JP2015194459A - Substrate inspection probe unit and substrate inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate inspection probe unit requiring no CCD camera or actuator mechanism for aligning when readjusting the relative position between terminals and probes.SOLUTION: The substrate inspection probe unit includes: probe groups (A and C) corresponding to an array pitch of component terminals of an inspection terminal (7), in which the probe groups (A and C) are displaced in a terminal array direction; a resistance measurement section (12) that measures an ohmic value R between two terminals in the inspection terminal (7); and a switch (11) for each terminal.

Description

  The present invention relates to a substrate inspection probe device and a substrate inspection method.

  In recent years, display panels are installed in small and medium digital products typified by mobile phones, smartphones, tablets, and the like. Such a display panel is manufactured by the following method. First, each substrate of a CF panel substrate and a TFT panel substrate is fabricated on a so-called mother glass. Then, after the CF panel substrate and the TFT panel substrate are bonded together using a sealing material or the like, the CF panel substrate side is divided by a dividing wheel. Thereafter, the mother glass is inverted, and the TFT panel substrate side is divided by a plurality of dividing wheels. By such division, the pair of substrates bonded together is divided into a predetermined size, and a display panel is manufactured.

  The division accuracy of this display panel varies about ± 0.1mm from the set value due to factors such as rattling of the division wheel, positioning accuracy of the division wheel, and deviations in the division position of the CF panel substrate and TFT panel substrate. Occurs.

  A predetermined lighting inspection is performed on a display panel divided into a predetermined size by bringing a probe of an inspection unit into contact with a terminal portion formed on the surface of the TFT substrate. By this lighting inspection, the display panel is inspected by checking the disconnection, short circuit, and lighting state of the electrodes.

  This lighting inspection requires highly accurate alignment between the terminal portion and the probe. For example, in a TFT liquid crystal display panel, if a wrong voltage is applied to a lead terminal due to misalignment, the TFT may be destroyed depending on the timing of voltage application. Therefore, when the panel is positioned on the basis of the outer shape of the display panel and brought into contact with the probe due to the variation in the accuracy of the dividing position of the panel, the TFT is frequently broken due to the above-described positional deviation.

  For this reason, in the inspection of the display panel, in many cases, an inspection apparatus having an auto alignment mechanism is used. An inspection apparatus having an auto alignment mechanism is disclosed in, for example, Patent Document 1.

  According to the inspection method using this inspection apparatus, first, an alignment mark provided on the liquid crystal display panel is imaged by a CCD camera, and the image signal is processed by an image processing unit to position the lead terminals of the liquid crystal display panel. Is identified. Then, either the probe pin or the liquid crystal display panel is moved based on the specified position data of the lead terminal, and the terminal portion and the probe pin are aligned. Patent Document 1 proposes a means for reliably detecting the alignment state between the terminal portion and the probe pin before actually applying the lighting voltage to the terminal portion while the probe pin is actually in contact with the terminal portion.

  In the inspection method using the inspection apparatus of Patent Document 1, a dummy terminal is disposed in a terminal portion, and a pair of current probe pins that cause a continuity check current to flow through the dummy terminal are provided on the probe head side that holds the probe pin. . And after making all the said voltage probe pin and the said current probe pin contact the said terminal part, a continuity check electric current is sent only between the said current probe pins. The presence / absence of displacement between the voltage probe pin and the lead terminal is detected by the conduction / non-conduction of the current. When a current is conducted between the current probe pins and there is no position shift, a lighting voltage is applied from the voltage probe pin to each of the lead terminals while the current probe pin is in contact with the dummy terminal. It has become.

  According to the inspection method of Patent Document 1, the lighting inspection is performed after confirming the final alignment state of the terminal portion and the probe by confirming the continuity with the dummy terminal after the highly accurate alignment of the terminal portion and the probe. Can be carried out. Therefore, the TFT is not destroyed due to the displacement.

  Further, for example, Patent Literature 2 discloses a lighting inspection device for a display panel. Further, Patent Document 3 discloses a continuity inspection apparatus that performs a continuity test on a conductor pattern by bringing a test probe into contact with the conductor pattern formed on the surface of the substrate.

Patent No. 4803692 (issued on October 26, 2011) JP 2004-170238 A (released on June 17, 2004) Japanese Patent Laid-Open No. 10-115653 (published May 6, 1998)

  In the lighting inspection method of Patent Document 1, a probe for continuity check is brought into contact with a dummy terminal, and the relative positional relationship between the terminal portion and the probe is confirmed based on the presence or absence of continuity. And when conduction | electrical_connection is confirmed, it becomes possible to implement a lighting test | inspection as it is. On the other hand, when conduction is not confirmed, it is necessary to readjust the relative positional relationship between the terminal portion and the probe.

  When re-adjusting the relative positional relationship between the terminal section and the probe, first, an alignment mark provided on the liquid crystal display panel is imaged by a CCD camera, and the image signal is processed by an image processing unit to display a liquid crystal display. Determine the location of the panel lead terminals. Then, either the probe pin or the liquid crystal display panel is moved based on the specified position data of the lead terminal, and the relative positional relationship between the terminal portion and the probe is readjusted. In this case, in order to adjust the relative positional relationship between the CCD camera or terminal unit and the probe, it is necessary to provide an actuator mechanism in the lighting inspection apparatus. When a lighting inspection of a plurality of liquid crystal display panels is performed by one lighting inspection device, it is necessary to provide a plurality of CCD cameras and a plurality of actuator mechanisms in the lighting inspection device. For this reason, the lighting inspection method of Patent Document 1 has a problem in that the configuration of the lighting inspection apparatus becomes complicated and the price of the apparatus increases.

  In addition, when the external accuracy of the liquid crystal display panel with respect to the position of the lead terminal with which the probe is brought into contact is low, if the lead terminal is positioned with reference to the external shape of the liquid crystal display panel, the relative position of the lead terminal with respect to the external shape is shifted. . For this reason, a probe does not contact a lead terminal and there exists a possibility that desired lighting test | inspection cannot be implemented.

  Furthermore, the above problem also occurs when conducting a continuity test by bringing a probe into contact with a terminal on the FPC. Even if the terminal portion is formed with high precision by photolithography technology as in FPC, the FPC outer shape punching accuracy is lower than the formation accuracy of the terminal portion. Therefore, even if the FPC is positioned based on the outer shape reference, A relative displacement occurs between the outer shape and the terminal portion. As a result, there is a possibility that the probe does not contact the terminal at a predetermined position and a desired inspection cannot be performed.

  The present invention has been made in view of the above-described conventional problems, and its purpose is to realize an inspection that does not require an alignment CCD camera or an actuator mechanism when the relative position between the terminal and the probe is adjusted again. Another object of the present invention is to provide a substrate inspection probe apparatus and a substrate inspection method that can be performed.

  In order to solve the above problems, a substrate inspection probe apparatus according to an aspect of the present invention includes an inspection unit having a probe that contacts a terminal portion for inspection on a substrate to be inspected, and the terminal portion, the probe, A board inspection probe apparatus for inspecting continuity of a plurality of probe groups arranged corresponding to the arrangement pitch of each of a plurality of terminals constituting the terminal portion, wherein the probe groups are arranged in a terminal arrangement direction. The probe group that is arranged in a shifted manner and that confirms the electrical connection state of at least one of the plurality of probe groups, and the probe group that is electrically connected to the inspection unit for each terminal are connected to other probe groups. And a switching unit for switching to.

In order to solve the above problems, a substrate inspection method according to an aspect of the present invention is a method in which a probe provided in an inspection unit is brought into contact with a terminal portion for inspection on a substrate to be inspected. A substrate inspection method for inspecting continuity with a probe, wherein the probe is composed of a plurality of probe groups arranged corresponding to the arrangement pitch of each of a plurality of terminals constituting the terminal portion, and the probe groups Are displaced in the terminal arrangement direction,
A confirmation step of confirming an electrical connection state of at least one probe group among the plurality of probe groups, and a switching step of switching a probe group to be electrically connected to the inspection unit for each terminal to another probe group, The switching step is characterized in that when a predetermined electrical connection state is not confirmed in the confirmation step, the probe group electrically connected to the inspection unit is switched.

  According to one aspect of the present invention, when the relative position between the terminal and the probe is adjusted again, it is possible to realize an inspection that does not require an alignment CCD camera or an actuator mechanism.

It is a top view which shows schematic structure of the panel for a measurement which is a test object of the board | substrate inspection probe apparatus which concerns on Embodiment 1 of this invention. It is a top view which shows schematic structure of the board | substrate inspection probe apparatus which concerns on Embodiment 1 of this invention. It is a side view which shows schematic structure of the board | substrate inspection probe apparatus which concerns on Embodiment 1 of this invention. It is an enlarged top view which shows schematic structure of the terminal part for a test | inspection in the measurement panel shown in FIG. FIG. 2 is a schematic top view showing a schematic configuration of a probe in the substrate inspection probe apparatus according to Embodiment 1 of the present invention and a relative positional relationship between the probe and an inspection terminal portion. FIG. 5 is a schematic top view showing a relative positional relationship between a probe and an inspection terminal when a relative positional deviation amount between the inspection terminal and the probe is smaller than a normal value. FIG. 7 is a schematic top view showing a relative positional relationship between the probe and the inspection terminal when the relative displacement between the inspection terminal and the probe is larger than a normal value. It is a top view which shows schematic structure of the module for a test | inspection which is a test object of the lighting inspection apparatus which concerns on Embodiment 2 of this invention. It is a top view which shows schematic structure of the board | substrate inspection probe apparatus which concerns on Embodiment 2 of this invention. It is a side view which shows schematic structure of the board | substrate inspection probe apparatus which concerns on Embodiment 2 of this invention. FIG. 9 is an enlarged top view showing the configuration of an external driving FPC in the inspection module shown in FIG. 8. The structure of the probe FPC in the board | substrate inspection probe apparatus which concerns on Embodiment 3 of this invention is shown, (a) is a top view, (b) is a side view. It is a top view which shows roughly the state which the probe FPC in the board | substrate inspection probe apparatus which concerns on Embodiment 3 of this invention contacted the terminal part for an inspection. It is an enlarged top view which shows schematic structure of the terminal part for an inspection in the measurement panel which is a measuring object of the board | substrate inspection probe apparatus which concerns on Embodiment 5 of this invention. It is the upper surface schematic diagram which shows the schematic structure of the probe in the board | substrate inspection probe apparatus which concerns on Embodiment 5 of this invention, and the relative positional relationship of a probe and the terminal part for a test | inspection. In the substrate inspection probe apparatus according to Embodiment 5 of the present invention, the relative positional relationship between the probe and the inspection terminal portion when the relative positional deviation between the inspection terminal portion and the probe is smaller than the normal value. FIG.

