JP2015530930A - マイクロキャリアの製造方法、及び生物学的分析の実施方法 - Google Patents
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Abstract
Description
a)底部層、上部第1の犠牲層、及び、上記底部層と上部層との間に位置する絶縁層を含むサンドイッチ構造を有するウエハーを提供する段階と;
b)第1の三次元ネガティブパターンを画定する第1のマスクを形成するために第1の犠牲層を構造化する段階と;
c)第1の三次元ネガティブパターンに相補的な第1の三次元構造体を形成するために、第1の犠牲層の上に第1の構造層を堆積する段階と;
d)第1の構造層の上面の上に第2の犠牲層を堆積する段階と;
e)第1の構造層の上面の上に第2の三次元ネガティブパターンを画定する第2のマスクを規定するために第2の犠牲層を構造化する段階と;
f)第1の構造層の上面の上に第2の三次元構造体を形成するために第2の三次元ネガティブパターンにおいて第2の構造層を堆積する段階と;
g)マイクロキャリアのボディの外側壁を画定するために、絶縁層まで第1の構造層及び第2の構造層を上からエッチング除去する段階であって、各ボディが少なくとも第1の下部三次元構造体及び第2の上部三次元構造体を含む段階と;
h)マイクロキャリアを解放するために、絶縁層、底部層及び犠牲層をエッチング除去する段階と。
a)第2の犠牲層をエッチング除去する段階と;
b)第1の構造層及び第2の構造層の上に第2の活性層を堆積する段階と;
にある二つの追加の段階を含み得る。
4 上面
5 底面
6 ボディ
10 マイクロチャネル
14 平坦面
15 ウエハー
16 底部層
17 第1の犠牲層
18 絶縁層
20 スペーシング要素
21 第1の三次元ネガティブパターン
22 第1の活性層
23 第1の構造層
24 第1の三次元構造体、下部三次元構造体、スペーシング要素
25 第2の犠牲層
28 第2の三次元ネガティブパターン
29 第2の三次元構造体、第2の構造層、スペーシング要素
30 第3の犠牲層
31 マイクロキャリア
32 外側壁
32 第2の活性層
Claims (12)
- 少なくともマイクロキャリアを製造するための方法であって、
a)底部層(16)、上部第1の犠牲層(17)、及び、前記底部層(16)と上部層(17)との間に位置する絶縁層(18)を含むサンドイッチ構造を有するウエハー(15)を提供する段階と;
b)第1の三次元ネガティブパターン(21)を画定する第1のマスクを形成するために第1の犠牲層(17)を構造化する段階と;
c)第1の三次元ネガティブパターン(21)に相補的な第1の三次元構造体を形成するために、第1の犠牲層(17)の上に第1の構造層(23)を堆積する段階と;
d)第1の構造層(23)の上面の上に第2の犠牲層(25)を堆積する段階と;
e)第1の構造層(23)の上面の上に第2の三次元ネガティブパターン(28)を画定する第2のマスクを規定するために第2の犠牲層(25)を構造化する段階と;
f)第1の構造層の上面の上に第2の三次元構造体を形成するために、第2の三次元ネガティブパターン(28)において第2の構造層(29)を堆積する段階と;
g)マイクロキャリア(31)のボディの外側壁(32)を画定するために絶縁層まで第1の構造層(23)及び第2の構造層(29)を上からエッチング除去する段階であって、各ボディが少なくとも第1の下部三次元構造体(24)及び第2の上部三次元構造体(29)を含む段階と;
h)マイクロキャリアを解放するために、絶縁層(18)、底部層(16)及び犠牲層をエッチング除去する段階と;
を含む方法。 - 第1の三次元構造体及び/又は第2の三次元構造体は、その上に第1の三次元構造体及び/又は第2の三次元構造体が形成されるボディの対応する表面から突き出る少なくとも一つのスペーシング要素(24、29)を含む、請求項1に記載の方法。
- 段階cの前に、第1の犠牲層の上に、及び第1の三次元ネガティブパターン(21)の上へ第1の活性層(22)を堆積する段階をさらに含む、請求項1又は2に記載の方法。
- 段階gの前に、
a)第2の犠牲層(25)をエッチング除去する段階と;
b)第1の構造層及び第2の構造層の上に第2の活性層(32)を堆積する段階と;
にある段階をさらに含む、請求項1から3の何れか一項に記載の方法。 - 第1の活性層(22)又は第2の活性層(32)の内の少なくとも一つが、光学特性又は磁気特性を有する材料、多結晶シリコン及び/又はポリテトラフルオロエチレン、又は高屈折率を有する金属層を含む、請求項3又は4に記載の方法。
- 第1の活性層(22)及び/又は第2の活性層(32)が、酸化物若しくは窒化物、又は金属層、例えば二酸化ケイ素、又は金属層を含む、請求項5に記載の方法。
- 各マイクロキャリア(31)の第1の三次元構造体(24)及び第2の三次元構造体(29)の内の少なくとも一つが、少なくとも回折格子を含む、請求項1から6の何れか一項に記載の方法。
- 段階dの前に、平坦な上面を形成するために、第1の構造層(23)の上面を研磨することにある段階をさらに含む、請求項1から7の何れか一項に記載の方法。
- 絶縁層(18)及び第1の犠牲層(17)が、窒化ケイ素を含む単層等の単層を形成する、請求項1から8の何れか一項に記載の方法。
- 犠牲層(17、25)の内の少なくとも一つが、窒化ケイ素若しくはフォトレジスト材料で作製される、又は、窒化ケイ素若しくはフォトレジスト材料を含む、請求項1から9の何れか一項に記載の方法。
- 第1の構造層(23)及び第2の構造層(29)が、シリコン、好ましくはアモルファスシリコン又は多結晶シリコンを含む、請求項1から10の何れか一項に記載の方法。
- 請求項1から11の何れか一項に記載の方法によって得られるマイクロキャリア(31)であって、マイクロキャリアが上面(4)及び底面(5)を有するボディ(6)を含み、表面(4、5)の各々が三次元構造体(24、29)を含む、マイクロキャリア(31)。
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Application Number | Priority Date | Filing Date | Title |
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EP12177717.1 | 2012-07-24 | ||
EP12177717.1A EP2690058A1 (en) | 2012-07-24 | 2012-07-24 | Method for producing microcarriers and for performing biological assays |
PCT/EP2013/065544 WO2014016309A1 (en) | 2012-07-24 | 2013-07-23 | Method for producing microcarriers and for performing biological assays |
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JP2015530930A true JP2015530930A (ja) | 2015-10-29 |
JP6208757B2 JP6208757B2 (ja) | 2017-10-04 |
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JP2015523534A Expired - Fee Related JP6208757B2 (ja) | 2012-07-24 | 2013-07-23 | マイクロキャリアの製造方法、及び生物学的分析の実施方法 |
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Country | Link |
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US (1) | US9400275B2 (ja) |
EP (2) | EP2690058A1 (ja) |
JP (1) | JP6208757B2 (ja) |
CN (1) | CN104640804B (ja) |
