JP2015501528A - 安定した組成を有する酸窒化物キャッピング層を備えたeuvミラー、euvリソグラフィ装置、及び作動方法 - Google Patents
安定した組成を有する酸窒化物キャッピング層を備えたeuvミラー、euvリソグラフィ装置、及び作動方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000203 mixture Substances 0.000 title description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 89
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 46
- 238000000576 coating method Methods 0.000 claims abstract description 43
- 239000011248 coating agent Substances 0.000 claims abstract description 38
- 230000005855 radiation Effects 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- 229910052710 silicon Inorganic materials 0.000 claims description 36
- 239000010703 silicon Substances 0.000 claims description 36
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 32
- 239000001301 oxygen Substances 0.000 claims description 32
- 229910052760 oxygen Inorganic materials 0.000 claims description 32
- 239000001257 hydrogen Substances 0.000 claims description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims description 28
- 230000036961 partial effect Effects 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 18
- 150000001875 compounds Chemical class 0.000 claims description 11
- 238000005240 physical vapour deposition Methods 0.000 claims description 11
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- -1 made of SiNxOY Chemical class 0.000 abstract description 6
- 150000004767 nitrides Chemical class 0.000 abstract description 5
- 239000002253 acid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 135
- 239000000463 material Substances 0.000 description 27
- 230000003287 optical effect Effects 0.000 description 23
- 229910052581 Si3N4 Inorganic materials 0.000 description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- 230000008569 process Effects 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 13
- 238000002310 reflectometry Methods 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000006467 substitution reaction Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 238000000168 high power impulse magnetron sputter deposition Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 150000002829 nitrogen Chemical class 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052752 metalloid Inorganic materials 0.000 description 2
- 150000002738 metalloids Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- BEFDCLMNVWHSGT-UHFFFAOYSA-N C=CC1CCCC1 Chemical compound C=CC1CCCC1 BEFDCLMNVWHSGT-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 1
- 239000006094 Zerodur Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001687 destabilization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- CNEOGBIICRAWOH-UHFFFAOYSA-N methane;molybdenum Chemical compound C.[Mo] CNEOGBIICRAWOH-UHFFFAOYSA-N 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Abstract
Description
Claims (15)
- 基板(15)及びEUV放射線(6)を反射するコーティング(16)を備えたミラー(13)であって、
前記反射コーティング(16)は、酸窒化物からなるキャッピング層(18)を有し、前記酸窒化物NxOY中の窒素比率xは、0.4〜1.4であることを特徴とするミラー。 - 請求項1に記載のミラーにおいて、前記酸窒化物は、金属酸窒化物化合物、半金属酸窒化物化合物、又は半導体酸窒化物化合物であるミラー。
- 請求項1又は2に記載のミラーにおいて、前記キャッピング層(18)は、SiNxOYから形成されるミラー。
- 請求項3に記載のミラーにおいて、前記キャッピング層(18)は、非晶質SiNxOYから形成されるミラー。
- 請求項1〜4のいずれか1項に記載のミラーにおいて、前記キャッピング層(18)は、物理気相成長により形成されるミラー。
- 請求項1〜5のいずれか1項に記載のミラーにおいて、前記酸窒化物NxOY中の窒素比率はx>1であるミラー。