Embodiment 1
The substrate inspection probe apparatus of the present invention is configured to perform electrical inspection (electrodes) by contacting a probe to a terminal of a substrate to be inspected positioned with reference to the outer shape, and confirming the presence or absence of conduction between the terminal and the probe. (Inspection of disconnection, short circuit, etc.).

  In the present embodiment, as an example of such a substrate inspection probe device, an apparatus for adopting a TFT panel substrate of a liquid crystal display panel as a substrate to be inspected and performing a lighting inspection of the liquid crystal display panel as an electrical inspection will be described. The inspection target substrate of the substrate inspection probe device of the present invention is not limited to the TFT panel substrate of the liquid crystal display panel, and may be any substrate that requires electrical inspection such as electrode disconnection or short circuit.

  FIG. 1 is a top view illustrating a schematic configuration of a measurement panel which is an inspection target of the substrate inspection probe apparatus according to the present embodiment. FIG. 2 is a top view showing a schematic configuration of the substrate inspection probe apparatus according to the present embodiment. FIG. 3 is a side view showing a schematic configuration of the substrate inspection probe apparatus according to the present embodiment.

  As shown in FIG. 1, the measurement panel 20 has a configuration in which a CF panel substrate 5 and a TFT panel substrate 6 (substrate to be inspected) are bonded together. An inspection terminal portion 7 is provided on the surface of the TFT panel substrate 6. Two inspection terminal portions 7 are provided, each of which is formed at an adjacent corner portion of the TFT panel substrate 6. The TFT panel substrate 6 is bonded to the CF panel substrate 5 with the inspection terminal portion 7 exposed. Further, the measurement panel 20 includes a liquid crystal layer between the CF panel substrate 5 and the TFT panel substrate 6.

  The substrate inspection probe device according to the present embodiment is a lighting inspection device 10 that performs a lighting inspection of the measurement panel 20, and includes a jig portion 1 (positioning portion) on which the measurement panel 20 is mounted, and an inspection unit 8. ing. The inspection unit 8 is provided with a probe 9 that comes into contact with the inspection terminal portion 7 of the TFT panel substrate 6. The lighting inspection device 10 inspects the display state (lighting) of the measurement panel 20 when the probe 9 is brought into contact with the inspection terminal portion 7 of the TFT panel substrate 6 and the lighting inspection voltage is applied. .

  As shown in FIGS. 2 and 3, the jig unit 1 is configured to be capable of mounting two measurement panels 20 simultaneously. In addition, the left side part in the jig | tool part 1 shown by FIG. 2 has shown the state by which the panel 20 for a measurement is not mounted. The right part shows a state in which the measurement panel 20 is mounted. In the right part of the jig portion 1 shown in FIG. 2, the probe 9 of the inspection unit 8 is in contact with the inspection terminal portion 7 of the measurement panel 20.

  The jig portion 1 is made of an engineering plastic material such as a bake plate or unilate. The jig portion 1 is provided with a plurality of reference pins 2 for positioning the measurement panel 20, a moving pin 3 having a movable portion, and an opening portion 4. The reference pin 2 is disposed so as to simultaneously contact two adjacent sides of the measurement panel 20. The moving pin 3 is disposed so as to face the reference pin 2 and is movable so as to approach or separate from the facing reference pin 2. The opening 4 is provided in the mounting region of the measurement panel 20 in the jig portion 1. When the measurement panel 20 is mounted, the opening 4 is closed by the measurement panel 20. When the lighting inspection by the lighting inspection device 10 is performed, the backlight is turned on from the lower side of the opening 4 and the measurement panel is irradiated with light. Then, a lighting test is performed by applying a lighting test voltage and confirming the display state of the measurement panel 20.

  Hereinafter, a lighting inspection method (board inspection method) of the measurement panel 20 using the lighting inspection device 10 will be described. The lighting inspection method for the measurement panel 20 includes a positioning step for positioning the outer shape of the measurement panel 20, a probe contact step for bringing the probe 9 into contact with the inspection terminal portion 7 of the measurement panel 20, and the probe 9 and the inspection terminal. A confirmation process for confirming whether or not there is a positional deviation with respect to the unit 7, and an inspection process for applying a lighting inspection voltage to the inspection terminal unit 7 to perform a lighting inspection of the measurement panel 20.

  First, in the positioning step, the measurement panel 20 is mounted on the jig portion 1 of the lighting inspection device 10, and the outer shape of the measurement panel 20 is positioned (step of positioning the substrate). In the outer shape positioning step, as shown in the right side portion of the jig part 1 in FIG. It is held by the reference pin 2. Then, in a state where the two sides 20A and 20B are held by the reference pin 2, the moving pin 3 is moved so as to approach the opposite reference pin 2, and the two sides 20C and 20D of the measurement panel 20 are moved. Abut. As described above, the measurement panel 20 is positioned with respect to the reference pin 2.

  Next, in the probe contact step, the inspection unit 8 disposed above the inspection terminal portion 7 of the measurement panel 20 is lowered. Then, the probe 9 of the inspection unit 8 is brought into contact with the inspection terminal portion 7 (step of bringing the probe into contact with the inspection terminal portion).

  Here, the measurement panel 20 is manufactured as follows. That is, first, the CF panel substrate 5 and the TFT panel substrate 6 are each formed on a so-called mother glass. And after bonding together the CF panel board | substrate 5 and the TFT panel board | substrate 6 using a sealing material etc., the part by the side of the CF panel board | substrate 5 is parted with a parting wheel. Thereafter, the mother glass is inverted, and the portion on the TFT panel substrate 6 side is cut using a plurality of cutting wheels. By such division, the pair of substrates (CF panel substrate 5 and TFT panel substrate 6) bonded together are divided into a predetermined size, and the measurement panel 20 is manufactured.

  In the measurement panel 20 manufactured by the above method, the distance L from the end of the measurement panel 20 to the inspection terminal portion 7 varies about ± 0.1 mm with respect to the set value. This variation is caused by factors such as rattling of the dividing wheel, positioning accuracy of the dividing wheel, and deviation of the dividing position between the CF panel substrate 5 side portion and the TFT panel substrate 6 side portion.

  The measurement panel in which the probe 9 of the inspection unit 8 is externally positioned in the probe contact process due to the variation in the distance L (± 0.1 mm), the variation in the external positioning of the measurement panel 20, the positional variation of the probe, and the like. When lowered to the 20 inspection terminal portions 7, the probe 9 may not come into contact with the inspection terminal portion 7.

  Therefore, in the lighting inspection method for the measurement panel 20, the presence or absence of a positional deviation between the probe 9 and the inspection terminal portion 7 is confirmed in the confirmation step.

  FIG. 4 is an enlarged top view showing a schematic configuration of the inspection terminal portion 7. As shown in FIG. 4, the two inspection terminal portions 7 each have a plurality of lighting terminals 7 a (inspection terminal portions) for performing a lighting inspection and two contact terminals for confirming the contact position of the probe 9. It is comprised from the confirmation terminal 7b (terminal part for position confirmation). In the inspection terminal section 7, the lighting terminal 7a and the confirmation terminal 7b are arranged in a line, and the confirmation terminal 7b is arranged outside the lighting terminal 7a. In a state where two inspection terminal portions 7 are arranged in parallel, the confirmation terminals 7b are arranged on both sides of the lighting terminal 7a. Further, the measurement panel 20 is provided with a resistance measurement unit 12 (connection state confirmation unit) for measuring a resistance value (predetermined electrical connection state) between the confirmation terminals 7b arranged on both sides of the lighting terminal 7a. Yes.

  The lighting terminal 7 a and the confirmation terminal 7 b are in contact with the probe 9 by the probe contact process. In the confirmation step, the resistance measurement unit 12 measures a resistance value R (predetermined electrical connection state) between the confirmation terminals 7b arranged on both sides of the lighting terminal 7a (see FIG. 4). Here, the probe 9 is provided in association with each of the lighting terminal 7a and the confirmation terminal 7b. Therefore, when the contact position of the probe 9 with respect to each of the lighting terminal 7a and the confirmation terminal 7b is correct, that is, when there is a probe 9 in contact with each of the lighting terminal 7a and the confirmation terminal 7b, the measured value is the resistance value R. Become. Therefore, by measuring the resistance value R between the confirmation terminals 7b arranged on both sides of the lighting terminal 7a and confirming the measured value, it is confirmed whether or not there is a positional deviation between the probe 9 and the inspection terminal portion 7. can do.

