JP2016039295A - Gas purge unit, load port device and installation base for purge object container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide: a gas purge unit which is excellent in sealing characteristics, and easy in filling the inside of a purge object container with purification gas, and further in which a nozzle can be smoothly detached from a port; a load port device; and an installation base for a purge object container.SOLUTION: A gas purge unit includes: an air supply nozzle 28 having a nozzle port 26 from which purification gas is blown; an elastically deformable tubular member 31 in which a base end part 32 is fixed to the air supply nozzle 28 so as to surround around the nozzle port 26; and a contact member 34 provided to a tip 33 of the tubular member 31 and capable of contacting the air supply port 5 detachably. The hardness of the contact member 34 is higher than that of the tubular member 31.SELECTED DRAWING: Figure 3A

Description

  The present invention relates to a gas purge unit, a load port device, and an installation table for a purge target container.

  For example, in a semiconductor manufacturing process, a gas supply nozzle is arranged on a mounting table of a load port device, the supply nozzle is brought into contact with a gas supply port provided on the bottom surface of the wafer transfer container, and a purge gas is introduced. There is a technique for purging the inner atmosphere of a wafer transfer container with a purge gas (bottom purge).

  In such a technique, there is a possibility that a position shift occurs between the gas supply nozzle and the gas supply port due to the variation or inclination of the position of the gas supply port. When such a gap is generated, there is a problem that the inert gas supplied from the gas supply nozzle leaks or outside air is mixed into the wafer transfer container through the gap.

  In order to solve such a problem, there is a technique using a flexible seal in which the tip of the gas supply nozzle follows the introduction pressure of the purge gas (Patent Document 1). In addition, there is a technique for following the inclination by adopting a mode in which the nozzle can tilt with respect to the support member that supports the air supply nozzle (Patent Document 2).

  In patent document 1, since the site | part which contacts a gas supply port is a flexible sealing member, the effect of filling a clearance gap can be anticipated from a viewpoint of purge gas introduction. However, when the wafer transfer container is detached from the mounting table in a separate process, there arises a problem that the flexible seal member adheres to the gas supply port, making it difficult to remove. Since the deformed part of the flexible member keeps in direct contact for a long time, it is considered that the member is fixed by the introduction pressure of the purge gas.

  On the other hand, in Patent Document 2, the inclination of the air supply nozzle is followed to follow the inclination, and the nozzle position can be adjusted. However, if even a slight amount of deposit is generated between the air supply nozzle and the tilting support portion, the followability can be hindered. Further, it is necessary to secure a movable region of the air supply nozzle, and it is difficult to reduce the size of the entire nozzle unit.

US Pat. No. 6,164,664 JP 2014-36185 A

  The present invention has been made in view of such a situation, and the object thereof is excellent in sealing characteristics, it is easy to fill the inside of the purge target container with the cleaning gas, and the desorption between the nozzle and the port is smooth. It is to provide a gas purge unit, a load port device, and an installation base for a purge target container.

In order to achieve the above object, a gas purge unit according to the first aspect of the present invention comprises:
A gas purge unit for blowing a cleaning gas into a purge target container having an air supply port formed with an air supply port through the air supply port,
An air supply nozzle having a nozzle port for blowing out the cleaning gas;
A cylindrical member whose base end is fixed to the air supply nozzle so as to surround the nozzle opening and is elastically deformable;
A contact member provided at a distal end portion of the cylindrical member and detachably contactable with the air supply port;
The contact member has a hardness higher than that of the cylindrical member.

The gas purge unit according to the second aspect of the present invention is:
A gas purge unit for exhausting a cleaning gas from the inside of a purge target container having an exhaust port formed with an exhaust port through the exhaust port,
An exhaust nozzle having a nozzle port for exhausting the cleaning gas;
A tubular member having a base end fixed to the exhaust nozzle so as to surround the periphery of the nozzle opening and elastically deformable,
A contact member provided at a distal end portion of the cylindrical member and detachably contactable with the exhaust port;
The contact member has a hardness higher than that of the cylindrical member.

