JP2015503110A5 - - Google Patents

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Publication number
JP2015503110A5
JP2015503110A5 JP2014549117A JP2014549117A JP2015503110A5 JP 2015503110 A5 JP2015503110 A5 JP 2015503110A5 JP 2014549117 A JP2014549117 A JP 2014549117A JP 2014549117 A JP2014549117 A JP 2014549117A JP 2015503110 A5 JP2015503110 A5 JP 2015503110A5
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JP
Japan
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sample
array
focal
item
focal spot
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JP2014549117A
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English (en)
Japanese (ja)
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JP2015503110A (ja
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Priority claimed from PCT/US2012/068935 external-priority patent/WO2013096003A1/en
Publication of JP2015503110A publication Critical patent/JP2015503110A/ja
Publication of JP2015503110A5 publication Critical patent/JP2015503110A5/ja
Withdrawn legal-status Critical Current

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JP2014549117A 2011-12-20 2012-12-11 表面不均一性を測定するためのセンサ Withdrawn JP2015503110A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161578174P 2011-12-20 2011-12-20
US61/578,174 2011-12-20
PCT/US2012/068935 WO2013096003A1 (en) 2011-12-20 2012-12-11 Sensor for measuring surface non-uniformity

Publications (2)

Publication Number Publication Date
JP2015503110A JP2015503110A (ja) 2015-01-29
JP2015503110A5 true JP2015503110A5 (https=) 2015-12-10

Family

ID=48669363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014549117A Withdrawn JP2015503110A (ja) 2011-12-20 2012-12-11 表面不均一性を測定するためのセンサ

Country Status (8)

Country Link
US (1) US20140362371A1 (https=)
EP (1) EP2795250A4 (https=)
JP (1) JP2015503110A (https=)
KR (1) KR20140105593A (https=)
CN (1) CN104797906A (https=)
BR (1) BR112014014823A2 (https=)
SG (1) SG11201403446XA (https=)
WO (1) WO2013096003A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106970049B (zh) * 2017-05-15 2024-01-02 中国工程物理研究院激光聚变研究中心 透射率分布测量系统及方法
CN108007397A (zh) * 2018-01-09 2018-05-08 常州华达科捷光电仪器有限公司 一种激光测准系统
CN109870128B (zh) * 2019-03-19 2022-06-28 青岛科技大学 一种喷墨打印中微纳结构形貌实时监测光路系统
US12320632B2 (en) * 2022-02-10 2025-06-03 Sarcos Corp. High resolution optical displacement measurement

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2808359C3 (de) * 1978-02-27 1980-09-04 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Suchgerät für Löcher in Bahnen
DE3334357C2 (de) * 1983-09-22 1986-04-10 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Fehlersuchgerät für Bahnen
JPH0641923B2 (ja) * 1988-09-20 1994-06-01 株式会社東芝 表面検査装置
US5966212A (en) * 1996-07-18 1999-10-12 Pixel Systems, Inc. High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
JP2000180373A (ja) * 1998-12-15 2000-06-30 Hoya Corp 欠陥検査方法及び欠陥検査装置
US7830522B2 (en) * 2002-09-25 2010-11-09 New York University Method and apparatus for determining reflectance data of a subject
CN1247956C (zh) * 2002-12-25 2006-03-29 合肥工业大学 并行像散三维光聚焦探测方法及装置
US7292333B2 (en) * 2003-06-24 2007-11-06 Corning Incorporated Optical interrogation system and method for 2-D sensor arrays
KR100662904B1 (ko) * 2004-03-09 2007-01-02 삼성전자주식회사 편향 디스크 판별방법 및 장치
KR20070111544A (ko) * 2005-03-09 2007-11-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 미세 복제품 제조 장치 및 방법
CA2648305C (en) * 2006-04-07 2012-10-16 Amo Wavefront Sciences, Llc Geometric measurement system and method of measuring a geometric characteristic of an object
CN1971232B (zh) * 2006-12-13 2010-06-16 中国科学院光电技术研究所 具有主动式对准功能的哈特曼波前传感器及其检测方法
KR101493115B1 (ko) * 2007-06-19 2015-02-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브의 위치를 나타내는 시스템 및 방법
US7777872B2 (en) * 2007-07-31 2010-08-17 Alcon Research, Ltd. Method of measuring diffractive lenses
KR20100110847A (ko) * 2007-12-28 2010-10-13 롤링 옵틱스 에이비 미세구조 제품의 제조 방법
US9977154B2 (en) * 2010-04-01 2018-05-22 3M Innovative Properties Company Precision control of web material having micro-replicated lens array
CN102226738B (zh) * 2011-03-25 2013-03-13 宁波大学 一种红外玻璃非均匀性检测方法

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