JP2015516357A5 - - Google Patents
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- Publication number
- JP2015516357A5 JP2015516357A5 JP2015501729A JP2015501729A JP2015516357A5 JP 2015516357 A5 JP2015516357 A5 JP 2015516357A5 JP 2015501729 A JP2015501729 A JP 2015501729A JP 2015501729 A JP2015501729 A JP 2015501729A JP 2015516357 A5 JP2015516357 A5 JP 2015516357A5
- Authority
- JP
- Japan
- Prior art keywords
- graphene sheet
- activated gas
- gas stream
- adjusting
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000004913 activation Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 20
- 229910021389 graphene Inorganic materials 0.000 claims 20
- 210000002381 Plasma Anatomy 0.000 claims 6
- 239000002131 composite material Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 229920000307 polymer substrate Polymers 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
前述の方法の更に他の実施の形態は、前記活性化ガスとして、酸素、窒素、または、それらの組合せ、のうちの１つを選択すると共に、前記活性化ガス流の中に３％以下の活性ガスを利用する。
Claims (15)
- ガスの流れを大気圧プラズマに曝し、前記大気圧プラズマの下流に当該大気圧プラズマから分離された活性化ガス流を生成する工程と、
前記大気圧プラズマから分離された前記活性化ガス流をグラフェンシートに向けて方向付ける工程と、
前記活性化ガス流で前記グラフェンシートを穿孔する工程と、
を備え、
前記ガスの流れは、ある濃度の活性化ガスを有し、
前記活性化ガスは、酸素、窒素、またはそれらの組合せ、の１つから選択される
ことを特徴とするグラフェンを穿孔するための方法。 - 前記グラフェンシート内に所望の開口寸法を得るために当該グラフェンシートへの前記活性化ガス流の適用を制御する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記穿孔工程に先立ち、前記グラフェンシートと金属基板との複合材シートを形成する工程
を更に備えたことを特徴とする請求項２に記載の方法。 - 前記穿孔工程の後に、前記グラフェンシートと高分子基板との複合材シートを形成する工程を更に備えたことを特徴とする請求項２に記載の方法。
- ５ｎｍ未満の直径の所望の開口寸法を得る工程
を更に備えたことを特徴とする請求項１に記載の方法。 - １０ｎｍ未満の直径の所望の開口寸法を得る工程
を更に備えたことを特徴とする請求項１に記載の方法。 - １．５ｎｍ未満の直径の所望の開口寸法を得る工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 約０．５ｎｍから約１．５ｎｍに及ぶ大きさの所望の開口寸法を得る工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 所望の範囲の開口寸法を得るために、前記活性化ガス流が前記グラフェンシートに適用される時間を調整する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記グラフェンシート内に所望の範囲の開口寸法を得るために、前記活性化ガス流と前記グラフェンシートとの間の隔離距離を調整する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記グラフェンシート内に所望の開口寸法を得るために、前記活性化ガス流と前記グラフェンシートとの間の距離を調整する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記グラフェンシート内に所望の開口寸法を得るために、前記グラフェンシート上における前記活性化ガス流の接触滞留時間を調整する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記グラフェンシート内に所望の開口寸法を得るために、前記活性化ガス流に適用されるプラズマの電力量を調整する工程
を更に備えたことを特徴とする請求項１に記載の方法。 - 前記ガスの流れの中に３％以下の酸素、窒素、またはそれらの組合せを利用する工程と、
を更に備えたことを特徴とする請求項１に記載の方法。 - 以下のうちの少なくとも１つ：
前記グラフェンシートに前記活性化ガス流が適用される時間、
前記活性化ガス流と前記グラフェンシートとの間の距離、
前記グラフェンシート上における前記活性化ガス流の接触滞留時間、及び、
前記活性化ガス流に適用されるプラズマの電力量、
を調整することによって前記グラフェンシート内に所望の開口寸法を得る工程
を更に備えたことを特徴とする請求項１に記載の方法。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261613938P | 2012-03-21 | 2012-03-21 | |
| US61/613,938 | 2012-03-21 | ||
| PCT/US2013/030344 WO2013142133A1 (en) | 2012-03-21 | 2013-03-12 | Methods for perforating graphene using an activated gas stream and perforated graphene produced therefrom |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015516357A JP2015516357A (ja) | 2015-06-11 |
| JP2015516357A5 true JP2015516357A5 (ja) | 2017-04-13 |
| JP6246785B2 JP6246785B2 (ja) | 2017-12-13 |
Family
ID=48040413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015501729A Expired - Fee Related JP6246785B2 (ja) | 2012-03-21 | 2013-03-12 | 活性化ガス流を用いてグラフェンを穿孔するための方法 |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US9567224B2 (ja) |
| EP (1) | EP2828196A1 (ja) |
| JP (1) | JP6246785B2 (ja) |
| KR (1) | KR20140146131A (ja) |
| CN (1) | CN104245577A (ja) |
| AU (1) | AU2013235643B2 (ja) |
| CA (1) | CA2865634A1 (ja) |
| IL (1) | IL234684A0 (ja) |
| IN (1) | IN2014DN07732A (ja) |
| SG (1) | SG11201405346RA (ja) |
| WO (1) | WO2013142133A1 (ja) |
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-
2013
- 2013-03-12 US US13/795,276 patent/US9567224B2/en not_active Expired - Fee Related
- 2013-03-12 JP JP2015501729A patent/JP6246785B2/ja not_active Expired - Fee Related
- 2013-03-12 EP EP13713275.9A patent/EP2828196A1/en not_active Withdrawn
- 2013-03-12 WO PCT/US2013/030344 patent/WO2013142133A1/en active Application Filing
- 2013-03-12 CA CA2865634A patent/CA2865634A1/en not_active Abandoned
- 2013-03-12 CN CN201380013988.9A patent/CN104245577A/zh active Pending
- 2013-03-12 IN IN7732DEN2014 patent/IN2014DN07732A/en unknown
- 2013-03-12 SG SG11201405346RA patent/SG11201405346RA/en unknown
- 2013-03-12 AU AU2013235643A patent/AU2013235643B2/en not_active Ceased
- 2013-03-12 KR KR1020147029287A patent/KR20140146131A/ko not_active Application Discontinuation
-
2014
- 2014-09-16 IL IL234684A patent/IL234684A0/en unknown
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