JP2016031993A5 - - Google Patents
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- Publication number
- JP2016031993A5 JP2016031993A5 JP2014153150A JP2014153150A JP2016031993A5 JP 2016031993 A5 JP2016031993 A5 JP 2016031993A5 JP 2014153150 A JP2014153150 A JP 2014153150A JP 2014153150 A JP2014153150 A JP 2014153150A JP 2016031993 A5 JP2016031993 A5 JP 2016031993A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- photoelectric conversion
- conversion element
- insulating layer
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 38
- 238000006243 chemical reaction Methods 0.000 claims description 36
- 239000010410 layer Substances 0.000 claims description 29
- 239000011229 interlayer Substances 0.000 claims description 24
- 238000003384 imaging method Methods 0.000 claims description 22
- 238000000926 separation method Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 208000024891 symptom Diseases 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014153150A JP2016031993A (ja) | 2014-07-28 | 2014-07-28 | 固体撮像装置及びカメラ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014153150A JP2016031993A (ja) | 2014-07-28 | 2014-07-28 | 固体撮像装置及びカメラ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016031993A JP2016031993A (ja) | 2016-03-07 |
| JP2016031993A5 true JP2016031993A5 (enExample) | 2017-09-07 |
Family
ID=55442216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014153150A Pending JP2016031993A (ja) | 2014-07-28 | 2014-07-28 | 固体撮像装置及びカメラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2016031993A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10204943B2 (en) | 2016-08-10 | 2019-02-12 | Canon Kabushiki Kaisha | Image sensor, method of manufacturing the same, and camera with pixel including light waveguide and insulation film |
| JP6779929B2 (ja) | 2018-02-09 | 2020-11-04 | キヤノン株式会社 | 光電変換装置および機器 |
| JP7182968B2 (ja) | 2018-09-12 | 2022-12-05 | キヤノン株式会社 | 光電変換装置および機器 |
| DE112021001902T5 (de) * | 2020-03-27 | 2023-02-23 | Sony Semiconductor Solutions Corporation | Abbildungsvorrichtung und elektronische vorrichtung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007157912A (ja) * | 2005-12-02 | 2007-06-21 | Nikon Corp | 固体撮像装置 |
| JP5076528B2 (ja) * | 2007-02-06 | 2012-11-21 | 株式会社ニコン | 光電変換部の連結／分離構造、固体撮像素子及び撮像装置 |
| JP5422889B2 (ja) * | 2007-12-27 | 2014-02-19 | 株式会社ニコン | 固体撮像素子及びこれを用いた撮像装置 |
| JP5506517B2 (ja) * | 2010-04-12 | 2014-05-28 | キヤノン株式会社 | 固体撮像素子 |
| JP5631176B2 (ja) * | 2010-11-29 | 2014-11-26 | キヤノン株式会社 | 固体撮像素子及びカメラ |
| JP5812610B2 (ja) * | 2011-01-18 | 2015-11-17 | キヤノン株式会社 | 固体撮像素子及び固体撮像素子を有する撮像システム |
| JP5995416B2 (ja) * | 2011-08-24 | 2016-09-21 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| WO2013094419A1 (en) * | 2011-12-22 | 2013-06-27 | Canon Kabushiki Kaisha | Solid-state imaging device and imaging apparatus |
| JP6174940B2 (ja) * | 2012-10-19 | 2017-08-02 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| JP6120523B2 (ja) * | 2012-10-24 | 2017-04-26 | オリンパス株式会社 | 撮像素子及び撮像装置 |
| JP6124555B2 (ja) * | 2012-11-01 | 2017-05-10 | キヤノン株式会社 | 固体撮像素子及びそれを用いた測距装置 |
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2014
- 2014-07-28 JP JP2014153150A patent/JP2016031993A/ja active Pending