourth holding means are moved in the second direction. The expanding sheet attached to the workpiece is expanded to break the adhesive sheet by separating the expanded sheet, and after performing the breaking step, the expansion canceling member is moved to the expanded sheet. There is provided a method for breaking an adhesive sheet, comprising an expansion canceling member peeling step for peeling from an area.

  In the expansion device and the adhesive sheet breaking method according to the present invention, a plate-shaped expansion cancellation member is attached to the area of the expanded sheet located between each clamping means and the workpiece, and therefore when expanding the expanded sheet In addition, expansion of this area can be suppressed.

  That is, the area of the expanded sheet positioned between each clamping means and the workpiece is not expanded, and the external force applied to the workpiece is not reduced. Therefore, an appropriate external force can be applied to the workpiece.

It is a perspective view which shows typically the structural example of an expansion apparatus. It is the perspective view which looked at the expansion cancellation member attachment / detachment mechanism from the lower side. FIG. 3A is a cross-sectional view schematically showing the clamping step, and FIG. 3B is a cross-sectional view schematically showing the expansion cancel member attaching step. It is a top view which shows an expansion cancellation member sticking step typically. 5A is a cross-sectional view schematically showing the breaking step, FIG. 5B is a cross-sectional view schematically showing the expansion canceling member peeling step, and FIG. 5C is a holding step. It is sectional drawing which shows this typically.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a configuration example of the expansion device according to the present embodiment. In FIG. 1, some of the components of the expansion device are omitted.

  As shown in FIG. 1, the expansion device 2 includes a base 4 that supports each structure. An elevating mechanism 6 is disposed at the center of the upper surface 4a of the base 4, and a disk-like table 8 on which a workpiece 11 (see FIG. 3 and the like) is placed is placed at the upper end of the elevating mechanism 6. It is fixed. The table 8 is formed, for example, in the same size as the workpiece 11 and is moved up and down by the lifting mechanism 6.

  In the vicinity of the table 8, a first moving base 10 that is movable with respect to the base 4 is disposed. The first moving base 10 is connected to a first moving mechanism (moving means) 12 provided on the base 4, and moves in a first direction D 1 that is substantially parallel to the upper surface of the table 8.

  The first moving base 10 is provided with a first clamping unit (first clamping means) 14 that clamps an expanded sheet 13 (see FIG. 3) adhered to the workpiece 11. The first clamping unit 14 includes a first upper unit 16 and a first lower unit 18.

  The first upper unit 16 includes a substantially L-shaped first upper arm portion 16a. A first upper contact portion 16b that contacts the expanded sheet 13 is fixed to the distal end side of the first upper arm portion 16a.

  The first upper contact portion 16b is disposed in a region outside the table 8 in plan view. Further, the first upper contact portion 16b is formed in a straight line extending in the second direction D2 substantially parallel to the upper surface of the table 8 and substantially orthogonal to the first direction D1. A first upper lifting mechanism 16c provided on the first moving base 10 is connected to the proximal end side of the first upper arm portion 16a.

  Similarly, the first lower unit 18 includes a substantially L-shaped first lower arm portion 18a. A first lower contact portion 18b that contacts the expand sheet 13 is fixed to the distal end side of the first lower arm portion 18a.

  The first lower contact portion 18 b is disposed at a position corresponding to the first upper contact portion 16 b of the first upper unit 16. That is, the first lower contact portion 18b is disposed outside the table 8 in plan view. The first lower contact portion 18b is formed in a linear shape extending in the second direction D2. A first lower lifting mechanism 18c provided on the first moving base 10 is connected to the base end side of the first lower arm portion 18a.

  In order to sandwich the expanded sheet 13 with the first sandwiching unit 14 configured in this way, for example, the first upper abutting portion 16b is lowered by the first upper elevating mechanism 16c and the upper surface of the expanded sheet 13 is placed on the upper surface. Make contact.

  Further, the first lower contact mechanism 18 c is raised by the first lower lifting mechanism 18 c and is brought into contact with the lower surface of the expanded sheet 13. Thereby, the expanded sheet 13 is formed on the first upper contact portion 16b and the first lower contact portion 18b extending in the second direction D2 in the region outside the workpiece 11 (first clamping region). It is pinched.