  In the confirmation step, the presence or absence of misalignment between the probe 9 and the inspection terminal section 7 is measured by measuring the resistance value R between the two confirmation terminals 7b arranged on both sides of the lighting terminal 7a. Had confirmed. However, the arrangement of the two confirmation terminals 7b for measuring the resistance value R is not limited to the both sides of the lighting terminal 7a, and may be any arrangement that can measure the resistance value R. For example, in the configuration shown in FIG. 4, the resistance value R between the two confirmation terminals 7 b arranged on one side of the lighting terminal 7 a can also be measured to determine whether the probe 9 and the inspection terminal portion 7 are connected. It is possible to confirm the presence or absence of misalignment.

  When it is confirmed that there is no positional deviation between the probe 9 and the inspection terminal portion 7 in the confirmation step, a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a, and the measurement panel 20 lighting inspections are performed (inspection process).

  In general, the terminal width W of the lighting terminal 7a in the current inspection terminal section 7 is about 0.25 mm, and the arrangement pitch P is generally about 0.3 mm. Further, as described above, due to the variation in the distance L (± 0.1 mm), the variation during positioning of the outer shape of the measuring panel 20, the variation in the position of the probe 9, etc. When the probe 9 of the inspection unit 8 is lowered to the inspection terminal portion 7 of the panel 20, the probe 9 may not contact the inspection terminal portion 7. In this case, the relative positional deviation between the inspection terminal portion 7 and the probe 9 may be ½ or more of the terminal width W.

  When it is confirmed that there is a displacement between the probe 9 and the inspection terminal portion 7 in the confirmation step, the relative position between the inspection terminal portion 7 and the probe 9 is readjusted and the confirmation step is performed. It is necessary to measure the resistance value R again. The lighting inspection apparatus 10 according to the present embodiment has a configuration that does not require an alignment CCD camera or an actuator mechanism when readjusting the relative positions of the inspection terminal unit 7 and the probe 9. Therefore, according to the lighting inspection apparatus 10 according to the present embodiment, a cheap and reliable lighting inspection can be performed.

  FIG. 5 is a schematic top view illustrating a schematic configuration of the probe 9 of the lighting inspection apparatus 10 and a relative positional relationship between the probe 9 and the inspection terminal portion 7. FIG. 5 shows a case where the relative position between the inspection terminal portion 7 and the probe 9 is normal. Here, the normal case means a case where the distance L from the end of the measurement panel 20 to the inspection terminal 7 can be divided so as to be the set value.

  As shown in FIG. 5, the probe 9 includes a probe group A composed of a plurality of probes 9a and a probe group C composed of a plurality of probes 9c. The probes 9a constituting the probe group A are arranged corresponding to the arrangement pitch of the terminals (lighting terminals 7a and confirmation terminals 7b) constituting the inspection terminal unit 7. Similarly, the probes 9c constituting the probe group C are arranged corresponding to the arrangement pitch of the terminals constituting the inspection terminal portion 7. As described above, the probe 9 includes the probe groups A and C in which the probes 9 a and 9 c are arranged corresponding to the arrangement pitch of the terminals constituting the inspection terminal unit 7.

  The inspection unit 8 is provided with a changeover switch 11 (switching unit) for each of the terminals constituting the inspection terminal unit 7. This change-over switch 11 switches the electrical connection between the inspection unit 8 and the probe groups A and C. That is, the changeover switch 11 switches the probe group electrically connected to the inspection unit 8 from the probe group A to the probe group C or from the probe group C to the probe group A. Therefore, the probe groups A and C are connected to the inspection unit 8 via the changeover switch 11. In the lighting inspection method according to the present embodiment, the probe group electrically connected to the inspection unit 8 for each terminal constituting the inspection terminal unit 7 is changed from the probe group A to the probe group C, or from the probe group C to the probe group A. A switching step for switching to is included.

  The probes 9a and 9c are arranged at the same pitch as the terminals constituting the inspection terminal portion 7. Furthermore, the arrangement positions of the probe 9a and the probe 9c are shifted within a range where they contact the same terminal. It is preferable that the probe 9a and the probe 9c are located on both sides of the same terminal with the center line of the terminal interposed therebetween.

  In the configuration shown in FIG. 5, for example, the terminal width W is 0.25 mm, and the amount of deviation between the probe 9a and the probe 9c is 0.2 mm. Therefore, when the relative position between the inspection terminal portion 7 and the probe 9 is normal as shown in FIG. 5, the terminals constituting the inspection terminal portion 7 belong to the probe 9a and the probe group C belonging to the probe group A. The probe 9c is in contact with both.

  In the lighting inspection apparatus 10 according to the present embodiment having the configuration shown in FIG. 5, when the resistance value R between the confirmation terminals 7 b is measured by the resistance measurement unit 12 in the confirmation step, first, a changeover switch. 11, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side to check the measured value (switching step, confirmation step).

  And when the contact position of the probe 9a with respect to each of the lighting terminal 7a and the confirmation terminal 7b is correct, the measured value indicates the resistance value R. If it can be confirmed that the measured value is the resistance value R, there is no positional deviation between the probe 9 a and the inspection terminal portion 7.

  When it is confirmed that there is no positional deviation between the probe 9a and the inspection terminal section 7 in the confirmation process, a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a, and the measurement panel 20 is turned on. Perform inspection (inspection process).

  If the resistance value R between the confirmation terminals 7b cannot be confirmed in the confirmation process, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group C side by the changeover switch 11 in the switching process, and the resistance measuring unit 12 is switched. Check the measured value.

  Here, in the configuration shown in FIG. 5, as described above, the terminals constituting the inspection terminal portion 7 are in contact with both the probe 9a belonging to the probe group A and the probe 9c belonging to the probe group C. It has become. For this reason, in the confirmation step, the measured value by the resistance measuring unit 12 is the resistance value regardless of whether the switch 11 is switched to the probe group A side including the probe 9a or the probe group C side including the probe 9c. R is shown. Therefore, if it is not necessary to switch the electrical connection between the probe group A side and the probe group C side by the changeover switch 11 and the measured value by the resistance measuring unit 12 can be confirmed to be the resistance value R, the inspection unit 8 can turn on the lighting. A lighting test can be performed on the measurement panel 20 by applying a lighting test voltage to the terminal 7a.

  On the other hand, unlike the configuration shown in FIG. 5, when the relative position between the inspection terminal portion 7 and the probe 9 is not normal (the distance L from the end of the measurement panel 20 to the inspection terminal portion 7 is greater than the set value). The terminal constituting the inspection terminal portion 7 is in contact with either the probe 9a or the probe 9c. In such a case, it is necessary to switch the electrical connection between the probe group A side and the probe group C side by the changeover switch 11.

  FIG. 6 is a schematic top view showing the relative positional relationship between the probe 9 and the inspection terminal portion 7 when the relative displacement between the inspection terminal portion 7 and the probe 9 is smaller than the normal value. is there. Here, the case where the distance is smaller than the normal value refers to, for example, a case where the distance L from the end of the measurement panel 20 to the inspection terminal portion 7 is smaller than a set value.

  Due to the variation in the distance L (± 0.1 mm), the variation in positioning the outer shape of the measurement panel 20, the variation in the position of the probe, etc., the relative positional deviation amount between the inspection terminal portion 7 and the probe 9 is less than the normal value. May also be small. In such a case, when the resistance value R between the confirmation terminals 7b is measured by the resistance measuring unit 12 in the confirmation step, first, the electrical connection between the inspection unit 8 and the probe group is established by the changeover switch 11 in the probe group A. Switch to the side and check the measured value.

  As shown in FIG. 6, the contact position of the probe 9a does not correspond to each of the lighting terminal 7a and the confirmation terminal 7b. That is, among the plurality of probes 9a, there is a probe 9a that is not in contact with the lighting terminal 7a and the confirmation terminal 7b. In such a case, the resistance value R cannot be measured as a measurement value. When the resistance value between the confirmation terminals 7b is measured by the resistance measurement unit 12 in the state where the electrical connection is switched to the probe group A side as described above, if the resistance value R cannot be confirmed, the switch 11 switches the electrical value to the probe group C side. Switch connection.

  As shown in FIG. 6, the contact position of the probe 9c corresponds to each of the lighting terminal 7a and the confirmation terminal 7b, and the contact position of the probe 9c to each of the lighting terminal 7a and the confirmation terminal 7b is correct. Therefore, the resistance value R can be confirmed as the measurement value of the resistance measurement unit 12 by switching the electrical connection to the probe group C side by the changeover switch 11. If the resistance value R can be confirmed in this way, a lighting test voltage can be applied from the test unit 8 to the lighting terminal 7a via the probe 9c to perform a lighting test of the measurement panel 20.

  FIG. 7 is a schematic top view showing the relative positional relationship between the probe 9 and the inspection terminal portion 7 when the relative displacement between the inspection terminal portion 7 and the probe 9 is larger than the normal value. is there. Here, the case where the distance is larger than the normal value means, for example, a case where the distance L from the end of the measurement panel 20 to the inspection terminal portion 7 is larger than a set value.

  Due to the variation in the distance L (± 0.1 mm), the variation in positioning the outer shape of the measurement panel 20, the variation in the position of the probe, etc., the relative positional deviation amount between the inspection terminal portion 7 and the probe 9 is less than the normal value. Can also be large. In such a case, when the resistance value R between the confirmation terminals 7b is measured by the resistance measuring unit 12 in the confirmation step, first, the electrical connection between the inspection unit 8 and the probe group is established by the changeover switch 11 in the probe group A. Switch to the side and check the measured value.

  As shown in FIG. 7, the contact position of the probe 9a corresponds to each of the lighting terminal 7a and the confirmation terminal 7b, and the contact position of the probe 9a to each of the lighting terminal 7a and the confirmation terminal 7b is correct. Therefore, the resistance value R can be confirmed as the measured value of the resistance measuring unit 12 by switching the electrical connection to the probe group A side by the changeover switch 11. If the resistance value R can be confirmed in this way, a lighting test voltage can be applied to the lighting terminal 7a from the test unit 8 via the probe 9a, and the lighting test of the measurement panel 20 can be performed.

