JP5394436B2 - Switch device, transmission line switching device, manufacturing method, and test device - Google Patents

Description

  The present invention relates to a switch device, a transmission line switching device, a manufacturing method, and a test device.

Conventionally, there has been known an actuator that is provided with a piezoelectric film and an electrode for applying a voltage to the piezoelectric film, and that operates according to expansion and contraction when the voltage is applied to the piezoelectric film and the piezoelectric film expands and contracts ( For example, see Patent Document 1).
Patent Document 1 JP 2001-191300 A

  However, when such an actuator is used as a switch that operates by expanding and contracting a piezoelectric film to contact or separate the contacts, the contacts may adhere to each other and the contacts cannot be separated. Further, when an actuator is formed by forming a piezoelectric film on the support layer, the piezoelectric film is heat-treated to the firing temperature of the piezoelectric film together with the support layer. Therefore, in the process of manufacturing such an actuator, physical destruction such as cracks, chips, or cracks may occur in the actuator.

  According to a first aspect of the present invention, there is provided a base provided with a first contact, and an actuator that moves or moves the second contact to or away from the first contact. The actuator includes a support layer and a support layer. A first piezoelectric film formed on the first piezoelectric film and extending and contracting according to a first drive voltage; and an insulating material formed on the first piezoelectric film, and in contact with the support layer at least at a part of the end of the first piezoelectric film. Provided is a switch device having a first protective film covering an end portion.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

The structural example of the switch apparatus 100 which concerns on this embodiment is shown. The side view of the switch apparatus 100 which concerns on this embodiment is shown. An example of the manufacturing method which forms the switch apparatus 100 which concerns on this embodiment is shown. The cross section of the stage in which the 1st protective film 152 was formed on the board | substrate used as the base part 140 which concerns on this embodiment is shown. The cross section at the stage where the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are formed on the first protective film 152 according to this embodiment is shown. The cross section of the stage which processed the electrode layer 162, the 1st piezoelectric film 136, and the electrode layer 164 which concern on this embodiment is shown. A cross section at a stage where the support layer 150, the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 are formed on the electrode layer 164 according to the present embodiment is shown. The cross section of the stage which processed the electrode layer 166, the 2nd piezoelectric film 138, and the electrode layer 168 which concern on this embodiment is shown. The top view of the stage which processed the electrode layer 166, the 2nd piezoelectric film 138, and the electrode layer 168 which concern on this embodiment is shown. A cross section at a stage where the second protective film 154 is formed on the electrode layer 168 according to the present embodiment is shown. A cross-section at a stage where the second contact portion 132 is formed by processing the support layer 150, the second protective film 154, and the first protective film 152 according to the present embodiment is shown. A top view of the stage where the support layer 150, the second protective film 154, and the first protective film 152 according to the present embodiment are processed to form the second contact portion 132 is shown. The cross section of the stage which processed the board | substrate which concerns on this embodiment, and formed the base part 140 is shown. The bottom view of the stage which processed the board | substrate which concerns on this embodiment, and formed the base part 140 is shown. The cross section in the stage which connected the base part 140 which concerns on this embodiment, and the base | substrate lower part 110 is shown. The cross section in the stage which connected the base part 140 which concerns on this embodiment, and the base | substrate upper part 170 is shown. A configuration example of a test apparatus 410 according to this embodiment is shown together with a device under test 400. The structural example of the transmission path switching apparatus 500 which concerns on this embodiment is shown. A configuration example of a test apparatus that performs a loopback test according to the present embodiment is shown together with a device under test 400.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 shows a configuration example of a switch device 100 according to the present embodiment. FIG. 2 shows a side view of the switch device 100 according to the present embodiment. The switch device 100 includes an actuator 130 in which a piezoelectric film and an electrode that applies a voltage to the piezoelectric film are covered with an insulating film. The switch device 100 prevents physical destruction such as cracking, chipping, or cracking of the actuator 130 while increasing the rigidity of the actuator 130.

  The switch device 100 switches electrical conduction or non-conduction between the first contact 122 and the second contact 134 by contacting or separating the first contact 122 and the second contact 134. The switch apparatus 100 may be an apparatus sealed and accommodated in a package or the like. The switch device 100 includes a base lower part 110, a first contact part 120, an actuator 130, a base part 140, a base upper part 170, and a control part 180.

  The base lower part 110 has a flat first surface on which the first contact part 120 is provided. The base lower part 110 may be an insulator such as a glass substrate, or may be a semiconductor substrate such as silicon instead. The base lower part 110 may further include a via 112 and a wiring part 114. Moreover, the base | substrate lower part 110 may have the wiring part 114 on the 1st surface in which the 1st contact part 120 is provided, and the 2nd surface different from a 1st surface.

  The via 112 penetrates the first surface and the second surface of the base lower portion 110 and is coated with a metal that electrically connects the first contact portion 120 and the wiring portion 114. The via 112 may be formed of a metal that electrically connects the wiring portion 114 on the first surface of the lower portion 110 of the substrate and the wiring portion 114 on the second surface. The via 112 may be formed so as to maintain the hermeticity of the upper surface and the lower surface of the base lower portion 110 in which the through hole is formed by being filled with a conductive material. A plurality of vias 112 may be provided in the base lower part 110 according to the number of first contact portions 120 provided in the base lower part 110 and the number of electrical signals supplied to the actuator 130.

