JP2015202546A - Method for groove processing by wire saw and wire saw for groove processing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for groove processing by a wire saw by which a groove of a predetermined groove depth can be processed on a groove processing surface of a work-piece with a good accuracy, and a wire saw for groove processing.SOLUTION: Provided is a method for groove processing by a single wire type or a multi-wire type wire saw 1 for groove processing by which a wire 4 brought into contact with a groove processing surface 3 of a work-piece 2, and a groove is formed on the groove processing surface 3 by travel of the wire 4. In the method, pressing means comprising a discoid or columnar pressing roller 7 or pressing rod is relatively moved in a groove processing direction with respect to the work-piece 2, the wire 4 during traveling is pressed onto the groove processing surface 3 by the pressing means over a range of a groove formation length, and a groove depth is regulated by a pressing amount of the pressing means in a groove depth direction thereby processing a target groove on the groove processing surface 3 with a good accuracy.

Description

  The present invention relates to a method for machining a groove in a workpiece using a single wire type or multi-wire type wire saw, and a wire saw for grooving for realizing the method.

  The wire saw is generally used for cutting a workpiece such as a semiconductor ingot, but can also be used for grooving a workpiece such as a semiconductor wafer. In grooving with a wire saw, when grooving a flat surface, the wire bends during grooving, so after grooving, the groove becomes deeper at the edge of the workpiece and shallower at the center of the workpiece. It is difficult to make grooves with uniform depth. In addition, deep grooves are easy to process, but shallow grooves cannot be accurately processed because they become unstable due to the lateral vibration of the wire.

  For example, Patent Document 1 discloses that a workpiece is curved in advance according to the deflection characteristics of the wire and the wire is run along the curved surface, thereby realizing groove processing with a uniform depth. The technique cannot be applied to a workpiece that does not bend, and cannot be used for a workpiece that is easily broken even if it is bent.

  Further, Patent Document 2 discloses that a groove having a uniform depth is formed on a processed surface by pressing a magnetic wire against the processed surface of a workpiece with a magnetic force using a magnet. According to that technique, since the same magnetic force is difficult to effectively act on all the wires, a difference in the groove depth tends to appear between the edge portion and the center portion of the workpiece.

JP 2000-233357 A JP 2000-225552 A

  Accordingly, an object of the present invention is to make it possible to accurately process a groove having a predetermined depth on a groove processing surface of a workpiece by using a single wire type or multi wire type wire saw.

  Based on the above problems, the present invention provides a method of directly pressing a pressing means against the wire in the running state in the groove machining in which a wire is applied to the groove machining surface of the workpiece and the groove is formed on the groove machining surface by running of the wire. The pressing means is moved relative to the workpiece over the range of the groove forming length, and the pressing means moves in the direction of the groove depth of the pressing means. The groove depth is regulated by the amount of pressing (claim 1).

  In the grooving method using the wire saw according to the present invention, the pressing amount of the pressing means is varied according to the groove depth during grooving (Claim 2).

  According to the present invention, in the groove processing method using the wire saw, the pressing unit is configured by one or more disc-shaped and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire. Or the pressing means is constituted by one or two or more cylindrical and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire (claim 4).

  In the grooving method using the wire saw according to the present invention, the pressing means is constituted by one or more pressing rods, and the pressing rod is brought into contact with the wire (Claim 5), or the pressing means. Is composed of one or more pressing rods, and the pressing rod is brought into contact with the wire, and the traveling speed of the wire and the moving speed of the pressing rod are set equal to each other (Claim 6).

  And, in order to specifically carry out the grooving method, the present invention provides a grooving process in which a wire is applied to a grooving surface of a workpiece and a groove is formed on the grooving surface by traveling of the wire. A pressing unit that directly contacts the wire and presses the wire against the groove processing surface, a feed moving unit that moves the pressing unit over a groove forming length range, and a pressing amount of the pressing unit is regulated. Position adjusting means, and the pressing means is moved by the feed moving means over the range of the groove forming length, and the pressing amount of the pressing means in the groove depth direction is changed in the moving stroke of the pressing means. The groove depth is regulated by adjusting the position adjusting means (claim 7).

  According to the present invention, in the wire saw for grooving, the pressing amount of the pressing means is varied according to the groove depth during grooving (Claim 8).

  According to the present invention, in the wire saw for grooving, the pressing means is constituted by one or two or more disk-shaped and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire. Or the pressing means is constituted by one or two or more cylindrical and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire (claim 10). According to the present invention, in the wire saw for grooving, the pressing roller is constituted by an annular grooved roller, and is brought into rolling contact with the wire by the annular groove.

  According to the present invention, in the wire saw for grooving, the pressing means is constituted by one or more pressing rods, and the pressing rod is brought into contact with the wire (Claim 12), or the pressing means. Is composed of one or more pressing rods, and the pressing rod is brought into contact with the wire, and the traveling speed of the wire and the moving speed of the pressing rod are set equal to each other (claim 13).

