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- JP2015018968A5 JP2015018968A5 JP2013145751A JP2013145751A JP2015018968A5 JP 2015018968 A5 JP2015018968 A5 JP 2015018968A5 JP 2013145751 A JP2013145751 A JP 2013145751A JP 2013145751 A JP2013145751 A JP 2013145751A JP 2015018968 A5 JP2015018968 A5 JP 2015018968A5
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Description
以上に説明したものは一例であり、本発明は、次の態様毎に特有の効果を奏する。
（態様Ａ）
電気機械変換素子３０の製造方法であって、基板３１上または基板３１に形成された下地膜上に第１の駆動電極３３を形成するステップと、第１の駆動電極３３上に、互いに独立した複数の電気機械変換膜３４と複数の電気機械変換膜３４それぞれの上に位置する複数の第２の駆動電極３５とを形成するステップと、第１の駆動電極３３上及び複数の第２の駆動電極３５上に第１の絶縁保護膜４１を形成するステップと、第１の駆動電極３３に第１の配線４２を介して電気的に接続された共通電極用パッド４６などの第１の端子電極と、複数の第２の駆動電極３５それぞれに第２の配線４３を介して電気的に接続された個別電極用パッド４７などの複数の第２の端子電極と、複数の第２の端子電極に電気的に接続されたエージング処理用電極５１などの集合電極とを、第１の絶縁保護膜４１上に形成するステップと、第１の配線４２上及び第２の配線４３上に形成される膜であり第１の端子電極と第２の端子電極とを露出する第２の絶縁保護膜４４を形成するステップと、第１の端子電極に対応した接触部２０ｂを有する導体プレート２０などの導電性部材を用い、導電性部材の接触部２０ｂを第１の端子電極に電気的に接触させて、導電性部材を介して、放電により発生した電荷を第１の駆動電極３３に注入することにより、複数の電気機械変換膜３４を一括して分極処理するステップと、を有する。
これよれば、上記実施形態について説明したように、電気機械変換膜３４の分極処理を行うときに、導電性部材の接触部２０ｂを、第２の絶縁保護膜４４において露出している第１の端子電極に接触させ、その導電性部材に放電により発生した電荷を注入する。この放電により発生して注入された電荷は、導電性部材、第１の端子電極及び第１の配線４２を介して第１の駆動電極３３に注入される。このように放電により発生した電荷が第１の駆動電極３３に確実に注入され、電気機械変換膜３４を一括して分極処理を行うことができる。また、分極処理は高温の熱が加わる第２の絶縁保護膜４４の形成後に行われることにより、分極処理された電気機械変換膜３４が加熱されないので、電気機械変換膜３４の分極処理後の脱分極を防ぐことができる。しかも、その分極処理の際に、複数の電気機械変換膜３４それぞれに対して形成されている複数の第２の駆動電極は、所定の電位の集合電極に電気的に接続され、複数の第２の駆動電極３５の電位は所定の大きさに保たれる。従って、一部の電気機械変換膜３４に電荷が集中することなく、均一な分極処理を行うことができる。以上により、製造効率の向上を図りつつ、電気機械変換素子の分極特性のばらつきを低減するとともに分極処理後の脱分極の発生を防止することができる。
（態様Ｂ）
上記態様Ａにおいて、第１の端子電極は、共通電極用パッド４６などの外部接続用端子部と、導電性部材の接触部２０ｂを接触させるダミーパッド６０などの電荷注入用端子部とを有し、電気機械変換膜３４を分極処理するステップでは、導電性部材の接触部２０ｂを第１の端子電極の電荷注入用端子部に電気的に接触させて、導電性部材を介して、放電により発生した電荷を第１の駆動電極に注入することにより、複数の電気機械変換膜３４を一括して分極処理する。
これよれば、上記変形例１について説明したように、第１の端子電極はにおける共通電極用パッド４６などの外部接続用端子部とは別の電荷注入用端子部に対して電荷が注入されるので、実際の使用時に電圧が印加される外部接続用端子部へのダメージを抑制できる。
（態様Ｃ）
上記態様Ａ又は態様Ｂにおいて、第２の絶縁保護膜４４を形成するステップでは、集合電極を露出させて第２の絶縁保護膜４４を形成し、その集合電極はアースに接地されている。
これよれば、上記実施形態について説明したように、第２の絶縁保護膜４４から露出した集合電極は容易にアースに接地することができる。しかも、その集合電極に電気的に接続された複数の第２の駆動電極３５の電位はアースの電位に安定して保たれる。従って、一部の電気機械変換膜３４への電荷の集中をよりより確実に防止し、より均一な分極処理を行うことができる。
（態様Ｄ）
上記態様Ａ乃至Ｃのいずれかにおいて、導電性部材の材料は、接触部２０ｂが接触する第１の端子電極の材料と同じである。
これによれば、上記実施形態について説明したように、導電性部材の接触部２０ｂと第１の端子電極との接触抵抗を小さくすることができ、第１の端子電極を介した電荷の注入効率を高めることができる。