  The wiring unit 114 transmits a signal for passing the switch device 100 or an electric signal supplied to the actuator 130. The wiring portion 114 may be a wiring pattern provided on the first surface or the second surface of the lower portion 110 of the base body so as to transmit or receive signals to at least one via 112. The wiring unit 114 may include a land, a connector, and / or an antenna, and may transmit and receive a signal that passes from the outside to the switch device 100.

  The first contact portion 120 is provided with a first contact 122. A plurality of first contact portions 120 may be provided. The first contact 122 may be a planar pad without a protrusion. The first contact portion 120 may include aluminum, tungsten, palladium, rhodium, gold, platinum, ruthenium, indium, iridium, osmium, molybdenum, and / or nickel. Here, the first contact 122 may be an alloy of two or more materials including these materials.

  The actuator 130 has a second contact 134 and moves the second contact 134 to contact or separate from the first contact 122. The actuator 130 may be formed by a semiconductor manufacturing apparatus using a CVD (Chemical Vapor Deposition) method. The actuator 130 includes a second contact portion 132, a first piezoelectric film 136, a second piezoelectric film 138, a support layer 150, a first protective film 152, a second protective film 154, a protrusion 156, The electrode layer 162 and the electrode layer 164 of the first piezoelectric film 136 and the electrode layer 166 and the electrode layer 168 of the second piezoelectric film 138 are included.

  The second contact part 132 is provided with a second contact 134. The second contact portion 132 may include the same metal as the first contact portion 120. The second contact 134 may be a flat surface without a protrusion so as to contact the first contact 122 with a surface. Alternatively, the second contact 134 may have a shape having a protrusion.

  The second contact 134 may have a hemispherical shape so as to prevent the destruction or deterioration of the first contact 122, and may instead have a needle shape with a rounded tip. As an example, when the second contact 134 is in contact with the first contact 122 to form a transmission line, the second contact 134 is provided in a predetermined shape so as to form a transmission line width or the like according to the frequency of the signal to be transmitted. May be.

  In the present embodiment, in the switch device 100, two first contact portions 120 are provided in the base lower part 110, and the two first contacts 122 and one second contact 134 are contacted / separated. As a result, the switch device 100 switches electrical conduction or non-conduction between the first contact 122a and the first contact 122b via the second contact 134. The wiring unit 114 may transmit an electrical signal from the outside to the first contact 122a, and transmit the electrical signal from the first contact 122b to the outside when the switch device 100 is ON.

  Instead of this, the switch device 100 may have the first contact part 120 in the base lower part 110, and the actuator 130 may have a wiring for transmitting an electric signal from the outside to the second contact 134. In addition, an electrical signal from the outside may be transmitted to the first contact portion 120, received via the second contact 134, and transmitted to the outside. The switch device 100 turns on / off signal transmission from the second contact 134 to the first contact 122, and in the case of ON, the signal input from the outside is transmitted from the second contact 134 to the outside via the first contact 122. May be transmitted.

  The first piezoelectric film 136 is formed on the support layer 150 and expands and contracts according to the first drive voltage. The first piezoelectric film 136 expands and contracts in the length direction of the actuator 130 when the first driving voltage is applied, and the actuator 130 is bent in a direction in which the distance between the first contact 122 and the second contact 134 changes. To be arranged.

  The first piezoelectric film 136 is formed of wurtzite crystal of lead zirconate titanate (PZT), lead lanthanum zirconate titanate (PLZT), aluminum nitride (AlN), zinc oxide (ZnO), or barium titanate (BTO). ) Etc. may be formed of a perovskite ferroelectric. The first piezoelectric film 136 is, for example, a PZT piezoelectric film of 90 μm in the width direction W, 750 μm in the length direction L, and 0.5 μm in the thickness direction H.

  The second piezoelectric film 138 is provided on a surface different from the surface on which the second piezoelectric film 138 of the support layer 150 is formed so as to face the first piezoelectric film 136 with the support layer 150 interposed therebetween. It expands and contracts according to. Similar to the first piezoelectric film 136, the second piezoelectric film 138 may use a perovskite ferroelectric or the like. The second piezoelectric film 138 expands and contracts in the length direction of the actuator 130 when a second drive voltage is applied, and the actuator 130 moves in the direction in which the distance between the first contact 122 and the second contact 134 changes. Is arranged to bend.

  The second piezoelectric film 138 is desirably formed of substantially the same material as the first piezoelectric film 136 and substantially the same shape as the first piezoelectric film 136. The second piezoelectric film 138 is, for example, a PZT piezoelectric film of 90 μm in the width direction W, 750 μm in the length direction L, and 0.5 μm in the thickness direction H.

  The actuator 130 moves the second contact 134 with the expansion and contraction of the first piezoelectric film 136 and the second piezoelectric film 138 so as to contact or separate from the first contact 122. Here, the first piezoelectric film 136 and the second piezoelectric film 138 may be provided on both sides of the central surface of the actuator 130 in the thickness direction. Further, the first piezoelectric film 136 and the second piezoelectric film 138 may have substantially the same distance and thickness from the center plane in the thickness direction of the actuator 130. The actuator 130 may have a plurality of films stacked substantially symmetrically with respect to the center plane in the thickness direction. Here, the alternate long and short dash line in the figure indicates the center plane of the actuator 130 in the thickness direction.

  The support layer 150 is provided between the first piezoelectric film 136 and the second piezoelectric film 138. The support layer 150 has elasticity that is deformed by application of force, and is bent when the first piezoelectric film 136 and / or the second piezoelectric film 138 expands and contracts and applies force. Further, the support layer 150 has a rigidity that suppresses the actuator 130 from being bent excessively, and when the application of the electric field to the first piezoelectric film 136 and the second piezoelectric film 138 is stopped, the actuator 130 returns to the initial position.