  In the wire saw for grooving, the present invention provides a pair of guide plates corresponding to the groove forming length in a fixed position sandwiching the wire on the grooving surface in a facing state leaving a space for wire guidance, The wire and the pressing rod are guided in the traveling direction of the wire between the pair of guide plates (Claim 14), or a pair of shorter than the groove forming length is provided at a position corresponding to the wire on the groove processing surface. A guide plate is provided to be movable in an opposing state leaving a space for guiding the wire, and a guide roller that can move on the groove processing surface is attached to a lower portion of each guide plate, and the pair of guide plates is moved by moving the pair of guide plates. The wire and the pressing rod are guided in the traveling direction of the wire between the guide plates (Claim 15).

  According to the present invention, in the wire saw for grooving, the dimension of the pressing rod in the direction perpendicular to the wire is set smaller than the diameter of the wire. Further, according to the present invention, in the wire saw for groove processing, either a single wire type wire saw or a multi-wire type wire saw is used according to the number of grooves formed (claim 17).

  According to the groove processing method by the wire saw according to the present invention, the pressing means is pressed as a direct contact state with the running wire, and moves relative to the workpiece over the range of the groove formation length. Since a groove having a uniform groove depth can be processed over the range of the groove forming length, and the groove depth is regulated by the pressing amount of the pressing means in the groove depth direction in the movement process of the pressing means, the groove The effect of wire deflection during processing is eliminated, and groove processing with a uniform groove depth can be performed efficiently and with high accuracy (claim 1).

  According to the grooving method using the wire saw according to the present invention, the pressing amount of the pressing means can be changed during the grooving, so that grooving with a partially different groove depth is possible for the groove being processed. .

  According to the grooving method using the wire saw according to the present invention, the disk-like pressing roller presses the wire in the running state against the grooving surface of the workpiece and moves relative to the workpiece, so that even a long workpiece can be continuously moved. In addition, when the disk-shaped pressing roller moves, even if the wire traveling speed is different from the relative moving speed of the disk-shaped pressing roller with respect to the wire, there is a difference in speed between the two. Since it can be absorbed by the rotation of the disk-shaped pressing roller, the traveling speed of the wire can be arbitrarily set (claim 3). Furthermore, the groove depth is regulated by the pressing amount of the disk-shaped pressing roller in the groove depth direction, and there is no influence of wire deflection during groove processing, and the groove depth is determined by the pressing amount. Can be processed with high accuracy and high accuracy, and if two or more disk-shaped pressing rollers are provided in the groove processing direction, Therefore, the apparatus can be reduced in size.

  Further, according to the grooving method using the wire saw according to the present invention, the cylindrical pressing roller presses the wire in the running state against the grooving surface of the workpiece and moves relative to the workpiece, so that even a long workpiece is continuously moved. In addition, when the cylindrical pressing roller moves, even if the traveling speed of the wire is different from the relative moving speed of the cylindrical pressing roller with respect to the wire, the speed difference between the two is circular. Since it can be absorbed by the rotation of the columnar pressing roller, the traveling speed of the wire can be set arbitrarily (claim 4). Furthermore, since the groove depth is regulated by the pressing amount of the cylindrical pressing roller in the groove depth direction, there is no influence of wire deflection during groove processing, and the groove depth is determined by the pressing amount. In addition to enabling efficient and high-accuracy groove processing with a certain groove depth or any groove depth, the cylindrical pressing roller presses multiple wires simultaneously onto the grooved surface of the workpiece. If the processing can be performed efficiently and two or more cylindrical pressing rollers are provided in the groove processing direction, the relative movement amount of the pressing rollers is reduced, and the apparatus can be downsized. 4).

  According to the grooving method using the wire saw according to the present invention, since the pressing rod directly presses the wire in the groove depth direction, the groove depth can be accurately regulated over the range of the groove formation length (Claim 5). Further, if the traveling speed of the wire and the moving speed of the pressing rod are set to be equal, it is advantageous in that the pressing rod is not worn and the management and repair of the pressing rod are simplified (claim 6).

  According to the wire saw for grooving according to the present invention, the pressing means is pressed by the position adjusting means as being in direct contact with the running wire, and the workpiece is moved over the range of the groove forming length by the feed moving means. Therefore, a groove with a uniform groove depth can be processed over the range of the groove formation length, and the groove depth is in the groove depth direction of the pressing means in the travel of the pressing means. The amount of pressing can be easily regulated by the position adjusting means, and the feed moving means and the position adjusting means can be simply constituted by general-purpose machine elements.

  According to the wire saw for grooving according to the present invention, the position adjusting means operates during grooving, and the pressing means can change the pressing amount during grooving, so that the groove being processed has a partially different groove depth. Groove machining is possible (claim 8).