  A second clamping unit (second clamping means) 24 that clamps the expanded sheet 13 is disposed at a position facing the first clamping unit 14 across the table 8 in the first direction D1. The configuration of the second clamping unit 24 is the same as the configuration of the first clamping unit 14.

  That is, the second clamping unit 24 is provided on the second moving base 20. The second moving base 20 is moved in the first direction D1 by the second moving mechanism (moving means) 22. The second clamping unit 24 includes a second upper unit 26 and a second lower unit 28.

  The second upper unit 26 includes a substantially L-shaped second upper arm portion 26a. A second upper contact portion 26b that contacts the expanded sheet 13 is fixed to the distal end side of the second upper arm portion 26a.

  The second upper contact portion 26b is disposed in a region outside the table 8 in plan view. The second upper contact portion 26b is formed in a linear shape extending in the second direction D2. A second upper elevating mechanism 26c provided on the second movable base 20 is connected to the proximal end side of the second upper arm portion 26a.

  Similarly, the second lower unit 28 includes a substantially L-shaped second lower arm portion 28a. A second lower contact portion 28b that contacts the expanded sheet 13 is fixed to the distal end side of the second lower arm portion 28a.

  The second lower contact portion 28 b is disposed at a position corresponding to the second upper contact portion 26 b of the second upper unit 26. That is, the second lower contact portion 28b is disposed outside the table 8 in plan view. The second lower contact portion 28b is formed in a linear shape extending in the second direction D2. A second lower lifting mechanism 28c provided on the second moving base 20 is connected to the proximal end side of the second lower arm portion 28a.

  In order to hold the expanded sheet 13 with the second holding unit 24, for example, the second upper contact mechanism 26 c is lowered by the second upper lifting mechanism 26 c and is brought into contact with the upper surface of the expanded sheet 13.

  Further, the second lower contact mechanism 28 c is raised by the second lower lifting mechanism 28 c and is brought into contact with the lower surface of the expanded sheet 13. As a result, the expanded sheet 13 is applied to the second upper contact portion 26b and the second lower contact portion 28b extending in the second direction D2 in the region outside the workpiece 11 (second clamping region). It is pinched.

  Further, if the first holding unit 14 and the second holding unit 24 holding the expanded sheet 13 are separated in the first direction D1 by the first moving mechanism 12 and the second moving mechanism 22, the expanded sheet 13 is used. Can be expanded in the first direction D1.

  A third clamping unit (third clamping means) 34 that clamps the expanded sheet 13 is disposed at a position adjacent to the first clamping unit 14 and the second clamping unit 24. The configuration of the third clamping unit 34 is similar to the configuration of the first clamping unit 14 and the second clamping unit 24.

  The third clamping unit 34 is provided on the third moving base 30. The third moving base 30 is moved in the second direction D2 by a third moving mechanism (moving means) 32. The third clamping unit 34 includes a third upper unit 36 and a third lower unit 38.

  The third upper unit 36 includes a linear third upper arm portion 36a. A third upper contact portion 36b that contacts the expanded sheet 13 is fixed to the distal end side of the third upper arm portion 36a.

  The third upper contact portion 36b is disposed in a region outside the table 8 in plan view. Further, the third upper contact portion 36b is formed in a linear shape extending in the first direction D1. A third upper elevating mechanism 36c provided on the third movable base 30 is connected to the proximal end side of the third upper arm portion 36a.

  Similarly, the third lower unit 38 includes a linear third lower arm portion 38a. A third lower contact portion 38b that contacts the expanded sheet 13 is fixed to the distal end side of the third lower arm portion 38a.

  The third lower contact portion 38 b is disposed at a position corresponding to the third upper contact portion 36 b of the third upper unit 36. That is, the third lower contact portion 38b is disposed outside the table 8 in plan view. The third lower contact portion 38b is formed in a linear shape extending in the first direction D1. A third lower lifting mechanism 38c provided on the third moving base 30 is connected to the proximal end side of the third lower arm portion 38a.

  In order to hold the expanded sheet 13 with the third holding unit 34, for example, the third upper abutting mechanism 36c is lowered by the third upper elevating mechanism 36c and brought into contact with the upper surface of the expanded sheet 13.