  When the first piezoelectric film 136 or the second piezoelectric film 138 is formed, the support layer 150 is heated to the firing temperature together with the piezoelectric film. Therefore, the support layer 150 is formed of a material that is not destroyed even when heated to the firing temperature of the first piezoelectric film 136 and the second piezoelectric film 138. When the first piezoelectric film 136 and the second piezoelectric film 138 are formed of PZT or the like, the firing temperature may reach approximately 700 ° C. or higher. Therefore, it is desirable that the support layer 150 be formed of a material that does not cause physical destruction such as cracking, chipping, or cracking even when heated to the firing temperature of the first piezoelectric film 136 and the second piezoelectric film 138.

  The support layer 150 is preferably formed of a material that does not easily cause a chemical reaction with the piezoelectric film or the electrode layer even when heated to the firing temperature of the first piezoelectric film 136 and the second piezoelectric film 138. The first support layer 150 is preferably formed of a material that forms a compound with the piezoelectric film or the electrode layer by heating at the firing temperature of the piezoelectric film, and does not cause physical destruction such as cracking, chipping, or cracking. . In this case, the support layer 150 is preferably formed of a material that does not deteriorate film characteristics such as the piezoelectric constants of the first piezoelectric film 136 and the second piezoelectric film 138 by heating at the firing temperature of the piezoelectric film.

  The support layer 150 may be an insulating layer. Since the support layer 150 is formed of an insulating layer, it can withstand a baking temperature of a piezoelectric film of, for example, about 700 ° C. and can be formed in a short time by a manufacturing method such as CVD that is cheaper than a metal film.

The support layer 150 is, for example, silicon oxide (SiO ₂ ). Alternatively, the support layer 150 may be silicon nitride (SiN). The support layer 150 is, for example, silicon oxide (SiO ₂ ) of 90 μm in the width direction W, 750 μm in the length direction L, and 4 μm in the thickness direction H. Instead, the support layer 150 may use a conductor such as aluminum, gold, or platinum, an insulator such as glass, or a semiconductor such as silicon.

  The protruding portion 156 is a portion of the support layer 150 where the first piezoelectric film 136 and the second piezoelectric film 138 are not provided at the distal end that is the movable end of the actuator 130. The second contact part 132 may be provided on the protruding part 156. Accordingly, the second contact 134 can be formed at a position separated from the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168, and the influence of the electric signal supplied to each electrode layer can be reduced. Can be reduced.

The electrode layer 162 and the electrode layer 164 are provided on the upper and lower surfaces of the first piezoelectric film 136 and apply a first drive voltage to the first piezoelectric film 136. Here, the first drive voltage may be a positive or negative constant voltage. The electrode layer 162 and the electrode layer 164 may have a flat plate shape extending in the length direction L of the actuator 130. The electrode layer 162 and the electrode layer 164 may be a low-resistance metal that can be easily processed, such as aluminum, gold, platinum, copper, indium, tungsten, molybdenum, ruthenium, and iridium, and may be ruthenium oxide (RuO ₂ ) or iridium oxide. An oxide electrode such as (IrO ₂ ), a ceramic electrode, or a semiconductor such as silicon may be used.

  When silicon is used as the electrode material, it is preferable to use silicon doped with impurities at a high concentration. The electrode layer 162 and the electrode layer 164 of this example are platinum having a thickness in the thickness direction H of 0.2 μm. Here, in the case where a platinum film is formed, the platinum film may be formed after titanium, tantalum, chromium, or the like is formed.

  The electrode layer 166 and the electrode layer 168 are provided on the upper and lower surfaces of the second piezoelectric film 138, and apply a second drive voltage to the second piezoelectric film. The electrode layer 166 and the electrode layer 168 may have a flat plate shape extending in the length direction L of the actuator 130. The electrode layer 166 and the electrode layer 168 may have substantially the same shape and the same material as the electrode layer 162 and the electrode layer 164. The electrode layer 166 may have substantially the same shape and material as the electrode layer 164, and the electrode layer 168 may have approximately the same shape and material as the electrode layer 162.

  The first protective film 152 is formed of an insulating material on the first piezoelectric film 136 and covers at least a part of the end portion of the first piezoelectric film 136 in contact with the support layer 150. The first protective film 152 and the support layer 150 may be formed so as to cover each layer so that the first piezoelectric film 136, the electrode layer 162, and the electrode layer 164 are not exposed. As an example, the first protective film 152 and the support layer 150 completely cover each layer. Here, the first protective film 152 and the support layer 150 may be formed by exposing a connection portion where the electrode layer 162 and the electrode layer 164 are connected to the wiring portion 114, respectively.

  Here, the first protective film 152 and the support layer 150 may be formed to cover a part of the first piezoelectric film 136, the electrode layer 162, and the electrode layer 164. For example, the 1st protective film 152 and the support layer 150 cover the side part of each layer. That is, the first protective film 152 and the support layer 150 are covered on the side portion of the actuator 130. Further, the first protective film 152 and the support layer 150 may cover the support layer 150 side of the side portion of the actuator 130.

  The second protective film 154 is formed of an insulating material on the second piezoelectric film 138 and covers at least a part of the end portion of the second piezoelectric film 138 in contact with the support layer 150. The second protective film 154 and the support layer 150 may be formed so as to cover each layer so that the second piezoelectric film 138, the electrode layer 168, and the electrode layer 166 are not exposed. As an example, the second protective film 154 and the support layer 150 completely cover each layer. Here, the second protective film 154 and the support layer 150 may be formed by exposing the connection portions where the electrode layer 162, the electrode layer 164, the electrode layer 168, and the electrode layer 166 are connected to the wiring portion 114, respectively.