（態様Ｅ）
上記態様Ａ乃至Ｄのいずれかにおいて、前記第１の駆動電極及び第１の端子電極をそれぞれ複数備え、第１の絶縁保護膜４１を形成するステップ及び第２の絶縁保護膜４４を形成するステップでは、複数の第１の端子電極を露出させて各絶縁保護膜を形成し、導電性部材は、複数の第１の端子電極と同数の接続部２０ｂを有する。
これによれば、上記実施形態について説明したように、前記第１の駆動電極及び第１の端子電極をそれぞれ複数備えている場合に、それら複数の第１の駆動電極それぞれに対応する複数の電気機械変換膜３４を一括して分極処理することができる。したがって、製造効率をさらに向上させることができる。
（態様Ｆ）
上記態様Ｅにおいて、第１の端子電極は、導電性部材の接触部２０ｂを接触させるダミーパッド６０などの電荷注入用端子部を有し、導電性部材の接続部２０ｂの第１の端子電極又は電荷注入用端子部に接触する部分の面積は、第１の端子電極又は電荷注入用端子部の面積以下である。
これによれば、上記実施形態について説明したように、導電性部材の接触部２０ｂが、第１の端子電極又は電荷注入用端子部に確実に接触し、導電性部材を介した電荷の注入効率を維持することができる。
（態様Ｇ）
上記態様Ａ乃至Ｆのいずれかにおいて、前記導電性部材の放電により発生した電荷が注入される面の面積は、基板の面積以上である。
上記実施形態について説明したように、導電性部材の放電により発生した電荷が注入される面の面積が基板３１の面積よりも小さいと、放電により発生した電荷が、第１の駆動電極３３以外の電極に注入されてしまう。すると、分極処理における所望の効果が得られないおそれがある。本態様Ｇによれば、導電性部材の放電により発生した電荷が注入される面の面積が、基板３１の面積以上であるので、第１の駆動電極３３以外の電極への電荷注入を抑制することができ、分極処理における所望の効果が得られる。
（態様Ｈ）
上記態様Ａ乃至Ｇのいずれかにおいて、基板３１上または下地膜上に形成した複数の電気機械変換素子３０を互いに分離して個別化するように切断するステップを有し、第２の絶縁保護膜４４を形成するステップでは、集合電極を電気機械変換膜３４に対して第２の端子電極よりも離れた位置に形成し、電気機械変換素子３０を個別化するステップでは、複数の第２の端子電極と集合電極との間を切断する。
これによれば、上記実施形態について説明したように、複数の第２の端子電極と集合電極との間を切断することにより、複数の第２の端子電極と集合電極との導通を切断し、各第２の端子電極に互いに独立に駆動電圧を印加できる。従って、各電気機械変換素子３０の個別駆動を確実に行うことができる。
（態様Ｉ）
上記態様Ｈにおいて、電気機械変換素子３０を個別化するステップは、第２の端子電極と集合電極との間を完全に切断する切断位置よりも第２の端子電極側を基板３１の厚み方向の途中まで切断するステップを含む。
これによれば、上記実施形態について説明したように、使用時に電圧がかかる第２の配線４３の端部（破断面）が基板３１を含む電気機械変換素子３０の最端部（最外周）になることを防いで短絡などのトラブルを未然に防止することができる。
（態様Ｊ）
上記態様Ｈにおいて、電気機械変換素子３０を個別化するステップは、第２の端子電極と集合電極との間を切断刃により基板３１の厚み方向の途中まで切断するステップと、切断刃よりも幅の狭い切断刃により基板３１の厚み方向の途中まで切断した位置を中心に完全に切断するステップと、を含む。
これによれば、上記実施形態について説明したように、切断する部分をあらかじめ基板３１の途中まで切断しておくことができる。これにより、完全に切断して電気機械変換素子３０を切り離したときに、使用時に電圧がかかる第２の配線４３の端部（破断面）が基板３１を含む電気機械変換素子３０の最端部（最外周）になることを防いで短絡などのトラブルを未然に防止することができる。
（態様Ｋ）
上記態様Ａ乃至Ｊのいずれかにおいて、分極処理を行うステップにおいて、放電により発生する電荷は負極性に帯電している。
これによれば、上記実施形態について説明したように、放電により大気中の分子をイオン化させることで、負極性に帯電した電荷を有する陰イオンを容易に発生させることができる。この陰イオンが、第１の配線４２と接続した第１の端子電極を介して電気機械変換素子３０に流れ込むことにより、負極性に帯電した電荷を電気機械変換素子３０に容易に蓄積させることができる。従って、電気機械変換膜３４の分極処理を安定して行うことができる。
（態様Ｌ）
上記態様Ａ乃至Ｋのいずれかにおいて、分極処理を行うステップにおいて、放電により、１．０×１０−８［Ｃ］以上の電荷量を発生させる。
これによれば、上記実施形態について説明したように、放電による電荷量が１．０×１０−８［Ｃ］に満たない場合は、分極処理が十分に行えず、その電気機械変換膜３４をアクチュエータに使用した場合に連続駆動後の変位劣化について十分な特性が得られないおそれがある。本態様Ｌは、放電による電荷量が１．０×１０−８［Ｃ］以上の電荷量を発生させるので、分極処理が十分に行うことができ、電気機械変換膜３４をアクチュエータに使用した場合に連続駆動後の変位劣化について十分な特性が得られる。
