JP2015537146A - バックアップ軸受接触センサ付きの真空ポンプ - Google Patents
バックアップ軸受接触センサ付きの真空ポンプ Download PDFInfo
- Publication number
- JP2015537146A JP2015537146A JP2015540202A JP2015540202A JP2015537146A JP 2015537146 A JP2015537146 A JP 2015537146A JP 2015540202 A JP2015540202 A JP 2015540202A JP 2015540202 A JP2015540202 A JP 2015540202A JP 2015537146 A JP2015537146 A JP 2015537146A
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- Prior art keywords
- vacuum pump
- bearing assembly
- drive shaft
- rotor
- movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007723 transport mechanism Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 abstract description 10
- 238000005086 pumping Methods 0.000 abstract description 10
- 230000001133 acceleration Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/04—Shafts or bearings, or assemblies thereof
- F04D29/046—Bearings
- F04D29/048—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/053—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/52—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2233/00—Monitoring condition, e.g. temperature, load, vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims (15)
- 真空ポンプであって、駆動シャフトによって回転可能に支持されたロータと、前記駆動シャフトの回転中に前記ロータの運動を制御する第1の軸受組立体と、前記運動を制限するバックアップ軸受組立体と、前記運動が前記バックアップ軸受組立体によって制限された時点を検出するセンサとを含む真空ポンプ輸送機構体を有する、真空ポンプ。
- 前記駆動シャフトの運動は、全体として、前記駆動シャフトの軸線に対して半径方向の運動である、請求項1記載の真空ポンプ。
- 前記バックアップ軸受組立体は、前記ロータ又は前記駆動シャフトとの接触によって前記運動を制限するよう構成され、前記センサは、前記バックアップ軸受組立体と前記ロータ又は前記駆動シャフトとの各接触イベントを検出するよう構成されている、請求項1又は2記載の真空ポンプ。
- 前記第1の軸受組立体は、前記ロータ又は前記駆動シャフトに接触することなく前記運動を制御する非接触型軸受組立体である、請求項1〜3のうちいずれか一に記載の真空ポンプ。
- 前記第1の軸受組立体は、磁気軸受組立体である、請求項4記載の真空ポンプ。
- 前記第1の軸受組立体は、前記バックアップ軸受組立体を前記ロータ又は前記駆動シャフトから隔てる距離よりも長い距離だけ前記ロータ又は前記駆動シャフトから間隔を置いて配置されている、請求項1〜5のうちいずれか一に記載の真空ポンプ。
- 前記センサは、前記バックアップ軸受体が前記力に起因して生じる前記運動を制限するようにするのに十分な、前記ロータ又は前記駆動シャフトに加えられる力を検出するよう構成されている、請求項1〜6のうちいずれか一に記載の真空ポンプ。
- 前記センサは、加速度計である、請求項7記載の真空ポンプ。
- 前記センサは、ポンプハウジングに対して固定されている、請求項1〜8のうちいずれか一に記載の真空ポンプ。
- 前記センサは、前記バックアップ軸受組立体が前記運動を制限したイベントの回数を計数する計数器に信号を出力するよう構成されている、請求項1〜9のうちいずれか一に記載の真空ポンプ。
- 前記イベントの回数が前記バックアップ軸受組立体の破損を予測する所定の値を超えた時点をユーザに指示する指示器を更に有する、請求項10記載の真空ポンプ。
- 前記指示器は、前記イベントの回数を表示するディスプレイである、請求項11記載の真空ポンプ。
- 前記指示器は、前記イベントの回数をワイヤード又はワイヤレス接続方式により遠隔の場所に送信する送信機である、請求項10記載の真空ポンプ。
- 前記センサは、前記真空ポンプに加えられた力の大きさを検出し、前記検出した力の大きさに応じて前記バックアップ軸受組立体について生じる損傷を関連付けるよう構成されている、請求項1〜13のうちいずれか一に記載の真空ポンプ。
- ターボ分子真空ポンプ輸送機構体を有する、請求項1〜14のうちいずれか一に記載の真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1219517.8A GB2507500B (en) | 2012-10-30 | 2012-10-30 | Vacuum pump |
GB1219517.8 | 2012-10-30 | ||
PCT/GB2013/052672 WO2014068276A1 (en) | 2012-10-30 | 2013-10-14 | Vacuum pump with back-up bearing contact sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015537146A true JP2015537146A (ja) | 2015-12-24 |
JP6485874B2 JP6485874B2 (ja) | 2019-03-20 |
Family
ID=47358884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015540202A Active JP6485874B2 (ja) | 2012-10-30 | 2013-10-14 | バックアップ軸受接触センサ付きの真空ポンプ |
Country Status (8)
Country | Link |
---|---|
US (1) | US9822788B2 (ja) |
EP (1) | EP2914856B1 (ja) |
JP (1) | JP6485874B2 (ja) |
KR (1) | KR102156950B1 (ja) |
CN (1) | CN104769285B (ja) |
CA (1) | CA2886618A1 (ja) |
GB (1) | GB2507500B (ja) |
WO (1) | WO2014068276A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2507501B (en) | 2012-10-30 | 2015-07-15 | Edwards Ltd | Vacuum pump |
EP3106668B1 (de) * | 2015-06-17 | 2020-08-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
CN111442029B (zh) * | 2020-05-07 | 2021-11-16 | 南京邮电大学 | 主动径向磁轴承用位移传感器容错控制系统及控制方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006009759A (ja) * | 2004-06-29 | 2006-01-12 | Koyo Seiko Co Ltd | ターボ分子ポンプ装置 |
JP2006022914A (ja) * | 2004-07-09 | 2006-01-26 | Koyo Seiko Co Ltd | 磁気軸受装置 |
WO2010007975A1 (ja) * | 2008-07-14 | 2010-01-21 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (26)
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US3071323A (en) | 1960-08-09 | 1963-01-01 | Optomechanisms Inc | Digital counter indicator means |