  In the gas purge unit of the present invention, the contact member provided at the tip of the cylindrical member provided in the air supply nozzle (or exhaust nozzle / hereinafter the same) is the air supply port (or exhaust port / hereinafter the same) of the purge target container. Removably contact with. The cylindrical member to which the contact member is attached is composed of an elastic member that can be elastically deformed. Therefore, even when the supply port is displaced or inclined due to the displacement or inclination of the purge target container, the elastically deformable cylindrical member is deformed, so that the contact member is Or contact closely with the air supply port around the exhaust port. For this reason, the cylindrical member can seal the nozzle port and the air supply port well from the outside air, and can seal them.

  Therefore, the cleaning gas supplied from the nozzle port (or exhausted / hereinafter the same) flows into the purge target container from the supply port without leaking to the outside and without being mixed with outside air (or exhausted). / Same as below), the inside can be satisfactorily filled with the cleaning gas, and the inside can be maintained in a clean state.

  Further, since the contact member has a higher hardness than the elastically deformable cylindrical member, even if the contact member is in contact with the air supply port for a long time compared to the case where the tip of the cylindrical member is in contact, the contact member It does not deform itself and can be effectively prevented from sticking to the air supply port. Further, wear can be prevented, generation of particles can be suppressed, and malfunction due to dust and dust does not occur.

  Furthermore, since the nozzle port of the air supply nozzle, the movable part (cylindrical member), and the position adjusting part (contact member) are independent, the nozzle itself does not tilt and can be moved by the deposits on the nozzle. There is no deterioration in sealing performance due to the deterioration in performance. Further, since the nozzle itself does not tilt, it is easy to supply the cleaning gas to the nozzle. Furthermore, since the elastically deformable portion may be formed in a local portion, the entire nozzle can be reduced in size.

  Preferably, the hardness of the contact member is higher than the hardness of the contact surface of the air supply port with which the contact member contacts. By comprising in this way, the adhering with respect to an air supply port can be prevented more effectively.

  Preferably, the contact member is made of a material different from that of the cylindrical member. By comprising in this way, the hardness of a contact member can be easily made high compared with a cylindrical member. In addition, you may form a contact member with high hardness by changing and hardening the front-end | tip part of a cylindrical member by chemical processing or physical processing.

The cylindrical member may have a base end portion fixed to the air supply nozzle, and a tube main body that connects the base end portion and the tip end portion,
The inner diameter of the cylinder body close to the distal end may be larger than the inner diameter of the cylinder body close to the base end.

  In that case, the contact property between the contact member and the air supply port can be further improved. In addition, the diameter of the base of the air supply nozzle to which the base end portion of the cylindrical member is fixed can be reduced.

  Or you may make the internal diameter of the said cylinder main body near the said front-end | tip part smaller than the internal diameter of the said cylinder main body near the said base end part. With this configuration, the flow of the cleaning gas from the supply nozzle toward the supply port is improved.

  The contact member may be a ring-shaped covering member that covers a distal end portion of the cylindrical member. Alternatively, the contact member may be a ring-shaped embedded member embedded in the distal end portion of the cylindrical member.

Alternatively, the contact member is
A mounting portion provided at the inner edge of the tip of the tubular member;
An enlarged diameter portion extending radially outward from the mounting portion;
A contact portion that is formed on the enlarged diameter portion and removably contacts the contact surface of the air supply port.

Alternatively, the contact member is
A mounting portion provided at the inner edge of the tip of the tubular member;
An enlarged diameter portion extending radially outward from the mounting portion;
It may have a convex contact convex part formed on the outer periphery of the enlarged diameter part and detachably contacting the contact surface of the air supply port.

  The load port apparatus of the present invention has the gas purge unit described above. The installation base of the purge target container of the present invention has the gas purge unit described above. The gas purge unit of the present invention may be installed in other devices or places.

