JP2016004869A5

JP2016004869A5 -

Info

Publication number: JP2016004869A5
Application number: JP2014123655A
Authority: JP
Filing date: 2014-06-16
Publication date: 2017-07-13
Anticipated expiration: 2034-06-16

Description

すなわち、ダミー個別電極パッド２４は、個別電極パッド２１を介して圧電素子１６の上部電極１６３に供給される電荷量の不均一を抑制するように、上部電極１６３に電荷を供給する電荷供給用個別端子電極として機能するものである。個別電極パッド２１と、このダミー個別電極パッド２４とを介して供給された電荷を用いて圧電素子１６の分極処理をおこなうことで、複数の圧電素子１６を均一に分極処理することが可能となる。 That is, the dummy individual electrode pad 24 is a charge supplying individual that supplies charges to the upper electrode 163 so as to suppress unevenness in the amount of charge supplied to the upper electrode 163 of the piezoelectric element 16 via the individual electrode pad 21. It functions as a terminal electrode. The individual electrode pads 21, by performing polarization processing of the piezoelectric element 16 by using the charge supplied via the dummy individual electrodes pads 24, it can be polarized multiple pressure conductive elements 16 uniformly Become.

このように、複数のダミー個別電極パッド２４を介して供給される電荷が、個別電極パッド２１を介して供給される電荷量の差を補正して複数の上部電極１６３に供給される電荷量を均一化するように、複数のダミー個別電極パッド２４を形成する。これにより、複数の上部電極１６３に供給される電荷量は均一化され、複数の圧電素子１６を均一に分極処理することが可能となる。 In this way, the charge supplied through the plurality of dummy individual electrode pads 24 corrects the difference in the amount of charge supplied through the individual electrode pads 21 to obtain the amount of charge supplied to the plurality of upper electrodes 163. A plurality of dummy individual electrode pads 24 are formed so as to be uniform. Thus, the amount of charge supplied to the plurality of upper electrodes 163 are equalized, it is possible to uniformly polarized multiple pressure conductive elements 16.

次に、図６に示す、分極処理を行うコロナ放電装置５０の一例について詳しく説明する。コロナ放電装置５０は、主放電電極としてのコロナワイヤー電極５２、コロナ電極用電源５１、図示しないグリッド電極とグリッド電極用電源、複数の圧電素子が形成されたウェハ等の処理対象物を固定して載置する保持部材としてのステージ５３等を具備している。コロナワイヤー電極５２及びグリッド電極（不図示）はそれぞれ、コロナ電極用電源５１及びグリッド電極用電源（不図示）に接続され、所定の電圧が印加される。また、ステージ５３は、ステージ５３上に配置された処理対象物に対して電荷を付与しやすくなるように、アース線を介して接地されていることが好ましい。 Next, FIG. 6, will be described in detail an example of row Uco corona discharge device 50 to a polarization treatment. The corona discharge device 50 fixes a processing object such as a corona wire electrode 52 as a main discharge electrode, a corona electrode power supply 51, a grid electrode and power supply for grid electrodes (not shown), and a wafer on which a plurality of piezoelectric elements are formed. A stage 53 as a holding member to be placed is provided. The corona wire electrode 52 and the grid electrode (not shown) are connected to a corona electrode power source 51 and a grid electrode power source (not shown), respectively, and a predetermined voltage is applied thereto. Moreover, it is preferable that the stage 53 is grounded via a ground wire so that an electric charge can be easily applied to the processing object disposed on the stage 53.

(態様Ｋ)
前記（態様Ａ）乃至（態様Ｅ）のいずれかに記載の電気機械変換部材を製造する製造方法であって、基板上にまたは前記基板に形成された下地膜上に、共通駆動電極を形成する工程と、前記共通駆動電極上に、互いに独立した複数の電気機械変換膜を形成する工程と、前記複数の電気機械変換膜それぞれの上に位置する複数の個別駆動電極を形成する工程と、前記共通駆動電極上及び前記複数の個別駆動電極上に第１の絶縁保護膜を形成する工程と、前記共通駆動電極に第１の配線を介して接続された共通端子電極と、前記複数の個別駆動電極それぞれに第２の配線を介して接続され所定の方向に並ぶように配置された複数の個別端子電極と、前記複数の個別駆動電極それぞれに第３の配線を介して接続され所定の方向に並ぶように配置された複数のダミー個別端子電極とを、前記第１の絶縁保護膜上に形成する工程と、前記共通端子電極と前記複数の個別端子電極と前記複数のダミー個別端子電極を露出させた状態で前記第１の配線上、第２の配線上及び前記第３の配線上に第２の絶縁保護膜を形成する工程と、放電により発生した電荷を前記共通端子電極と前記複数の個別端子電極と前記複数のダミー個別端子電極に供給することにより、前記複数の電気機械変換膜を一括して分極処理する工程と、を含む。
これよれば、上記実施形態について説明したように、良好な分極特性を有する電気機械変換素子を備えた電気機械変換部材を得ることができる。
(Aspect K)
A manufacturing method for manufacturing the electromechanical conversion member according to any one of (Aspect A) to (Aspect E), wherein a common drive electrode is formed on a substrate or a base film formed on the substrate. Forming a plurality of independent electromechanical conversion films on the common drive electrode, forming a plurality of individual drive electrodes positioned on each of the plurality of electromechanical conversion films, and Forming a first insulating protective film on the common drive electrode and the plurality of individual drive electrodes; a common terminal electrode connected to the common drive electrode via a first wiring; and the plurality of individual drives. A plurality of individual terminal electrodes connected to each of the electrodes via a second wiring and arranged in a predetermined direction, and connected to each of the plurality of individual drive electrodes via a third wiring in a predetermined direction Arranged side by side Forming a plurality of dummy individual terminal electrodes on the first insulating protective film; and exposing the common terminal electrode, the plurality of individual terminal electrodes, and the plurality of dummy individual terminal electrodes in a state where the plurality of dummy individual terminal electrodes are exposed. on first wiring, a step of forming a second insulating protective film on the second wiring and on the third line, the charges generated by the discharge and before Symbol Common terminal electrode and said plurality of individual terminal electrodes And supplying the plurality of dummy individual terminal electrodes together to subject the plurality of electromechanical conversion films to polarization treatment.
According to this, as described in the above embodiment, an electromechanical conversion member including an electromechanical conversion element having good polarization characteristics can be obtained.

