JP2015523297A - 感光性耐熱材料、その製造方法及びその使用方法 - Google Patents
感光性耐熱材料、その製造方法及びその使用方法 Download PDFInfo
- Publication number
- JP2015523297A JP2015523297A JP2015506280A JP2015506280A JP2015523297A JP 2015523297 A JP2015523297 A JP 2015523297A JP 2015506280 A JP2015506280 A JP 2015506280A JP 2015506280 A JP2015506280 A JP 2015506280A JP 2015523297 A JP2015523297 A JP 2015523297A
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- JP
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- ato
- ito
- graphene
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- 238000000034 method Methods 0.000 title claims description 4
- 239000003779 heat-resistant material Substances 0.000 title description 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract description 58
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 37
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000011366 tin-based material Substances 0.000 claims abstract description 10
- 229910052738 indium Inorganic materials 0.000 claims abstract description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims description 29
- 239000002105 nanoparticle Substances 0.000 claims description 21
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 10
- 239000002082 metal nanoparticle Substances 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000976 ink Substances 0.000 description 19
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000011819 refractory material Substances 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- ULPMRIXXHGUZFA-UHFFFAOYSA-N (R)-4-Methyl-3-hexanone Natural products CCC(C)C(=O)CC ULPMRIXXHGUZFA-UHFFFAOYSA-N 0.000 description 1
- PFCHFHIRKBAQGU-UHFFFAOYSA-N 3-hexanone Chemical compound CCCC(=O)CC PFCHFHIRKBAQGU-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- AQCDIIAORKRFCD-UHFFFAOYSA-N cadmium selenide Chemical compound [Cd]=[Se] AQCDIIAORKRFCD-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 229910052981 lead sulfide Inorganic materials 0.000 description 1
- 229940056932 lead sulfide Drugs 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G19/00—Compounds of tin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
- H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G19/00—Compounds of tin
- C01G19/02—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/06533—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/008—Thermistors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/32—Thermal properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/60—Optical properties, e.g. expressed in CIELAB-values
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Thermistors And Varistors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1253653 | 2012-04-20 | ||
FR1253653A FR2989677B1 (fr) | 2012-04-20 | 2012-04-20 | Materiau photosensible et thermoresistant, procede de preparation et utilisation |
PCT/FR2013/050713 WO2013156705A1 (fr) | 2012-04-20 | 2013-03-29 | Materiau photosensible et thermoresistant, procede de preparation et utilisation |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2015523297A true JP2015523297A (ja) | 2015-08-13 |
Family
ID=48237109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015506280A Pending JP2015523297A (ja) | 2012-04-20 | 2013-03-29 | 感光性耐熱材料、その製造方法及びその使用方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10008619B2 (fr) |
EP (1) | EP2838849B1 (fr) |
JP (1) | JP2015523297A (fr) |
KR (1) | KR20150010703A (fr) |
FR (1) | FR2989677B1 (fr) |
WO (1) | WO2013156705A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019128176A (ja) * | 2018-01-22 | 2019-08-01 | 公立大学法人大阪府立大学 | 温度センサ及び温度センサの製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103741094A (zh) * | 2014-01-22 | 2014-04-23 | 武汉理工大学 | 石墨烯复合导电氧化物靶材及其透明导电薄膜的制备方法 |
CN108323170B (zh) * | 2017-11-03 | 2020-09-22 | 江苏时瑞电子科技有限公司 | 一种用于热敏电阻的复合膜的制备方法 |
CN108863293A (zh) * | 2018-06-17 | 2018-11-23 | 赵娟 | 硫硒锌化合物光敏电阻材料的制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011076578A (ja) * | 2009-10-01 | 2011-04-14 | Samsung Electro-Mechanics Co Ltd | タッチスクリーンの入力装置及びその製造方法 |
JP6125611B2 (ja) * | 2012-04-20 | 2017-05-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 感光性触覚センサ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3154645B2 (ja) * | 1995-01-23 | 2001-04-09 | セントラル硝子株式会社 | 自動車用合せガラス |
US6351068B2 (en) * | 1995-12-20 | 2002-02-26 | Mitsui Chemicals, Inc. | Transparent conductive laminate and electroluminescence light-emitting element using same |
JP2003339540A (ja) * | 2002-05-30 | 2003-12-02 | Thermos Kk | 電気加熱保温容器 |
CN101192257A (zh) * | 2006-11-20 | 2008-06-04 | 鸿富锦精密工业(深圳)有限公司 | 电子装置及该电子装置的开启方法 |
KR101119913B1 (ko) * | 2009-10-30 | 2012-03-05 | 삼성전자주식회사 | 그래핀 박막을 포함하는 전자 소자 및 그 제조 방법 |
KR101167969B1 (ko) * | 2010-04-12 | 2012-07-23 | 한국생산기술연구원 | 투명열차단 기능을 갖는 나노입자 조성물 및 이를 이용한 투명열차단 기능을 갖는 열저항필름의 제조방법 |
JP5674594B2 (ja) * | 2010-08-27 | 2015-02-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の駆動方法 |
US8796677B2 (en) * | 2011-12-06 | 2014-08-05 | Nutech Ventures | Photovoltaic device |
-
2012
- 2012-04-20 FR FR1253653A patent/FR2989677B1/fr not_active Expired - Fee Related
-
2013
- 2013-03-29 US US14/388,504 patent/US10008619B2/en active Active
- 2013-03-29 EP EP13719959.2A patent/EP2838849B1/fr active Active
- 2013-03-29 KR KR1020147026614A patent/KR20150010703A/ko not_active Application Discontinuation
- 2013-03-29 JP JP2015506280A patent/JP2015523297A/ja active Pending
- 2013-03-29 WO PCT/FR2013/050713 patent/WO2013156705A1/fr active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011076578A (ja) * | 2009-10-01 | 2011-04-14 | Samsung Electro-Mechanics Co Ltd | タッチスクリーンの入力装置及びその製造方法 |
JP6125611B2 (ja) * | 2012-04-20 | 2017-05-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 感光性触覚センサ |
Non-Patent Citations (1)
Title |
---|
SEO TAE HOON: "GRAPHENE NETWORK ON INDIUM TIN OXIDE NANODOT NODES 以下省略", APPLIED PHYSICS LETTERS, vol. V98 N25, JPN5015005588, 24 June 2011 (2011-06-24), US, pages P251114-1 - 251114-3 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019128176A (ja) * | 2018-01-22 | 2019-08-01 | 公立大学法人大阪府立大学 | 温度センサ及び温度センサの製造方法 |
JP7014408B2 (ja) | 2018-01-22 | 2022-02-01 | 公立大学法人大阪 | 温度センサ |
Also Published As
Publication number | Publication date |
---|---|
US10008619B2 (en) | 2018-06-26 |
EP2838849B1 (fr) | 2020-03-25 |
WO2013156705A1 (fr) | 2013-10-24 |
FR2989677A1 (fr) | 2013-10-25 |
US20150053895A1 (en) | 2015-02-26 |
FR2989677B1 (fr) | 2015-06-19 |
EP2838849A1 (fr) | 2015-02-25 |
KR20150010703A (ko) | 2015-01-28 |
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