JP2015163844A5 - - Google Patents
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- Publication number
- JP2015163844A5 JP2015163844A5 JP2014039295A JP2014039295A JP2015163844A5 JP 2015163844 A5 JP2015163844 A5 JP 2015163844A5 JP 2014039295 A JP2014039295 A JP 2014039295A JP 2014039295 A JP2014039295 A JP 2014039295A JP 2015163844 A5 JP2015163844 A5 JP 2015163844A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- transparent tube
- hole
- light
- shape measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010287 polarization Effects 0.000 claims 25
- 238000003384 imaging method Methods 0.000 claims 13
- 238000000034 method Methods 0.000 claims 13
- 230000001678 irradiating effect Effects 0.000 claims 5
- 239000013307 optical fiber Substances 0.000 claims 5
- 238000004148 unit process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014039295A JP6234274B2 (ja) | 2014-02-28 | 2014-02-28 | 内面形状計測方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014039295A JP6234274B2 (ja) | 2014-02-28 | 2014-02-28 | 内面形状計測方法および装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015163844A JP2015163844A (ja) | 2015-09-10 |
| JP2015163844A5 true JP2015163844A5 (enrdf_load_stackoverflow) | 2016-09-23 |
| JP6234274B2 JP6234274B2 (ja) | 2017-11-22 |
Family
ID=54186833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014039295A Active JP6234274B2 (ja) | 2014-02-28 | 2014-02-28 | 内面形状計測方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6234274B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210156681A1 (en) | 2017-05-31 | 2021-05-27 | Nippon Steel Corporation | Tubular body inner surface inspection method and tubular body inner surface inspection apparatus |
| JP6481217B1 (ja) | 2018-07-30 | 2019-03-13 | 新日鐵住金株式会社 | 管状体内表面検査装置及び管状体内表面検査方法 |
| CN117006958B (zh) * | 2023-08-08 | 2025-01-28 | 大连工业大学 | 一种高深径比小孔内表面几何特征精密测量方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0375544A (ja) * | 1989-08-18 | 1991-03-29 | Nippon Telegr & Teleph Corp <Ntt> | レーザ管内検査装置 |
| US5895927A (en) * | 1995-06-30 | 1999-04-20 | The United States Of America As Represented By The Secretary Of The Air Force | Electro-optic, noncontact, interior cross-sectional profiler |
| JP3427625B2 (ja) * | 1996-07-05 | 2003-07-22 | ソニー株式会社 | 複合偏光フィルタおよびｉｃリード検査システム |
| JP2000097846A (ja) * | 1998-09-21 | 2000-04-07 | Olympus Optical Co Ltd | 光走査プローブ装置 |
| JP2000266525A (ja) * | 1999-03-19 | 2000-09-29 | Komatsu Ltd | 電子部品検査装置 |
| JP2004101190A (ja) * | 2002-09-04 | 2004-04-02 | Hitachi Ltd | 管渠内面形状測定装置及び測定方法 |
| JP3837431B2 (ja) * | 2004-07-26 | 2006-10-25 | 国立大学法人 宮崎大学 | 管内面形状測定装置 |
| US7609373B2 (en) * | 2005-05-31 | 2009-10-27 | Kla-Tencor Technologies Corporation | Reducing variations in energy reflected from a sample due to thin film interference |
| JP5309542B2 (ja) * | 2007-12-05 | 2013-10-09 | 株式会社ニコン | 測定装置およびその方法 |
| JP5315124B2 (ja) * | 2009-05-12 | 2013-10-16 | 本田技研工業株式会社 | 車両用撮像装置および車両周辺監視装置 |
| EP2762860A4 (en) * | 2011-09-30 | 2015-05-27 | Olympus Corp | SHAPE MEASURING APPARATUS FOR INNER SURFACES, DETECTION HEAD AND ENDOSCOPE APPARATUS |
| JP2015025771A (ja) * | 2013-07-29 | 2015-02-05 | 株式会社Ihi | 内形測定装置 |
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2014
- 2014-02-28 JP JP2014039295A patent/JP6234274B2/ja active Active