  Further, the third lower abutting mechanism 38 c raises the third lower abutting portion 38 b and abuts the lower surface of the expanded sheet 13. As a result, the expanded sheet 13 is formed on the third upper contact portion 36b and the third lower contact portion 38b extending in the first direction D1 in the region outside the workpiece 11 (third clamping region). It is pinched.

  A fourth clamping unit (fourth clamping means) 44 that clamps the expanded sheet 13 is disposed at a position facing the third clamping unit 34 with the table 8 interposed therebetween in the second direction D2. The configuration of the fourth clamping unit 44 is the same as the configuration of the third clamping unit 34.

  That is, the fourth clamping unit 44 is provided on the fourth moving base 40. The fourth moving base 40 is moved in the second direction D2 by a fourth moving mechanism (moving means) 42. The fourth clamping unit 44 includes a fourth upper unit 46 and a fourth lower unit 48.

  The fourth upper unit 46 includes a linear fourth upper arm portion 46a. A fourth upper abutting portion 46b that abuts against the expanded sheet 13 is fixed to the distal end side of the fourth upper arm portion 46a. In FIG. 1, a part of the fourth upper contact portion 46b is omitted.

  The fourth upper contact portion 46b is disposed in a region outside the table 8 in plan view. Further, the fourth upper contact portion 46b is formed in a linear shape extending in the first direction D1. A fourth upper lifting mechanism 46c provided on the fourth moving base 40 is connected to the proximal end side of the fourth upper arm portion 46a.

  Similarly, the fourth lower unit 48 includes a linear fourth lower arm portion 48a. A fourth lower contact portion 48b that contacts the expanded sheet 13 is fixed to the distal end side of the fourth lower arm portion 48a.

  The fourth lower contact portion 48 b is disposed at a position corresponding to the fourth upper contact portion 46 b of the fourth upper unit 46. That is, the fourth lower contact portion 48b is disposed outside the table 8 in plan view. The fourth lower contact portion 48b is formed in a straight line extending in the first direction D1. A fourth lower lifting mechanism (not shown) provided on the fourth moving base 40 is connected to the base end side of the fourth lower arm portion 48a.

  In order to hold the expanded sheet 13 with the fourth holding unit 44, for example, the fourth upper contact mechanism 46 c is lowered by the fourth upper lifting mechanism 46 c and brought into contact with the upper surface of the expanded sheet 13.

  Further, the fourth lower contact mechanism 48 b is raised by the fourth lower lifting mechanism and is brought into contact with the lower surface of the expanded sheet 13. As a result, the expanded sheet 13 is placed on the fourth upper abutting portion 46b and the fourth lower abutting portion 48b extending in the first direction D1 in the region outside the workpiece 11 (fourth clamping region). It is pinched.

  Furthermore, if the third holding unit 34 and the fourth holding unit 44 holding the expanded sheet 13 are separated in the second direction D2 by the third moving mechanism 32 and the fourth moving mechanism 42, the expanded sheet 13 is used. Can be expanded in the second direction D2.

  Above the table 8, an expansion cancellation member attaching / detaching mechanism (expansion canceling member attaching / detaching means) 50 is disposed. The expansion cancel member attaching / detaching mechanism 50 includes an actuator 52 coupled to a moving mechanism (not shown). The actuator 52 moves in the first direction D1 (or the second direction D2) by the moving mechanism.

  The actuator 52 includes a columnar casing 54 and two support rods 56 inserted through the casing 54. A substantially square support plate 58 is fixed to the front end side (lower end side) of the support rod 56 in a plan view. The support plate 58 is moved up and down by the actuator 52.

  A plurality of expansion cancellation members 60 are provided on the lower surface side of the support plate 58. FIG. 2 is a perspective view of the expansion canceling member attaching / detaching mechanism 50 as viewed from below. The expansion cancellation member 60 is a plate-like object such as a rubber sheet that can be attached to the expanded sheet 13 and is attached to the lower surface side of the support plate 58 by a plurality of locking members 62 made of a highly elastic material.

  In the present embodiment, as shown in FIG. 2, eight expansion cancellation members 60 are arranged so as to surround a circular region corresponding to the workpiece 11. At the end of each expansion cancellation member 60, each expansion cancellation member 60 is engaged with any of the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44. A hook 64 is disposed.