  According to the wire saw for groove processing according to the present invention, the disk-shaped pressing roller presses the wire in the running state against the groove processing surface of the workpiece and moves relatively to the workpiece, so that even a long workpiece can be continuously moved. In addition, when the disk-shaped pressing roller moves, even if the wire traveling speed is different from the relative moving speed of the disk-shaped pressing roller with respect to the wire, there is a difference in speed between the two. Since it can be absorbed by the rotation of the disk-shaped pressing roller, the traveling speed of the wire can be set arbitrarily (claim 9). Furthermore, since the groove depth is regulated by the pressing amount of the disk-shaped pressing roller in the groove depth direction, there is no influence of wire deflection at the time of grooving, and the groove depth is determined by the pressing amount. In addition to enabling efficient and highly accurate groove processing with a uniform groove depth or arbitrary groove depth, if two or more disk-shaped pressing rollers are provided in the groove processing direction, the pressing roller Therefore, the apparatus can be reduced in size.

  In addition, according to the wire saw for grooving according to the present invention, the cylindrical pressing roller presses the running wire against the grooving surface of the workpiece and moves relative to the workpiece, so that even a long workpiece can be continuously moved. In addition, when the cylindrical pressing roller moves, even if the traveling speed of the wire is different from the relative moving speed of the cylindrical pressing roller with respect to the wire, the speed difference between the two is circular. Since it can be absorbed by the rotation of the columnar pressing roller, the traveling speed of the wire can be set arbitrarily (claim 10). Furthermore, since the groove depth is regulated by the pressing amount of the cylindrical pressing roller in the groove depth direction, there is no influence of wire deflection during groove processing, and the groove depth is determined by the pressing amount. In addition to enabling efficient and high-accuracy groove processing with a certain groove depth or any groove depth, the cylindrical pressing roller presses multiple wires simultaneously onto the grooved surface of the workpiece. If the processing can be performed efficiently and two or more cylindrical pressing rollers are provided in the groove processing direction, the relative movement amount of the pressing roller becomes small, and the apparatus can be downsized. .

  According to the present invention, in the wire saw for groove processing, the annular groove of the disk-shaped pressing roller and the cylindrical pressing roller is in rolling contact with the wire, and the lateral vibration of the wire is suppressed inside the annular groove. The running of the wire is stable, and accurate groove processing is possible even with a shallow groove (claim 11).

  According to the wire saw for groove processing according to the present invention, since the pressing rod directly presses the wire in the groove depth direction, the groove depth can be accurately regulated over the range of the groove forming length (claim 12), Further, if the traveling speed of the wire and the moving speed of the pressing rod are set to be equal, it is advantageous in that the pressing rod is not worn and the management and repair of the pressing rod is simplified (claim 13).

  According to the wire saw for grooving according to the present invention, the wire and the pressing rod are guided in the traveling direction of the wire between the pair of guide plates on the grooving surface. Traveling is stable, and accurate groove processing is possible even with shallow grooves. Further, according to the wire saw for grooving according to the present invention, a long pair of guide plates are moved together with the pressing rod by the guide roller on the grooving surface at a position corresponding to the wire on the grooving surface. No plate is required, and continuous groove machining is possible even for long workpiece grooves while visually confirming the front and back of the guide plate (claim 15).

  According to the wire saw for grooving according to the present invention, the dimension of the pressing rod in the direction orthogonal to the wire is smaller than the diameter of the wire, and the pressing rod enters into the groove being processed, so that deep grooving is possible ( Claim 16). Furthermore, according to the wire saw for grooving according to the present invention, the single wire type wire saw enables one precise grooving, and the multi-wire type wire saw enables equal pitch or different pitches. Since a plurality of grooves can be efficiently processed at the same time, an appropriate wire saw can be employed in accordance with the accuracy of grooves and the processing mode.

It is a front view of the aspect which processes one groove | channel using one disk-shaped pressing roller in the wire saw for a single wire type groove | channel process which concerns on this invention. It is a front view of the principal part at the time of the groove processing start at the time of one groove processing by a disk-shaped pressing roller. It is a front view of the principal part at the time of the end of groove processing at the time of one groove processing by a disk-like pressing roller. It is an expanded sectional view of a groove formation portion at the time of processing one groove by a disk-shaped pressing roller. It is a top view of the principal part of the aspect which processes a some groove | channel using a some disc-shaped pressing roller in the wire saw for a multi-wire type groove | channel process which concerns on this invention. It is a front view of the principal part at the time of the process of the several groove | channel by a disk shaped pressing roller. It is a front view of the principal part of the aspect which processes one groove | channel using the some disk-shaped pressing roller in the wire saw for a single wire type groove | channel process which concerns on this invention. It is a top view of the principal part of the aspect which processes a some groove | channel using a some disc-shaped pressing roller in the wire saw for a multi-wire type groove | channel process which concerns on this invention. It is a top view of the principal part of the aspect which processes a several groove | channel using one cylindrical pressing roller in the wire saw for a multi-wire type groove | channel process which concerns on this invention. It is a side view of the principal part of the aspect which processes a some groove | channel using a cylindrical pressing roller. It is a front view of the principal part of the aspect which processes a some groove | channel using a cylindrical pressing roller. It is sectional drawing of the principal part of the aspect which processes a some groove | channel using a cylindrical pressing roller. It is a front view of the principal part of the aspect which processes one groove | channel using one pressing rod in the wire saw for a single wire type groove | channel process which concerns on this invention. It is an expanded sectional view of the principal part at the time of one groove | channel process start by a pressing rod. It is an expanded sectional view of the important section at the time of one groove processing by a pressing rod. It is an enlarged front view of the principal part at the time of the process of one groove | channel by the pressing rod in another aspect. It is an enlarged side view of the principal part at the time of the process of one groove | channel by the pressing rod in another aspect. It is a top view of the principal part of the aspect which processes a some groove | channel using a some pressing rod in the wire saw for a multi-wire type groove | channel process which concerns on this invention. It is a top view of the principal part of the aspect which processes one groove | channel using the several pressing rod in the wire saw for a single wire type groove | channel process which concerns on this invention. It is a top view of the principal part of the aspect which processes a some groove | channel using a some pressing rod in the wire saw for a multi-wire type groove | channel process which concerns on this invention.