  Here, the second protective film 154 and the support layer 150 may be formed so as to cover a part of the second piezoelectric film 138, the electrode layer 168, and the electrode layer 166. For example, the second protective film 154 and the support layer 150 cover the side portion of each layer. That is, the second protective film 154 and the support layer 150 are covered on the side portion of the actuator 130. Further, the second protective film 154 and the support layer 150 may cover the support layer 150 side of the side portion of the actuator 130.

  The first protective film 152 and the second protective film 154 may be formed of silicon oxide or silicon nitride (SiN). The first protective film 152 and the second protective film 154 may be formed of the same insulating material as the support layer 150, and are preferably formed of substantially the same insulating material as the support layer 150. That is, the first protective film 152 and the second protective film 154 have elasticity and rigidity, and are formed by being strongly bonded to the support layer 150 with good adhesion, like the support layer 150.

  As a result, the first protective film 152, the second protective film 154, and the support layer 150 having substantially the same elasticity and rigidity are the first piezoelectric film 136, the second piezoelectric film 138, the electrode layer 162, the electrode layer 164, and the electrode. Since the layer 166 and the electrode layer 168 are wrapped, physical destruction such as cracking, chipping, or cracking of each layer can be prevented in the process of manufacturing the actuator 130 or when the actuator 130 is bent. Further, since the first protective film 152 and the second protective film 154 have rigidity, the rigidity of the actuator 130 can be increased.

  In addition, since the first protective film 152 and the second protective film 154 are formed of substantially the same material as the support layer 150, they can have substantially the same rigidity and elasticity as the support layer 150. Therefore, when the actuator 130 is displaced, the first protective film 152 and the second protective film 154 can suppress the generation of stress due to the mismatch in rigidity and elasticity inside the actuator 130. Also, the residual stress and thermal stress, etc., acting in the direction in which the actuator 130 is deflected due to the lamination of a plurality of films, and the residual stress, thermal stress, etc., acting in the direction to suppress warpage are made substantially the same and cancel each other out. Accordingly, warping of the actuator 130 can be suppressed.

  As a result, the actuator 130 can prevent adhesion between the contacts. The first protective film 152, the second protective film 154, and the support layer 150 do not expose the second piezoelectric film 138, the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168 to the outside. This layer can also be prevented from oxidation and the like.

  The pedestal portion 140 is formed of a semiconductor material by fixing the fixed end of the actuator 130 to the base upper portion 170. The pedestal portion 140 is formed by etching a semiconductor material. As an example, the pedestal part 140 may be formed of a silicon substrate. As an example, the actuator 130 is fixed to the base body 170 via the pedestal part 140.

  In the present embodiment, it has been described that the pedestal part 140 fixes the actuator 130 to the upper part 170 of the base body. Instead, the lower part 110 of the base part is separated from the first contact part 120 in the vicinity of the first contact part 120. It may be arranged at the position. In this case, the thickness of the pedestal portion 140 may be equal to or less than the maximum displacement amount of the actuator 130. Here, the maximum amount of displacement of the actuator 130 may mean the amount of displacement of the actuator 130 when the maximum drive voltage that can be applied to the first piezoelectric film 136 and / or the second piezoelectric film 138 is applied.

  The actuator 130 is supported by the pedestal 140 at one end in the length direction L. When a voltage is applied to the first piezoelectric film 136 or the second piezoelectric film 138, the end portion on the second contact portion 132 side that is not supported by the pedestal portion 140 in the actuator 130 is bent in the thickness direction (downward in the figure). Or can be warped (displaced upward in the figure).

  The controller 180 supplies the first drive voltage to the first piezoelectric film 136 and the second drive voltage to the second piezoelectric film 138, respectively. When the switch device 100 is turned on by bringing the first contact 122 and the second contact 134 into contact with each other, the control unit 180 applies a second driving voltage to the second piezoelectric film 138 to cause the second piezoelectric film 138 to move. Shrink. In addition, the controller 180 stops the supply of the second drive voltage to the second piezoelectric film 138 when the switch device 100 is turned off by separating the first contact 122 and the second contact 134.

  Here, since the first piezoelectric film 136 and the second piezoelectric film 138 of the present embodiment have substantially the same distance and thickness from the center plane in the thickness direction of the actuator 130, the first piezoelectric film 136 causes warpage. The stress and the stress at which the second piezoelectric film 138 suppresses warpage can be made substantially the same. In addition, since the actuator 130 has a plurality of films laminated substantially symmetrically with respect to the center plane in the thickness direction, the residual stress acting in the direction in which the actuator 130 is deflected due to the lamination of the plurality of films, and The warp of the actuator 130 can be suppressed by making the thermal stress and the like, the residual stress and the thermal stress acting in the direction of suppressing warpage substantially the same. Thus, since the actuator 130 can suppress warping due to thermal stress, the switching operation can be executed even at various environmental temperatures.

  The control unit 180 applies the second drive voltage to the second piezoelectric film 138 when the switch device 100 is turned on by bringing the first contact 122 and the second contact 134 into contact with each other. May be shortened. In addition, the controller 180 may stop the supply of the second drive voltage to the second piezoelectric film 138 when the switch device 100 is turned off by separating the first contact 122 and the second contact 134. .

