JP2015164149A5 - - Google Patents

Claims (8)

A pre-polarization substrate that has a plurality of electromechanical transducer elements composed of a lower electrode, an electromechanical conversion film, and an upper electrode, and creates an actuator substrate by polarizing the electromechanical conversion film by corona discharge or glow discharge In
A plurality of upper terminal electrodes that are electrically connected to the plurality of upper electrodes, respectively, and a corona discharge generated by a discharge electrode disposed to face the surface on which the plurality of upper terminal electrodes are formed. Alternatively, the electromechanical conversion film is polarized by forming a potential difference between the upper electrode and the lower electrode by using electric charges supplied to the surface of the upper terminal electrode by glow discharge. A substrate before polarization treatment, characterized in that the surface area of the terminal electrode for use is larger at a position farther from a position closer to the horizontal direction than an arrangement position of the discharge electrode.   2. The substrate before polarization treatment according to claim 1, wherein the substrate has a plurality of upper terminal electrode rows in which the plurality of upper terminal electrodes are arranged in a row, and the plurality of upper terminal electrode rows with respect to a center line along the upper terminal electrode row. A substrate before polarization treatment, wherein the upper terminal electrode array is arranged to be a line target, and the surface area of the upper terminal electrode increases as the distance from the center line increases. In the substrate prior to polarization treatment according to claim 1 or 2, the common electrode and is, the common electrode electrically connected to the upper terminal of the terminal electrode for the lower portion Ru the lower electrode common to a plurality of electromechanical transducer Using the charge supplied to the surface of the lower terminal electrode by the corona discharge or glow discharge and the charge supplied to the surface of the upper terminal electrode, formed on the same side as the surface on which the electrode is formed, A substrate before polarization treatment, wherein polarization treatment is performed by forming an electric field in an electromechanical conversion film.   A polarization treatment of the electromechanical conversion film by supplying an electric charge by corona discharge or glow discharge to the substrate before polarization treatment according to any one of claims 1 to 3 to generate an electric field in the electromechanical conversion film. Actuator board, characterized in that A method of manufacturing an actuator substrate comprising a plurality of electromechanical transducer elements having a structure in which a lower electrode, an electromechanical transducer film and an upper electrode are laminated,
Forming the lower electrode on a substrate, forming the electromechanical conversion film on the lower electrode, forming the upper electrode on the electromechanical conversion film, and the electromechanical conversion film; The step of individualizing the upper electrode, the step of forming a first insulating protective film on the lower electrode and the upper electrode, and the electrical connection to the lower electrode on the first insulating protective film The surface area of the upper terminal electrode electrically connected to the upper electrode is increased at a position farther from the position near the horizontal direction than the position where the discharge electrode is disposed. Forming the terminal electrode, forming the second insulating protective film with the lower terminal electrode and the upper terminal electrode exposed, the lower terminal electrode and the upper terminal electrode The corona is released by the discharge electrode on the surface of Or the actuator substrate manufacturing method comprising a polarization step of an electric field is generated electromechanical conversion film by supplying charges generated glow discharge polarization is performed in the electro-mechanical transducer film.   6. The method of manufacturing an actuator substrate according to claim 5, wherein a positive charge is used as the charge by the corona discharge or glow discharge. In a droplet discharge head comprising a plurality of nozzles for discharging droplets, a liquid chamber communicating with each of the nozzles, and an actuator for pressurizing the liquid in the liquid chamber,
A droplet discharge head using the actuator substrate according to claim 4 as the actuator.   An image forming apparatus comprising the droplet discharge head according to claim 7.