JP2016017962A5 - - Google Patents

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Publication number
JP2016017962A5
JP2016017962A5 JP2015133462A JP2015133462A JP2016017962A5 JP 2016017962 A5 JP2016017962 A5 JP 2016017962A5 JP 2015133462 A JP2015133462 A JP 2015133462A JP 2015133462 A JP2015133462 A JP 2015133462A JP 2016017962 A5 JP2016017962 A5 JP 2016017962A5
Authority
JP
Japan
Prior art keywords
support structure
pad
raised
proof mass
flexure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2015133462A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016017962A (ja
Filing date
Publication date
Priority claimed from US14/326,224 external-priority patent/US9658244B2/en
Application filed filed Critical
Publication of JP2016017962A publication Critical patent/JP2016017962A/ja
Publication of JP2016017962A5 publication Critical patent/JP2016017962A5/ja
Ceased legal-status Critical Current

Links

JP2015133462A 2014-07-08 2015-07-02 加速度計のヒステリシス効果の低減 Ceased JP2016017962A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/326,224 US9658244B2 (en) 2014-07-08 2014-07-08 Reducing hysteresis effects in accelerometer
US14/326,224 2014-07-08

Publications (2)

Publication Number Publication Date
JP2016017962A JP2016017962A (ja) 2016-02-01
JP2016017962A5 true JP2016017962A5 (https=) 2018-07-19

Family

ID=53365935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015133462A Ceased JP2016017962A (ja) 2014-07-08 2015-07-02 加速度計のヒステリシス効果の低減

Country Status (4)

Country Link
US (1) US9658244B2 (https=)
EP (1) EP2966450B1 (https=)
JP (1) JP2016017962A (https=)
CN (1) CN105301285A (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10401378B2 (en) 2015-10-21 2019-09-03 Honeywell International Inc. Accelerometer
US10335897B2 (en) * 2016-07-28 2019-07-02 Applied Physics, Inc. Laser ablation of accelerometer proof mass
US10437616B2 (en) * 2016-12-31 2019-10-08 Intel Corporation Method, apparatus, system for optimized work submission to an accelerator work queue
KR101915770B1 (ko) * 2017-10-17 2018-11-06 국방과학연구소 열탄성 코일패드 내장형 가속도계
US10859593B2 (en) 2018-08-31 2020-12-08 Honeywell International Inc. Reducing thermal expansion induced errors in a magnetic circuit assembly
US11169175B2 (en) * 2020-02-11 2021-11-09 Honeywell International Inc. Multilayer excitation ring
US11521772B2 (en) 2020-02-11 2022-12-06 Honeywell International Inc. Multilayer magnetic circuit assembly
US20230290663A1 (en) * 2022-03-11 2023-09-14 X-Celeprint Limited Printing components suspended by frames

Family Cites Families (31)

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Publication number Priority date Publication date Assignee Title
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4592234A (en) * 1984-06-11 1986-06-03 Sundstrand Data Control, Inc. Suspension system for a transducer
US4736629A (en) 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4697455A (en) 1986-04-16 1987-10-06 Sundstrand Data Control, Inc. Accelerometer coil mounting system
US4726228A (en) 1986-04-16 1988-02-23 Sundstrand Data Control, Inc. Accelerometer proof mass interface
US4872342A (en) 1986-06-27 1989-10-10 Sundstrand Data Control, Inc. Translational accelerometer and accelerometer assembly method
US5095749A (en) 1986-08-25 1992-03-17 Hanson Richard A Proofmass suspension assembly for accelerometers
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
US5090243A (en) 1990-06-11 1992-02-25 Sundstrand Data Control, Inc. Preload system for accelerometer
JP3142292B2 (ja) 1990-06-11 2001-03-07 サンドストランド・コーポレイション 絶縁した屈曲部を有する加速度計
US5605598A (en) 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5289719A (en) 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5600067A (en) 1993-08-18 1997-02-04 Alliedsignal, Inc. Torque wire thermal strain relief
WO1996024853A1 (en) * 1995-02-09 1996-08-15 Alliedsignal Inc. Accelerometer with improved support rim isolation
US5693882A (en) 1996-02-27 1997-12-02 Honeywell Inc. Force sensing device having breakout tabs
US5962784A (en) 1997-05-27 1999-10-05 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5905201A (en) 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
ATE315235T1 (de) 1998-04-03 2006-02-15 Allied Signal Inc Beschleunigungsaufnehmer
US6389899B1 (en) 1998-06-09 2002-05-21 The Board Of Trustees Of The Leland Stanford Junior University In-plane micromachined accelerometer and bridge circuit having same
US7541214B2 (en) 1999-12-15 2009-06-02 Chang-Feng Wan Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
EP1395835B1 (en) * 2001-05-15 2006-08-16 Honeywell International Inc. Accelerometer strain relief structure
US6912902B2 (en) 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US20090205424A1 (en) * 2008-02-15 2009-08-20 Honeywell International Inc. Flexure type accelerometer and method of making same
US8528405B2 (en) * 2009-12-04 2013-09-10 The Charles Stark Draper Laboratory, Inc. Flexure assemblies and methods for manufacturing and using the same
US8516886B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric X-Axis gyroscope
IL215656A0 (en) * 2011-10-10 2011-11-30 Israel Aerospace Ind Ltd Accelerometer
US9164117B2 (en) 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors

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