FIG. 1 is a schematic view of a load port apparatus to which a gas purge unit according to an embodiment of the present invention is applied. FIG. 2 is a cross-sectional view showing a relationship between a gas purge unit incorporated in the load port apparatus shown in FIG. 1 and a hoop as a purge target container. FIG. 3A is a detailed cross-sectional view of the main part of the gas purge unit shown in FIG. 2, showing a state in which the air supply port is separated from the air supply nozzle. FIG. 3B is a detailed cross-sectional view of the main part of the gas purge unit shown in FIG. 2, showing a state in which the air supply port is attached to the air supply nozzle while being inclined. 4A is a cross-sectional view of a main part of a sealing device used in the gas purge unit shown in FIGS. 3A and 3B. FIG. 4B is a cross-sectional view of a main part of a sealing device used in a gas purge unit according to another embodiment of the present invention. FIG. 4C is a cross-sectional view of a main part of a sealing device used in a gas purge unit according to still another embodiment of the present invention. FIG. 4D is a cross-sectional view of a main part of a sealing device used in a gas purge unit according to still another embodiment of the present invention. FIG. 4E is a sectional view of an essential part of a sealing device used in a gas purge unit according to still another embodiment of the present invention. FIG. 4F is a cross-sectional view of a main part of a sealing device used in a gas purge unit according to still another embodiment of the present invention. FIG. 4G is a cross-sectional view of a main part of a sealing device used in a gas purge unit according to still another embodiment of the present invention. FIG. 5A is a schematic view showing a process in which the door of the hoop is opened by the load port device. FIG. 5B is a schematic view showing a step subsequent to FIG. 5A. FIG. 5C is a schematic view showing a step subsequent to FIG. 5B. FIG. 5D is a schematic view showing a step subsequent to FIG. 5C.

  Hereinafter, the present invention will be described based on embodiments shown in the drawings.

First Embodiment As shown in FIG. 1, a load port apparatus 10 according to an embodiment of the present invention is connected to a semiconductor processing apparatus 60. The load port apparatus 10 includes an installation table 12 and a movable table 14 that can move in the X-axis direction with respect to the installation table 12. In the drawings, the X-axis indicates the moving direction of the movable table 14, the Z-axis indicates the vertical direction in the vertical direction, and the Y-axis indicates the direction perpendicular to these X-axis and Z-axis.

  On the upper part of the movable table 14 in the Z-axis direction, a sealed transfer container 2 composed of a pot, a hoop, or the like for sealing, storing, and transferring a plurality of wafers 1 can be detachably mounted. The sealed transport container 2 has a casing 2a. Inside the casing 2a, a space for accommodating the wafer 1 as an object to be processed is formed. The casing 2a has a substantially box-like shape having an opening on any one surface that exists in the horizontal direction.

  The sealed transport container 2 includes a lid 4 for sealing the opening 2b of the casing 2a. A shelf (not shown) having a plurality of steps for vertically stacking the wafers 1 held horizontally in the casing 2a is arranged, and the wafers 1 placed thereon are set at a constant interval. Housed inside the container 2.

  The load port device 10 is an interface device for transferring a wafer accommodated in a sealed state in the sealed transfer container 2 into the semiconductor processing apparatus 60 while maintaining a clean state. The load port device 10 includes a door 18 that opens and closes the delivery port 13 of the wall member 11. The wall member 11 seals the inside of the semiconductor processing apparatus 60 in a clean state, or a part of the casing that seals the inside of the semiconductor processing apparatus 60 in a clean state, or the interior of an apparatus such as an EFEM (EFEM) that connects the semiconductor processing apparatus 60 and the load port apparatus 10 in a clean state. Function as part of the casing. The movement of the door 18 will be briefly described with reference to FIGS. 5A to 5D.

  As shown in FIG. 5A, when the container 2 is installed on the table 14, a bottom gas purge described later is performed. Then, as shown in FIG. 5B, in the state where the bottom gas purge is performed, the table 14 moves in the X-axis direction, and the opening edge 2c to which the lid 4 that airtightly closes the opening 2b of the container 2 is attached. However, it enters the inside of the delivery port 13 of the wall member 11.

  At the same time, the door 18 located inside the wall 11 (on the side opposite to the table 14) engages with the lid 4 of the container 2. At that time, the gap between the opening edge 2c and the opening edge of the delivery port 13 is sealed with a gasket or the like, and the gap between these is well sealed. Thereafter, as shown in FIG. 5C, the door 18 is moved in parallel with the lid 4 in the X-axis direction or is pivotally moved to remove the lid 4 from the opening edge 2c, open the opening 2c, and open the container 2 The inside and the inside of the wall 11 are communicated. At that time, the bottom gas purge may be continued to operate, or in addition to the bottom purge, a purge gas (cleaning gas) such as nitrogen gas or other inert gas from the inside of the wall 11 to the inside of the container 2 may be used. Gas) may be blown out (front purge).

