JP2015173209A5

JP2015173209A5 -

Info

Publication number: JP2015173209A5
Application number: JP2014048941A
Authority: JP
Filing date: 2014-03-12
Publication date: 2018-02-15
Anticipated expiration: 2034-03-12

Description

実施形態に係る洗浄システムは、
被処理物に、硫酸イオンおよびアンモニウムイオンの少なくともいずれかを含む第１の溶液を供給する第１の供給部と、
前記第１の溶液が供給された被処理物に第２の溶液を供給する第２の供給部と、
前記第２の溶液が供給された被処理物を乾燥させる乾燥部と、
前記乾燥部において乾燥させた前記被処理物の表面の残留成分を除去する残留成分除去部と、を備え、
前記残留成分除去部は、前記乾燥部において乾燥させた被処理物を加熱する加熱部を有する。
The cleaning system according to the embodiment
A first supply unit for supplying a first solution containing at least one of sulfate ions and ammonium ions to the object to be treated;
A second supply unit for supplying a second solution to the object to be processed supplied with the first solution;
A drying section for drying the object to be treated supplied with the second solution;
A residual component removal unit that removes residual components on the surface of the object to be processed dried in the drying unit,
The residual component removing unit includes a heating unit that heats the workpiece dried in the drying unit .

Claims

A first supply unit for supplying a first solution containing at least one of sulfate ions and ammonium ions to the object to be treated;
A second supply unit for supplying a second solution to the object to be processed supplied with the first solution;
A drying section for drying the object to be treated supplied with the second solution;
A residual component removal unit that removes residual components on the surface of the object to be processed dried in the drying unit,
The said residual component removal part is a washing | cleaning system which has a heating part which heats the to-be-processed object dried in the said drying part .

The residual component removing unit is
A container capable of maintaining an atmosphere depressurized from atmospheric pressure;
A gas supply unit for supplying gas into the container;
A decompression section for decompressing the inside of the container to a predetermined pressure;
The cleaning system according to claim 1, further comprising:

The cleaning system according to claim 2, wherein the drying unit is provided inside the container.

A first supply unit for supplying a first solution containing at least one of sulfate ions and ammonium ions to the object to be treated;
A second supply unit for supplying a second solution to the object to be processed supplied with the first solution;
A drying section for drying the object to be treated supplied with the second solution;
A residual component removal unit that removes residual components on the surface of the object to be processed dried in the drying unit,
The residual component removing unit is
A plasma generator for supplying electromagnetic energy to a region for generating plasma;
A process gas supply unit for supplying a flop Rosesugasu the region for generating the plasma,
Having a cleaning system.

The said 2nd supply part further supplies the said 2nd solution to the said to-be-processed object from which the residual component of the surface was removed in the said residual component removal part. Cleaning system.

The residual component includes at least one of the sulfate ion and the ammonium ion,
A detection unit for detecting a component contained in the atmosphere inside the residual component removal unit;
The cleaning system according to claim 1, wherein the detection unit detects at least one of the sulfate ions and the ammonium ions desorbed from the object to be processed.

The cleaning system according to claim 4, wherein the process gas includes at least one of oxygen gas, a mixed gas containing oxygen gas, hydrogen gas, and a mixed gas containing hydrogen gas.

Supplying a first solution containing at least one of sulfate ions and ammonium ions to an object to be treated;
Supplying a second solution to the workpiece to which the first solution is supplied;
Drying the object to be treated supplied with the second solution;
A residual component removing step of removing a residual component on the surface of the workpiece to be dried in the drying step,
The residual component removing step includes
A cleaning method comprising a step of heating an object to be dried in the step of drying.

The cleaning method according to claim 8, wherein the heating step is performed in an atmosphere containing a predetermined gas and depressurized from an atmospheric pressure.

Supplying a first solution containing at least one of sulfate ions and ammonium ions to an object to be treated;
Supplying a second solution to the workpiece to which the first solution is supplied;
Drying the object to be treated supplied with the second solution;
A residual component removing step of removing a residual component on the surface of the workpiece to be dried in the drying step,
The residual component removing step includes
Using the plasma product generated from the process gas containing at least one of oxygen atoms and hydrogen atoms, treating the dried object to be processed in the drying step;
Cleaning method with.

The cleaning method according to claim 8, further comprising a step of supplying the second solution to the object to be processed from which residual components on the surface have been removed.

The said residual component contains at least any one of a sulfate ion and the said ammonium ion, The process of detecting at least any one of the said sulfate ion and the said ammonium ion which detach | desorbed from the said to-be-processed object was further provided. The washing | cleaning method as described in any one of these.

The cleaning method according to claim 12, wherein the end of the residual component removing step is determined based on the detection result detected by the detecting step.