  Instead, the control unit 180 applies the first driving voltage to the first piezoelectric film 136 when the first contact 122 and the second contact 134 are brought into contact with each other to turn on the switch device 100. The piezoelectric film 136 may be stretched. The controller 180 may stop supplying the first drive voltage to the first piezoelectric film 136 when the switch device 100 is turned off by separating the first contact 122 and the second contact 134. .

  In addition, the controller 180 applies the first driving voltage to the first piezoelectric film 136 when the switch device 100 is turned on by bringing the first contact 122 and the second contact 134 into contact with each other. The second piezoelectric film 138 may be contracted by extending 136 and applying a second driving voltage to the second piezoelectric film 138. The controller 180 stops supplying the drive voltage to the first piezoelectric film 136 and the second piezoelectric film 138 when the switch device 100 is turned off by separating the first contact 122 and the second contact 134. It's okay.

  In addition, when the control unit 180 separates the first contact 122 and the second contact 134 to turn off the switch device 100, the control unit 180 applies a voltage that is different from the first drive voltage in positive and negative directions to the first piezoelectric film 136. Then, the return of the actuator 130 may be urged. Similarly, when the switch device 100 is turned off, the control unit 180 may apply a voltage that is different from the second drive voltage to the second piezoelectric film 138 to bias the return of the actuator 130. .

  The controller 180 may supply predetermined values to the corresponding first piezoelectric film 136 and second piezoelectric film 138 as the first drive voltage and the second drive voltage, respectively. The control unit 180 may be hardware such as an electronic circuit, or may be software that operates according to a program or the like instead.

  In the present embodiment, it has been described that the second contact portion 132 is provided on the protruding portion 156, but instead, it may be provided on the movable end side on the second protective film 154. In this case, the actuator 130 may not have the protrusion 156.

  FIG. 3 shows an example of a manufacturing method for forming the switch device 100 according to the present embodiment. 4 to 16 show cross sections of the switch device 100 in the process of forming the switch device 100 according to the present embodiment.

  First, the 1st protective film 152 is formed on the board | substrate used as the base part 140 (S300). In this embodiment, the substrate is a silicon substrate, and the first protective film 152 is silicon oxide. The first protective film 152 may be formed by a CVD method. As an example, the first protective film 152 made of silicon oxide is formed by reacting with oxygen or ozone using TEOS (Tetra Ethyl Ortho Silicate) as a raw material. FIG. 4 shows a cross section at a stage where the first protective film 152 is formed on the substrate to be the pedestal portion 140 according to the present embodiment.

  Next, the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are formed on the first protective film 152 (S310). The electrode layer 162 and the electrode layer 164 include platinum (Pt) and may be formed by vapor deposition or sputtering. The first piezoelectric film 136 may be formed by a sol-gel method in which a sol-gel solution is applied and heat-treated. In this embodiment, the first piezoelectric film 136 is a PZT film formed by applying a PZT sol-gel solution.

  FIG. 5 shows a cross section at a stage where the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are formed on the first protective film 152 according to the present embodiment. Here, the electrode layer 164 may be formed in a predetermined shape on the first piezoelectric film 136 by photolithography.

  Next, the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are processed (S320). The electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 have their surface shapes processed by etching or the like so as to be smaller than the surface area of the support layer 150 to be formed later. Here, the first protective film 152 may be used as an etching stop layer. Here, when the electrode layer 164 is formed in a predetermined shape, the electrode layer 162 and the first piezoelectric film 136 may be processed into a shape substantially the same as the electrode layer 164.

  FIG. 6 shows a cross-section at a stage where the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 according to this embodiment are processed. Here, the first piezoelectric film 136 and the electrode layer 164 may be formed so that a connection portion connected to the wiring portion 114 after the electrode layer 162 has is exposed in the upper surface direction of the substrate.

  Next, the support layer 150 is formed on the electrode layer 164 (S330). In this embodiment, the support layer 150 is made of silicon oxide and is formed so as to cover the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164. The support layer 150 may be formed by a CVD method as with the first protective film 152. Since the support layer 150 and the first protective film 152 are formed of the same material, the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are disposed inside the silicon oxide layer formed by both. Formed as follows.

  Next, the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 are formed on the support layer 150 (S340). The electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 may be formed in the same manner as Step S310 in which the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164 are formed on the first protective film 152. FIG. 7 shows a cross section at a stage where the support layer 150, the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 are formed on the electrode layer 164 according to the present embodiment. Here, the electrode layer 168 may be formed in a predetermined shape on the second piezoelectric film 138 by photolithography.

  Next, the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 are processed (S350). The electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 may be processed in the same manner as step S320 of processing the electrode layer 162, the first piezoelectric film 136, and the electrode layer 164. FIG. 8 shows a cross-section at a stage where the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 according to this embodiment are processed.

  Here, the electrode layer 166 may be formed so that each connection portion connected to the wiring portion 114 after the electrode layer 162 and the electrode layer 164 have is exposed in the upper surface direction of the substrate. In addition, the second piezoelectric film 138 and the electrode layer 168 are exposed so that respective connection portions connected to the wiring portion 114 after the electrode layer 162, the electrode layer 164, and the electrode layer 166 are provided are exposed in the upper surface direction of the substrate. May be formed.

  FIG. 9 is a top view of a stage where the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 according to the present embodiment are processed. This figure shows an example in which one actuator 130 formed of a plurality of electrode layers and a piezoelectric film is formed on a substrate. Here, a substrate having a diameter of 2 inches or more may be used for manufacturing, and in this case, a plurality of actuators 130 are formed on the substrate.