（態様Ｍ）
上記態様Ａ乃至Ｌのいずれかを実施するための電気機械変換素子の分極処理装置であって、コロナワイヤー５２などの放電を発生するための放電電極、又は、放電電極及び放電を制御するためのグリッド電極と、基板３１を設置するためのステージ５３と、導電性部材と、を備え、ステージ５３がアースに接地された構成、及び、ステージ５３と基板３１との間が絶縁物で絶縁された構成の少なくとも一方の構成を有する。
これによれば、上記実施形態について説明したように、ステージ５３上に設置された基板３１に電気機械変換素子３０を効率良く製造することができる。更に、ステージ５３がアースに接地されることにより、電気機械変換膜３４の電位が安定し、一部の電気機械変換膜３４に電荷が集中することなく、より均一な分極処理を行うことができる。また、基板３１とステージ５３との間を絶縁物で絶縁することにより、基板３１に注入された電荷がステージ５３からリークすることを防ぐことができる。
（態様Ｎ）
上記態様Ａ乃至Ｌのいずれかの電気機械変換素子の製造方法により得られた電気機械変換素子３０であって、電気機械変換膜の分極が、±１５０［ｋＶ／ｃｍ］の電界強度かけてヒステリシスループを測定する際、測定開始時の０［ｋＶ／ｃｍ］における分極をＰｉｎｉとし、＋１５０［ｋＶ／ｃｍ］の電圧印加後、０［ｋＶ／ｃｍ］まで戻した際の０［ｋＶ／ｃｍ］時の分極をＰｒとした場合に、ＰｒとＰｉｎｉとの差が１０［μＣ／ｃｍ２］以下である。
これによれば、上記実施形態について説明したように、製造効率の向上を図りつつ、電気機械変換素子３０の分極特性のばらつきを低減するとともに、分極処理後の脱分極の発生を防止することができる電気機械変換素子を提供できる。また、複数の電気機械変換膜に対して均一な分極処理を短時間で確実に行い、しかも歩留まりを向上させることができる電気機械変換素子を提供できる。また、ＰｒとＰｉｎｉとの差が１０［μＣ／ｃｍ２］より大きい場合、電気機械変換膜３４をアクチュエータに使用した場合に連続駆動後の変位劣化について十分な特性が得られないおそれがある。本態様Ｏでは、ＰｒとＰｉｎｉとの差が１０［μＣ／ｃｍ２］以下なので、電気機械変換膜３４をアクチュエータに使用した場合に連続駆動後の変位劣化について十分な特性が得られる。
（態様Ｏ）
上記態様Ｎにおいて、電気機械変換膜３４の比誘電率が、６００以上、２０００以下である。
上記実施形態について説明したように、比誘電率が６００より小さいと、電気機械変換膜３４をアクチュエータに使用した場合に十分な変位特性が得られないおそれがある。また、比誘電率が２０００より大きくなると、分極処理が十分行われず、連続駆動後の変位劣化については十分な特性が得られないといった不具合が発生するおそれがある。本態様Ｆでは、電気機械変換膜３４の比誘電率が、６００以上、２０００以下なので、電気機械変換膜３４をアクチュエータに使用した場合に十分な変位特性が得られる。また、分極処理が十分に行われ、連続駆動後の変位劣化についても十分な特性が得られる。
（態様Ｐ）
上記態様Ｎ又はＯにおいて、第１の駆動電極３３に電気的に接続された第１の配線４２と、第２の駆動電極３５に電気的に接続された第２の配線４３とが、同一プロセス中に作製される。
これによれば、上記実施形態について説明したように、別々のプロセスで作製される場合に比べて、処理工数と処理時間とを削減でき、コストダウンを図ることができる。
（態様Ｑ）
上記態様Ｎ乃至Ｐのいずれかにおいて、第１の配線４２及び第２の配線４３の少なくとも一方が、Ａｇ合金、Ｃｕ、Ａｌ、Ａｌ合金、Ａｕ、Ｐｔ、Ｉｒのいずれかから成る金属電極材料で形成されている。
これによれば、上記実施形態について説明したように、これらの金属は、基板上に低抵抗で耐久性のある電極を成膜することができる。
（態様Ｒ）
上記態様Ｎ乃至Ｑのいずれかにおいて、第１の絶縁保護膜４１及び第２の絶縁保護膜４４の少なくとも一方は、アルミナ膜、シリコン酸化膜、窒化シリコン膜及び酸化窒化シリコン膜のいずれかの無機膜である。
これによれば、上記実施形態について説明したように、これらの膜は、密着性がよく、膜が硬く、しかも耐磨耗性やコストパフォーマンスに優れた第１の絶縁保護膜４１又は第２の絶縁保護膜４４を形成できる。
（態様Ｓ）
液滴を吐出するノズル１１と、ノズル１１が連通する加圧室１２と、加圧室１２内の液体を昇圧させる吐出駆動手段とを備えた液滴吐出ヘッド１０において、吐出駆動手段として、加圧室１２の壁の一部を振動板１７で構成し、振動板１７に上記態様Ｏ乃至Ｒのいずれかの電気機械変換素子を配置した。
これによれば、上記実施形態について説明したように、脱分極のない分極処理が確実に行われた電気機械変換素子によって加圧室１２内の液体を昇圧させることができるので、安定した液滴吐出特性が得られる。
（態様Ｔ）
上記態様Ｓの液滴吐出ヘッドを備えた液滴吐出装置である。これによれば、上記実施形態について説明したように、安定した液滴吐出特性が得られる。
What has been described above is merely an example, and the present invention has a specific effect for each of the following modes.
