JP2016028414A - 化合物半導体太陽電池、及び、化合物半導体太陽電池の製造方法 - Google Patents
化合物半導体太陽電池、及び、化合物半導体太陽電池の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 171
- 150000001875 compounds Chemical class 0.000 title claims abstract description 168
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 244
- 238000006243 chemical reaction Methods 0.000 claims abstract description 87
- 239000000463 material Substances 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims description 83
- 239000000203 mixture Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 19
- 238000010030 laminating Methods 0.000 claims description 10
- 238000005304 joining Methods 0.000 claims description 6
- 229910000673 Indium arsenide Inorganic materials 0.000 abstract description 27
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 abstract description 26
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 236
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 99
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 59
- 239000012535 impurity Substances 0.000 description 40
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 18
- 230000004048 modification Effects 0.000 description 15
- 238000012986 modification Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 239000000969 carrier Substances 0.000 description 8
- 239000011701 zinc Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 4
- 239000011259 mixed solution Substances 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001994 activation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 229910005542 GaSb Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
Description
図1は、実施の形態1の化合物半導体太陽電池100を示す断面図である。
図3は、実施の形態2の化合物半導体太陽電池200を示す断面図である。
図4は、実施の形態3の化合物半導体太陽電池300を示す断面図である。
実施の形態3では、GaInPセル180、GaAsセル160、及びGaInPAsセル120によって構成される3接合型の化合物半導体太陽電池300を作製した。3つの光電変換セルのバンドギャップの組み合わせは、1.9eV/1.42eV/1.0eVであった。
図15は、実施の形態5の化合物半導体太陽電池500を示す断面図である。以下、実施の形態4の化合物半導体太陽電池400と同様の構成要素には同一符号を付し、その説明を省略する。
(Al)GaAs層582の(Al)GaAsは、正式にはAlxGa1−xAsであるが、簡略化した表現として(Al)GaAsを用いている。また、(Al)はAlを含む場合と含まない場合を包含した表記である。
10 電極
110 GaAs基板
111 GaAsバッファ層
160 GaAsセル
170 トンネル接合層 171 (Al)GaInP層
172 (Al)GaAs層
180 GaInPセル
40A コンタクト層
50 電極
200 化合物半導体太陽電池
210 Geセル
220 トンネル接合層
150 トンネル接合層
260 GaInAsセル
280 GaInPセル
300 化合物半導体太陽電池
310 InP基板
120 GaInPAsセル
130 接合層
150A トンネル接合層
400 化合物半導体太陽電池
410 GaInAsセル
400A、400B、400C 化合物半導体太陽電池
170A、170B、170C トンネル接合層
500 化合物半導体太陽電池
520 GaInPAsセル
560 GaInAsセル
570 AlGaAsセル
580 トンネル接合層
590 AlGaInPセル
Claims (14)
- GaAs又はGeに格子整合する第1化合物半導体材料で構成される第1光電変換セルと、
光の入射方向において前記第1光電変換セルよりも奥側に配設され、第1のp型(Alx1Ga1−x1)y1In1−y1As(0≦x1<1、0<y1≦1)層及び第1のn型(Alx2Ga1−x2)y2In1−y2P(0≦x2<1、0<y2<1)層を有する第1トンネル接合層と、
前記光の入射方向において前記第1トンネル接合層よりも奥側に配設され、GaAs系の第2化合物半導体材料で作製される第2光電変換セルと
を含み、
前記第1光電変換セルと前記第2光電変換セルとは、前記第1トンネル接合層によって接合されており、