WO (1) | WO2014016309A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020515110A (ja) * | 2017-01-11 | 2020-05-21 | クアルコム,インコーポレイテッド | ワイヤレス通信用の信号スクランブリングシーケンス技法 |
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JP2002542484A (ja) * | 1999-04-16 | 2002-12-10 | テイボテク・エヌ・ブイ | マイクロキャリアのコード化 |
US20050244955A1 (en) * | 2004-04-21 | 2005-11-03 | The Regents Of The University Of California | Automated, programmable, high throughput, multiplexed assay system for cellular and biological assays |
JP2005536725A (ja) * | 2002-08-20 | 2005-12-02 | シヴェラ コーポレイション | マルチプレックス実験用の回折格子ベースのコード化マイクロパーティクル |
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WO2012106827A1 (en) * | 2011-02-07 | 2012-08-16 | Biocartis Sa | Improved encoded macrocarriers, assay system using them and method for performing an assay |
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EP2690059A1 (en) * | 2012-07-24 | 2014-01-29 | Biocartis SA | Method for producing microcarriers |
EP2690057A1 (en) * | 2012-07-24 | 2014-01-29 | Biocartis SA | Method for producing structured microcarriers |
US9618520B2 (en) * | 2013-04-25 | 2017-04-11 | Vladislav B. Bergo | Microarray compositions and methods of their use |
-
2012
- 2012-07-24 EP EP12177717.1A patent/EP2690058A1/en not_active Withdrawn
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- 2013-07-23 CN CN201380049044.7A patent/CN104640804B/zh not_active Expired - Fee Related
- 2013-07-23 JP JP2015523534A patent/JP6208757B2/ja not_active Expired - Fee Related
- 2013-07-23 US US14/414,905 patent/US9400275B2/en active Active
- 2013-07-23 EP EP13739723.8A patent/EP2877425B1/en not_active Not-in-force
- 2013-07-23 WO PCT/EP2013/065544 patent/WO2014016309A1/en active Application Filing
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JP2002542484A (ja) * | 1999-04-16 | 2002-12-10 | テイボテク・エヌ・ブイ | マイクロキャリアのコード化 |
US20010041369A1 (en) * | 2000-05-12 | 2001-11-15 | Genemaster Biotechnology Corp. | Method for producing micro-carrier and test method by using said micro-carrier |
JP2005536725A (ja) * | 2002-08-20 | 2005-12-02 | シヴェラ コーポレイション | マルチプレックス実験用の回折格子ベースのコード化マイクロパーティクル |
US20050244955A1 (en) * | 2004-04-21 | 2005-11-03 | The Regents Of The University Of California | Automated, programmable, high throughput, multiplexed assay system for cellular and biological assays |
JP2012513593A (ja) * | 2008-12-23 | 2012-06-14 | ビオカルティ ソシエテ アノニム | アッセイ装置および生物学的アッセイを行う方法 |
WO2011044708A1 (en) * | 2009-10-14 | 2011-04-21 | Biocartis Sa | Method for producing microparticles |
JP2013507621A (ja) * | 2009-10-14 | 2013-03-04 | ビオカルティ ソシエテ アノニム | 微小粒子の製造方法 |
WO2012106827A1 (en) * | 2011-02-07 | 2012-08-16 | Biocartis Sa | Improved encoded macrocarriers, assay system using them and method for performing an assay |
JP2014504733A (ja) * | 2011-02-07 | 2014-02-24 | バイオカーティス ソシエテ アノニム | 改良コード化マイクロキャリア、それらを用いるアッセイシステム、およびアッセイの実施方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020515110A (ja) * | 2017-01-11 | 2020-05-21 | クアルコム,インコーポレイテッド | ワイヤレス通信用の信号スクランブリングシーケンス技法 |
US11303481B2 (en) | 2017-01-11 | 2022-04-12 | Qualcomm Incorporated | Signal scrambling sequence techniques for wireless communications |
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Publication number | Publication date |
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CN104640804A (zh) | 2015-05-20 |
EP2877425B1 (en) | 2016-09-28 |
JP6208757B2 (ja) | 2017-10-04 |
EP2690058A1 (en) | 2014-01-29 |
WO2014016309A1 (en) | 2014-01-30 |
US9400275B2 (en) | 2016-07-26 |
CN104640804B (zh) | 2016-10-12 |
EP2877425A1 (en) | 2015-06-03 |
US20150153333A1 (en) | 2015-06-04 |
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