(Aspect A)
A method of manufacturing the electromechanical transducer 30, wherein the step of forming the first drive electrode 33 on the substrate 31 or the base film formed on the substrate 31 and the first drive electrode 33 are independent of each other. Forming a plurality of electromechanical conversion films 34 and a plurality of second drive electrodes 35 positioned on each of the plurality of electromechanical conversion films 34; and on the first drive electrodes 33 and the plurality of second drives. A step of forming a first insulating protective film 41 on the electrode 35, and a first terminal electrode such as a common electrode pad 46 electrically connected to the first drive electrode 33 via a first wiring 42. A plurality of second terminal electrodes such as individual electrode pads 47 electrically connected to each of the plurality of second drive electrodes 35 via the second wiring 43, and a plurality of second terminal electrodes. Electrically connected aging electrode 1 is formed on the first insulating protective film 41, and is a film formed on the first wiring 42 and the second wiring 43. The first terminal electrode and the second electrode A step of forming a second insulating protective film 44 exposing the terminal electrode of the conductive member, and a conductive member such as a conductor plate 20 having a contact portion 20b corresponding to the first terminal electrode. 20b is brought into electrical contact with the first terminal electrode, and the electric charge generated by the discharge is injected into the first drive electrode 33 through the conductive member. And polarization processing.
According to this, as described in the above embodiment, when the electromechanical conversion film 34 is subjected to the polarization process, the contact portion 20b of the conductive member is exposed in the second insulating protective film 44. Charges generated by discharge are injected into the conductive member in contact with the terminal electrode. The electric charge generated and injected by this discharge is injected into the first drive electrode 33 through the conductive member, the first terminal electrode, and the first wiring 42. Thus, the electric charge generated by the discharge is surely injected into the first drive electrode 33, and the electromechanical conversion film 34 can be collectively polarized. Further, since the polarization process is performed after the formation of the second insulating protective film 44 to which high-temperature heat is applied, the polarized electromechanical conversion film 34 is not heated, and therefore the electromechanical conversion film 34 is removed after the polarization process. Polarization can be prevented. In addition, during the polarization process, the plurality of second drive electrodes formed for each of the plurality of electromechanical conversion films 34 are electrically connected to the collective electrodes of a predetermined potential, and the plurality of second drive electrodes are electrically connected. The potential of the drive electrode 35 is kept at a predetermined magnitude. Therefore, a uniform polarization process can be performed without concentration of charges on some electromechanical conversion films 34. As described above, it is possible to reduce the variation in the polarization characteristics of the electromechanical transducer while preventing the occurrence of depolarization after the polarization process while improving the manufacturing efficiency.
(Aspect B)
In the aspect A, the first terminal electrode has an external connection terminal portion such as the common electrode pad 46 and a charge injection terminal portion such as the dummy pad 60 that contacts the contact portion 20b of the conductive member. In the step of polarizing the electromechanical conversion film 34, the contact portion 20b of the conductive member is brought into electrical contact with the charge injection terminal portion of the first terminal electrode, and is generated by discharge through the conductive member. The plurality of electromechanical conversion films 34 are collectively polarized by injecting the charged charges into the first drive electrode.
According to this, as described in the first modification, charges are injected into the charge injection terminal portion different from the external connection terminal portion such as the common electrode pad 46 in the first terminal electrode. Therefore, it is possible to suppress damage to the external connection terminal portion to which a voltage is applied during actual use.
(Aspect C)
In the aspect A or aspect B, in the step of forming the second insulating protective film 44, the second insulating protective film 44 is formed by exposing the collective electrode, and the collective electrode is grounded.
According to this, as described in the above embodiment, the collective electrode exposed from the second insulating protective film 44 can be easily grounded to the ground. In addition, the potentials of the plurality of second drive electrodes 35 electrically connected to the collective electrode are stably maintained at the ground potential. Therefore, it is possible to more reliably prevent charge concentration on a part of the electromechanical conversion film 34 and perform more uniform polarization processing.
(Aspect D)
In any of the above aspects A to C, the material of the conductive member is the same as the material of the first terminal electrode with which the contact portion 20b contacts.
According to this, as described in the above embodiment, the contact resistance between the contact portion 20b of the conductive member and the first terminal electrode can be reduced, and the charge injection efficiency via the first terminal electrode can be reduced. Can be increased.
(Aspect E)
In any of the above-described aspects A to D, a step of forming the first insulating protective film 41 and a step of forming the second insulating protective film 44, each including a plurality of the first drive electrodes and the first terminal electrodes. Then, the plurality of first terminal electrodes are exposed to form each insulating protective film, and the conductive member has the same number of connection portions 20b as the plurality of first terminal electrodes.
According to this, as described in the above embodiment, when a plurality of the first drive electrodes and a plurality of first terminal electrodes are provided, a plurality of electricity corresponding to each of the plurality of first drive electrodes is provided. The mechanical conversion film 34 can be polarized at once. Therefore, manufacturing efficiency can be further improved.
(Aspect F)
In the aspect E , the first terminal electrode has a charge injection terminal portion such as a dummy pad 60 for contacting the contact portion 20b of the conductive member, and the first terminal electrode of the connection portion 20b of the conductive member or The area of the portion in contact with the charge injection terminal is less than the area of the first terminal electrode or the charge injection terminal.
According to this, as described in the above-described embodiment, the contact portion 20b of the conductive member reliably contacts the first terminal electrode or the charge injection terminal portion, and the charge injection efficiency via the conductive member. Can be maintained.
(Aspect G)
In any one of the above aspects A to F, the area of the surface into which charges generated by the discharge of the conductive member are injected is equal to or larger than the area of the substrate.
As described in the above embodiment, when the area of the surface into which the charge generated by the discharge of the conductive member is injected is smaller than the area of the substrate 31, the charge generated by the discharge is other than the first drive electrode 33. It is injected into the electrode. Then, the desired effect in the polarization treatment may not be obtained. According to this aspect G, since the area of the surface into which charges generated by the discharge of the conductive member are injected is equal to or larger than the area of the substrate 31, the charge injection to the electrodes other than the first drive electrode 33 is suppressed. And a desired effect in the polarization treatment can be obtained.