  Next, a method for breaking the adhesive sheet using the expansion device 2 described above will be described. First, a sandwiching step of sandwiching the expanded sheet 13 attached to the workpiece 11 with the first sandwiching unit 14, the second sandwiching unit 24, the third sandwiching unit 34, and the fourth sandwiching unit 44 is performed. carry out. FIG. 3A is a cross-sectional view schematically showing the clamping step.

  The workpiece 11 is, for example, a disk-shaped plate made of a material such as silicon, and a modified layer (division starting point) or a cutting groove (division starting point) is formed along a plurality of intersecting scheduled lines. ing. The modified layer is formed by, for example, irradiating a laser beam having a wavelength that is difficult to be absorbed by the workpiece 11, and the cutting groove is formed by, for example, cutting the cutting blade into the workpiece 11.

  An adhesive sheet 15 such as DAF (Die Attach Film) is provided on the lower surface (second surface) 11 b side of the workpiece 11. The adhesive sheet 15 is formed in a size that covers the entire lower surface 11 b of the workpiece 11, and the workpiece 11 has a central area (workpiece adhesion area) of the expanded sheet 13 through the adhesive sheet 15. ). Note that an adhesive layer having an adhesive force is provided on the upper surface of the expanded sheet 13.

  In the clamping step, first, the workpiece 11 attached to the expanded sheet 13 is placed on the table 8 so that the upper surface (first surface) 11a side is exposed upward. As described above, the first clamping unit 14 and the second clamping unit 24 face each other across the table 8 in the first direction D1, and the third clamping unit 34 and the fourth clamping unit 44 are the second clamping unit 44. Opposite the table 8 in the direction D2.

  Therefore, when the workpiece 11 is placed on the table 8, the first clamping unit 14 and the second clamping unit 24 face each other with the workpiece 11 interposed therebetween, and the third clamping unit 34 and the fourth clamping unit 24. The sandwiching unit 44 faces each other with the workpiece 11 interposed therebetween.

  The workpiece 11 is placed such that the upper surface 11 a and the lower surface 11 b are substantially parallel to the upper surface of the table 8. That is, the first direction D1 and the second direction D2 are substantially parallel to the upper surface 11a and the lower surface 11b of the workpiece 11.

  After the workpiece 11 is placed on the table 8, as shown in FIG. 3A, the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping The expanded sheet 13 is sandwiched by the unit 44. After sandwiching the expanded sheet 13, the table 8 is moved downward.

  After the clamping step, the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, the fourth clamping unit 44, and the expanded sheet 13 positioned between the workpiece 11 An expansion cancel member adhering step for adhering the expansion cancel member 60 to the region is performed. FIG. 3B is a cross-sectional view schematically showing the expansion cancel member attaching step, and FIG. 4 is a plan view schematically showing the expansion cancel member attaching step.

  In the extension canceling member attaching step, first, the support plate 58 is moved by the moving mechanism, and the first holding unit 14, the second holding unit 24, the third holding unit 34, and the fourth holding unit 44 are moved. Align above the enclosed area. Next, the support plate 58 is moved downward by the actuator 52 so that the lower surface of each expansion cancellation member 60 is brought into close contact with the upper surface of the expanded sheet 13.

  As described above, since the adhesive layer is formed on the upper surface of the expanded sheet 13, when the lower surface of each expansion cancellation member 60 is brought into close contact with the upper surface of the expanded sheet 13, as shown in FIG. The expansion cancellation member 60 is attached to the expanded sheet 13.

  More specifically, as shown in FIG. 4, in a plan view, the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, the fourth clamping unit 44, and the workpiece 11, each expansion canceling member 60 is attached to a region sandwiched between them. The area where the expansion cancellation member 60 is adhered (expansion cancellation member adhesion area) includes the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44. It is good to set so that the area | region pinched | interposed with the workpiece 11 may be filled substantially.

  After sticking each expansion canceling member 60 to the expanded sheet 13, as shown in FIG. 3B, the first upper contact portion 16b, the second upper contact portion 26b, and the third upper contact The hook engaging member 66 provided in each of the part 36b and the fourth upper contact part 46b is rotated to engage the hook 64 with the opening 66a.