  At this stage, since the electrode layer 166, the second piezoelectric film 138, and the electrode layer 168 are processed so as to be smaller than the surface shape of the support layer 150 to be processed later, a part of the substrate is supported. Layer 150 is exposed. In addition, the electrode layer 162, the electrode layer 164, the electrode layer 166, and the connection part of each electrode layer to which the corresponding wiring part 114 is connected are formed so as to be exposed from above.

  Next, the second protective film 154 is formed on the electrode layer 168 (S360). In the present embodiment, the second protective film 154 is made of silicon oxide and is formed so as to cover the electrode layer 168, the second piezoelectric film 138, and the electrode layer 166 together with the support layer 150. Similar to the support layer 150 and the first protective film 152, the second protective film 154 may be formed by a CVD method. Since the second protective film 154 and the support layer 150 are formed of the same material, the electrode layer 168, the second piezoelectric film 138, and the electrode layer 166 are disposed inside the silicon oxide layer formed by both. Formed as follows. FIG. 10 shows a cross section at a stage where the second protective film 154 is formed on the electrode layer 168 according to the present embodiment.

  Next, the support layer 150, the first protective film 152, and the second protective film 154 are processed (S370). Here, the support layer 150, the second protective film 154, and the first protective film 152 include the first piezoelectric film 136, the second piezoelectric film 138, the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168. The shape of the actuator 130 is processed while being covered.

  In addition, the support layer 150, the first protective film 152, and the second protective film 154 are protruding portions 156 where the second piezoelectric film 138 and the first piezoelectric film 136 are not provided at the distal end that is the movable end of the actuator 130. Formed leaving. The support layer 150, the first protective film 152, and the second protective film 154 may be formed by etching.

  Next, the second contact portion 132 is formed on the protruding portion 156 (S380). FIG. 11 shows a cross section at a stage where the support layer 150, the first protective film 152, and the second protective film 154 according to the present embodiment are processed to form the second contact portion 132. Here, the support layer 150 and the second protective film 154 are formed so that the connection portions of the electrodes are exposed.

  FIG. 12 is a top view of the stage where the second contact portion 132 is formed by processing the support layer 150, the first protective film 152, and the second protective film 154 according to the present embodiment. At this stage, since the support layer 150, the first protective film 152, and the second protective film 154 are processed into the surface shape of the actuator 130, a portion of the substrate that becomes the base portion 140 is exposed on a part of the substrate. ing. Further, the connection portions of the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168 are exposed from above.

  Next, the base plate 140 is formed by processing the substrate (S390). Here, the pedestal portion 140 is formed by etching and removing a part of the semiconductor substrate from the other surface opposite to the surface on which the actuator 130 of the semiconductor substrate is formed, using the first protective film 152 as an etching stop layer. Is done. At this stage, the actuator 130 is separated from the substrate and is self-supporting with the pedestal portion 140 as a fixed end. FIG. 13 shows a cross section at a stage where the base portion 140 is formed by processing the substrate according to the present embodiment.

  FIG. 14 is a bottom view of the stage where the base portion 140 is formed by processing the substrate according to the present embodiment. That is, this figure shows the actuator 130 viewed from the pedestal 140 side. The first protective film 152 is exposed on the pedestal 140 side of the actuator 130. Here, the base part 140 may be provided with an opening 142. The opening 142 may be used for connection work of electrical wiring for exchanging electrical signals with the actuator 130.

  Next, the base part 140 is connected to the base lower part 110 and the base upper part 170, respectively. The substrate lower portion 110 and the substrate upper portion 170 of this embodiment are each formed of a glass substrate, and may be bonded to the pedestal portion 140 by anodic bonding that is heated and bonded while applying a voltage.

  FIG. 15 shows a cross section at a stage where the pedestal part 140 according to the present embodiment and the base lower part 110 are connected. The connection portions of the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168 may be connected to the wiring portion 114 provided in the lower portion 110 of the base body. Here, the connection portion and the wiring portion 114 may be connected by pressure bonding. The connection work may be performed from the opening 142 of the pedestal 140.

  FIG. 16 shows a cross section at a stage where the pedestal 140 according to this embodiment is connected to the base upper portion 170. In the switch device 100 formed as described above, the actuator 130 is driven in accordance with a control signal from the control unit 180 provided outside the base, and the first contact 122 and the second contact 134 are brought into contact with or separated from each other.

  As described above, in the switch device 100 according to the present embodiment, the first piezoelectric film 136, the second piezoelectric film 138, the electrode layer 162, the electrode layer 164, the electrode layer 166, and the electrode layer 168 are substantially the same as the support layer 150. It is possible to provide an actuator formed by being wrapped with a first protective film 152 and a second protective film 154 having the elasticity and rigidity described above. The switch device 100 according to the present embodiment has been described as including the actuator 130 having the first piezoelectric film 136 and the second piezoelectric film 138. Instead of this, the actuator 130 in which three or more piezoelectric films are stacked. May be provided. In this case, the actuator 130 may stack a plurality of piezoelectric films and electrodes on the first piezoelectric film 136 and / or the second piezoelectric film 138 of this example.

  Instead of this, the switch device 100 may include an actuator 130 having one of the second piezoelectric film 138 and the first piezoelectric film 136. Here, when the actuator 130 includes the second piezoelectric film 138, the support layer 150 may be formed on the substrate serving as the pedestal portion 140 instead of forming the first protective film 152. Since the support layer 150 uses the same insulating material as that of the first protective film 152, the support layer 150 can be used as an etching stop layer when the pedestal portion is etched.