  Next, as shown in FIG. 5D, if the door 18 is moved downward in the Z axis inside the wall 11, the opening 2 b of the container 2 opens completely with respect to the inside of the wall 11, and the inside of the wall 11. The wafer 1 is delivered to the inside of the wall 11 through the opening 2b by a robot hand or the like disposed on the wall. At that time, the inside of the container 2 and the inside of the wall 11 may be blocked from the outside air, and the bottom purge and / or the front purge may be continued, and the inside of the container 2 is maintained in a clean environment. In order to return the wafer 1 to the inside of the container 2 and remove the container 2 from the table 14, the reverse operation described above may be performed.

  As shown in FIG. 2, one or more positioning pins 16 are embedded in the upper surface 14a of the movable table 14, and the positioning pins 16 are fitted into the recesses of the positioning portion 3 provided on the lower surface of the casing 2a. Thus, the positional relationship between the container 2 and the movable table 14 is uniquely determined.

  During the storage and transfer of the wafer 1, the inside of the sealed transfer container 2 is sealed, and the periphery of the wafer 1 is maintained in a clean environment. When the sealed transport container 2 is positioned and installed on the upper surface 14 a of the movable table 14, the air supply port 5 and the exhaust port 6 formed on the lower surface of the sealed transport container 2 are respectively connected to the gas purge unit 20 for air supply. The air supply seal device 30 and the exhaust gas seal unit 50 of the exhaust gas purge unit 40 are connected in an airtight manner. In the present embodiment, a bottom gas purge process inside the container 2 is performed by the supply gas purge unit 20 and the exhaust gas purge unit 40. In the drawings, the air supply port 5, the exhaust port 6, the air supply gas purge unit 20, the exhaust gas purge unit 40, etc. are enlarged as compared with the sealed transfer container 2 for easy understanding. Although illustrated, it is different from the actual dimensional ratio.

  An air supply port 5a and an exhaust port 6a are formed in the air supply port 5 and the exhaust port 6, respectively, and these can communicate with the inside of the casing 2a via check valves 5b and 6b. The check valve 5b provided in the middle of the air supply port 5a allows the inflow of the cleaning gas that tries to enter the casing 2a through the air supply port 5a with a pressure higher than a predetermined level, but allows the reverse exhaust. It is a valve that does not.

  The check valve 6b provided in the middle of the exhaust port 6a allows the discharge of the cleaning gas that is about to be discharged from the inside of the casing 2a through the exhaust port 5a at a pressure higher than a predetermined level. It is an unacceptable valve. By providing these valves 5b and 6b, the inside of the container 2 can be connected to the air inlet 5a during the transportation or storage of the container 2 unless the gas purge unit 20 or 40 is connected to the air supply port 5 or the exhaust port 6. Or it does not communicate with outside air through the exhaust port 6a.

  As shown in FIG. 2, in this embodiment, the supply gas purge unit 20 and the exhaust gas purge unit 40 have the same structure. These units 20 and 40 are accommodated in the movable table 14, and only the heads of the sealing devices 30 and 50 in these units 20 and 40 protrude from the upper surface 14a of the table 14 to the upper part in the Z-axis direction. ing.

  The air supply gas purge unit 20 has an air supply member 24 in which an air supply passage 22 for supplying a cleaning gas such as nitrogen gas or other inert gas is formed. The air supply member 24 is a table. 14 is arranged inside. An air supply nozzle 28 in which a nozzle port 26 is formed is airtightly connected to the upper portion of the air supply member 24 in the Z-axis direction, and the nozzle port 26 and the air supply channel 22 communicate with each other. The nozzle port 26 communicates with the inside of the air supply sealing device 30 in an airtight manner.

  The exhaust gas purge unit 40 includes an exhaust member 44 in which an exhaust passage 42 for exhausting a cleaning gas such as nitrogen gas or inert gas is formed. The exhaust member 44 is disposed inside the table 14. It is. An exhaust nozzle 48 in which a nozzle port 46 is formed is airtightly connected to the upper portion of the exhaust member 44 in the Z-axis direction, and the nozzle port 46 and the exhaust flow path 42 communicate with each other. The nozzle port 46 communicates with the inside of the exhaust sealing device 50 in an airtight manner.