  After the expansion canceling member attaching step, a breaking step for expanding the expanded sheet 13 attached to the workpiece 11 and breaking the adhesive sheet 15 is performed. FIG. 5A is a cross-sectional view schematically showing the breaking step.

  In the breaking step, the first holding unit 14 and the second holding unit 24 that hold the expanded sheet 13 are separated in the first direction D1 by the first moving mechanism 12 and the second moving mechanism 22.

  Further, the third holding unit 34 and the fourth holding unit 44 that hold the expanded sheet 13 are moved away in the second direction D2 by the third moving mechanism 32 and the fourth moving mechanism 42. Thereby, the expand sheet 13 can be expanded in the first direction D1 and the second direction D2.

  In the present embodiment, as described above, since the plurality of expansion cancel members 60 are adhered to the expansion cancel member attachment region of the expand sheet 13, even if the expand sheet 13 is expanded as described above, the expand sheet 13 does not expand the external force applied to the work piece 11.

  In the present embodiment, as described above, each expansion cancellation member 60 is attached to any one of the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44. Engaged.

  Therefore, when the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44 are moved, each expansion cancellation member 60 is also changed to the first clamping unit 14, the first clamping unit 14, and the fourth clamping unit 44. It moves together with the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44.

  Thereby, the workpiece sticking area | region of the expand sheet | seat 13 can fully be expanded, and the appropriate external force can be provided to the workpiece 11. FIG. By this breaking step, the workpiece 11 is divided into a plurality of chips 17, and the adhesive sheet 15 is broken into small sheets 19 corresponding to the respective chips 17.

  After the breaking step, an expansion cancellation member peeling step for peeling the expansion cancellation member 60 from the expanded sheet 13 is performed. FIG. 5B is a cross-sectional view schematically showing the expansion cancel member peeling step.

  In the extension canceling member peeling step, first, the hook engaging member 66 is rotated to release the engagement of the hook 64. Next, the support plate 58 is moved upward by the actuator 52, and each expansion cancel member 60 is peeled from the expansion cancel member attaching region of the expanded sheet 13.

  Here, the inner locking member 62a of each expansion cancellation member 60 is formed shorter than the outer locking member 62b. Further, the opening of the support plate 58 through which the locking member 62a and the locking member 62b are inserted is formed in a shape that allows the movement of the lower ends of the locking member 62a and the locking member 62b.

  Therefore, when the support plate 58 is moved upward, the inside of each expansion cancellation member 60 is pulled up first. When each expansion cancellation member 60 is completely peeled from the expanded sheet 13, the expansion cancellation member peeling step is finished.

  After the expansion cancellation member peeling step, a holding step for holding the chip 17 and the small sheet 19 with an annular frame is performed. FIG. 5C is a cross-sectional view schematically showing the holding step.

  In the holding step, first, an annular frame 21 surrounding the workpiece 11 is attached to the expanded sheet 13. Next, the expanded sheet 13 is cut along the frame 21 with the cutter 68. Thereby, the chip 17 and the small sheet 19 are held by the annular frame via the expanded sheet 13.