  FIG. 17 shows a configuration example of the test apparatus 410 according to this embodiment together with the device under test 400. The test apparatus 410 tests at least one device under test 400 such as an analog circuit, a digital circuit, an analog / digital mixed circuit, a memory, and a system on chip (SOC). The test apparatus 410 inputs a test signal based on a test pattern for testing the device under test 400 to the device under test 400, and the device under test based on an output signal output from the device under test 400 according to the test signal. The quality of 400 is judged.

  The test apparatus 410 includes a test unit 420, a signal input / output unit 430, and a control device 440. The test unit 420 tests the device under test 400 by exchanging electrical signals with the device under test 400. The test unit 420 includes a test signal generation unit 423 and an expected value comparison unit 426.

  The test signal generator 423 is connected to one or a plurality of devices under test 400 via the signal input / output unit 430 and generates a plurality of test signals to be supplied to the device under test 400. The test signal generator 423 may generate an expected value of the response signal output from the device under test 400 according to the test signal.

  The expected value comparison unit 426 compares the data value included in the response signal of the device under test 400 received from the signal input / output unit 430 with the expected value generated by the test signal generation unit 423. The expected value comparison unit 426 determines pass / fail of the device under test 400 based on the comparison result.

  The signal input / output unit 430 electrically connects the device under test 400 to be tested and the test unit 420, and transmits the test signal generated by the test signal generation unit 423 to the device under test 400. The signal input / output unit 430 receives a response signal output from the device under test 400 in accordance with the test signal. The signal input / output unit 430 transmits the received response signal of the device under test 400 to the expected value comparison unit 426. The signal input / output unit 430 may be a performance board on which a plurality of devices under test 400 are mounted. The signal input / output unit 430 includes the switch device 100.

  The switch device 100 is provided between the test unit 420 and the device under test 400 and electrically connects or disconnects between the test unit 420 and the device under test 400. The test apparatus 410 may perform electrical connection or disconnection by the switch apparatus 100 according to the present embodiment.

  In this example, the example in which the signal input / output unit 430 is connected to one device under test 400 and one switch apparatus 100 is provided for each of the input signal line and the output signal line of one device under test 400 has been described. Instead, the signal input / output unit 430 may be connected to a plurality of devices under test 400, and one switch device 100 may be provided for each of the input signal lines and the output signal lines of the plurality of devices under test 400. Further, when one signal input / output line is connected from the signal input / output unit 430 to one device under test 400, one switch device 100 may be provided in one input / output line.

  The control device 440 transmits a control signal to the test unit 420 and the signal input / output unit 430 in order to execute the test of the test device 410. The control device 440 transmits a control signal for causing the test unit 420 to generate a test signal or compare a response signal with an expected value in accordance with a test program. Further, the control device 440 instructs connection of the switch device 100 provided in the signal input / output line to be connected and disconnection of the switch device 100 provided in the signal input / output line to be disconnected according to the test program. An instruction or the like is transmitted to the signal input / output unit 430.

  The test apparatus 410 according to the present embodiment described above executes a test using the switch apparatus 100 including the actuator 130 that can prevent physical destruction such as cracking, chipping, or cracking while increasing rigidity. Can do. In addition, the test apparatus 410 can perform a test by using the switch apparatus 100 which has low power consumption switching control by voltage control and has a long life. Moreover, the test apparatus 410 can perform a test using the switch apparatus 100 in which adhesion between the contacts is reduced.

  FIG. 18 shows a configuration example of a transmission path switching device 500 according to the present embodiment. The transmission path switching device 500 includes a plurality of switch devices 100 respectively connected between an input end and a plurality of output ends. The transmission line switching apparatus 500 of this embodiment includes a plurality of switch devices 100a and 100b that are respectively connected between the input terminal A and the output terminals B and C.

  The transmission path switching device 500 electrically connects the input terminal A and the output terminal B by setting the switch device 100a to the ON state and the switch device 100b to the OFF state, and also connects the input terminal A and the output device. The end C is electrically disconnected. Further, the transmission path switching device 500 electrically disconnects the input end A, the output end B, and the output end C by turning the switch device 100a OFF and the switch device 100b ON. The output terminal B and the output terminal C are electrically connected.

  As described above, the transmission path switching device 500 switches the transmission path between the input end and the plurality of output ends by turning ON / OFF the plurality of switch devices, respectively. The transmission path switching device 500 may be a device in which a plurality of switch devices are sealed and accommodated in one package or the like.

  FIG. 19 shows a configuration example of a test apparatus for performing a loopback test according to the present embodiment, together with a device under test 400. The test apparatus for performing a loopback test according to the present embodiment includes a combination of the test apparatus 410 described with reference to FIG. 17 and the transmission path switching apparatus 500 described with reference to FIG. Therefore, the same reference numerals are given to the substantially same operations as those of the test apparatus 410 and the transmission path switching apparatus 500 according to the present embodiment shown in FIGS.

  When supplying a test signal from the test apparatus 410 to the device under test 400, the test apparatus turns on the switch apparatus 100a of the transmission path switching apparatus 500 and turns off the switch apparatus 100b. Further, when the signal output from the device under test 400 is looped back to the device under test 400, the test apparatus turns off the switch device 100a of the transmission path switching device 500 and turns on the switch device 100b. Put it in a state.