US4641978A (en) * | 1984-10-23 | 1987-02-10 | The United States Of America As Represented By The United States Department Of Energy | Bearing system |
DE3931661A1 (de) * | 1989-08-25 | 1991-04-04 | Leybold Ag | Magnetgelagerte vakuumpumpe |
JPH05157664A (ja) * | 1991-12-09 | 1993-06-25 | Ishikawajima Harima Heavy Ind Co Ltd | 接触検知方法 |
JP3651703B2 (ja) | 1995-07-24 | 2005-05-25 | 株式会社島津製作所 | 磁気軸受装置 |
IT1289811B1 (it) * | 1996-12-27 | 1998-10-16 | Varian Spa | Metodo ed apparato di diagnosi per pompa da vuoto. |
US6074165A (en) * | 1998-03-10 | 2000-06-13 | Varian, Inc. | Vacuum pump with magnetic bearing system and back-up bearings |
DE10043235A1 (de) | 2000-09-02 | 2002-03-14 | Leybold Vakuum Gmbh | Vakuumpumpe |
JP2002295398A (ja) | 2001-03-28 | 2002-10-09 | Boc Edwards Technologies Ltd | ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法 |
US6524005B2 (en) * | 2001-06-04 | 2003-02-25 | Honeywell International, Inc. | Touchdown bearing assembly with actuator ring assembly |
JP3978018B2 (ja) | 2001-11-15 | 2007-09-19 | 三菱重工業株式会社 | ターボ分子ポンプおよびターボ分子ポンプの運転方法 |
EP1517042A1 (en) | 2003-09-17 | 2005-03-23 | Mecos Traxler AG | Magnetic bearing device and vacuum pump |
DE60304870T2 (de) | 2003-11-18 | 2006-11-30 | Varian S.P.A., Leini | Vakuumpumpe mit Schwingungsdämpfer |
EP1760319A4 (en) * | 2004-06-25 | 2010-07-07 | Osaka Vacuum Ltd | BEARING SUPPORT STRUCTURE FOR TURBOMOLECULAR PUMP |
EP1895180A2 (en) | 2006-08-30 | 2008-03-05 | Ebara Corporation | Magnetic bearing device, rotating system therewith and method of identification of the model of the main unit in a rotating system |
US7736062B2 (en) * | 2007-09-14 | 2010-06-15 | Hamilton Sundstrand Corporation | Auxiliary rotary bearing system |
DE102008019472A1 (de) * | 2008-04-17 | 2009-10-22 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
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FR2947309A1 (fr) | 2009-06-26 | 2010-12-31 | Alcatel Lucent | Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe |
WO2011011573A1 (en) * | 2009-07-22 | 2011-01-27 | Johnson Controls Technology Company | Apparatus and method for determining clearance of mechanical back-up bearings of turbomachinery utilizing electromagnetic bearings |
CN201908851U (zh) | 2010-12-31 | 2011-07-27 | 清华大学 | 一种磁悬浮分子泵系统 |
CN102011745B (zh) | 2010-12-31 | 2013-08-07 | 清华大学 | 一种磁悬浮分子泵的神经网络控制系统及方法 |
CN102155425A (zh) * | 2011-04-14 | 2011-08-17 | 中山共享光电科技有限公司 | 检测高速高真空涡轮分子泵状态的方法 |
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US9976572B2 (en) | 2012-09-26 | 2018-05-22 | Shimadzu Corporation | Vacuum pump protection net, method for manufacturing the same, and vacuum pump |
GB2507501B (en) | 2012-10-30 | 2015-07-15 | Edwards Ltd | Vacuum pump |
-
2012
- 2012-10-30 GB GB1219517.8A patent/GB2507500B/en active Active
-
2013
- 2013-10-14 WO PCT/GB2013/052672 patent/WO2014068276A1/en active Application Filing
- 2013-10-14 CA CA2886618A patent/CA2886618A1/en not_active Abandoned
- 2013-10-14 KR KR1020157011126A patent/KR102156950B1/ko active IP Right Grant
- 2013-10-14 JP JP2015540202A patent/JP6485874B2/ja active Active
- 2013-10-14 EP EP13780372.2A patent/EP2914856B1/en active Active
- 2013-10-14 CN CN201380057294.5A patent/CN104769285B/zh active Active
- 2013-10-14 US US14/438,148 patent/US9822788B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006009759A (ja) * | 2004-06-29 | 2006-01-12 | Koyo Seiko Co Ltd | ターボ分子ポンプ装置 |
JP2006022914A (ja) * | 2004-07-09 | 2006-01-26 | Koyo Seiko Co Ltd | 磁気軸受装置 |
WO2010007975A1 (ja) * | 2008-07-14 | 2010-01-21 | エドワーズ株式会社 | 真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
EP2914856B1 (en) | 2019-09-18 |
KR102156950B1 (ko) | 2020-09-16 |
KR20150079654A (ko) | 2015-07-08 |
GB2507500B (en) | 2015-06-17 |
CN104769285B (zh) | 2018-10-12 |
US9822788B2 (en) | 2017-11-21 |
GB201219517D0 (en) | 2012-12-12 |
WO2014068276A1 (en) | 2014-05-08 |
CN104769285A (zh) | 2015-07-08 |
JP6485874B2 (ja) | 2019-03-20 |
GB2507500A (en) | 2014-05-07 |
CA2886618A1 (en) | 2014-05-08 |
US20150292515A1 (en) | 2015-10-15 |
EP2914856A1 (en) | 2015-09-09 |
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