  As described above, in the expansion device and the method for breaking the adhesive sheet according to the present embodiment, the first clamping unit 14, the second clamping unit 24, the third clamping unit 34, and the fourth clamping unit 44 (each When the expansion sheet 13 is expanded by sticking the plate-like expansion cancellation member 60 to the expansion cancellation member adhesion region of the expanded sheet 13 located between the clamping means) and the workpiece 11, this expansion is performed. The cancellation member sticking area is prevented from expanding. Thereby, the expansion cancel member sticking region is expanded, and the external force applied to the workpiece 11 is not reduced, and an appropriate external force can be applied to the workpiece 11.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, an undivided workpiece 11 in which a modified layer or a cutting groove serving as a starting point of division is used is used. However, in the present invention, the workpiece after being divided into a plurality of chips is used. A workpiece 11 can also be used. In this case, for example, the expanded sheet 13 is attached to the workpiece divided into chips along a plurality of intersecting scheduled lines through the adhesive sheet 15.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2 Expansion device 4 Base 4a Upper surface 6 Lifting mechanism 8 Table 10 First moving base 12 First moving mechanism (moving means)
14 First clamping unit (first clamping means)
16 first upper unit 16a first upper arm portion 16b first upper contact portion 16c first upper lifting mechanism 18 first lower unit 18a first lower arm portion 18b first lower contact Contact 18c First lower lifting mechanism 20 Second moving base 22 Second moving mechanism (moving means)
24 Second clamping unit (second clamping means)
26 second upper unit 26a second upper arm portion 26b second upper contact portion 26c second upper lifting mechanism 28 second lower unit 28a second lower arm portion 28b second lower side contact Contact portion 28c Second lower lifting mechanism 30 Third moving base 32 Third moving mechanism (moving means)
34 Third clamping unit (third clamping means)
36 Third upper unit 36a Third upper arm portion 36b Third upper contact portion 36c Third upper lifting mechanism 38 Third lower unit 38a Third lower arm portion 38b Third lower contact Contact portion 38c Third lower lifting mechanism 40 Fourth moving base 42 Fourth moving mechanism (moving means)
44 Fourth clamping unit (fourth clamping means)
46 4th upper unit 46a 4th upper arm part 46b 4th upper contact part 46c 4th upper raising / lowering mechanism 48 4th lower unit 48a 4th lower arm part 48b 4th lower side contact Contact 50 Expansion cancellation member attaching / detaching mechanism (expansion canceling member attaching / detaching means)
52 Actuator 54 Housing 56 Support Rod 58 Support Plate 60 Expansion Cancel Member 62, 62a, 62b Locking Member 64 Hook 66 Hook Engagement Member 66a Opening 68 Cutter 11 Workpiece 11a Upper Surface (First Surface)
11b Lower surface (second surface)
13 Expanded sheet 15 Adhesive sheet 17 Chip 19 Small sheet 21 Frame D1 First direction D2 Second direction

Claims (3)

Expands an expanded sheet attached to a workpiece with split start points formed along multiple intersecting scheduled lines, or to a workpiece split into individual chips along multiple intersecting scheduled lines An expansion device that
A first clamping means and a second clamping means which are opposed to each other with the workpiece sandwiched in a first direction parallel to the first surface of the workpiece and sandwich the expanded sheet in a region outside the workpiece; Clamping means;
A third sandwiching means that faces the workpiece in a second direction parallel to the first surface and perpendicular to the first direction and sandwiches the expanded sheet in a region outside the workpiece; and A fourth clamping means;
Movement for separating the first clamping means and the second clamping means along the first direction and separating the third clamping means and the fourth clamping means along the second direction Means,
A plate-like expansion canceling member that partially suppresses expansion of the expanded sheet is attached to the area of the expanded sheet positioned between each clamping means and the workpiece, or is expanded to peel from the area An expansion device comprising: a cancel member attaching / detaching means.   The expansion cancel member attaching means attaches the plurality of expansion cancel members arranged adjacent to each other to the expanded sheet so as to surround the workpiece. Expansion unit. Affixed to a workpiece formed with division start points along a plurality of intersecting scheduled lines, or a workpiece divided into individual chips along a plurality of intersecting scheduled lines via an adhesive sheet Expanding the expanded sheet and breaking the adhesive sheet,
The first clamping means and the second clamping means facing each other with the workpiece sandwiched in a first direction parallel to the first surface of the workpiece, and the expand in a region outside the workpiece Using a third clamping means and a fourth clamping means that sandwich the sheet and face each other with the workpiece sandwiched in a second direction parallel to the first surface and perpendicular to the first direction, A sandwiching step of sandwiching the expanded sheet in a region outside the object;
An expansion canceling member attaching step for attaching a plate-like expansion canceling member that partially suppresses expansion of the expanding sheet to an area of the expanding sheet located between each clamping means and the workpiece;
After performing the expansion canceling member attaching step, the first holding means and the second holding means are separated along the first direction, and the third holding means and the fourth holding means Breaking along the second direction, expanding the expanded sheet adhered to the workpiece and breaking the adhesive sheet;
An expansion cancellation member peeling step for peeling the expansion cancellation member from the region of the expanded sheet after the breaking step is performed.