JP2016009713A - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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Abstract
【解決手段】第1の主面10aと、第1の主面10aと反対側の第2の主面10bとを有する炭化珪素基板10が準備される。炭化珪素基板10の第1の主面10aに接して表面電極50が形成される。表面電極50を覆うように表面電極上に粘着テープ1が貼り付けられる。大気圧よりも低い第1の圧力において、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10が加熱される。炭化珪素基板10が加熱された後、炭化珪素基板10の第2の主面10bが研削される。第2の主面10bを研削する工程後、大気圧よりも低い第2の圧力において、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10の第2の主面10bに対して処理が行われる。
【選択図】図1
Description
(1)本発明の一形態に係る炭化珪素半導体装置の製造方法は以下の工程を備えている。第1の主面10aと、第1の主面10aと反対側の第2の主面10bとを有する炭化珪素基板10が準備される。炭化珪素基板10の第1の主面10aに接して表面電極50が形成される。表面電極を覆うように表面電極上に粘着テープ1が貼り付けられる。大気圧よりも低い第1の圧力において、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10が加熱される。炭化珪素基板10が加熱された後、炭化珪素基板10の第2の主面10bが研削される。第2の主面10bを研削する工程後、大気圧よりも低い第2の圧力において、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10の第2の主面10bに対して処理が行われる。
[本発明の実施形態の詳細]
以下、図面に基づいて本発明の実施の形態を説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付し、その説明は繰返さない。また、本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また、負の指数については、結晶学上、”−”(バー)を数字の上に付けることになっているが、本明細書中では、数字の前に負の符号を付けている。
まず、基板準備工程(S10:図2)が実施される。具体的には、たとえばポリタイプ4Hを有する炭化珪素単結晶からなるインゴット(図示しない)をスライスすることにより、六方晶炭化珪素単結晶からなり、かつ導電型がn型の炭化珪素単結晶基板11が準備される。次に、炭化珪素単結晶基板11上にエピタキシャル成長によりn型の炭化珪素エピタキシャル層20が形成される。炭化珪素エピタキシャル層20にはたとえば窒素イオンなどの不純物が含まれている。炭化珪素基板10の第1の主面10aの最大径は100mm以上であり、好ましくは150mm以上であり、より好ましくは200mm以上である。炭化珪素基板10の第1の主面10aは、たとえば{0001}面または{0001}面から8°以下程度オフした面であってもよい。炭化珪素単結晶基板11は、炭化珪素基板10の第2の主面10bを構成し、かつ炭化珪素エピタキシャル層20は、炭化珪素基板10の第1の主面10aを構成する(図5参照)。
本実施の形態に係るMOSFET100の製造方法によれば、炭化珪素基板10の第2の主面10bが研削される前に、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10が加熱される。これにより、粘着テープ1と表面電極50との間の空間に閉じ込められた気体の大部分を、当該空間の外部に排出することができる。炭化珪素基板10の第2の主面10bが研削されて炭化珪素基板が薄くなっている場合と比較して、炭化珪素基板10の厚みが大きいので、炭化珪素基板10が加熱される際に、炭化珪素基板10が割れることを抑制することができる。また第2の主面10bを研削する工程後、大気圧よりも低い第2の圧力において、粘着テープ1が表面電極50上に貼り付いた状態で炭化珪素基板10の第2の主面10bに対して処理が行われる。炭化珪素基板10の第2の主面10bを研削する前に、粘着テープ1と表面電極50との間の空間に閉じ込められた気体の大部分が、当該空間の外部に排出されているので、炭化珪素基板10の第2の主面10bに対して研削が行われた後においては、粘着テープ1と表面電極50との間の空間には、ほとんど気体が残っていない。そのため、大気圧よりも低い第2の圧力において、炭化珪素基板10の第2の主面10bに対して処理が行われる場合において、炭化珪素基板10が割れること効果的に抑制することができる。
1a 第4の主面
1b 第5の主面
3 基板保持部
3a 基板保持面
3b 加熱部
10 炭化珪素基板
10a 第1の主面
10b 第2の主面
10c 加工変質層
10d 単結晶層
11 炭化珪素単結晶基板
15 ドレイン電極
15 裏面電極
16 中間基板
16a 第3の主面
17 裏面保護電極
20 炭化珪素エピタキシャル層
21 ドリフト領域
22 ボディ領域
23 ソース領域
24 コンタクト領域
30 ゲート酸化膜
31 収容室
32 加熱処理室
33 接続部
40 ゲート電極
50 表面電極
50a ソース電極
50b 表面保護電極
60 層間絶縁膜
80 上面素子構造
100 炭化珪素半導体装置(MOSFET)
T 厚み
t 隙間
Claims (12)
- 第1の主面と、前記第1の主面と反対側の第2の主面とを有する炭化珪素基板を準備する工程と、
前記炭化珪素基板の前記第1の主面に接して表面電極を形成する工程と、
前記表面電極を覆うように前記表面電極上に粘着テープを貼り付ける工程と、
大気圧よりも低い第1の圧力において、前記粘着テープが前記表面電極上に貼り付いた状態で前記炭化珪素基板を加熱する工程と、
前記炭化珪素基板を加熱する工程後、前記炭化珪素基板の前記第2の主面を研削する工程と、
前記第2の主面を研削する工程後、大気圧よりも低い第2の圧力において、前記粘着テープが前記表面電極上に貼り付いた状態で前記炭化珪素基板の前記第2の主面に対して処理を行う工程とを備えた、炭化珪素半導体装置の製造方法。 - 前記第1の圧力は、1×10−5Pa以上1×10−2Pa以下である、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第1の圧力は、前記第2の圧力以下である、請求項1または請求項2に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板を加熱する工程における前記炭化珪素基板の温度は、100℃以上200℃以下である、請求項1〜請求項3のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第2の主面に対して処理を行う工程は、前記第2の主面を研削する工程において前記第2の主面に形成された加工変質層をプラズマエッチングにより除去する工程を含む、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第2の主面に対して処理を行う工程は、前記炭化珪素基板の前記第2の主面に裏面電極を形成する工程を含む、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第2の主面に対して処理を行う工程は、前記裏面電極に対してレーザーアニールを行う工程を含む、請求項6項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第1の主面の最大径は、100mm以上である、請求項1〜請求項7のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第2の主面を研削する工程後において、前記炭化珪素基板の厚みは、50μm以上200μm以下である、請求項1〜請求項8のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第2の主面に対して処理を行う工程後、前記粘着テープを前記表面電極上から除去する工程をさらに備えた、請求項1〜請求項9のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板を加熱する工程は、加熱部を含む基板保持部から前記炭化珪素基板が離間した状態で前記炭化珪素基板を加熱する工程を含む、請求項1〜請求項10のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板を加熱する工程は、前記基板保持部から前記炭化珪素基板が離間した状態で前記炭化珪素基板を加熱する工程後、前記炭化珪素基板が前記基板保持部に接触した状態で前記炭化珪素基板を加熱する工程をさらに含む、請求項11に記載の炭化珪素半導体装置の製造方法。
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