  In the present embodiment, the supply sealing device 30 and the exhaust sealing device 50 have the same configuration, so only the supply sealing device 30 will be described in detail, and the description of the exhaust sealing device 50 is omitted. To do.

  As shown in FIG. 4A, the air supply sealing device 30 includes a cylindrical member 31. The tubular member 31 has a tubular body 31 a, the proximal end portion 32 of the tubular body 31 a is embedded and fixed in the upper end portion of the air supply nozzle 28, and the tubular body 31 a surrounds the nozzle opening 26. It has become.

  An enlarged flange portion 31b is integrally formed in the middle of the cylinder main body 31a. In this embodiment, the enlarged diameter flange portion 31b is formed so as to spread in a horizontal plate shape. A ring-shaped contact member 34 is joined to the distal end portion 33 of the cylinder main body 31a including the enlarged diameter flange portion 31b so as to cover the distal end portion 33 by means such as caulking or adhesion. The contact member 34 is a ring-shaped covering member that surrounds the nozzle opening 26 and covers the distal end portion 33 of the cylindrical member, and has a cross-sectional shape that is a semicircular convex shape on the upper side.

  The hardness of the contact member 34 is higher than the hardness of the elastically deformable cylindrical member 31, and the O-ring 35 is deformed when the contact portion 34 comes into contact with the air supply port 5 a. It is preferable that the hardness does not occur. For example, the cylindrical member 31 is made of a material and a thickness that are highly elastic and do not allow gas to pass through at a working pressure. Specifically, the cylindrical member 31 is made of, for example, rubber, soft plastic, sponge, or the like.

  Further, the contact member 34 is made of a material and a thickness that are poor in elasticity and high in hardness, and do not allow gas to pass through at a working pressure. Specifically, the contact member 34 is made of a metal such as aluminum, steel, copper, or titanium. However, the contact member 34 is not limited to a metal and may be made of plastic or the like as long as the material has high hardness.

  In the present embodiment, as shown in FIG. 4A, the inner diameter d2 of the cylinder body 31a near the distal end portion 33 is larger than the inner diameter d1 of the cylinder body 31a near the proximal end portion 32. If the inner diameter of the nozzle port 26 is d0, the relationship is d0 <d1 <d2.

  As shown in FIGS. 3A and 3B, the convex portion of the contact member 34, which is a convex portion having a semicircular cross section on the upper side, contacts the lower contact surface 5 c surrounding the air supply port 5 a of the air supply port 5. A sealing gasket sheet (not shown) may be attached to the contact lower surface 5c. The gasket sheet has elasticity, and the hardness of the contact member 34 is higher than the hardness of the contact lower surface 5c of the air supply port 5 with which the contact member 34 contacts.

  As shown in FIG. 3B, the cylindrical member 31 is formed of a member that can be elastically deformed, such as rubber, so that the cylindrical member 31 is cylindrical even if the container 2 is installed with a slight inclination with respect to the table 14. The member 31 is elastically deformed, and the projecting portion having a semicircular cross section of the contact member 34 is in close contact with the contact lower surface 5c over the entire circumference, and the internal airtightness is maintained.

  If purge gas is supplied to the air supply passage 22 in the state shown in FIG. 3B, the internal pressure of the nozzle port 26 is increased, the check valve 5 b is opened, and the nozzle port 26 passes through the air supply port 5 a and enters the inside of the container 2. Purge gas is supplied. Inside the container 2, the pressure due to the purge gas increases, the check valve 6 b of the exhaust port 6 a shown in FIG. 2 opens, and the purge gas is exhausted through the exhaust port 6 a, the nozzle port 46 and the exhaust flow path 42. Therefore, the inside of the container 2 is filled with a clean purge gas, and the cleanliness inside the container 2 is improved.