  Thus, according to the lighting inspection method using the lighting inspection apparatus 10 according to the present embodiment, even if the resistance value R between the confirmation terminals 7b cannot be confirmed in the confirmation process, the confirmation terminals 7b and the probes 9 There is no need to adjust the relative position. The electrical connection between the inspection unit 8 and the probe group is switched by the changeover switch 11, and the resistance value R between the confirmation terminals 7b is confirmed again. Then, after the confirmation, a lighting inspection voltage can be applied to the lighting terminal 7a via the probe group switched from the inspection unit 8 to perform the lighting inspection of the measurement panel 20.

  In addition, the direction of the relative position of the probe 9 is deviated from the normal value by switching the probe group with the changeover switch 11 and confirming which probe group is performing the lighting test. It becomes possible. And the confirmation result regarding this deviation is fed back to the dividing step of the measurement panel 20, and the deviation direction of the dividing position can be optimized.

  As described above, according to the lighting inspection device and the lighting inspection method according to the present embodiment, by confirming the electrical connection state (resistance value R) of at least one probe group among the plurality of probe groups A and C. The lighting inspection of the measurement panel 20 can be performed. Therefore, when the relative position between the terminal constituting the inspection terminal section 7 and the probe 9 is adjusted again, an alignment CCD camera and an actuator mechanism are not required, and an inexpensive and reliable inspection can be realized. It becomes possible.

[Embodiment 2]
The following will describe another embodiment of the present invention with reference to FIGS. For convenience of explanation, members having the same functions as those described in the above embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 8 is a top view illustrating a schematic configuration of the inspection module 30 which is an inspection target of the lighting inspection apparatus 10A according to the present embodiment. FIG. 9 is a top view showing a schematic configuration of a lighting inspection apparatus 10A according to the present embodiment. FIG. 10 is a side view showing a schematic configuration of a lighting inspection apparatus 10A according to the present embodiment. FIG. 11 is an enlarged top view showing a configuration of an FPC (flexible printed circuit board) 22 for external driving in the inspection module 30.

  As shown in FIG. 8, the inspection module 30 includes a measurement panel 20 and a backlight 25 bonded to the back side of the measurement panel 20. Since the configuration of the measurement panel 20 is the same as that of the first embodiment, description thereof is omitted. In the inspection module 30, an IC chip 21 for driving the TFT panel substrate 6 is mounted on the surface of the TFT panel substrate 6 of the measurement panel 20 on which the inspection terminal portion 7 is formed. Further, an FPC 22 (substrate to be inspected) for external driving is connected to the surface of the TFT panel substrate 6. The external drive FPC 22 includes a positioning reference hole 23 and a drive electrode 24 (inspection terminal portion).

  In the lighting inspection apparatus 10A according to the present embodiment, the driving electrode 24 of the FPC 22 in the inspection module 30 is brought into contact with the probe 9 of the inspection unit 8, a lighting inspection voltage is applied, and the measurement panel 20 in the inspection module 30 is applied. The lighting state of is inspected. The lighting inspection device 10A includes a jig portion 51 on which the inspection module 30 is mounted.

  As shown in FIGS. 9 and 10, the jig portion 51 is configured to be capable of mounting two inspection modules 30 simultaneously. Note that the left side portion of the jig portion 51 shown in FIG. 9 shows a state where the inspection module 30 is not mounted. The right part shows a state where the inspection module 30 is mounted.

  The jig part 51 is made of an engineering plastic material such as a bake plate or unilate. The jig portion 51 is provided with a corner portion 52, an FPC reference pin 53, and a digging portion 54 for positioning the inspection module 30. The digging portion 54 is provided in a region where the backlight 25 of the inspection module 30 in the jig portion 51 is mounted. The digging portion 54 is formed in substantially the same shape as the backlight 25. The corner portions 52 are formed at the four corners of the digging portion 54. Further, the FPC reference pin 53 is provided at a position corresponding to the reference hole 23 when the inspection module 30 is mounted on the jig portion 51.

  Hereinafter, a lighting inspection method (board inspection method) of the inspection module 30 using the lighting inspection device 10A will be described.

  In the positioning step in the lighting inspection method of the inspection module 30, the inspection module 30 is mounted on the jig portion 51 of the lighting inspection device 10 </ b> A, and the outer shape of the measurement panel 20 is positioned (step of positioning the substrate). In this positioning process, first, the inspection module 30 is roughly positioned by dropping the inspection module 30 into the digging portion 54. Next, the inspection module 30 is positioned by inserting the FPC reference pin 53 into the reference hole 23 for positioning the FPC 22. The FPC reference pin 53 is provided for positioning the FPC 22 in the inspection module 30. The FPC reference pins 53 are formed with the same diameter and the same pitch as the positioning reference holes 23 of the FPC 22.

  Next, in the probe contact step, the inspection unit 8 disposed above the drive electrode 24 of the FPC 22 in the inspection module 30 is lowered, and the probe 9 is brought into contact with the drive electrode 24. The inspection unit 8 is provided with a plurality of probes 9 so as to correspond to the drive electrodes 24.

  FIG. 11 is an enlarged top view showing a schematic configuration of the FPC 22 for external driving in the inspection module 30. The drive electrode 24 in the FPC 22 is formed by a photolithography technique and is processed with high accuracy. The reference hole 23 is formed by punching.

  As shown in FIG. 11, the drive electrode 24 includes a lighting terminal 24 a for performing a lighting test and a confirmation terminal 24 b for confirming a contact position with the probe 9. In the drive electrode 24, the lighting terminal 24a and the confirmation terminal 24b are arranged in a line, and two confirmation terminals 24b are arranged on both sides of the lighting terminal 24a. And the electrical connection between the two adjacent confirmation terminals 24b is in a short-circuited state. Although not shown in the drawing, the lighting inspection device 10A is provided with a short-circuit confirmation unit for confirming a short circuit (predetermined electrical connection state) between two adjacent confirmation terminals 24b.

  Here, while the drive electrode 24 is formed with high accuracy, the reference hole 23 formed by punching varies in punching die processing accuracy and punching die positioning accuracy. Due to this variation, the distance L between the drive electrode 24 and the reference hole 23 varies by about ± 0.1 mm with respect to the set value. Furthermore, the probe 9 may not contact the drive electrode 24 when the probe 9 of the inspection unit 8 is lowered in the probe contact process due to the positional accuracy of the FPC reference pin 53 and the variation in the position of the probe 9. It will occur.

  Therefore, in the lighting inspection method for the inspection module 30, whether or not there is a positional deviation between the probe 9 and the drive electrode 24 is confirmed in the confirmation step.

  The probe 9 has the same configuration as that shown in FIG. 5, and includes a probe group A composed of a plurality of probes 9a and a probe group C composed of a plurality of probes 9c. In the present embodiment, the probes 9a constituting the probe group A are arranged corresponding to the arrangement pitch of the terminals (lighting terminals 24a and confirmation terminals 24b) constituting the drive electrodes 24 as shown in FIG. Different from the configuration. Similarly, the probes 9 c constituting the probe group C are arranged corresponding to the arrangement pitch of the terminals constituting the drive electrode 24. Further, the inspection unit 8 is provided with a changeover switch 11 (switching unit) for each terminal constituting the drive electrode 24. This change-over switch 11 switches the electrical connection between the inspection unit 8 and the probe groups A and C.

  Through the probe contact process, the lighting terminal 24 a and the confirmation terminal 24 b are in contact with the probe 9. In the confirmation step, a short circuit (predetermined electrical connection state) between two adjacent confirmation terminals 24b is confirmed. Here, the probe 9 is provided in association with each of the lighting terminal 24a and the confirmation terminal 24b. Therefore, when the contact position of the probe 9 with respect to each of the lighting terminal 24a and the confirmation terminal 24b is correct, that is, when there is a probe 9 in contact with each of the lighting terminal 24a and the confirmation terminal 24b, two adjacent confirmation terminals 24b. A short circuit between is confirmed. Therefore, by confirming a short circuit between two adjacent confirmation terminals 7b arranged on both sides of the lighting terminal 7a, it is confirmed whether or not there is a positional deviation between the probe 9 and the inspection terminal section 7. Can do.

  In the confirmation step, first, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side by the changeover switch 11, and a short circuit between the two adjacent confirmation terminals 7b is confirmed (switching step, confirmation step). ).

  And when the contact position of the probe 9a with respect to each of the lighting terminal 24a and the confirmation terminal 24b is correct, a short circuit between two adjacent confirmation terminals 7b is confirmed. If a short circuit between two adjacent confirmation terminals 7b can be confirmed, there will be no displacement between the probe 9a and the drive electrode 24.

  When it is confirmed in the confirmation step that there is no positional deviation between the probe 9a and the drive electrode 24, a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a to perform a lighting inspection of the inspection module 30. Implement (inspection process).

  If a short circuit between two adjacent confirmation terminals 7b cannot be confirmed in the confirmation process, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group C side by the changeover switch 11 in the switching process. The short circuit (predetermined electrical connection state) between the two confirmation terminals 7b to be confirmed is confirmed. Then, after confirming the short circuit, a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a, and the lighting inspection of the inspection module 30 is performed.

  Here, in this embodiment, the amount of deviation between the probe 9a constituting the probe group A and the probe 9c constituting the probe group C is the width, pitch, and assumed position of the terminals constituting the drive electrode 24. It is set from the amount of deviation.

  However, the terminals constituting the drive electrode 24 in the probe 9 are prevented from being short-circuited by the probe 9 between two adjacent terminals in the drive electrode 24 due to relative displacement between the probe 9 and the terminals constituting the drive electrode 24. The width of the contact portion is preferably smaller than the interval between adjacent terminals constituting the drive electrode 24. This makes it possible to prevent TFT breakdown and troubles in the inspection unit 8 due to a short circuit.

