JP2015519607A5 - - Google Patents
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- Publication number
- JP2015519607A5 JP2015519607A5 JP2015515016A JP2015515016A JP2015519607A5 JP 2015519607 A5 JP2015519607 A5 JP 2015519607A5 JP 2015515016 A JP2015515016 A JP 2015515016A JP 2015515016 A JP2015515016 A JP 2015515016A JP 2015519607 A5 JP2015519607 A5 JP 2015519607A5
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- display device
- opening
- recess
- depression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 4
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/486,722 US9063333B2 (en) | 2012-06-01 | 2012-06-01 | Microelectromechanical device and method of manufacturing |
| US13/486,722 | 2012-06-01 | ||
| PCT/US2013/039652 WO2013180903A1 (en) | 2012-06-01 | 2013-05-06 | Display apparatus comprising micro-electromechanical light modulator including a shutter |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015519607A JP2015519607A (ja) | 2015-07-09 |
| JP2015519607A5 true JP2015519607A5 (cg-RX-API-DMAC7.html) | 2016-06-02 |
| JP6246798B2 JP6246798B2 (ja) | 2017-12-13 |
Family
ID=48534483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015515016A Expired - Fee Related JP6246798B2 (ja) | 2012-06-01 | 2013-05-06 | マイクロ電気機械デバイスおよび製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9063333B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2856238A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6246798B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20150015539A (cg-RX-API-DMAC7.html) |
| CN (1) | CN104350410B (cg-RX-API-DMAC7.html) |
| TW (1) | TWI566223B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013180903A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140225904A1 (en) * | 2013-02-13 | 2014-08-14 | Pixtronix, Inc. | Shutter assemblies fabricated on multi-height molds |
| US20150279282A1 (en) * | 2014-03-28 | 2015-10-01 | Pixtronix, Inc. | Distributed electrostatic actuator for mems devices |
| CN105700226A (zh) * | 2016-04-25 | 2016-06-22 | 京东方科技集团股份有限公司 | 视角控制机构、导光板、背光模组、阵列基板及显示面板 |
| CN105700243A (zh) * | 2016-04-29 | 2016-06-22 | 京东方科技集团股份有限公司 | 一种显示面板以及显示装置 |
| CN105895023B (zh) * | 2016-06-03 | 2019-03-15 | 深圳市华星光电技术有限公司 | 微机电光阀、显示屏和显示装置 |
| CN107577043B (zh) * | 2016-07-04 | 2021-10-08 | 爱德华·帕克奇亚恩 | 用于显示器的mems光调制器 |
| JP7015104B2 (ja) * | 2016-07-04 | 2022-02-15 | エドワード・パクチャン | Ｍｅｍｓディスプレイ |
| JP6953116B2 (ja) * | 2016-07-04 | 2021-10-27 | エドワード・パクチャン | Ｍｅｍｓディスプレイ |
| KR102712568B1 (ko) * | 2016-07-04 | 2024-09-30 | 에드워드 파크얀 | 디스플레이용 mems 광 변조기 |
| KR102590788B1 (ko) * | 2016-07-04 | 2023-10-17 | 에드워드 파크얀 | Mems 디스플레이 |
| CN115567777B (zh) * | 2022-09-30 | 2023-08-29 | 杭州海康微影传感科技有限公司 | 微机电挡片及其制备方法、图像传感器组件及其制备方法、图像传感器及其制作方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1190687C (zh) * | 2002-02-07 | 2005-02-23 | 台湾积体电路制造股份有限公司 | 具有阻隔构件的反射式液晶光闸 |
| US7417782B2 (en) * | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
| JP2006071949A (ja) * | 2004-09-01 | 2006-03-16 | Fuji Photo Film Co Ltd | レンズ付きフイルムユニット |
| CN100470305C (zh) * | 2004-09-27 | 2009-03-18 | Idc公司 | 用结构加强的背板保护微机电系统阵列的电子装置及制法 |
| CN1755495A (zh) * | 2004-09-27 | 2006-04-05 | Idc公司 | 制造mems系统的预结构的方法 |
| ATE414971T1 (de) * | 2005-02-23 | 2008-12-15 | Pixtronix Inc | Licht-modulator und verfahren zu seiner herstellung |
| US7405852B2 (en) * | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8526096B2 (en) * | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| EP2074464A2 (en) | 2007-01-19 | 2009-07-01 | Pixtronix Inc. | Mems display apparatus |
| CN201066421Y (zh) * | 2007-07-05 | 2008-05-28 | 比亚迪股份有限公司 | 可防止漏光的背光模组及液晶显示器 |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| KR20120129256A (ko) * | 2011-05-19 | 2012-11-28 | 삼성디스플레이 주식회사 | 표시 기판, 이의 제조 방법 및 이를 포함하는 표시 패널 |
| JP5856759B2 (ja) * | 2011-06-03 | 2016-02-10 | ピクストロニクス，インコーポレイテッド | 表示装置 |
| US9809445B2 (en) * | 2011-08-26 | 2017-11-07 | Qualcomm Incorporated | Electromechanical system structures with ribs having gaps |
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2012
- 2012-06-01 US US13/486,722 patent/US9063333B2/en not_active Expired - Fee Related
-
2013
- 2013-05-06 WO PCT/US2013/039652 patent/WO2013180903A1/en not_active Ceased
- 2013-05-06 JP JP2015515016A patent/JP6246798B2/ja not_active Expired - Fee Related
- 2013-05-06 EP EP13725508.9A patent/EP2856238A1/en not_active Withdrawn
- 2013-05-06 CN CN201380029042.1A patent/CN104350410B/zh not_active Expired - Fee Related
- 2013-05-06 KR KR1020147037040A patent/KR20150015539A/ko not_active Ceased
- 2013-05-14 TW TW102117067A patent/TWI566223B/zh not_active IP Right Cessation