  In the gas purge units 20 and 40 of the present embodiment, the contact member 34 provided at the distal end portion of the cylindrical member 31 provided in the air supply nozzle 28 (or the exhaust nozzle 48 / hereinafter the same) is the air supply port 5 of the container 2. (Or the exhaust port 6 / the same shall apply hereinafter) removably contacts. The cylindrical member 31 to which the contact member 34 is attached is composed of an elastic member that can be elastically deformed. Therefore, as shown in FIG. 3B, even when there is a displacement or inclination of the air supply port 5 due to a positional deviation or inclination of the container 2, the elastically deformable cylindrical member 31 is deformed, The contact member 34 is in close contact with the air supply port 5 around the air supply port 5a (or the exhaust port 6a / hereinafter the same). Therefore, the cylindrical member 31 can seal and seal the nozzle port 26 and the air supply port 5a well from the outside air.

  Therefore, the purge gas supplied (or exhausted / hereinafter the same) from the nozzle port 26 flows into the container 2 from the air supply port 5a without leaking to the outside and without mixing outside air (or exhaust / The same applies to the following), and the inside can be satisfactorily filled with the purge gas, and the inside can be kept clean.

  Furthermore, since the contact member 34 has a higher hardness than the elastically deformable tubular member 31, the contact member 34 is in contact with the air supply port 5 for a long time compared to the case where the tip of the tubular member 31 is in direct contact. Even so, the contact member 34 itself is not deformed, and the sticking to the air supply port 5 can be effectively prevented. In addition, since the nozzle port 26 of the air supply nozzle 28, the cylindrical member 31 that is a movable portion, and the contact member 34 that is a position adjusting portion are independent of each other, the nozzle 28 itself does not tilt and is directed to the nozzle 28. There is no deterioration in sealing performance due to a decrease in mobility due to deposits. Further, since the nozzle 28 itself does not tilt, it is easy to supply the cleaning gas to the nozzle 28. Furthermore, since the elastically deformable portion may be formed in a local portion, the entire nozzle 28 can be downsized.

  In this embodiment, the hardness of the contact member 34 is higher than the hardness of the contact lower surface 5c of the air supply port 5 with which the contact member 34 contacts. By comprising in this way, adhesion of the contact member 34 with respect to the contact lower surface 5c of the air supply port 5 can be prevented more effectively.

  Furthermore, in the present embodiment, the contact member 34 is made of a material different from that of the cylindrical member 31, so that the hardness of the contact member 34 can be easily increased as compared with the cylindrical member 31.

  In the present embodiment, as shown in FIG. 4A, the inner diameter d1 of the cylinder body 31a near the distal end portion 33 is larger than the inner diameter d1 of the cylinder body 31a near the proximal end portion 32. The contact property with the supply port 5 (see FIG. 3B) can be further improved. Further, the diameter of the base of the air supply nozzle 28 to which the base end portion 32 of the cylindrical member 31 is fixed can be reduced.

Second Embodiment FIGS. 4B to 4G are cross-sectional views of a main part of a sealing device used in a gas purge unit according to another embodiment of the present invention. Except for the above, it has the same configuration as that of the first embodiment described above, and has the same effects.

  In the sealing device 30a shown in FIG. 4B, the cylindrical body 31a of the cylindrical member 31 has a diameter-enlarged flange portion 31b1 having a tapered inner diameter. Since the cylindrical main body 31a has the diameter-enlarged flange portion 31b1 having a tapered inner diameter, the elasticity of the cylindrical member 31 (particularly the elasticity in the Z-axis direction) is improved.

  In the sealing device 30 b shown in FIG. 4C, the cylinder main body 31 a of the cylindrical member 31 has a reduced diameter flange portion 31 b 2 whose inner diameter becomes smaller toward the distal end portion 33. That is, the inner diameter d2 of the cylinder body 31a near the distal end portion 33 is smaller than the inner diameter d1 of the cylinder body 31a near the proximal end portion 32. With this configuration, the purge gas flow from the supply nozzle 26 shown in FIG. 4C toward the supply port 5 shown in FIG. 3B is improved.

  In the sealing device 30c shown in FIG. 4D, the cylinder main body 31a of the cylindrical member 31 has a reduced diameter flange portion 31b3 whose inner diameter decreases in a tapered shape toward the distal end portion 33. By configuring in this way, the flow of the purge gas from the supply nozzle 26 shown in FIG. 4D toward the supply port 5 shown in FIG. 3B is further improved. Moreover, the elasticity (especially elasticity in the Z-axis direction) of the cylindrical member 31 is improved.