(Aspect H)
In any one of the above aspects A to G, the second insulating protective film includes a step of cutting the plurality of electromechanical conversion elements 30 formed on the substrate 31 or the base film so as to be separated from each other and individualized. In the step of forming 44, the collective electrode is formed at a position away from the second terminal electrode with respect to the electromechanical conversion film 34, and in the step of individualizing the electromechanical conversion element 30, a plurality of second terminals are formed. Cut between the electrode and the collecting electrode.
According to this, as described in the above embodiment, by cutting between the plurality of second terminal electrodes and the collecting electrode, the conduction between the plurality of second terminal electrodes and the collecting electrode is cut, A driving voltage can be applied to each second terminal electrode independently of each other. Therefore, the individual drive of each electromechanical transducer 30 can be reliably performed.
(Aspect I)
In the above aspect H, the step of individualizing the electromechanical conversion element 30 is such that the second terminal electrode side in the thickness direction of the substrate 31 is located at the cutting position where the gap between the second terminal electrode and the collecting electrode is completely cut. Including a step of cutting halfway.
According to this, as described in the above embodiment, the end portion (fracture surface) of the second wiring 43 to which a voltage is applied during use is at the outermost end portion (outermost periphery) of the electromechanical transducer 30 including the substrate 31. It is possible to prevent troubles such as a short circuit.
(Aspect J)
In the aspect H, the step of individualizing the electromechanical transducer 30 includes a step of cutting between the second terminal electrode and the collecting electrode halfway in the thickness direction of the substrate 31 with a cutting blade, and a width wider than the cutting blade. A step of completely cutting the substrate 31 with a narrow cutting blade at a position where the substrate 31 is cut halfway in the thickness direction.
According to this, as described in the above embodiment, the portion to be cut can be cut in advance to the middle of the substrate 31. Thus, when the electromechanical conversion element 30 is completely cut and the electromechanical conversion element 30 is separated, the end (fracture surface) of the second wiring 43 to which a voltage is applied during use is the endmost part of the electromechanical conversion element 30 including the substrate 31. (Outermost circumference) can be prevented and troubles such as a short circuit can be prevented.
(Aspect K)
In any of the above aspects A to J, in the step of performing the polarization treatment, the charge generated by the discharge is negatively charged.
According to this, as described in the above embodiment, anions having a charge charged to negative polarity can be easily generated by ionizing molecules in the atmosphere by discharge. The negative ions flow into the electromechanical conversion element 30 through the first terminal electrode connected to the first wiring 42, so that the negatively charged charge can be easily accumulated in the electromechanical conversion element 30. it can. Therefore, the polarization process of the electromechanical conversion film 34 can be performed stably.
(Aspect L)
In any of the above aspects A to K, in the step of performing the polarization treatment, a charge amount of 1.0 × 10 −8 [C] or more is generated by discharge.
According to this, as described in the above embodiment, when the charge amount due to the discharge is less than 1.0 × 10 −8 [C], the polarization process cannot be sufficiently performed, and the electromechanical conversion film 34 is not formed. When used in an actuator, there is a possibility that sufficient characteristics cannot be obtained with respect to displacement deterioration after continuous driving. In the present aspect L, since the charge amount due to the discharge is 1.0 × 10 −8 [C] or more, the polarization process can be sufficiently performed, and the electromechanical conversion film 34 is used as an actuator. In addition, sufficient characteristics can be obtained with respect to displacement deterioration after continuous driving.
(Aspect M)
A polarization processing apparatus for an electromechanical transducer for implementing any one of the above aspects A to L, for generating a discharge of a corona wire 52 or the like, or for controlling a discharge electrode and a discharge A grid electrode, a stage 53 for installing the substrate 31, and a conductive member are provided, the stage 53 is grounded to the ground, and the stage 53 and the substrate 31 are insulated by an insulator. It has at least one of the configurations.
According to this, as described in the above embodiment, the electromechanical transducer 30 can be efficiently manufactured on the substrate 31 placed on the stage 53. Furthermore, since the stage 53 is grounded to the ground, the potential of the electromechanical conversion film 34 is stabilized, and a more uniform polarization process can be performed without charge concentration on a part of the electromechanical conversion film 34. . Further, by insulating the substrate 31 and the stage 53 with an insulator, it is possible to prevent the charge injected into the substrate 31 from leaking from the stage 53.
(Aspect N)
The electromechanical transducer 30 obtained by the method of manufacturing an electromechanical transducer according to any one of the above aspects A to L, wherein the polarization of the electromechanical transducer is a hysteresis with an electric field strength of ± 150 [kV / cm] When measuring the loop, the polarization at 0 [kV / cm] at the start of measurement is Pini, and after applying a voltage of +150 [kV / cm], 0 [kV / cm] when returning to 0 [kV / cm] When the time polarization is Pr, the difference between Pr and Pini is 10 [μC / cm 2 ] or less.
According to this, as described in the above embodiment, it is possible to reduce the variation in the polarization characteristics of the electromechanical transducer 30 while preventing the occurrence of depolarization after the polarization process while improving the manufacturing efficiency. An electromechanical transducer that can be provided can be provided. In addition, it is possible to provide an electromechanical conversion element capable of reliably performing a uniform polarization process on a plurality of electromechanical conversion films in a short time and improving the yield. When the difference between Pr and Pini is larger than 10 [μC / cm 2 ], there is a possibility that sufficient characteristics cannot be obtained with respect to displacement deterioration after continuous driving when the electromechanical conversion film 34 is used as an actuator. In the aspect O, since the difference between Pr and Pini is 10 [μC / cm 2 ] or less, when the electromechanical conversion film 34 is used as an actuator, sufficient characteristics can be obtained with respect to displacement deterioration after continuous driving.