  1 to 4 show a wire saw 1 for grooving for carrying out a grooving method using a wire saw according to the present invention. 1 to 4, the wire saw 1 for grooving is a single wire type wire saw, and a single wire 4 for processing is applied linearly to the grooving surface 3 of the work 2, and one direction of the wire 4 is obtained. A target groove 5 is formed on the groove processing surface 3 by traveling or reciprocating traveling.

  The workpiece 2 is a structure of a semiconductor crystal plate such as a solar cell or a liquid crystal display, for example, and the groove processing surface 3 is a flat surface such as a front surface, a back surface, or a side surface of the workpiece 2 placed at a processing position. The wire 4 is usually a fixed abrasive wire, is stretched between a plurality of grooved guide rollers 6 under a predetermined tension, and faces the groove forming position on the groove processing surface 3. Depending on the material of the workpiece 2, the wire 4 may be a free abrasive wire.

  Then, the wire saw 1 for grooving presses the wire 4 having a predetermined tension linearly when viewed in plan on the grooving surface 3 of the workpiece 2, for example, and the target is applied to the grooving surface 3 by running the wire 4. In order to form the groove 5, a pressing roller 7, a feed moving means 11 and a position adjusting means 12 for the pressing roller 7 are provided as characteristic components.

  1 to 4, the pressing roller 7 is pressing means, and is a single disk that is in rolling contact with the wire 4 in a direct contact state, specifically, in a state of circumscribing the wire 4. 4 and is configured to be in rolling contact with the wire 4 through the annular groove 7a. At the time of grooving, the pressing roller 7 uses a roller shaft 9 perpendicular to the wire 4 to press the running wire 4 against the grooving surface 3 of the workpiece 2 over the range of the groove forming length of the groove 5. The presser holder 10 is rotatably supported.

  The feed moving means 11 includes a feed screw 13 in the grooving direction, a feed nut 14 connected to the feed screw 13 by a screw pair, a feed nut in order to roll and move the pressing roller 7 over the range of the groove forming length of the groove 5. A feed motor 15 for rotating the screw 13 and a controller 16 for the feed motor 15 are configured. The feed screw 13 is rotatably supported by the frame 20 at both ends, and the feed nut 14 is not shown so as not to rotate together when the feed screw 13 rotates. It is supported by a guide bar.

  The position adjusting means 12 adjusts the position of the pressing roller 7 to bring the pressing roller 7 into rolling contact with the wire 4 and press the wire 4 against the groove processing surface 3 with the pressing roller 7, and the groove depth of the groove 5. In order to adjust the adjusting nut, the adjusting feed screw 17 that supports the holding holder 10 movably in the groove depth direction at the portion of the feed nut 14, the adjusting feed nut 18 that is connected to the adjusting feed screw 17 by a screw pair, An adjustment feed motor 19 that rotates the feed screw 17 and a controller 16 are included.

  The adjusting feed screw 17 rotates to move the pressing roller 7 together with the holding holder 10 in the groove depth direction. However, the holding holder 10 is not rotated by the rotation of the adjusting feed screw 17 and is not shown in the drawing. It is supported by a flat sliding guide or a parallel guide bar for the portion 14 so that it always faces the groove machining direction.

  In this example, the controller 16 also serves to control the rotation of the feed motor 15 and the adjustment feed motor 19, and the controller 16 controls the feed motor 15 and the adjustment feed motor 19 based on the drive data corresponding to the groove formation length and groove depth. Control the rotation direction, rotation speed and rotation amount.

  As shown in FIG. 1, when grooving, the workpiece 2 faces the wire 4 on the grooving surface 3, and is placed at a machining position different from the pressing roller 7 with the wire 4 interposed therebetween. For this reason, the wire 4 is located between the workpiece 2 and the pressing roller 7 and corresponds to the groove forming position of the groove processing surface 3 on the outer peripheral removal processing surface of the wire 4. It is in a position where it can make rolling contact with the pressing roller 7 on the back side. Prior to grooving, the pressing roller 7 is in the groove formation start position on the grooving surface 3. On the other hand, the wire 4 is in one-way traveling or reciprocating traveling under a predetermined tension for groove processing by a traveling driving device (not shown), and is supplied from the sending side to the winding side in this traveling state. Is done.