Claims

A plurality of electromechanical conversion elements each made of an electromechanical conversion film sandwiched between a pair of drive electrodes, and an individual drive electrode formed on one surface side of the plurality of electromechanical conversion films among the drive electrodes, respectively. Electromechanical conversion member comprising a plurality of individual terminal electrodes connected to each other and an insulating protective film that protects the plurality of electromechanical conversion elements formed so that the plurality of individual terminal electrodes are exposed, respectively.
A plurality of dummy individual terminal electrodes respectively electrically connected to the plurality of individual drive electrodes are formed on the surface side on which the plurality of individual terminal electrodes are formed so as to be exposed from the insulating protective film. An electromechanical conversion member.

The electromechanical conversion member according to claim 1,
The plurality of individual terminal electrodes and the plurality of dummy individual terminal electrodes are arranged side by side in the same predetermined direction, and the area of the dummy individual terminal electrode located at the end in the predetermined direction is larger than the area of the other dummy individual terminal electrodes Electromechanical conversion member characterized by being small.

The electromechanical conversion member according to claim 1,
The plurality of individual terminal electrodes and the plurality of dummy individual terminal electrodes are arranged side by side in the same predetermined direction, and the dummy individual terminal electrodes located at the end portions in the predetermined direction are formed so as not to be exposed from the insulating protective film. An electromechanical conversion member characterized by being made.

The electromechanical conversion member according to claim 1,
The plurality of individual terminal electrodes are arranged in a predetermined direction, and the dummy individual terminal electrodes are not formed on the individual driving electrodes connected to the individual terminal electrodes located at the end portions in the predetermined direction. Mechanical conversion member.

In the electromechanical conversion member according to any one of claims 1 to 4,
A common terminal electrode connected to a common drive electrode formed so as to be common to the other surface side of the plurality of electromechanical conversion films among the drive electrodes, and the insulation on the surface side on which the individual terminal electrode is formed An electromechanical conversion member formed so as to be exposed from a protective film.

A liquid chamber that communicates with a nozzle that discharges droplets; and an electromechanical conversion member that includes an electromechanical conversion element provided on a substrate that forms the liquid chamber so that the liquid in the liquid chamber can be pressurized. In the droplet discharge head,
6. A liquid droplet ejection head using the electromechanical conversion member according to claim 1 as the electromechanical conversion member.

In an image forming apparatus that forms an image by discharging droplets from a droplet discharge head,
An image forming apparatus using the droplet discharge head according to claim 6 as the droplet discharge head.

Connected to a plurality of electromechanical conversion elements made of an electromechanical conversion film sandwiched between a pair of drive electrodes and an individual drive electrode on the opposite side of the plurality of electromechanical conversion elements provided on the substrate. An electromechanical conversion element in an electromechanical conversion member comprising: a plurality of individual terminal electrodes; and an insulating protective film that protects the plurality of electromechanical conversion elements formed to expose the plurality of individual terminal electrodes. A polarization processing method comprising:
The plurality of individual drive electrodes are electrically connected to each of the plurality of individual drive electrodes on the surface side on which the plurality of individual terminal electrodes are formed so that the charges supplied to the plurality of individual drive electrodes are uniform. A plurality of dummy individual terminal electrodes for supplying the discharge are formed so as to be exposed from the insulating protective film, and the discharge is generated by the discharge electrodes arranged to face the surface on which the plurality of individual terminal electrodes are formed. The method for polarizing an electromechanical transducer element, comprising: supplying charges to the individual terminal electrode and the dummy individual terminal electrode to polarize the electromechanical conversion film.

9. The method for polarizing an electromechanical transducer according to claim 8, wherein the discharge by the discharge electrode is corona discharge or glow discharge.

10. The method for polarizing an electromechanical transducer according to claim 8, wherein the electric charge generated by the discharge is a positive charge.

A manufacturing method for manufacturing the electromechanical conversion member according to any one of claims 1 to 5,
Forming a common drive electrode on a substrate or on a base film formed on the substrate;
Forming a plurality of independent electromechanical conversion films on the common drive electrode;
Forming a plurality of individual drive electrodes positioned on each of the plurality of electromechanical conversion films;
Forming a first insulating protective film on the common drive electrode and the plurality of individual drive electrodes;
A common terminal electrode connected to the common drive electrode via a first wiring, and a plurality of individual terminals connected to each of the plurality of individual drive electrodes via a second wiring and arranged in a predetermined direction A terminal electrode and a plurality of dummy individual terminal electrodes connected to each of the plurality of individual drive electrodes via a third wiring and arranged in a predetermined direction are formed on the first insulating protective film. And a process of
Second insulation protection on the first wiring, the second wiring, and the third wiring with the common terminal electrode, the plurality of individual terminal electrodes, and the plurality of dummy individual terminal electrodes exposed. Forming a film;
By supplying the charge generated in the plurality of dummy individual terminal electrodes before and Symbol Common terminal electrodes and the plurality of individual terminal electrodes by the discharge, a step of polarization process collectively the plurality of electromechanical conversion film, The manufacturing method of the electromechanical conversion member characterized by including.