(Aspect O)
In the above aspect N, the relative permittivity of the electromechanical conversion film 34 is 600 or more and 2000 or less.
As described in the above embodiment, if the relative dielectric constant is smaller than 600, there is a possibility that sufficient displacement characteristics cannot be obtained when the electromechanical conversion film 34 is used for an actuator. Further, if the relative dielectric constant is larger than 2000, the polarization process is not sufficiently performed, and there may be a problem that a sufficient characteristic cannot be obtained for the displacement deterioration after continuous driving. In the aspect F, since the relative dielectric constant of the electromechanical conversion film 34 is 600 or more and 2000 or less, sufficient displacement characteristics can be obtained when the electromechanical conversion film 34 is used for an actuator. Further, the polarization process is sufficiently performed, and sufficient characteristics can be obtained with respect to displacement deterioration after continuous driving.
(Aspect P)
In the above aspect N or O, the first wiring 42 electrically connected to the first drive electrode 33 and the second wiring 43 electrically connected to the second drive electrode 35 are in the same process. Made in.
According to this, as described in the above embodiment, the number of processing steps and the processing time can be reduced and the cost can be reduced as compared with the case of being manufactured by separate processes.
(Aspect Q)
In any one of the above aspects N to P, at least one of the first wiring 42 and the second wiring 43 is a metal electrode material made of any one of Ag alloy, Cu, Al, Al alloy, Au, Pt, and Ir. Is formed.
According to this, as described in the above embodiment, these metals can form a low-resistance and durable electrode on the substrate.
(Aspect R)
In any one of the above aspects N to Q, at least one of the first insulating protective film 41 and the second insulating protective film 44 is an inorganic material selected from an alumina film, a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. It is a membrane.
According to this, as described in the above embodiment, these films have good adhesion, hard films, and excellent wear resistance and cost performance. An insulating protective film 44 can be formed.
(Aspect S)
In the droplet discharge head 10 including a nozzle 11 that discharges a droplet, a pressure chamber 12 that communicates with the nozzle 11, and a discharge drive unit that pressurizes the liquid in the pressure chamber 12, the discharge drive unit 10 A part of the wall of the pressure chamber 12 is constituted by the diaphragm 17, and the electromechanical transducer element according to any one of the above embodiments O to R is arranged on the diaphragm 17.
According to this, as described in the above embodiment, the liquid in the pressurizing chamber 12 can be boosted by the electromechanical conversion element that has been reliably subjected to the polarization process without depolarization. Discharge characteristics can be obtained.
(Aspect T)
A droplet discharge apparatus including the droplet discharge head according to aspect S. According to this, as described in the above embodiment, stable droplet discharge characteristics can be obtained.
Claims (20)
基板上にまたは該基板に形成された下地膜上に、第１の駆動電極を形成するステップと、
前記第１の駆動電極上に、互いに独立した複数の電気機械変換膜と、該複数の電気機械変換膜それぞれの上に位置する複数の第２の駆動電極とを形成するステップと、
前記第１の駆動電極上及び前記複数の第２の駆動電極上に第１の絶縁保護膜を形成するステップと、
前記第１の駆動電極に第１の配線を介して電気的に接続された第１の端子電極と、前記複数の第２の駆動電極それぞれに第２の配線を介して電気的に接続された複数の第２の端子電極と、該複数の第２の端子電極に電気的に接続された集合電極とを、前記第１の絶縁保護膜上に形成するステップと、
前記第１の配線上及び前記第２の配線上に形成される膜であり前記第１の端子電極と前記第２の端子電極と前記集合電極とを露出する第２の絶縁保護膜を形成するステップと、
前記第１の端子電極に対応した接触部を有する導電性部材を用い、該導電性部材の接触部を該第１の端子電極に電気的に接触させて、該導電性部材を介して、放電により発生した電荷を前記第１の駆動電極に注入することにより、前記複数の電気機械変換膜を一括して分極処理するステップと、を有することを特徴とする電気機械変換素子の製造方法。 A method of manufacturing an electromechanical transducer that forms a plurality of electromechanical transducers,
Forming a first drive electrode on a substrate or a base film formed on the substrate;
Forming a plurality of electromechanical conversion films independent of each other on the first drive electrode, and a plurality of second drive electrodes positioned on each of the plurality of electromechanical conversion films;
Forming a first insulating protective film on the first drive electrode and the plurality of second drive electrodes;
A first terminal electrode electrically connected to the first drive electrode via a first wiring; and a first terminal electrode electrically connected to each of the plurality of second drive electrodes via a second wiring. Forming a plurality of second terminal electrodes and a collecting electrode electrically connected to the plurality of second terminal electrodes on the first insulating protective film;
Forming a second insulating protective film which is a film formed on the first wiring and the second wiring and which exposes the first terminal electrode, the second terminal electrode and the collecting electrode; Steps,
A conductive member having a contact portion corresponding to the first terminal electrode is used, and the contact portion of the conductive member is brought into electrical contact with the first terminal electrode and discharged via the conductive member. And a step of injecting the electric charges generated by the step into the first drive electrode to collectively polarize the plurality of electromechanical conversion films.