  As shown in FIG. 2, at the time of grooving, the pressing roller 7 is in direct contact with the wire 4 in the running state at the start position, and is brought into rolling contact with the wire 4 inside the annular groove 7a. Press. At this time, the wire 4 is not restricted by the annular groove 7a and does not sway, and the target groove 5 is formed on the groove machining surface 3 of the workpiece 2 as shown in FIG. The cross-sectional shape of the groove 5 is a U-shaped bottom groove with the radius of the wire 4 as the inner bottom surface. At the time of grooving, the position adjusting means 12 determines the groove depth of the groove 5 by pressing the wire 4 against the groove forming position of the groove processing surface 3 by the pressing roller 7 based on the pressing amount corresponding to the groove depth.

  Thereafter, as shown in FIG. 3, the feed movement means 11 keeps the pressing roller 7 against the wire 4 in the running state while maintaining the constant pressing amount corresponding to the groove depth of the groove 5. It is moved at a predetermined speed in the grooving direction. During this movement, the pressing roller 7 circumscribes the wire 4 and rolls in the grooving direction while allowing the wire 4 to travel. In this way, the wire 4 travels at the position pressed by the pressing roller 7, thereby removing the groove forming position on the groove processing surface 3, and a shape corresponding to the outer shape of the wire 4 and a constant groove depth. One groove 5 is formed in a straight line. Thus, if the pressing amount is constant, the groove 5 having a constant groove depth is obtained. If the pressing roller 7 has an annular groove 7a and the lateral vibration of the wire 4 is regulated by the annular groove 7a, the shallow groove 5 can be processed stably and accurately.

  At the time of forming the groove, the wire 4 is always pressed against the groove forming position of the groove processing surface 3 by the pressing roller 7 from the back side of the removal processing surface, and the workpiece 2 is removed at the groove forming position. 5 is the target groove depth without being affected by the deflection of the wire 4. As shown in FIG. 4, the groove depth is formed as a shallow groove within a range smaller than the diameter of the wire 4 in order to avoid interference between the grooved pressing roller 7 and the workpiece 2. Since the pressing roller 7 moves while rolling with respect to the wire 4 at the time of such groove processing, the moving speed of the pressing roller 7 can be arbitrarily set regardless of the traveling speed of the wire 4.

  As described above, the groove depth of the processed groove 5 is uniform within the range of the groove formation length. On the other hand, if the position adjusting means 12 changes the pressing amount of the pressing roller 7 during the groove processing, the groove depth of the groove 5 after the processing is partially increased or decreased in the same groove 5. Become. When it takes time to remove the groove 5, the moving speed of the pressing roller 7 is also temporarily set as needed, but the groove depth of the groove 5 is also regulated by the position adjusting means 12 at this time. Therefore, it will not be removed deeper than necessary.

  Next, FIG. 5 and FIG. 6 use a multi-wire-type wire saw 1 for groove processing, and a plurality of, for example, four disk-shaped pressing rollers 7 are circumscribed one by one for each wire 4 as pressing means. It is an aspect. The wire 4 is spirally wound around the grooved guide roller 6 at an equal pitch or a predetermined different pitch, and travels in one direction or reciprocates by the rotation of the grooved guide roller 6 at the time of grooving.

  The workpiece 2 is located, for example, under the upper wire 4, and the four pressing rollers 7 are located above the upper wires 4. At the time of grooving, the four pressing rollers 7 roll in the grooving direction while circumscribing the corresponding wires 4 to process the four grooves 5 on the grooving surface 3 of the workpiece 2.

  7 uses the same wire saw 1 for grooving as shown in FIGS. 1 to 4, and a plurality of, for example, six disk-shaped pressing rollers 7 are used as pressing means along one wire 4. It is the aspect which has arrange | positioned. At the time of grooving, the six pressing rollers 7 process one groove 5 on the grooving surface 3 of the workpiece 2 by rolling and moving in the grooving direction while circumscribing the wire 4. According to this aspect, the amount of movement of the pressing roller 7 can be reduced as compared with the case of the single pressing roller 7. As a result, the amount of relative movement between the workpiece 2 and the pressing roller 7 is reduced. For example, when the pressing roller 7 is fixed and the workpiece 2 is moved by the feed moving device, the workpiece mounting table is grooved. The wire saw 1 can be miniaturized.

  Next, FIG. 8 shows a mode in which a multi-wire type wire saw 1 for groove processing is used and a plurality of, for example, three disk-shaped pressing rollers 7 are circumscribed as pressing means for each wire 4 at the processing position. . The wire 4 is wound in a spiral manner at a pitch equal to or different from the grooved guide roller 6 and travels in one direction or reciprocates during the groove processing. At the time of grooving, a total of twelve pressing rollers 7 roll and move in the grooving direction while circumscribing the wire 4, thereby processing the four grooves 5 on the grooving surface 3 of the workpiece 2.