  As described above, according to the lighting inspection apparatus 10A according to the present embodiment, when the dimension of the reference hole formed by punching and the outer dimension of the FPC 22 vary with respect to the drive electrode 24 formed with high accuracy. Even if it exists, it is not necessary to adjust the relative position of the confirmation terminal 24b and the probe 9. FIG. What is necessary is just to confirm the short circuit between the two adjacent confirmation terminals 24b again by switching the electrical connection of the test | inspection unit 8 and a probe group with the changeover switch 11. Then, after the confirmation, a lighting inspection voltage can be applied to the lighting terminal 7a via the probe group switched from the inspection unit 8 to perform the lighting inspection of the measurement panel 20.

  Therefore, according to the lighting inspection apparatus according to the present embodiment, when the relative position between the terminal constituting the inspection terminal section 7 and the probe 9 is adjusted again, an alignment CCD camera or an actuator mechanism is not required, and it is inexpensive. It is possible to realize a reliable inspection.

  In the present embodiment, the FPC 22 for external driving connected to the measurement panel 20 is an inspection target. However, the present embodiment is not limited to the FPC 22 connected to the measurement panel 20, and can be applied when inspecting FPCs for various uses. For example, even in a COF or the like in which an inkjet head or a functional element is mounted on an FPC, the probe 9 is brought into contact with the drive electrode 24 after positioning with the external reference of the FPC 22 for external drive, and first, a short circuit between the confirmation terminals 7b is confirmed. It is possible to inspect the functional element using a group of probes that have been confirmed to be short-circuited.

[Embodiment 3]
The following will describe still another embodiment of the present invention with reference to FIGS. For convenience of explanation, members having the same functions as those described in the above embodiment are denoted by the same reference numerals and description thereof is omitted.

  The lighting inspection apparatus according to the present embodiment is different from that of the first embodiment in that the probe portion is a probe FPC 32 formed of an FPC (flexible printed circuit board). FIG. 12 shows the configuration of the probe FPC 32 in the lighting inspection apparatus according to the present embodiment. FIG. 12 (a) is a top view and FIG. 12 (b) is a side view. FIG. 13 is a top view schematically showing a state in which the probe FPC 32 in the lighting inspection apparatus according to the present embodiment is in contact with the inspection terminal portion 7.

  As shown in FIGS. 12 and 13, the probe FPC 32 includes a probe unit 31 and an external lead terminal 33 corresponding to the probe constituting the probe unit 31. In the probe FPC 32, the probe portion 31 and the external lead terminal 33 are formed by rolling a copper foil on the base substrate 32a and patterning it with high precision by a photolithography technique. A cover film 32b is affixed on the copper foil other than the necessary portions in the probe portion 31 and the external lead terminal 33. Further, a reinforcing material 32c that reinforces the base substrate 32a is attached to the back surface of the base substrate 32a opposite to the probe portion 31 and the external lead terminal 33.

  The probe FPC 32 is provided with a reference hole 34 formed by punching. The reference hole 34 is used for positioning the probe FPC 32.

  Further, a film made of Ni, Au, or the like is formed on the exposed copper foil portions in the probe portion 31 and the external lead terminal 33 by plating. This improves the connection reliability.

  As shown in FIG. 12, the probe unit 31 includes a probe group A composed of a plurality of probes 31a and a probe group C composed of a plurality of probes 31c. Further, Au bumps 31b are provided on the plated copper foil portions of the probes 31a and 31c. As a method of forming the Au bump 31b, for example, a method of transferring the Au bump, a method of transferring the Au bump by Au ball bonding, or the like can be considered.

  In the Au bump 31b, the contact portion with the inspection terminal portion 7 has an R shape or a trapezoidal shape so that the contact width when contacting the inspection terminal portion 7 is about 0.02 mm. As a result, even if a relative displacement between the probe portion 31 and the inspection terminal portion 7 occurs, the Au bump 31b eliminates a short circuit between two adjacent terminals in the inspection terminal portion 7. For this reason, it becomes possible to prevent the trouble of the inspection unit 8 due to the destruction of the TFT or a short circuit.

  By the way, as the display panel is further refined, the terminal width W of the inspection terminal portion 7 shown in FIG. 13 is about 0.17 mm, and the arrangement pitch P is about 0.2 mm. The probes 31 a in the probe FPC 32 are arranged at the same pitch as the arrangement pitch P of the inspection terminal portions 7. The probes 31 c are also arranged at the same pitch as the arrangement pitch P of the inspection terminal portions 7. The probe 31a and the probe 31c are arranged so that their positions are shifted within a range in which the probe 31a and the probe 31c are in contact with the same terminal constituting the inspection terminal portion 7.

  In the lighting inspection apparatus according to the present embodiment, the terminal width W is 0.17 mm, and the deviation amount of the probe 31a and the probe 31c is 0.15 mm.

  According to the above configuration, the shorter distance among the distances between the adjacent probes 31a and 31c is 0.05 mm. As described above, the probe FPC 32 is patterned with high accuracy by the photolithography technique. Therefore, the adjacent probe 31a and the probe 31c can be processed without any problem even if the distance between the adjacent probes 31a and 0.05c is 0.05 mm.

  Hereinafter, a lighting inspection method (substrate inspection method) of the measurement panel 20 using the lighting inspection apparatus according to the present embodiment will be described. Since the positioning step and the probe contact step are the same as those in the first embodiment, description thereof is omitted.

  In the confirmation step, first, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side by the changeover switch 11, and the resistance value R between the confirmation terminals 7 b (predetermined electrical connection state) by the resistance measurement unit 12. Are measured (switching step, confirmation step).

  And when the contact position of the probe 31a with respect to each of the lighting terminal 7a and the confirmation terminal 7b is correct, the measured value indicates the resistance value R. If it can be confirmed that the measured value is the resistance value R, there is no positional deviation between the probe 31a and the inspection terminal portion 7.

  When it is confirmed that there is no positional deviation between the probe 31a and the inspection terminal portion 7 in the confirmation step, a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a, and the measurement panel 20 is turned on. Perform inspection (inspection process).

  If the resistance value R between the confirmation terminals 7b cannot be confirmed in the confirmation process, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group C side by the changeover switch 11 in the switching process, and the resistance measuring unit 12 is switched. Check the measured value.

  According to the lighting inspection apparatus according to the present embodiment, when the relative position between the terminal constituting the inspection terminal portion 7 and the probe portion 31 is adjusted again, an alignment CCD camera and an actuator mechanism are not required, and it is inexpensive. It is possible to realize a reliable and reliable inspection.

[Embodiment 4]
The lighting inspection device according to the first to third embodiments may include a determination control unit that determines and controls the operation of each unit (inspection unit 8, changeover switch 11, jig unit, and the like) of the device. This determination control unit controls, for example, the inspection unit 8 and the changeover switch 11 to switch the probe group by the changeover switch 11 and to confirm the continuity between the probe group and the confirmation terminal when switching (confirmation of short circuit, resistance (Confirmation of value) Operation is performed, and the probe group in which continuity is confirmed is selected. Then, a lighting test is performed by applying a lighting test voltage from the test unit 8 to the lighting terminal by the probe group in which conduction is confirmed. By providing such a control unit, it is possible to realize lighting test automation.

  The determination control unit may be realized by a logic circuit (hardware) formed in an integrated circuit (IC chip) or the like, or may be realized by software using a CPU (Central Processing Unit).

  In the latter case, the lighting inspection device 10 includes a CPU that executes instructions of a program that is software that realizes each function, and a ROM (Read Only Memory) in which the program and various data are recorded so as to be readable by the computer (or CPU). Alternatively, a storage device (these are referred to as “recording media”), a RAM (Random Access Memory) that expands the program, and the like are provided. And the objective of this invention is achieved when a computer (or CPU) reads the said program from the said recording medium and runs it. As the recording medium, a “non-temporary tangible medium” such as a tape, a disk, a card, a semiconductor memory, a programmable logic circuit, or the like can be used. The program may be supplied to the computer via an arbitrary transmission medium (such as a communication network or a broadcast wave) that can transmit the program. The present invention can also be realized in the form of a data signal embedded in a carrier wave in which the program is embodied by electronic transmission.

[Embodiment 5]
The following will describe another embodiment of the present invention with reference to FIGS. For convenience of explanation, members having the same functions as those described in the above embodiment are denoted by the same reference numerals and description thereof is omitted.

  In the lighting inspection apparatus 10 according to the first embodiment, the probe 9 is brought into contact with two inspection terminal portions 7 provided on the measurement panel 20 to inspect the display state of the measurement panel 20. As shown in FIG. 4, each inspection terminal section 7 includes six lighting terminals 7a (inspection terminal sections) for performing a lighting inspection and two confirmation terminals 7b (for confirming the contact position of the probe 9). Position confirmation terminal portion). That is, since the lighting inspection apparatus 10 of Embodiment 1 cannot confirm the contact position of the probe 9 of the measurement panel 20 that does not include the confirmation terminal 7b, it cannot perform a desired lighting inspection.

  Therefore, in the present embodiment, a lighting inspection apparatus and a lighting inspection method capable of confirming the contact position of the probe 9 and performing a lighting inspection even on the measurement panel 20 where the confirmation terminal 7b is not formed will be described.

  FIG. 14 is an enlarged top view showing a schematic configuration of the inspection terminal section 7 in the measurement panel 20 which is an inspection target of the lighting inspection apparatus (substrate inspection probe apparatus) of the present embodiment. As shown in FIG. 14, the measurement panel 20 includes two inspection terminal portions 7 on the TFT panel substrate 6 as in the first embodiment (see FIGS. 1 and 4). Each of the two inspection terminal portions 7 includes six lighting terminals 7a (inspection terminal portions) for performing a lighting inspection. That is, the confirmation terminal 7b as shown in FIG. 4 is not provided.