前記第１の端子電極は、外部接続用端子部と、前記導電性部材の接触部を接触させる電荷注入用端子部とを有し、
前記電気機械変換膜を分極処理するステップでは、前記導電性部材の接触部を前記第１の端子電極の電荷注入用端子部に電気的に接触させて、該導電性部材を介して、放電により発生した電荷を前記第１の駆動電極に注入することにより、前記複数の電気機械変換膜を一括して分極処理することを特徴とする電気機械変換素子の製造方法。 In the manufacturing method of the electromechanical transducer of claim 1,
The first terminal electrode has an external connection terminal part and a charge injection terminal part for contacting the contact part of the conductive member,
In the step of polarizing the electromechanical conversion film, the contact portion of the conductive member is brought into electrical contact with the charge injection terminal portion of the first terminal electrode, and discharged through the conductive member. A method of manufacturing an electromechanical conversion element, wherein the plurality of electromechanical conversion films are collectively polarized by injecting the generated charges into the first drive electrode.
前記第２の絶縁保護膜を形成するステップでは、前記集合電極を露出させて該第２の絶縁保護膜を形成し、
前記集合電極はアースに接地されていることを特徴とする電気機械変換素子の製造方法。 In the manufacturing method of the electromechanical transducer of Claim 1 or 2,
In the step of forming the second insulating protective film, the collecting electrode is exposed to form the second insulating protective film,
The method of manufacturing an electromechanical transducer element, wherein the collective electrode is grounded.
前記導電性部材の材料は、前記接触部が接触する前記第１の端子電極の材料と同じであることを特徴とする電気機械変換素子の製造方法。 In the method for manufacturing an electromechanical transducer according to any one of claims 1 to 3,
The method of manufacturing an electromechanical transducer element, wherein the material of the conductive member is the same as the material of the first terminal electrode with which the contact portion contacts.
前記第１の駆動電極及び第１の端子電極をそれぞれ複数備え、
前記第１の絶縁保護膜を形成するステップ及び前記第２の絶縁保護膜を形成するステップでは、前記複数の第１の端子電極を露出させて各絶縁保護膜を形成し、
前記導電性部材は、前記複数の第１の端子電極と同数の接続部を有することを特徴とする電気機械変換素子の製造方法。 In the method for manufacturing an electromechanical transducer according to any one of claims 1 to 4,
A plurality of the first drive electrodes and the first terminal electrodes, respectively,
In the step of forming the first insulating protective film and the step of forming the second insulating protective film, the plurality of first terminal electrodes are exposed to form each insulating protective film,
The method for manufacturing an electromechanical transducer, wherein the conductive member has the same number of connection portions as the plurality of first terminal electrodes.
前記第１の端子電極は、前記導電性部材の接触部を接触させる電荷注入用端子部を有し、
前記導電性部材の前記接続部の前記第１の端子電極又は前記電荷注入用端子部に接触する部分の面積は、該第１の端子電極又は該電荷注入用端子部の面積以下であることを特徴とする電気機械変換素子の製造方法。 In the manufacturing method of the electromechanical transducer of claim 5 ,
The first terminal electrode has a charge injection terminal part for contacting the contact part of the conductive member,
The area of the connection portion of the conductive member that contacts the first terminal electrode or the charge injection terminal is less than or equal to the area of the first terminal electrode or the charge injection terminal. A method for manufacturing an electromechanical transducer element.
前記導電性部材の前記放電により発生した電荷が注入される面の面積は、前記基板の面積以上であることを特徴とする電気機械変換素子の製造方法。 In the method for manufacturing an electromechanical transducer according to any one of claims 1 to 6,
The method of manufacturing an electromechanical transducer, wherein an area of a surface into which charges generated by the discharge of the conductive member are injected is equal to or larger than an area of the substrate.
前記基板上または前記下地膜上に形成した複数の電気機械変換素子を互いに分離して個別化するように切断するステップを有し、
前記第２の絶縁保護膜を形成するステップでは、前記集合電極を前記電気機械変換膜に対して前記第２の端子電極よりも離れた位置に形成し、
前記電気機械変換素子を個別化するステップでは、前記複数の第２の端子電極と前記集合電極との間を切断することを特徴とする電気機械変換素子の製造方法。 In the method of manufacturing an electromechanical transducer according to any one of claims 1 to 7,
Cutting the plurality of electromechanical conversion elements formed on the substrate or the base film so as to be separated from each other and individualized,
In the step of forming the second insulating protective film, the collecting electrode is formed at a position away from the second terminal electrode with respect to the electromechanical conversion film,
In the step of individualizing the electromechanical transducer, the method for producing an electromechanical transducer is characterized by cutting between the plurality of second terminal electrodes and the collective electrode.
前記電気機械変換素子を個別化するステップは、前記第２の端子電極と前記集合電極との間を完全に切断する切断位置よりも該第２の端子電極側を前記基板の厚み方向の途中まで切断するステップを含むことを特徴とする電気機械変換素子の製造方法。 In the manufacturing method of the electromechanical transducer of claim 8,
The step of individualizing the electromechanical conversion element is such that the second terminal electrode side is partway in the thickness direction of the substrate from the cutting position at which the space between the second terminal electrode and the collecting electrode is completely cut. A method for manufacturing an electromechanical transducer, comprising a step of cutting.