前記第1のn型(Alx2Ga1−x2)y2In1−y2P層の格子定数は、前記第1光電変換セルの格子定数より大きい、化合物半導体太陽電池。 - 前記第1光電変換セルの前記第1化合物半導体材料は、(Alx3Ga1−x3)y3In1−y3P(0≦x3<1、0<y3<1)である、請求項1記載の化合物半導体太陽電池。
- 前記第1光電変換セルのバンドギャップは、1.9eVより大きい、請求項1又は2に記載の化合物半導体太陽電池。
- 前記第1トンネル接合層は、前記第1のn型(Alx2Ga1−x2)y2In1−y2P層の前記第2光電変換セル側に形成され、GaAs又はGeに格子整合する、第2のn型(Alx4Ga1−x4)y4In1−y4Pをさらに有する、請求項1乃至3のいずれか一項記載の化合物半導体太陽電池。
- 前記第1のn型(Alx2Ga1−x2)y2In1−y2P層のAl組成よりも、前記第2のn型(Alx4Ga1−x4)y4In1−y4P層のAl組成の方が大きい、請求項4記載の化合物半導体太陽電池。
- 前記第1のn型(Alx2Ga1−x2)y2In1−y2P層は、Alを含有しないn型GaInP層である、請求項4記載の化合物半導体太陽電池。
- 前記第1トンネル接合層は、前記第1のp型(Alx1Ga1−x1)y1In1−y1As層の前記第1光電変換セル側に形成され、前記第1のp型(Alx1Ga1−x1)y1In1−y1As層よりもAl組成が多い第2のp型(Alx5Ga1−x5)y5In1−y5As(0<x5<1、0<y5≦1)層をさらに有する、請求項1乃至6のいずれか一項記載の化合物半導体太陽電池。
- 第3化合物半導体材料で作製され、前記第2光電変換セルの前記光の入射方向における奥側に形成される第1接合層と、
化合物半導体基板と、
第4化合物半導体材料で作製され、前記化合物半導体基板に積層される、1又は複数の第3光電変換セルと、
第5化合物半導体材料で作製され、前記1又は複数の第3光電変換セルに積層される第2接合層と、
をさらに含み、
前記第1接合層の前記第2光電変換セルに接続される面とは反対側の面と、前記第2接合層の前記第3光電変換セルに接続される面とは反対側の面とが接合される、請求項1乃至7のいずれか一項記載の化合物半導体太陽電池。 - 光の入射方向において前記第2光電変換セルよりも奥側に配設され、第2のp型(Alx6Ga1−x6)y6In1−y6As(0≦x6<1、0<y6≦1)層及び第2のn型(Alx7Ga1−x7)y7In1−y7P(0≦x7<1、0<y7<1)層を有する第2トンネル接合層と、
前記光の入射方向において前記第2トンネル接合層よりも奥側に配設され、GaAs系又はGe系の半導体材料製の第3光電変換セルと
を含み、
前記第2光電変換セルと前記第3光電変換セルとは、前記第2トンネル接合層によって接合されており、
前記第3光電変換セルのバンドギャップは、前記第2光電変換セルのバンドギャップより小さく、
前記第2のn型(Alx7Ga1−x7)y7In1−y7P層の格子定数は、前記第2光電変換セルの格子定数より大きい、請求項1乃至7のいずれか一項記載の化合物半導体太陽電池。 - 第3化合物半導体材料で作製され、前記第3光電変換セルの前記光の入射方向における奥側に形成される第1接合層と、
化合物半導体基板と、
第4化合物半導体材料で作製され、前記化合物半導体基板に積層される、1又は複数の第4光電変換セルと、
第5化合物半導体材料で作製され、前記1又は複数の第4光電変換セルに積層される第2接合層と、
をさらに含み、
前記第1接合層の前記第3光電変換セルに接続される面とは反対側の面と、前記第2接合層の前記第4光電変換セルに接続される面とは反対側の面とが接合される、請求項9記載の化合物半導体太陽電池。 - 前記化合物半導体基板は、InP基板である、請求項8又は10記載の化合物半導体太陽電池。
- 前記第1光電変換セル、前記第2光電変換セル、前記第3光電変換セル、2層の前記第4光電変換セルにより、少なくとも5つの光電変換セルが積層方向に接合された多接合セルである、請求項10又は11記載の化合物半導体太陽電池。
- 第1化合物半導体材料で作製される第1光電変換セルと、第2化合物半導体材料で作製される第2光電変換セルとを含む化合物半導体太陽電池の製造方法であって、
化合物半導体基板に前記第2光電変換セルを積層する工程と、
前記第2光電変換セルにp型(Alx1Ga1−x1)y1In1−y1As(0≦x1<1、0<y1≦1)層及びn型(Alx2Ga1−x2)y2In1−y2P(0≦x2<1、0<y2<1)層を有するトンネル接合層を積層する工程と、
前記トンネル接合層に前記第1光電変換セルを積層する工程と
を含み、
前記第1化合物半導体材料は、GaAs又はGeに格子整合する化合物半導体材料であり、
前記第2化合物半導体材料は、GaAs系の化合物半導体材料であり、
前記n型(Al)GaInP層の格子定数は、前記第1光電変換セルの格子定数より大きい、化合物半導体太陽電池の製造方法。 - 第1化合物半導体基板に、GaAs又はGeに格子整合する第1化合物半導体材料で作製される第1光電変換セルを積層する工程と、
前記第1光電変換セルに第1のp型(Alx1Ga1−x1)y1In1−y1As(0≦x1<1、0<y1≦1)層及び第1のn型(Alx2Ga1−x2)y2In1−y2P(0≦x2<1、0<y2<1)層を有する第1トンネル接合層を積層する工程と、
第1トンネル接合層に、GaAs系の第2化合物半導体材料で作製される第2光電変換セルを積層する工程と、
前記第2光電変換セルに、第3化合物半導体材料で作製される第1接合層を積層する工程と、
第2化合物半導体基板に、第4化合物半導体材料で作製される1又は複数の第3光電変換セルを積層する工程と、
前記1又は複数の第3光電変換セルに、第5化合物半導体材料で作製される第2接合層を積層する工程と、
前記第1接合層の前記第2光電変換セルに接続される面とは反対側の面と、前記第2接合層の前記第3光電変換セルに接続される面とは反対側の面とを接合する工程と、
前記第1化合物半導体基板を除去する工程と
を含み、
前記第1のn型(Alx2Ga1−x2)y2In1−y2P層の格子定数は、前記第1光電変換セルの格子定数より大きい、化合物半導体太陽電池の製造方法。
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