  In the inspection terminal portion 7 of the present embodiment, the plurality of lighting terminals 7a are arranged in a line, and the contact positions of the probes 9 are confirmed at the lighting terminals 7a at both ends.

  Hereinafter, a lighting inspection method (substrate inspection method) of the measurement panel 20 using the lighting inspection apparatus according to the present embodiment will be described. The positioning process and the probe contact process are substantially the same as those in the first embodiment. The lighting inspection method of this embodiment is greatly different from the lighting inspection method of Embodiment 1 in the confirmation process and the inspection process.

  Specifically, in the confirmation process of the first embodiment, as shown in FIG. 4, the resistance value between the confirmation terminal 7 b of one inspection terminal portion 7 and the confirmation terminal 7 b of the other inspection terminal portion 7. By measuring R by the resistance measuring unit 12, the presence or absence of a positional shift between the probe 9 and the inspection terminal unit 7 was confirmed.

  On the other hand, in the confirmation process of this embodiment, as shown in FIG. 14, the resistance value (predetermined electric current) between the two probes 9 and 9 brought into contact with one lighting terminal 7a of each inspection terminal portion 7 Connection state) is measured by the resistance measuring unit 12. At this time, if the measured value is the resistance value R, it indicates that there is no problem with the contact position of the probe 9, 9. If the measured value cannot be detected, it indicates that there is a problem with the contact position of the probe 9.

  FIG. 15 is a schematic top view showing the schematic configuration of the probe 9 and the relative positional relationship between the probe 9 and the inspection terminal section 7 in the lighting inspection apparatus of the present embodiment. FIG. 15 shows a case where the relative position between the inspection terminal portion 7 and the probe 9 is normal. Here, the normal case means a distance L (see FIG. 14) from the end of the measurement panel 20 to the inspection terminal 7 (the lighting terminal 7a on the end of the measurement panel 20). The case where it is divided so that it becomes a street.

  As shown in FIG. 15, the probe 9 includes a probe group A composed of a plurality of probes 9a, a probe group C composed of a plurality of probes 9c, and a probe group G composed of a plurality of probes 9g (parallel probes). It is configured. The probes 9 a constituting the probe group A are arranged corresponding to the arrangement pitch of the lighting terminals 7 a constituting the inspection terminal portion 7. Similarly, the probes 9c constituting the probe group C are arranged corresponding to the arrangement pitch of the lighting terminals 7a constituting the inspection terminal portion 7. Thus, the probes 9a and 9c constituting the probe groups A and C are arranged corresponding to the arrangement pitch of the lighting terminals 7a.

  On the other hand, the lighting terminal 7a at the outer end of each inspection terminal section 7 is provided with a probe 9g in addition to the probes 9a and 9c. The probe 9g is composed of 2 pins, and is arranged in a state of being sandwiched between the probes 9a and 9c. That is, in the configuration of FIG. 15, a total of 4-pin probes including a 1-pin probe 9 a and 9 c and a 2-pin probe 9 g are connected to the lighting terminal 7 a at the outer end of each inspection terminal portion 7. In this state, only the 1-pin probes 9a and 9c are connected to the other lighting terminals 7a.

  As shown in FIG. 15, when the relative position between the inspection terminal portion 7 and the probe 9 is normal, the lighting terminal 7a includes the probe 9a belonging to the probe group A, the probe 9c belonging to the probe group C, and the probe group G. Is in contact with all the probes 9g belonging to.

  Further, the inspection unit 8 is provided with a changeover switch 11 (switching unit) for each of the lighting terminals 7 a constituting the inspection terminal unit 7. Furthermore, the switch SW1 is provided only for the lighting terminal 7a at the outer end where the probe 9g is provided.

  This change-over switch 11 switches the electrical connection between the inspection unit 8 and the probe groups A and C. That is, the changeover switch 11 switches the probe group electrically connected to the inspection unit 8 from the probe group A to the probe group C or from the probe group C to the probe group A. Therefore, the probe groups A and C are connected to the inspection unit 8 via the changeover switch 11. In the lighting inspection method according to the present embodiment, the probe group electrically connected to the inspection unit 8 for each lighting terminal 7a constituting the inspection terminal unit 7 is changed from the probe group A to the probe group C or from the probe group C to the probe. A switching step for switching to group A is included.

  The probes 9 a and 9 c are arranged at the same pitch as the lighting terminals 7 a that constitute the inspection terminal portion 7. Further, the arrangement positions of the probe 9a and the probe 9c are shifted within a range where they contact the same lighting terminal 7a. It is preferable that the probe 9a and the probe 9c are located on both sides of the same lighting terminal 7a with the center line of the lighting terminal 7a interposed therebetween.

  In the configuration shown in FIG. 15, for example, the terminal width W (see FIG. 14) is 0.25 mm, and the amount of deviation between the probe 9a and the probe 9c is 0.2 mm. On the other hand, the probe 9g is arranged at a distance of 0.066 mm from the probe 9a, and the 2-pin probe 9g is arranged at equal intervals with respect to the displacement amount 0.2 mm of the probes 9a and 9c. . Therefore, when the relative position between the inspection terminal portion 7 and the probe 9 is normal as shown in FIG. 15, the lighting terminal 7a is connected to both the probe 9a belonging to the probe group A and the probe 9c belonging to the probe group C. It is in contact. The lighting terminal 7a at the outer end is in contact with all of the probes 9a belonging to the probe group A, the probes 9c belonging to the probe group C, and the probes 9g belonging to the probe group G.

  The probe 9g having a 2-pin configuration is connected to the upstream side (inspection unit 8 side) of the changeover switch 11 via the resistance measurement unit 12 via the switch SW1.

  In the lighting inspection apparatus according to the present embodiment having the configuration shown in FIG. 15, the outer ends of the inspection terminal portions 7 to which the 4-pin probes 9 a, 9 c, and 9 g are connected in the confirmation step. The resistance measurement unit 12 measures the resistance value R of the lighting terminal 7a. At this time, first, after the switch SW1 is turned on, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side by the changeover switch 11 and the measured value is confirmed (switching step, confirmation step).

  When the contact position of the probe 9a with the lighting terminal 7a is correct, the measured value indicates the resistance value R. If it can be confirmed that the measured value is the resistance value R, there is no positional deviation between the probe 9 a and the inspection terminal portion 7.

  When it is confirmed in the confirmation step that there is no positional deviation between the probe 9a and the inspection terminal section 7, the switch SW1 is turned off, and a lighting inspection voltage is applied from the inspection unit 8 to the lighting terminal 7a. The panel 20 is inspected for lighting (inspection process).

  Further, when the resistance value R between the lighting terminals 7a to which the 4-pin probe is connected cannot be confirmed in the confirmation process, the switch SW1 is turned on in the switching process, and then the inspection switch 8 is connected to the inspection unit 8 by the changeover switch 11. The electrical connection with the probe group is switched to the probe group C side, and the measurement value by the resistance measurement unit 12 is confirmed.

  Here, in the configuration shown in FIG. 15, as described above, the lighting terminals 7 a at the outer ends of the inspection terminal portions 7 include the probes 9 a belonging to the probe group A, the probes 9 c belonging to the probe group C, and The probe 9g is in contact with all the probes 9g belonging to the probe group G. For this reason, in the confirmation step, with the switch SW1 in the conductive state, the changeover switch 11 switches to the probe group A side consisting of the probe 9a or the probe group C side consisting of the probe 9c, The measured value by the resistance measuring unit 12 indicates the resistance value R. Therefore, if it is not necessary to switch the electrical connection between the probe group A side and the probe group C side by the changeover switch 11 and the measured value by the resistance measuring unit 12 can be confirmed to be the resistance value R, the switch SW1 is turned off and the inspection is performed. The lighting test of the measurement panel 20 can be performed by applying a lighting test voltage from the unit 8 to the lighting terminal 7a.

  On the other hand, unlike the configuration shown in FIG. 15, when the relative position between the inspection terminal portion 7 (lighting terminal 7 a) and the probe 9 is not normal (from the end of the measurement panel 20 to the inspection terminal portion 7. When the distance L (see FIG. 14) is larger or smaller than the set value), the lighting terminal 7a is in contact with either the probe 9a or the probe 9c. In addition, it comes into contact with at least one of the 2-pin probe 9g. In such a case, it is necessary to switch the electrical connection between the probe group A side and the probe group C side by the changeover switch 11.

  FIG. 16 is a schematic top view showing a relative positional relationship between the probe 9 and the inspection terminal portion 7 when the relative positional deviation amount between the inspection terminal portion 7 and the probe 9 is smaller than a normal value. is there. Here, the case where the distance is smaller than the normal value means, for example, a case where the distance L (see FIG. 14) from the end of the measurement panel 20 to the inspection terminal portion 7 is smaller than the set value.

  Also in the lighting inspection apparatus according to the present embodiment having the configuration shown in FIG. 16, the outer ends of the inspection terminal portions 7 to which the 4-pin probes 9 a, 9 c, and 9 g are connected in the confirmation process. The resistance measurement unit 12 measures the resistance value R of the lighting terminal 7a. At this time, first, after the switch SW1 is turned on, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side by the changeover switch 11 and the measured value is confirmed (switching step, confirmation step).

  When the contact position of the probe 9a with the lighting terminal 7a is correct, the measured value indicates the resistance value R. If it can be confirmed that the measured value is the resistance value R, there is no positional deviation between the probe 9 a and the inspection terminal portion 7.