  Next, FIG. 9 to FIG. 12 show a mode in which a single cylindrical pressing roller 7 is pressed against the wire 4 by using the multi-wire type wire saw 1 for groove processing. The wires 4 are wound in a spiral manner at a pitch equal to a plurality of, for example, four grooved guide rollers 6 or a predetermined different pitch. The pressing roller 7 is, for example, a long cylindrical roller without a groove. The pressing roller 7 circumscribes the wire 4 and rolls and moves in the groove processing direction while pressing the running wire 4 against the groove processing surface 3 of the workpiece 2.

  9 to 12, a large number of grooves 5 can be formed on the groove processing surface 3, and eight grooves can be formed at once according to the illustrated example. Also in this aspect, the pressing roller 7 is not limited to the illustrated grooveless roller, and may be a grooved roller. The pressing roller 7 is not limited to one, and as illustrated by an imaginary line in FIG. And can be rolled and moved simultaneously by the same holding holder 10. If the circular groove 7a is formed in the cylindrical pressing roller 7, the lateral vibration of the wire 4 is reliably restricted, so that the shallow groove 5 can be processed stably and accurately.

  1 to 12 described above, the rolling movement of the pressing roller 7 may be a movement relative to the workpiece 2 at the processing position. Therefore, when the workpiece 2 moves along the grooving direction, the pressing roller 7 may be stopped at a fixed position. When the pressing roller 7 is stopped at a fixed position, the workpiece 2 is moved by a feed moving device of the workpiece 2 (not shown). Further, the rolling movement of the pressing roller 7 is not limited to the direction from one end to the other end of the work 2, but can be advanced from an arbitrary position, for example, from the center to one end, and can be reciprocated as necessary.

  Next, FIGS. 13 to 15 show a mode in which a pressing rod 8 is used as pressing means in place of the pressing roller 7 in the single wire type wire saw 1 for grooving. The pressing rod 8 directly contacts the wire 4 at its tip, and moves in the grooving direction with respect to the workpiece 2 while pressing the wire 4 against the grooving surface 3 of the workpiece 2 over the range of the groove forming length. . The workpiece 2 is fixed at the machining position, and the pressing rod 8 is attached to the same holding holder 10 as described above and moves in the groove machining direction.

  The holding holder 10 presses the traveling wire 4 in the groove depth direction at the distal end surface of the pressing rod 8, and although not shown, the feed moving means 11 adjusts the length of the groove formation, as in the case of FIG. The groove 5 is fed and moved in the groove machining direction over the range, and is pressed by the position adjusting means 12 in the groove depth direction to regulate the groove depth. In this aspect, the dimension of the pressing rod 8 in the direction orthogonal to the wire 4 is set slightly smaller than the diameter of the wire 4 as shown in FIGS. 14 and 15. Note that the pressing rod 8 is a round bar or a square bar, and the tip end surface thereof is in contact with the outer peripheral surface of the wire 4 and is usually formed as a part of a cylindrical surface in order to prevent lateral deflection.

  As shown in FIGS. 13 to 15, the wire saw 1 for grooving is fixed on the upper surface of the grooving surface 3 at a fixed position with a length corresponding to the groove formation length at a fixed position between which the wire 4 and the pressing rod 8 are sandwiched. A pair of guide plates 21 is provided. The pair of guide plates 21 is made of a wear-resistant material that is difficult to cut, and is fixed to a predetermined position of the workpiece 2 by a clamping operation of a clamping device or a handling robot, leaving a space for wire guidance. By guiding the wire 4 and the pressing rod 8 between them in the traveling direction of the wire 4, that is, the grooving direction, they are prevented from shaking.

  At the time of grooving, the pressing rod 8 hits the wire 4 in the running state at the tip surface thereof, and the feed movement means 11 pushes the wire 4 against the groove machining surface 3 over the range of the groove forming length, The groove depth is regulated by the pressing amount of the adjusting means 12 in the groove depth direction. When the dimension of the pressing rod 8 in the direction orthogonal to the wire 4 is set smaller than the diameter of the wire 4, the groove depth of the processed groove 5 is set to the dimension of the pressing rod 8 as shown in FIG. 15. Unrestricted and deep. In addition, the pair of fixed guide plates 21 prevents lateral deflection of the wire 4 and the pressing rod 8 during groove processing. For this reason, accurate groove processing is possible.

  The moving speed of the pressing rod 8 at the time of grooving can be set to be equal to the traveling speed of the wire 4 in one direction or reciprocating, or smaller or larger than the traveling speed of the wire 4 depending on the grooving conditions of the workpiece 2. However, preferably, in order to avoid wear of the tip surface of the pressing rod 8, there is no speed difference between the wire 4 and the pressing rod 8, that is, the moving speed and the traveling speed are set equal in the same direction. . According to the setting with no speed difference, the wire 4 does not scrape the tip end surface of the pressing rod 8 during grooving, so that wear of the tip end surface of the pressing rod 8 can be reliably prevented. Such a set state is advantageous from the viewpoint of management and repair of the pressing rod 8.