- 請求項1〜6のいずれか1項に記載のミラーにおいて、前記酸窒化物NxOY中の酸素比率はy<0.4であるミラー。
- 請求項1〜7のいずれか1項に記載のミラーにおいて、前記キャッピング層(18)は、前記反射コーティング(16)のケイ素層(17a)に施されるミラー。
- 請求項1〜8のいずれか1項に記載のミラーにおいて、前記反射コーティング(16)は、EUV波長域の作動波長λBで反射最大値を有し、前記反射コーティング(16)における前記作動波長λBでの放射線の反射時に形成される定在波の場の強度(I)の最大値(Imax)又は最小値(Imin)は、前記キャッピング層(18)の表面(18a)から0.1λB以下の距離に配置されるミラー。
- EUVリソグラフィ装置(1)であって、
該EUVリソグラフィ装置(1)の残留ガス雰囲気(19)中に配置される請求項1〜9のいずれか1項に記載の少なくとも1つのミラー(9、10、11、13、14)を備えたEUVリソグラフィ装置。 - 請求項10に記載のEUVリソグラフィ装置において、前記残留ガス雰囲気(19)は、10−2mbar〜10−6mbarの窒素分圧p(N2)を有するEUVリソグラフィ装置。
- 請求項10又は11に記載のEUVリソグラフィ装置において、前記残留ガス雰囲気(19)は、10−7mbar〜10−11mbarの酸素分圧p(p(O2))を有するEUVリソグラフィ装置。
- 請求項10〜12のいずれか1項に記載のEUVリソグラフィ装置において、前記残留ガス雰囲気(19)は、10−5mbar〜10−9mbarの水分圧p(p(HN2O))を有するEUVリソグラフィ装置。
- 請求項10〜13のいずれか1項に記載のEUVリソグラフィ装置において、前記残留ガス雰囲気(19)は、10−1mbar〜10−3mbarの水素分圧(p(H2))を有するEUVリソグラフィ装置。
- 請求項10〜14のいずれか1項に記載のEUVリソグラフィ装置を作動させる方法であって、残留ガス雰囲気(19)中のガス成分及び/又はキャッピング層(18)の表面(18a)におけるEUV放射線(6)のパワー密度を、前記キャッピング層(18)の窒素比率xが減少しないよう設定する方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161539702P | 2011-09-27 | 2011-09-27 | |
DE102011083462A DE102011083462A1 (de) | 2011-09-27 | 2011-09-27 | EUV-Spiegel mit einer Oxynitrid-Deckschicht mit stabiler Zusammensetzung |
US61/539,702 | 2011-09-27 | ||
DE102011083462.1 | 2011-09-27 | ||
PCT/EP2012/068320 WO2013045311A1 (en) | 2011-09-27 | 2012-09-18 | Euv mirror comprising an oxynitride capping layer having a stable composition, euv lithography apparatus, and operating method |
Publications (2)
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JP2015501528A true JP2015501528A (ja) | 2015-01-15 |
JP6159334B2 JP6159334B2 (ja) | 2017-07-05 |
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JP2014532316A Expired - Fee Related JP6159334B2 (ja) | 2011-09-27 | 2012-09-18 | 安定した組成を有する酸窒化物キャッピング層を備えたeuvミラー、euvリソグラフィ装置、及び作動方法 |
Country Status (6)
Country | Link |
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US (1) | US9229331B2 (ja) |
JP (1) | JP6159334B2 (ja) |
KR (1) | KR101991530B1 (ja) |
CN (1) | CN103827701B (ja) |
DE (1) | DE102011083462A1 (ja) |
WO (1) | WO2013045311A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015501527A (ja) * | 2011-09-27 | 2015-01-15 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvミラー上に酸化ケイ素から成るキャップ層を生成する方法、euvミラー及びeuvリソグラフィ装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016208987A1 (de) | 2016-05-24 | 2017-11-30 | Carl Zeiss Smt Gmbh | Optisches Element und EUV-Lithographiesystem |
DE102019219024A1 (de) * | 2019-12-06 | 2021-06-10 | Carl Zeiss Smt Gmbh | Verfahren zur Vermeidung einer Degradation eines optischen Elements, Projektionssystem, Beleuchtungssystem sowie Projektionsbelichtungsanlage |
KR20220075021A (ko) | 2020-11-26 | 2022-06-07 | 삼성전자주식회사 | 극자외선 발생 장치와 이의 제조 방법, 및 극자외선 시스템 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01139771A (ja) * | 1987-08-14 | 1989-06-01 | Applied Materials Inc | プラズマ促進化学的蒸着方法 |
US20040151988A1 (en) * | 2003-02-05 | 2004-08-05 | Silverman Peter J. | EUV mask blank defect mitigation |
JP2006519386A (ja) * | 2003-03-03 | 2006-08-24 | カール・ツァイス・エスエムティー・アーゲー | 反射性光学要素およびeuvリソグラフィー装置 |
JP2007248562A (ja) * | 2006-03-14 | 2007-09-27 | Shincron:Kk | 光学物品およびその製造方法 |
WO2008090988A1 (ja) * | 2007-01-25 | 2008-07-31 | Nikon Corporation | 光学素子、これを用いた露光装置、及びデバイス製造方法 |