  However, due to variations in the distance L (± 0.1 mm), variations in positioning of the measurement panel 20 and variations in the position of the probe, the inspection terminal portion 7 (lighting terminal 7a) and In some cases, the amount of positional deviation relative to the probe 9 is smaller than the normal value. In such a case, the resistance measurement unit 12 determines the resistance value R of the lighting terminal 7a at the outer end of each inspection terminal unit 7 to which the 4-pin probes 9a, 9c, and 9g are connected in the confirmation step. measure. At this time, first, after the switch SW1 is turned on, the electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side by the changeover switch 11 and the measured value is confirmed (switching step, confirmation step).

  As shown in FIG. 16, the contact position of the probe 9a corresponds to each lighting terminal 7a, and the contact position of the probe 9a with respect to each lighting terminal 7a is correct. Therefore, the resistance value R can be confirmed as the measured value of the resistance measuring unit 12 by switching the electrical connection to the probe group A side by the changeover switch 11 with the switch SW1 in the conductive state. If the resistance value R can be confirmed in this way, the switch SW1 is turned off, and a lighting test voltage is applied from the test unit 8 to the lighting terminal 7a via the probe 9a to perform a lighting test of the measurement panel 20. it can. In this case, since the resistance value R is confirmed, there is no need to switch the electrical connection to the probe group C side by the changeover switch 11.

  On the other hand, as shown in FIG. 16, the contact position of the probe 9c does not correspond to each lighting terminal 7a. That is, among the plurality of probes 9c, there is a probe 9c that is not in contact with the lighting terminal 7a. In such a case, when the switch SW1 is in the conductive state and is switched to the probe group C side including the probes 9c by the changeover switch 11, the resistance value R of the lighting terminal 7a at the outer end of each inspection terminal portion 7 is set. Cannot be measured. As a result of measuring the resistance value R of the lighting terminal 7a at the outer end of each inspection terminal section 7 by the resistance measurement section 12 in the state where the electrical connection is switched to the probe group C side as described above, the resistance value R cannot be confirmed. In this case, the electrical connection is switched to the probe group A side by the changeover switch 11. Thereby, since the resistance value R can be confirmed as described above, a lighting test of the measurement panel 20 can be performed.

  As described above, according to the lighting inspection method according to the present embodiment, even if the resistance value R of the lighting terminal 7a at the outer end of each of the inspection terminal portions 7 cannot be confirmed in the confirmation process, the lighting terminal. It is not necessary to adjust the relative position between 7a and the probe 9. That is, even if the probe 9 connected to the resistance measuring unit 12 does not correspond to the lighting terminal 7a due to the positional deviation, it is not necessary to adjust the relative position between the lighting terminal 7a and the probe 9. In such a case, the electrical connection between the inspection unit 8 and the probe group A or the probe group C is switched by the change-over switch 11 in a state where the switch SW1 is in the conductive state, and the outer end of each inspection terminal section 7 is lit. The resistance value R of the terminal 7a is confirmed. Then, after the resistance value R is confirmed, the lighting test voltage is applied to all the lighting terminals 7a via the probe group A or the probe group C switched from the test unit 8, and the lighting test of the measurement panel 20 is performed. Can be implemented.

  Therefore, according to the lighting inspection apparatus and the lighting inspection method of the present embodiment, the contact position of the probe 9 also on the measurement panel 20 in which the confirmation terminal 7b (position confirmation terminal portion) is not formed as in the first embodiment. It is possible to confirm. In other words, the lighting terminal 7 a at the outer end of each inspection terminal portion 7 performs two functions of lighting inspection and confirmation of the contact position of the probe 9. Thereby, since it is not necessary to provide the confirmation terminal 7b separately, the structure of a lighting test | inspection apparatus can be simplified. In this embodiment, the resistance value R of the lighting terminal 7a at the outer end of each inspection terminal portion 7 is confirmed. However, the lighting terminal 7a for confirming the resistance value R is not limited to this. There may be any lighting terminal 7a.

  Furthermore, by switching the probe groups A and C with the changeover switch 11 and confirming which probe group is performing the lighting test, in which direction the relative position of the probe 9 deviates from the normal value. It becomes possible to confirm whether or not. And the confirmation result regarding this deviation is fed back to the dividing step of the measurement panel 20, and the deviation direction of the dividing position can be optimized.

  As described above, according to the lighting inspection device and the lighting inspection method according to the present embodiment, by confirming the electrical connection state (resistance value R) of at least one probe group among the plurality of probe groups A and C. The lighting inspection of the measurement panel 20 can be performed. Therefore, when the relative position between the lighting terminal 7a constituting the inspection terminal section 7 and the probe 9 is adjusted again, an alignment CCD camera and an actuator mechanism are not required, and an inexpensive and reliable inspection is realized. It becomes possible to do.

[Summary]
The substrate inspection probe device (lighting inspection device 10, 10A) according to the first aspect of the present invention has an inspection terminal portion (inspection terminal portion 7, drive electrode 24) on a substrate to be inspected (TFT panel substrate 6, FPC 22). A board inspection probe apparatus (lighting inspection apparatus 10, 10 A) that includes an inspection unit 8 having a probe 9 in contact with the terminal 9 and inspects continuity between the terminal section (inspection terminal section 7 and drive electrode 24) and the probe 9. The probes arranged in correspondence with the arrangement pitch P of each of the plurality of terminals (lighting terminals 7a and 24a and confirmation terminals 7b and 24b) constituting the terminal part (inspection terminal part 7 and drive electrode 24). A plurality of groups A and C are provided, and the probe groups A and C are arranged so as to be shifted in the arrangement direction of the terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b). Among them, the connection state confirmation unit (resistance measurement unit 12) for confirming the electrical connection state of at least one probe group and the terminals 8 (lighting terminals 7a and 24a and confirmation terminals 7b and 24b) are electrically connected to the inspection unit 8. A switching unit (switch 11) that switches the probe group to be connected to another probe group is provided.

  According to said structure, in the confirmation process which confirms the contact with the terminal part for an inspection (inspection terminal part 7, the drive electrode 24), and the probe 9, one electrical connection state of probe group A * C cannot be confirmed. Even in this case, it is not necessary to adjust the relative position between the terminal portion (inspection terminal portion 7, drive electrode 24) and the probe 9. It is only necessary to switch the electrical connection between the inspection unit 8 and the probe groups A and C to the other probe group by the switching unit (switch 11) and confirm the electrical connection state of the switched probe group again. Then, after the confirmation, the continuity inspection of the substrate to be inspected (TFT panel substrate 6, FPC 22) can be performed through the probe group switched from the inspection unit 8.

  As described above, according to the above configuration, when the relative position between the terminal and the probe 9 is adjusted again, it is possible to realize an inspection that does not require an alignment CCD camera or an actuator mechanism.

  The substrate inspection probe device (lighting inspection device 10, 10A) according to aspect 2 of the present invention is the above aspect 1, wherein the connection state confirmation unit is included in one of the plurality of terminals (lighting terminal 7a). The configuration may be such that a predetermined electrical connection state is confirmed.

  According to said structure, since a connection state confirmation part confirms an electrical connection state within one terminal, a board | substrate test | inspection can be implemented simply.

  The board inspection probe apparatus (lighting inspection apparatus 10, 10A) according to aspect 3 of the present invention is the probe 9a of the different probe groups A and C arranged in one terminal in which the electrical connection state is confirmed in the aspect 2. -The structure provided with the juxtaposed probe (probe 9g) juxtaposed between 9c may be sufficient.

  According to said structure, in addition to the probe 9a * 9c which comprises each probe group A * C on the terminal (terminal 7a for outer end lighting) by which an electrical connection state is confirmed, different probe groups A * C are provided. A probe 9g arranged in parallel between the probes 9a and 9c is provided. That is, three or more types of probes 9a, 9c, and 9g are provided on the lighting terminal 7a at the outer end of the inspection terminal portion 7 whose electrical connection state is confirmed. In other words, the total of the probes 9a and 9c corresponding to the probe groups A and C and the side-by-side probes (probes 9g) is 3 or more. As a result, even if the probes 9a and 9c constituting any one of the probe groups A and C are displaced and are not in contact with the lighting terminal 7a at the outer end, the probe 9g The contact state with the lighting terminal 7a is maintained. Therefore, the electrical connection state can be confirmed by using the probe 9a of the probe group A (or the probe 9c of the probe group C) and the side-by-side probe (probe 9g) in contact with the lighting terminal 7a at the outer end. it can.

  For example, in the configuration of FIG. 16, in the confirmation process, the switch SW1 is switched in the switching process so that the resistance value R of the lighting terminal 7a to which the 4-pin probe (probes 9a, 9c, 9g) is connected can be confirmed. When the electrical connection between the inspection unit 8 and the probe group C is switched to the probe group A by the changeover switch 11 in the conductive state, the resistance value R can be confirmed as the measured value of the resistance measuring unit 12. Therefore, the continuity test can be performed even on the measurement panel 20 in which the confirmation terminal 7b (position confirmation terminal portion) is not formed.

  The board inspection probe apparatus (lighting inspection apparatus 10, 10A) according to aspect 4 of the present invention is the above aspect 2, wherein the connection state confirmation unit includes the plurality of terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b). ) May be configured to confirm a predetermined electrical connection state between two terminals.

  According to said structure, in the confirmation process which confirms the contact of the terminal part for an inspection (inspection terminal part 7, the drive electrode 24) and the probe 9, said several terminal (lighting terminal 7a * 24a, confirmation terminal) 7b and 24b), even if a predetermined electrical connection state between two terminals (confirmation terminals 7b and 24b) cannot be confirmed, the terminal portion (inspection terminal portion 7 and drive electrode 24) and the probe 9 There is no need to adjust the relative position. The electrical connection between the inspection unit 8 and the probe group is switched to the probe group A side or the probe B side by the switching unit (switch 11), and a predetermined electrical connection between the two terminals (confirmation terminals 7b and 24b) is performed again. What is necessary is just to confirm a connection state. Then, after the confirmation, the continuity inspection of the substrate to be inspected (TFT panel substrate 6, FPC 22) can be performed through the probe group switched from the inspection unit 8.