  As a result, the test apparatus causes the test apparatus 410 to input a test signal for testing the device under test 400 to the device under test 400 and loops back the signal from the device under test 400 to perform the test. The transmission path to be input to the device 400 can be switched. The test apparatus for performing the loopback test according to the present embodiment has been described as including the single transmission line switching apparatus 500. Instead, the test apparatus includes two or more transmission line switching apparatuses 500, the test apparatus 410, and the device under test. By switching a plurality of transmission paths with the device 400, the test of the device under test 400 and the loopback test using the test signal may be switched.

  According to the test apparatus for performing the loopback test according to the above-described embodiment, the switch apparatus 100 including the actuator 130 that can prevent physical destruction such as cracking, chipping, or cracking while increasing rigidity is used. The test by the test signal and the loopback test can be switched. In addition, the present test apparatus can switch between two tests by using the switch apparatus 100 which has low power consumption switching control by voltage control and has a long life. In addition, this test apparatus can switch between two tests using the switch device 100 in which adhesion between the contacts is reduced.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

DESCRIPTION OF SYMBOLS 100 Switch apparatus, 110 Base | substrate lower part, 112 Via, 114 Wiring part, 120 1st contact part, 122 1st contact, 130 Actuator, 132 2nd contact part, 134 2nd contact, 136 1st piezoelectric film, 138 2nd piezoelectric Membrane, 140 pedestal portion, 142 opening portion, 150 support layer, 152 first protective film, 154 second protective film, 156 protruding portion, 162 electrode layer, 164 electrode layer, 166 electrode layer, 168 electrode layer, 170 upper part of substrate, 180 control unit, 400 device under test, 410 test device, 420 test unit, 423 test signal generation unit, 426 expected value comparison unit, 430 signal input / output unit, 440 control device, 500 transmission path switching device

Claims (16)

A substrate provided with a first contact;
An actuator that moves a second contact to contact or separate from the first contact;
With
The actuator is
A support layer;
A first piezoelectric film formed on the support layer by being processed so that a surface area thereof is smaller than a surface area of the support layer, and extending and contracting according to a first drive voltage;
A first protective film formed of an insulating material on the first piezoelectric film and covering the end portion in contact with the support layer in at least a part of the end portion of the first piezoelectric film;
A switch device. The actuator further includes a second piezoelectric film provided on the surface of the support layer different from the surface on which the first piezoelectric film is formed, facing the first piezoelectric film via the support layer. ,
A second protective film formed of an insulating material on the second piezoelectric film and covering the end portion in contact with the support layer in at least a part of the end portion of the second piezoelectric film;
The switch device according to claim 1, comprising:   The said 1st protective film, the said support layer, and the said 2nd protective film are processed while covering the said 1st piezoelectric film and the said 2nd piezoelectric film, and are formed in the shape of the said actuator. Switch device. The second piezoelectric film, the switch device according to claim 2 or 3 expands and contracts in response to the second driving voltage. The support layer has a protruding portion on which the first piezoelectric film and the second piezoelectric film are not provided at an end portion that becomes a movable end portion of the actuator,
It said second contact switch device according to any one of claims 2 to 4 provided in the protruding portion. The first piezoelectric film and the second piezoelectric film are provided on both sides of a center plane in the thickness direction of the actuator, and the distance and thickness from the center plane in the thickness direction of the actuator are substantially the same. The switch device according to any one of 2 to 5 . The switch device according to claim 6 , wherein the actuator includes a plurality of films stacked substantially symmetrically with respect to a center plane in a thickness direction. The first piezoelectric film and the second piezoelectric film, the switch device according to any one of claims 2 7 is PZT film. The support layer, the switch device according to any one of claims 1 to 8, which is formed of an insulating material. It said insulating material, the switch device according to any one of claims 1 a SiO ₂ or SiN 9. The switch device according to any one of claims 1 to 10 , further comprising a pedestal portion formed of a semiconductor material, wherein a fixed end of the actuator is fixed to the base. A rigid support layer on one surface of the semiconductor substrate, a first piezoelectric film formed on the support layer, an insulating material formed on the first piezoelectric film, and an end of the first piezoelectric film An actuator forming step of forming an actuator having a protective film that covers the end portion in contact with the support layer in at least a part of the portion;
Forming a contact on the support layer; and
An etching stage in which a part of the semiconductor substrate is etched and removed from the other surface of the semiconductor substrate, using the protective film or the support layer as an etching stop layer,
Equipped with a,
The actuator forming step, the first by working the piezoelectric film, the manufacturing method of the switch apparatus that the surface area of the first piezoelectric film having a machining step to be smaller than the surface area of the support layer. The actuator forming step includes
A support layer forming step of forming the support layer on one surface of the semiconductor substrate;
A first piezoelectric film forming step of forming the first piezoelectric film;
A protective film forming step of forming the protective film after the processing step ;
The manufacturing method of the switch apparatus of Claim 12 which has these. A transmission line switching device comprising a plurality of switch devices according to any one of claims 1 to 11 , each connected between an input end and a plurality of output ends. A test apparatus for performing a loopback test on a device under test,
A test unit for exchanging electrical signals with the device under test to test the device under test;
A switch that is provided between the test unit and the device under test and switches between supplying a signal from the test unit to the device under test or looping back a signal from the device under test to the device under test. Item 14. The transmission line switching device according to Item 14 ,
A test apparatus comprising: A test apparatus for testing a device under test,
A test unit for exchanging electrical signals with the device under test to test the device under test;
The switch device according to any one of claims 1 to 11 , which is provided between the test unit and the device under test and electrically connects or disconnects between the test unit and the device under test.
A test apparatus comprising:

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