  Further, in FIGS. 16 and 17, a guide body 22 is disposed at a position corresponding to the wire 4 on the groove processing surface 3, and a pair of guide plates 21 shorter than the groove formation length is provided on the guide body 22. Are provided in a state of being opposed to each other, and a total of, for example, four guide rollers 23 that can roll and move on the upper surface of the groove processing surface 3 are attached to the lower portions of the guide plates 21 by roller shafts 24.

  The pressing rod 8 is inserted into an interlocking hole 25 provided in the guide body 22 and presses the wire 4 against the groove processing surface 3 at the distal end surface during groove processing, and together with the pair of movable guide plates 21, Move in the processing direction. In this way, the pair of guide plates 21 are interlocked with the movement of the pressing rod 8, but are moved in the machining direction of the groove 5 by the feed movement means 11 or a dedicated feed movement device (not shown) linked with the feed movement means 11. It can also be made. According to the pair of movable guide plates 21 in this aspect, the front and rear of the processing position are opened during grooving, so that the processing status can be easily confirmed visually.

  Also in the examples of FIGS. 16 and 17, the moving speed of the pressing rod 8 is equal to the traveling speed of the wire 4 or smaller than the traveling speed of the wire 4 according to the grooving condition of the workpiece 2 at the time of grooving. However, preferably, in order to avoid wear of the tip surface of the pressing rod 8, there is no speed difference between the wire 4 and the pressing rod 8, that is, the moving speed and the traveling speed in the same direction. Are set equal.

  Next, FIG. 18 uses a multi-wire type groove saw wire saw 1, a plurality of, for example, four pressing rods 8 are brought into contact with each wire 4, and the pressing rod 8 is shown in FIGS. 17 is a mode of moving together with a pair of movable guide plates 21 similar to FIG. The wire 4 is wound in a spiral manner at a pitch equal to or different from the grooved guide roller 6 and travels in one direction or reciprocates during the groove processing.

  The workpiece 2 is located, for example, under the upper wire 4, and the four pressing rods 8 are located above the upper wire 4. At the time of grooving, the four pressing rods 8 move along with the pair of guide plates 21 while abutting the corresponding wires 4 to process the four grooves 5 on the grooving surface 3 of the workpiece 2. . The pair of guide plates 21 may not be movable, but may be fixed as shown in FIGS.

  FIG. 19 shows a single wire 4 between a pair of fixed guide plates 21 similar to those of FIGS. 13, 14, and 15, using the same wire saw 1 for groove processing as in FIG. 13. A plurality, for example, four pressing rods 8 are arranged along the same. The four pressing rods 8 move while contacting the wire 4 at the time of grooving, thereby machining one groove 5 on the grooving surface 3 of the workpiece 2. According to this aspect, the amount of movement of the pressing rod 8 can be reduced as compared with the case of a single pressing rod 8.

  As a result, the amount of relative movement between the workpiece 2 and the pressing rod 8 is reduced. For example, when the pressing rod 8 is fixed and the workpiece 2 is moved, the table on which the workpiece 2 is placed can be shortened in the grooving direction. The size of the wire saw 1 can be reduced. The pair of guide plates 21 are not fixed and may be movable as illustrated in FIGS. 16 and 17.

  20 uses a multi-wire type wire saw 1 for groove processing, and a plurality of, for example, three pressing rods 8 are brought into contact with each wire 4 at the processing position, and are the same as in FIGS. 13, 14 and 15. In this mode, the pressing rod 8 is moved along a pair of fixed guide plates 21. The workpiece 2 is located, for example, under the upper wire 4, and three pressing rods 8 for each wire 4 are located above the upper wire 4. At the time of grooving, at each machining position, the three pressing rods 8 for each wire 4 are guided by the pair of guide plates 21 while abutting against the wire 4 and moved in the grooving direction, thereby moving the workpiece 2. The four grooves 5 are processed on the groove processing surface 3. The pair of guide plates 21 are not fixed and may be movable as illustrated in FIGS. 16 and 17.

  13 to 20 also, the movement of the pressing rod 8 is a relative movement with respect to the workpiece 2 at the machining position. Therefore, the pressing rod 8 may be fixedly disposed at a predetermined position. In that case, the workpiece 2 is moved in the grooving direction by the feed movement means 11 or other feed movement devices.

  In all the above embodiments, the position adjusting means 12 in the groove depth direction is a mechanical means that simply regulates the groove depth instead of using the adjusting feed screw 17, the adjusting feed nut 18, the adjusting feed motor 19, and the like. The position of the pressing roller 7 and the pressing rod 8, that is, the groove depth, is adjusted during the groove processing by adjusting the tightening position of the adjusting set screw with respect to the long hole. The groove depth is changed during grooving by making it constant or comprising a linear cam in the grooving direction and a cam follower in contact with the linear cam surface, and transmitting the movement of the cam follower to the holding holder 10. It can also be done.

