JP2015508234A5 - - Google Patents
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- Publication number
- JP2015508234A5 JP2015508234A5 JP2014556596A JP2014556596A JP2015508234A5 JP 2015508234 A5 JP2015508234 A5 JP 2015508234A5 JP 2014556596 A JP2014556596 A JP 2014556596A JP 2014556596 A JP2014556596 A JP 2014556596A JP 2015508234 A5 JP2015508234 A5 JP 2015508234A5
- Authority
- JP
- Japan
- Prior art keywords
- flake
- thickness
- lamina
- donor body
- via hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000003776 cleavage reaction Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000007017 scission Effects 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261596696P | 2012-02-08 | 2012-02-08 | |
| US61/596,696 | 2012-02-08 | ||
| US13/490,460 | 2012-06-07 | ||
| US13/490,460 US8629061B2 (en) | 2012-02-08 | 2012-06-07 | Method for three-dimensional packaging of electronic devices |
| PCT/US2013/024685 WO2013119514A1 (en) | 2012-02-08 | 2013-02-05 | Method for three-dimensional packaging of electronic devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015508234A JP2015508234A (ja) | 2015-03-16 |
| JP2015508234A5 true JP2015508234A5 (enExample) | 2016-03-10 |
Family
ID=48903255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014556596A Pending JP2015508234A (ja) | 2012-02-08 | 2013-02-05 | 電子デバイスの三次元実装のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8629061B2 (enExample) |
| EP (1) | EP2812918A4 (enExample) |
| JP (1) | JP2015508234A (enExample) |
| KR (1) | KR20140123575A (enExample) |
| TW (1) | TW201336041A (enExample) |
| WO (1) | WO2013119514A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9576868B2 (en) * | 2012-07-30 | 2017-02-21 | General Electric Company | Semiconductor device and method for reduced bias temperature instability (BTI) in silicon carbide devices |
| US8916038B2 (en) * | 2013-03-13 | 2014-12-23 | Gtat Corporation | Free-standing metallic article for semiconductors |
| US8936709B2 (en) | 2013-03-13 | 2015-01-20 | Gtat Corporation | Adaptable free-standing metallic article for semiconductors |
| TWI594380B (zh) | 2015-05-21 | 2017-08-01 | 穩懋半導體股份有限公司 | 封裝結構及三維封裝結構 |
| WO2019185846A1 (en) * | 2018-03-29 | 2019-10-03 | Koninklijke Philips N.V. | X-ray radiation detector with a porous silicon interposer |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5236862A (en) | 1992-12-03 | 1993-08-17 | Motorola, Inc. | Method of forming oxide isolation |
| US6544862B1 (en) | 2000-01-14 | 2003-04-08 | Silicon Genesis Corporation | Particle distribution method and resulting structure for a layer transfer process |
| JP3904484B2 (ja) * | 2002-06-19 | 2007-04-11 | 新光電気工業株式会社 | シリコン基板のスルーホールプラギング方法 |
| JP2006351935A (ja) * | 2005-06-17 | 2006-12-28 | Shinko Electric Ind Co Ltd | 半導体チップ実装基板及びそれを用いた半導体装置 |
| US7713835B2 (en) | 2006-10-06 | 2010-05-11 | Brewer Science Inc. | Thermally decomposable spin-on bonding compositions for temporary wafer bonding |
| US20080284037A1 (en) * | 2007-05-15 | 2008-11-20 | Andry Paul S | Apparatus and Methods for Constructing Semiconductor Chip Packages with Silicon Space Transformer Carriers |
| US7825517B2 (en) | 2007-07-16 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for packaging semiconductor dies having through-silicon vias |
| US8143511B2 (en) | 2007-09-13 | 2012-03-27 | Silicon China (Hk) Limited | Texture process and structure for manufacture of composite photovoltaic device substrates |
| US8338209B2 (en) | 2008-08-10 | 2012-12-25 | Twin Creeks Technologies, Inc. | Photovoltaic cell comprising a thin lamina having a rear junction and method of making |
| US8097525B2 (en) | 2008-08-29 | 2012-01-17 | International Business Machines Corporation | Vertical through-silicon via for a semiconductor structure |
| GB0817831D0 (en) | 2008-09-30 | 2008-11-05 | Cambridge Silicon Radio Ltd | Improved packaging technology |
| US8049327B2 (en) | 2009-01-05 | 2011-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Through-silicon via with scalloped sidewalls |
| US7964431B2 (en) | 2009-03-19 | 2011-06-21 | Twin Creeks Technologies, Inc. | Method to make electrical contact to a bonded face of a photovoltaic cell |
| US8395191B2 (en) * | 2009-10-12 | 2013-03-12 | Monolithic 3D Inc. | Semiconductor device and structure |
| KR101604607B1 (ko) | 2009-10-26 | 2016-03-18 | 삼성전자주식회사 | 반도체 장치 및 반도체 장치의 제조 방법 |
| US9099526B2 (en) | 2010-02-16 | 2015-08-04 | Monolithic 3D Inc. | Integrated circuit device and structure |
| WO2012061304A1 (en) | 2010-11-02 | 2012-05-10 | Georgia Tech Research Corporation | Ultra-thin interposer assemblies with through vias |
-
2012
- 2012-06-07 US US13/490,460 patent/US8629061B2/en not_active Expired - Fee Related
-
2013
- 2013-02-05 JP JP2014556596A patent/JP2015508234A/ja active Pending
- 2013-02-05 WO PCT/US2013/024685 patent/WO2013119514A1/en not_active Ceased
- 2013-02-05 KR KR1020147025016A patent/KR20140123575A/ko not_active Withdrawn
- 2013-02-05 EP EP13746605.8A patent/EP2812918A4/en not_active Withdrawn
- 2013-02-06 TW TW102104600A patent/TW201336041A/zh unknown
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