  The board inspection probe device (lighting inspection apparatus 10, 10A) according to aspect 5 of the present invention is the above aspect 1-4, wherein the switching unit (switch 11) has a predetermined electrical connection state by the connection state confirmation unit. When not confirmed, the structure which switches probe group A * C electrically connected with the said test | inspection unit 8 may be sufficient.

  Thereby, when the relative position between the terminal and the probe 9 is adjusted again, an alignment CCD camera and an actuator mechanism are not required, and an inexpensive and reliable inspection can be realized.

  According to aspect 6 of the present invention (lighting inspection apparatus 10A), in aspects 1 to 5, the width of the contact portion of the probe 9 with the terminal (confirmation terminal 24b) is equal to the adjacent terminal (lighting terminal 24a). The configuration may be smaller than the interval between the confirmation terminals 24b).

  According to said structure, it adjoins in a terminal part (drive electrode 24) by relative position shift with the probe 9 and the terminal (lighting terminal 24a, confirmation terminal 24b) which comprises a terminal part (drive electrode 24). There is no short circuit between the two terminals by the probe 9. As a result, according to the configuration described above, it is possible to prevent the TFT from being broken or from being troubled by the short circuit due to a short circuit.

  The (lighting inspection apparatus 10, 10A) according to aspect 7 of the present invention includes the FPC 32 in the above aspects 1 to 6, and the probe (probe unit 31) is formed as a wiring pattern on the FPC 32, and the wiring pattern Bumps (Au bumps 31b) are formed.

  According to the above configuration, the continuity test is performed by bringing the probe (probe unit 31) into contact with the terminal even on the substrate to be inspected, where the terminal portion is further refined and the terminal arrangement pitch P is further reduced. Is possible.

  The “connection state confirmation unit for confirming a predetermined electrical connection state between two terminals” refers to a part for confirming a conduction state or a short-circuit state between two terminals.

  For example, the substrate inspection probe apparatus (lighting inspection apparatus 10) according to the aspect 8 of the present invention includes the resistance measurement unit 12 that measures the resistance between two terminals as the connection state confirmation unit in the aspects 1 to 7. It may be configured as described above.

  Moreover, the board | substrate inspection probe apparatus (lighting inspection apparatus 10A) which concerns on aspect 9 of this invention is provided with the short circuit confirmation part which confirms the short circuit state between two terminals as the said connection state confirmation part in the said aspects 1-8. It may be configured as described above.

  Moreover, even if it is the structure provided with the lighting confirmation part which adjusts the electric current and voltage applied between two terminals as a said connection state confirmation part, and confirms the lighting state of light sources, such as LED, between two terminals It is possible to check the electrical connection state.

  The substrate inspection probe apparatus (lighting inspection apparatus 10, 10A) according to aspect 10 of the present invention is the above-described aspect 1 to 9, in which each probe 9a, 9c constituting each of the probe groups A, C is an inspection terminal section. They are arranged at the same pitch as the terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b) constituting the (inspection terminal portion 7, drive electrode 24), and the probe 9a and the probe 9c are the same terminal ( The arrangement positions are shifted within a range in contact with the lighting terminals 7a and 24a and the confirmation terminals 7b and 24b). Preferably, the probe 9a and the probe 9c are located on both sides of the same terminal with the center line of the terminal interposed therebetween.

  As a result, even if the positional deviation between one probe group and the inspection terminal portion (inspection terminal portion 7, drive electrode 24) is relatively large, the connection state confirmation is performed by switching to the other probe group. The predetermined electrical connection state can be confirmed by the unit.

  Further, the substrate inspection probe device (lighting inspection device 10, 10A) according to aspect 11 of the present invention is the above-described aspect 1 to 10, wherein the terminal portion (inspection terminal portion 7, drive electrode 24) is the connection state confirmation. The position confirmation terminal part (confirmation terminal 7b * 24b) which has two terminals connected to the part (resistance measurement part 12) is provided.

  In the substrate inspection method according to the twelfth aspect of the present invention, the probe 9 provided in the inspection unit 8 is connected to an inspection terminal portion (inspection terminal portion 7, drive electrode 24) on the substrate to be inspected (TFT panel substrate 6, FPC 22). ), And inspecting the continuity between the terminal portion (inspection terminal portion 7 and the drive electrode 24) and the probe 9, wherein the probe 9 is connected to the terminal portion (inspection terminal portion 7). , Drive electrodes 24), and a plurality of terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b) are configured by probe groups A and C arranged corresponding to the arrangement pitch P of each of the terminals. C are arranged so as to be shifted in the arrangement direction of the terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b), and electrical connection of at least one of the plurality of probe groups A and C is performed. State And a switching step of switching the probe group electrically connected to the inspection unit 8 to another probe group for each terminal, and in the switching step, a predetermined electrical connection state is not confirmed in the checking step. In this case, the probe groups A and C electrically connected to the inspection unit 8 are switched.

  According to said structure, there exists an effect similar to the said aspect 1. FIG.

  In the substrate inspection method according to aspect 13 of the present invention, in the aspect 12, in the confirmation step, a predetermined electrical connection state may be confirmed within one terminal of the plurality of terminals (lighting terminals 7a).

  According to said structure, there exists an effect similar to the said aspect 2.

  In the substrate inspection method according to aspect 14 of the present invention, in aspect 12, in the confirmation step, two terminals (confirmation terminals 7b and 24b) among the plurality of terminals (lighting terminals 7a and 24a, confirmation terminals 7b and 24b) are provided. ) May be confirmed.

  According to said structure, there exists an effect similar to the said aspect 4. FIG.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention. Furthermore, a new technical feature can be formed by combining the technical means disclosed in each embodiment.

  INDUSTRIAL APPLICABILITY The present invention can be used in general board inspection probe apparatuses that perform inspection by contacting a probe to an external reference or an inspection terminal.

DESCRIPTION OF SYMBOLS 1 Jig part 2 Reference pin 3 Moving pin 4 Opening part 5 CF panel substrate 6 TFT panel substrate (board to be inspected)
7 Terminal part for inspection (terminal part)
7a Lighting terminal 7b Confirmation terminal (position confirmation terminal)
8 Inspection unit 9, 9a, 9c Probe 9g Probe (parallel probe)
10, 10A Lighting inspection device (substrate inspection probe device)
11 Changeover switch 12 Resistance measurement part (connection state confirmation part)
20 Measurement Panel 21 IC Chip 22 FPC (Subject to be Inspected)
23 Reference hole 24 Drive electrode (terminal part)
24a lighting terminal 24b confirmation terminal (position confirmation terminal)
25 Backlight 30 Inspection module 31 Probe portion 31a Probe 31b Au bump (bump)
31c probe 32 probe FPC
32a Base substrate 32b Cover film 32c Reinforcing material 33 External lead terminal 34 Reference hole 51 Jig part 52 Corner part 53 FPC reference pins A, C, G Probe group L Distance P Arrangement pitch W Terminal width SW1 Switch

Claims (10)

A board inspection probe apparatus comprising an inspection unit having a probe that contacts a terminal part for inspection on a substrate to be inspected, and inspecting conduction between the terminal part and the probe,
A plurality of probe groups arranged corresponding to the arrangement pitch of each of the plurality of terminals constituting the terminal portion, the probe groups are arranged offset in the arrangement direction of the terminals,
A connection state confirmation unit for confirming an electrical connection state of at least one of the plurality of probe groups; and
A board inspection probe apparatus comprising a switching unit that switches a probe group electrically connected to the inspection unit to another probe group for each terminal.   The substrate inspection probe apparatus according to claim 1, wherein the connection state confirmation unit confirms a predetermined electrical connection state in one of the plurality of terminals.   The board inspection probe apparatus according to claim 2, further comprising a side-by-side probe arranged in parallel between probes of different probe groups arranged on one terminal whose electrical connection state is confirmed.   The substrate inspection probe apparatus according to claim 1, wherein the connection state confirmation unit confirms a predetermined electrical connection state between two terminals of the plurality of terminals.   5. The switching unit according to claim 1, wherein the switching unit switches a probe group that is electrically connected to the inspection unit when a predetermined electrical connection state is not confirmed by the connection state confirmation unit. 6. Board inspection probe device.   The board inspection probe apparatus according to claim 1, wherein a width of a contact portion of the probe with the terminal is smaller than an interval between the adjacent terminals. With FPC,
The board inspection probe apparatus according to claim 1, wherein the probe is formed as a wiring pattern on the FPC, and a bump is formed on the wiring pattern. A substrate inspection method in which a probe provided in an inspection unit is brought into contact with a terminal portion for inspection on a substrate to be inspected, and continuity between the terminal portion and the probe is inspected,
The probe is composed of a plurality of probe groups arranged corresponding to the arrangement pitch of each of the plurality of terminals constituting the terminal portion, and the probe groups are arranged shifted in the arrangement direction of the terminals,
A confirmation step of confirming an electrical connection state of at least one of the plurality of probe groups;
A switching step of switching a probe group electrically connected to the inspection unit to another probe group for each terminal,
In the switching step, when a predetermined electrical connection state is not confirmed in the confirmation step, a probe group electrically connected to the inspection unit is switched.   9. The substrate inspection method according to claim 8, wherein in the confirmation step, a predetermined electrical connection state is confirmed within one terminal of the plurality of terminals.   9. The substrate inspection method according to claim 8, wherein in the confirmation step, a predetermined electrical connection state between two terminals among the plurality of terminals is confirmed.

Images