  The groove processing surface 3 is usually a flat surface, but by controlling the position of the pressing roller 7 along the curved surface by the position adjusting means 12, processing with a uniform groove depth is possible even on a curved surface. .

  In the present invention, a semiconductor crystal plate or a liquid crystal display is taken as an example of the workpiece 5, but the present invention is not limited thereto, and is also used for groove processing of materials such as porcelain, glass, metal plates, carbon fiber reinforced resin materials, and glass fiber reinforced resin materials. Applicable.

DESCRIPTION OF SYMBOLS 1 Wire saw 2 for groove processing 2 Work 3 Groove processing surface 4 Wire 5 Groove 6 Groove guide roller 7 Pressing roller 7a Annular groove 8 Pressing rod 9 Roller shaft 10 Holding holder 11 Feed moving means 12 Position adjusting means 13 Feed screw 14 Feed nut 15 Feed motor 16 Controller 17 Adjustment feed screw 18 Adjustment feed nut 19 Adjustment feed motor 20 Frame 21 Guide plate 22 Guide body 23 Guide roller 24 Roller shaft 25 Linkage hole

Claims (17)

  In the groove processing in which a wire is applied to the groove processing surface of the workpiece and the groove is formed in the groove processing surface by traveling of the wire, the pressing means is pressed against the wire in the traveling state as a direct contact state, On the other hand, the pressing means is relatively moved over the range of the groove forming length, and the groove depth is regulated by the pressing amount of the pressing means in the groove depth direction in the moving stroke of the pressing means. A groove processing method using a featured wire saw.   2. The groove processing method using a wire saw according to claim 1, wherein the pressing amount of the pressing means is varied according to the groove depth during the groove processing.   The wire saw according to claim 1 or 2, wherein the pressing means is constituted by one or more disc-shaped and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire. Groove machining method.   3. The wire saw according to claim 1, wherein the pressing unit includes one or more cylindrical and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire. Grooving method.   The groove processing method using a wire saw according to claim 1 or 2, wherein the pressing means includes one or more pressing rods, and the pressing rod is brought into contact with the wire.   The pressing means is composed of one or more pressing rods, the pressing rod is brought into contact with the wire, and the traveling speed of the wire and the moving speed of the pressing rod are set equal. A groove processing method using a wire saw according to claim 1 or 2.   In grooving in which a wire is applied to the grooving surface of the workpiece and a groove is formed on the grooving surface by traveling of the wire, the wire is brought into direct contact with the wire in the traveling state and pressed against the grooving surface. A pressing means, a feed moving means for moving the pressing means over a range of groove forming lengths, and a position adjusting means for regulating the pressing amount of the pressing means, wherein the pressing means is within a groove forming length range. And moving by the feed moving means, and adjusting the pressing amount in the groove depth direction of the pressing means by the position adjusting means in the moving stroke of the pressing means to regulate the groove depth. A wire saw for grooving.   The wire saw for grooving according to claim 7, wherein the pressing amount of the pressing means is varied according to the groove depth during grooving.   The groove according to claim 7 or 8, wherein the pressing means is constituted by one or more disc-shaped and rotatable pressing rollers, and the pressing rollers are brought into rolling contact with the wire. Wire saw for processing.   The groove processing according to claim 7 or 8, wherein the pressing means is constituted by one or two or more cylindrical and rotatable pressing rollers, and the pressing roller is brought into rolling contact with the wire. Wire saw.   The wire saw for grooving according to claim 9 or 10, wherein the pressing roller is constituted by an annular grooved roller, and is brought into rolling contact with the wire by the annular groove.   The wire saw for grooving according to claim 7 or 8, wherein the pressing means is constituted by one or more pressing rods, and the pressing rod is brought into contact with the wire.   The pressing means is composed of one or more pressing rods, the pressing rod is brought into contact with the wire, and the traveling speed of the wire and the moving speed of the pressing rod are set equal. The wire saw for groove processing according to claim 7 or 8.   A pair of guide plates corresponding to the groove forming length is provided in a fixed position at a fixed position where the wire is sandwiched on the groove processing surface, leaving a space for wire guidance, and the wire and the pressing rod between the pair of guide plates. The wire saw for grooving according to claim 12 or 13, wherein the wire is guided in a traveling direction of the wire.   A pair of guide plates shorter than the groove forming length is provided at positions corresponding to the wires on the groove processing surface so as to be movable in an opposing state, leaving a space for wire guidance, and on the groove processing surface below each guide plate. 13. A guide roller capable of rolling is attached, and the wire and the pressing rod are guided in the traveling direction of the wire between the pair of guide plates by movement of the pair of guide plates. Item 14. A wire saw for groove processing according to Item 13.   The wire saw for grooving according to claim 12, 13, 14, or 15, wherein a dimension of the pressing rod in a direction orthogonal to the wire is set smaller than a diameter of the wire. . Either a single wire type wire saw or a multi-wire type wire saw is used according to the number of grooves formed, The claim 7, claim 8, claim 9, claim 11, claim 11, The wire saw for grooving according to claim 12, claim 13, claim 14, claim 15 or claim 16.

Images