JP2010503980A (ja) * | 2006-09-19 | 2010-02-04 | カール・ツァイス・エスエムティー・アーゲー | 光学装置、特にeuvリソグラフィ用投影露光装置並びに汚れの少ない反射光学素子 |
WO2010127845A1 (en) * | 2009-05-07 | 2010-11-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for the production of oxide and nitride coatings and its use |
WO2011071086A1 (ja) * | 2009-12-09 | 2011-06-16 | 旭硝子株式会社 | Euvリソグラフィ用光学部材 |
JP2013531375A (ja) * | 2010-06-23 | 2013-08-01 | カール ツァイス エスエムエス ゲーエムベーハー | Euvマスク欠陥の分析及び/又は修復の方法及び装置 |
JP2015501527A (ja) * | 2011-09-27 | 2015-01-15 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvミラー上に酸化ケイ素から成るキャップ層を生成する方法、euvミラー及びeuvリソグラフィ装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI267704B (en) | 1999-07-02 | 2006-12-01 | Asml Netherlands Bv | Capping layer for EUV optical elements |
US7026076B2 (en) * | 2003-03-03 | 2006-04-11 | Freescale Semiconductor, Inc. | Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC |
US7211810B2 (en) * | 2004-12-29 | 2007-05-01 | Asml Netherlands B.V. | Method for the protection of an optical element, lithographic apparatus, and device manufacturing method |
US7336416B2 (en) | 2005-04-27 | 2008-02-26 | Asml Netherlands B.V. | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method |
WO2009059614A1 (en) | 2007-11-06 | 2009-05-14 | Carl Zeiss Smt Ag | Method for removing a contamination layer from an optical surface, method for generating a cleaning gas, and corresponding cleaning and cleaning... |
JP5673555B2 (ja) * | 2009-12-09 | 2015-02-18 | 旭硝子株式会社 | Euvリソグラフィ用反射層付基板、euvリソグラフィ用反射型マスクブランク、euvリソグラフィ用反射型マスク、および該反射層付基板の製造方法 |
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Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01139771A (ja) * | 1987-08-14 | 1989-06-01 | Applied Materials Inc | プラズマ促進化学的蒸着方法 |
US20040151988A1 (en) * | 2003-02-05 | 2004-08-05 | Silverman Peter J. | EUV mask blank defect mitigation |
JP2006519386A (ja) * | 2003-03-03 | 2006-08-24 | カール・ツァイス・エスエムティー・アーゲー | 反射性光学要素およびeuvリソグラフィー装置 |
JP2007248562A (ja) * | 2006-03-14 | 2007-09-27 | Shincron:Kk | 光学物品およびその製造方法 |
JP2010503980A (ja) * | 2006-09-19 | 2010-02-04 | カール・ツァイス・エスエムティー・アーゲー | 光学装置、特にeuvリソグラフィ用投影露光装置並びに汚れの少ない反射光学素子 |
WO2008090988A1 (ja) * | 2007-01-25 | 2008-07-31 | Nikon Corporation | 光学素子、これを用いた露光装置、及びデバイス製造方法 |
WO2010127845A1 (en) * | 2009-05-07 | 2010-11-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for the production of oxide and nitride coatings and its use |
WO2011071086A1 (ja) * | 2009-12-09 | 2011-06-16 | 旭硝子株式会社 | Euvリソグラフィ用光学部材 |
JP2013531375A (ja) * | 2010-06-23 | 2013-08-01 | カール ツァイス エスエムエス ゲーエムベーハー | Euvマスク欠陥の分析及び/又は修復の方法及び装置 |
JP2015501527A (ja) * | 2011-09-27 | 2015-01-15 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvミラー上に酸化ケイ素から成るキャップ層を生成する方法、euvミラー及びeuvリソグラフィ装置 |
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JP2015501527A (ja) * | 2011-09-27 | 2015-01-15 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvミラー上に酸化ケイ素から成るキャップ層を生成する方法、euvミラー及びeuvリソグラフィ装置 |
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CN103827701A (zh) | 2014-05-28 |
KR101991530B1 (ko) | 2019-09-30 |
US20140211179A1 (en) | 2014-07-31 |
CN103827701B (zh) | 2018-06-29 |
DE102011083462A1 (de) | 2013-03-28 |
JP6159334B2 (ja) | 2017-07-05 |
WO2013045311A1 (en) | 2013-04-04 |
US9229331B2 (en) | 2016-01-05 |
KR20140069016A (ko) | 2014-06-09 |
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