  In the sealing device 30d shown in FIG. 4E, the cylinder main body 31a of the cylindrical member 31 has a reduced diameter flange portion 31b4 whose inner diameter decreases in a tapered shape toward the distal end portion 33. Further, the contact member 34d is formed at an attachment portion 35d provided at the inner edge of the tip portion 33 of the cylindrical member 31, a diameter-expanding portion 36d that extends radially outward from the attachment portion 35d, and a diameter-expanding portion 36d. 3B, and a flat contact portion 37d detachably contacting the contact lower surface 5c of the air supply port 5 shown in 3B.

  With this configuration, the flow of the purge gas from the supply nozzle 26 shown in FIG. 4E toward the supply port 5 shown in FIG. 3B is further improved. Moreover, the elasticity (especially elasticity in the Z-axis direction) of the cylindrical member 31 is improved. Further, since the contact portion 37d is provided, the adhesion between the contact member 34d and the contact lower surface 5c of the air supply port 5 shown in FIG. 3B is improved, and the sealing characteristics are also improved.

  In the sealing device 30e shown in FIG. 4F, the cylindrical body 31a of the cylindrical member 31 has a reduced diameter flange portion 31b4 whose inner diameter decreases in a tapered shape toward the distal end portion 33. Further, the contact member 34e is attached to the outer periphery of the mounting portion 35e provided on the inner edge of the tip portion 33 of the cylindrical member 31, the diameter-enlarging flange portion 36e extending outward in the radial direction from the mounting portion 35e, and the diameter-enlarging flange portion 36e. A contact convex portion 37e having a semicircular convex cross section is formed and detachably contacts the contact lower surface 5c of the air supply port 5 shown in FIG. 3B.

  With this configuration, the purge gas flow from the supply nozzle 26 shown in FIG. 4F toward the supply port 5 shown in FIG. 3B is further improved. Moreover, the elasticity (especially elasticity in the Z-axis direction) of the cylindrical member 31 is improved. Furthermore, since it has the contact convex part 37e, the adhesiveness of the contact member 34e and the contact lower surface 5c of the air supply port 5 shown to FIG. 3B improves, and a sealing characteristic also improves. Furthermore, since the contact convex portion 37e is arranged on the outer peripheral side of the distal end portion of the cylindrical member 31, even if the contact lower surface 5c of the air supply port 5 shown in FIG. It is easy to follow and is excellent in adhesion between the contact lower surface 5c and the contact member 34e.

  A seal device 30f shown in FIG. 4G is a modification of the seal device 30 shown in FIG. 4A. A ring-shaped contact member 34f having a circular cross section is a ring-shaped embedded part of which is embedded in the distal end portion 33 of the cylindrical member 31. It is an insert member.

  The present invention is not limited to the above-described embodiment, and can be variously modified within the scope of the present invention.

  For example, the gas purge units 20 and 40 do not necessarily have the same configuration but may have different configurations. For example, one side may have any of the sealing devices in FIGS. 4A to 4F, and the other side may have other sealing devices. Alternatively, only one of the gas purge units 20 and 40 may have the configuration of the gas purge unit according to the present invention.

  Further, in the above-described embodiment, the cylindrical member 31 and the contact members 34, 34a to 34f are configured as separate members, but the present invention is not limited thereto, and these are configured integrally with the same member, and the contact members 34, 34a to 34f are configured. It may be so arranged that the hardness of the portion corresponding to is higher than the hardness of the portion corresponding to the cylindrical member 31. Specifically, for example, the entire cylindrical member 31 may be formed of a rubber member, and the contact member may be formed by curing only the tip portion. Examples of the curing treatment include heat curing by heating and ultraviolet curing.

  In the above-described embodiment, the gas purge unit of the present invention is applied to the load port apparatus 10, but may be applied to other apparatuses. For example, the gas purge unit of the present invention may be attached to a shelf or an installation table for storing a plurality of containers 2 side by side. Or you may install the gas purge unit of this invention in another apparatus and place.