前記電気機械変換素子を個別化するステップは、
前記第２の端子電極と前記集合電極との間を切断刃により前記基板の厚み方向の途中まで切断するステップと、
前記切断刃よりも幅の狭い切断刃により前記基板の厚み方向の途中まで切断した位置を中心に完全に切断するステップと、を含むことを特徴とする電気機械変換素子の製造方法。 In the manufacturing method of the electromechanical transducer of claim 8,
The step of individualizing the electromechanical transducer element comprises:
Cutting between the second terminal electrode and the collective electrode to the middle of the thickness direction of the substrate with a cutting blade;
And a step of completely cutting around the position where the substrate is cut halfway in the thickness direction with a cutting blade having a width narrower than that of the cutting blade.
前記分極処理を行うステップにおいて、前記放電により発生する電荷は負極性に帯電していることを特徴とする電気機械変換素子の製造方法。 In the method of manufacturing an electromechanical transducer according to any one of claims 1 to 10,
The method for manufacturing an electromechanical transducer, wherein in the step of performing the polarization treatment, the electric charge generated by the discharge is charged negatively.
前記分極処理を行うステップにおいて、前記放電により、１．０×１０−８［Ｃ］以上の電荷量を発生させることを特徴とする電気機械変換素子の製造方法。 In the method for manufacturing an electromechanical transducer according to any one of claims 1 to 11,
In the step of performing the polarization treatment, a charge amount of 1.0 × 10 −8 [C] or more is generated by the discharge.
前記放電を発生するための放電電極、又は、該放電電極及び放電を制御するためのグリッド電極と、
前記基板を設置するためのステージと、
前記導電性部材と、を備え、
前記ステージがアースに接地された構成、及び、前記ステージと前記基板との間が絶縁物で絶縁された構成の少なくとも一方の構成を有することを特徴とする電気機械変換素子の分極処理装置。 An electromechanical transducer polarization treatment apparatus for carrying out the electromechanical transducer production method according to any one of claims 1 to 12,
A discharge electrode for generating the discharge, or a grid electrode for controlling the discharge electrode and discharge;
A stage for installing the substrate;
The conductive member,
A polarization processing apparatus for an electromechanical transducer having at least one of a configuration in which the stage is grounded to ground and a configuration in which the stage and the substrate are insulated by an insulator.
前記電気機械変換膜の分極が、±１５０［ｋＶ／ｃｍ］の電界強度かけてヒステリシスループを測定する際、測定開始時の０［ｋＶ／ｃｍ］における分極をＰｉｎｉとし、＋１５０［ｋＶ／ｃｍ］の電圧印加後、０［ｋＶ／ｃｍ］まで戻した際の０［ｋＶ／ｃｍ］時の分極をＰｒとした場合に、ＰｒとＰｉｎｉとの差が１０［μＣ／ｃｍ２］以下であることを特徴とする電気機械変換素子。 An electromechanical transducer obtained by the method of manufacturing an electromechanical transducer according to any one of claims 1 to 12,
When measuring the hysteresis loop by applying an electric field strength of ± 150 [kV / cm] as the polarization of the electromechanical conversion film, the polarization at 0 [kV / cm] at the start of measurement is Pini, and +150 [kV / cm] When the polarization at 0 [kV / cm] when the voltage is returned to 0 [kV / cm] after applying the voltage is Pr, the difference between Pr and Pini is 10 [μC / cm 2 ] or less An electromechanical conversion element characterized by the above.
前記電気機械変換膜の比誘電率が、６００以上、２０００以下であることを特徴とする電気機械変換素子。 The electromechanical transducer of claim 14,
The electromechanical transducer having a relative dielectric constant of 600 or more and 2000 or less.
前記第１の駆動電極に電気的に接続された前記第１の配線と、前記第２の駆動電極に電気的に接続された前記第２の配線とが、同一プロセス中に作製されることを特徴とする電気機械変換素子。 The electromechanical transducer according to claim 14 or 15,
The first wiring electrically connected to the first driving electrode and the second wiring electrically connected to the second driving electrode are formed in the same process. A characteristic electromechanical transducer.
前記第１の配線及び前記第２の配線の少なくとも一方は、Ａｇ合金、Ｃｕ、Ａｌ、Ａｌ合金、Ａｕ、Ｐｔ、Ｉｒのいずれかから成る金属電極材料で形成されていることを特徴とする電気機械変換素子。 The electromechanical transducer according to any one of claims 14 to 16,
At least one of the first wiring and the second wiring is formed of a metal electrode material made of any one of Ag alloy, Cu, Al, Al alloy, Au, Pt, and Ir. Mechanical conversion element.
前記第１の絶縁保護膜及び前記第２の絶縁保護膜の少なくとも一方は、アルミナ膜、シリコン酸化膜、窒化シリコン膜及び酸化窒化シリコン膜のいずれかの無機膜であることを特徴とする電気機械変換素子。 The electromechanical transducer according to any one of claims 14 to 17,
At least one of the first insulating protective film and the second insulating protective film is an inorganic film of any one of an alumina film, a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. Conversion element.
前記吐出駆動手段として、前記加圧室の壁の一部を振動板で構成し、該振動板に請求項１４乃至１８のいずれかの電気機械変換素子を配置したことを特徴とする液滴吐出ヘッド。 In a droplet discharge head comprising a nozzle that discharges a droplet, a pressure chamber that communicates with the nozzle, and a discharge driving means that pressurizes the liquid in the pressure chamber.
A part of a wall of the pressurizing chamber is constituted by a diaphragm as the ejection driving means, and the electromechanical transducer according to any one of claims 14 to 18 is disposed on the diaphragm. head.
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| JP2001332956A (en) * | 2000-05-19 | 2001-11-30 | Mitsubishi Electric Corp | Membrane piezoelectric element substrate |
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