DESCRIPTION OF SYMBOLS 1 ... Wafer 2 ... Sealed conveyance container 2a ... Casing 2b ... Opening 2c ... Opening edge part 3 ... Positioning part 4 ... Lid 5 ... Air supply port 5a ... Air supply port 6 ... Exhaust port 6a ... Exhaust port 10 ... Load port apparatus 11 ... Wall member 12 ... Installation base 13 ... Delivery port 14 ... Movable table 16 ... Positioning pin 18 ... Door 20 ... Gas purge unit 22 for air supply ... Air supply passage 24 ... Air supply member 26 ... Nozzle port 28 ... Air supply nozzle 30 30a to 30f ... Air supply sealing device 31 ... Cylindrical member 31a ... Cylinder body 31b, 31b1 ... Expanded flange portion 31b2 ... Reduced diameter flange portion 31b3, 31b4 ... Cylindrical tapered portion 32 ... Base end portion 33 ... Tip 34 , 34d, 34f ... contact members 35d, 35e ... mounting portions 36d, 36e ... expanded diameter portion 37d ... contact portion 37e ... contact convex portion 40 ... exhaust gas purge unit G ... Exhaust flow path 44 ... Exhaust member 46 ... Nozzle port 48 ... Exhaust nozzle 50 ... Exhaust seal device 60 ... Semiconductor processing equipment

Claims (12)

A gas purge unit for blowing a cleaning gas into a purge target container having an air supply port formed with an air supply port through the air supply port,
An air supply nozzle having a nozzle port for blowing out the cleaning gas;
A cylindrical member whose base end is fixed to the air supply nozzle so as to surround the nozzle opening and is elastically deformable;
A contact member provided at a distal end portion of the cylindrical member and detachably contactable with the air supply port;
The gas purge unit, wherein the hardness of the contact member is higher than the hardness of the cylindrical member.   The gas purge unit according to claim 1, wherein the hardness of the contact member is higher than the hardness of the contact surface of the air supply port with which the contact member contacts.   The gas purge unit according to claim 1 or 2, wherein the contact member is made of a material different from that of the cylindrical member. The tubular member has a base end fixed to the air supply nozzle, and a tube main body that connects the base end and the tip.
The gas purge unit according to any one of claims 1 to 3, wherein an inner diameter of the cylindrical body close to the distal end is larger than an inner diameter of the cylindrical main body close to the base end. The tubular member has a base end fixed to the air supply nozzle, and a tube main body that connects the base end and the tip.
The gas purge unit according to any one of claims 1 to 3, wherein an inner diameter of the tube main body near the tip end portion is smaller than an inner diameter of the tube main body close to the base end portion.   The gas purge unit according to claim 1, wherein the contact member is a ring-shaped covering member that covers a distal end portion of the cylindrical member.   The gas purge unit according to any one of claims 1 to 5, wherein the contact member is a ring-shaped embedded member embedded in a distal end portion of the cylindrical member. The contact member is
A mounting portion provided at the inner edge of the tip of the tubular member;
An enlarged diameter portion extending radially outward from the mounting portion;
The gas purge unit according to any one of claims 1 to 5, further comprising a contact portion that is formed in the enlarged diameter portion and detachably contacts with a contact surface of the air supply port. The contact member is
A mounting portion provided at the inner edge of the tip of the tubular member;
An enlarged diameter portion extending radially outward from the mounting portion;
The gas purge unit according to any one of claims 1 to 5, further comprising a convex contact convex portion formed on an outer periphery of the enlarged diameter portion and detachably contacting a contact surface of the air supply port. A gas purge unit for exhausting a cleaning gas from the inside of a purge target container having an exhaust port formed with an exhaust port through the exhaust port,
An exhaust nozzle having a nozzle port for exhausting the cleaning gas;
A tubular member having a base end fixed to the exhaust nozzle so as to surround the periphery of the nozzle opening and elastically deformable,
A contact member provided at a distal end portion of the cylindrical member and detachably contactable with the exhaust port;
The gas purge unit, wherein the hardness of the contact member is higher than the hardness of the cylindrical member.   The load port apparatus which has a gas purge unit in any one of Claims 1-10.   The installation base of the purge object container which has a gas purge unit in any one of Claims 1-10.

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