JP2015132337A - Vibration isolating stand and substrate inspection equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration isolating stand capable of shortening a stabilization time by simple and inexpensive constitution.SOLUTION: A vibration isolating stand 1 comprises: a cradle 2 for placing an inspection object; an air spring 10a for holding the cradle 2; a fine adjustment leveling valve 11a for air supplying to or air exhaustion from the air spring 10a when the height of the cradle 2 is higher or lower than a reference height; and a quick air supply leveling valve 12a or a quick exhaust leveling valve 13a for air supplying to or air exhaustion from the air spring 10a when the height of the cradle 2 is lower than a first threshold value or higher than a second threshold value.

Description

  The present invention relates to a vibration isolation table and a base inspection apparatus.

  Conventionally, an anti-vibration table is used to inspect a base such as an FPD (Flat Panel Display). This vibration isolation table has a first stage on which a base to be inspected is arranged on a gantry and a second stage on which an inspection head is arranged. Moreover, the vibration isolation table holds the frame with an air spring to reduce vibration from the floor and keep the frame horizontal. Control of air supply or exhaust to the air spring is performed by a leveling valve provided adjacent to the air spring.

  The first and second stages can be moved in order to perform the inspection of the vibration isolation table. When these first and second stages move, the position of the center of gravity changes, so that the gantry becomes larger. Tilt. When the gantry tilted from the reference height (horizontal), normal inspection could not be performed, so the inspection had to be suspended until the gantry was level.

  Since the conventional vibration isolation table is provided only with a normal leveling valve for performing vibration isolation, the settling time until the gantry becomes horizontal is very long.

  Therefore, in Patent Document 1, a pressure sensor for detecting the pressure of the additional tank that supplies air to the air spring is provided, and the pressure of the additional tank is controlled by opening and closing the electromagnetic valve according to the detected pressure. An anti-vibration table that reduces time is disclosed.

JP-A-5-296288

  However, the vibration isolation table provided with the pressure sensor for detecting the pressure of the additional tank is expensive due to the provision of the pressure sensor, and further, the configuration is very complicated because the opening / closing of the electromagnetic valve is controlled according to the pressure.

  In view of the above, an object of the present invention is to provide a vibration isolation table that can shorten the settling time with an inexpensive and simple configuration.

  The vibration isolation table according to one aspect of the present invention includes a frame on which an inspection object is mounted, a gas spring that holds the frame, and the gas spring when the height of the frame is lower or higher than a reference height. To the gas spring when the height of the gantry is lower than a first threshold or higher than a second threshold. And a second on-off valve for exhausting air from the gas spring.

  The base inspection apparatus according to one aspect of the present invention is a base inspection apparatus for inspecting a base, and includes a movable inspection head for inspecting the base, a base on which the base is mounted, and the base A gas spring, a first on-off valve for supplying air to the gas spring or exhausting from the gas spring when the height of the gantry is lower or higher than a reference height, and the height of the gantry And a second on-off valve for supplying air to the gas spring or exhausting from the gas spring when the value becomes lower than the first threshold value or higher than the second threshold value.

  According to the vibration isolation table of the present invention, the settling time can be shortened with an inexpensive and simple configuration.

It is a figure which shows an example of the whole structure of the vibration isolator which concerns on this embodiment. It is a figure for demonstrating the detailed structure of the leveling valves 11a-13a. It is a figure for demonstrating an effect | action when the height of the mount frame 2 is lower than a 1st threshold value. It is a figure for demonstrating the operation | movement chart of each leveling valve 11a-13a. It is a flowchart for demonstrating operation | movement of each leveling valve 11a-13a.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the overall configuration of the vibration isolation table of this embodiment will be described with reference to FIG. FIG. 1 is a diagram illustrating an example of the overall configuration of the vibration isolation table according to the present embodiment. 1A is a view of the vibration isolation table viewed from directly above, and FIG. 1B is a diagram of the vibration isolation table viewed from the X direction of FIG. (C) is the figure which looked at the vibration isolator from the Y direction of Fig.1 (a). Further, in FIG. 1 (a), the illustration of the structure disposed on the gantry is omitted for the sake of simplicity.

  The anti-vibration table 1 has a first stage 4 on which a base to be inspected and the like are arranged on a gantry 2 via a movable mechanism 3. A gate-shaped gantry 5 is disposed on the gantry 2. A second stage 7 is attached to the gantry 5 via a movable mechanism 6, and an inspection head 8 such as a laser microscope is mounted on the second stage 7. Thereby, the first stage can be moved in the X direction, and the second stage can be moved in the Y direction. The vibration isolation table 1 constitutes a substrate inspection apparatus that inspects the substrate with the inspection head 8.

  Further, the gantry 2 is held by air springs 10a, 10b, and 10c as gas springs arranged at three places. In addition, although air is supplied to the air springs 10a, 10b, and 10c from an air supply source (see FIG. 2), a gas other than air may be supplied. The air springs 10a to 10c have functions of reducing vibration from the floor and keeping the gantry 2 horizontal when the first stage 4 or the second stage 7 is moved to change the center of gravity.

  Control of air supply to the air springs 10a to 10c or exhaust from the air springs 10a to 10c is performed by a plurality of leveling valves (open / close valves) arranged adjacent to each of the three air springs 10a to 10c. Is called.

  In the present embodiment, a plurality of leveling valves arranged adjacent to the air spring 10a are a normal fine adjustment leveling valve 11a for performing vibration isolation, and a quick air supply leveling for rapidly supplying air. It comprises a valve 12a and a quick exhaust leveling valve 13a for rapid exhaust. In the following description, the fine adjustment leveling valve 11a, the rapid air supply leveling valve 12a, and the rapid exhaust leveling valve 13a are also simply referred to as leveling valves. The same applies to leveling valves 11b and 11c for fine adjustment, leveling valves 12b and 12c for quick air supply, and leveling valves 13b and 13c for quick exhaust described later.

  The leveling valves 11a to 13a are arranged from the center of the gantry 2 to the outside in the order of the fine adjustment leveling valve 11a, the rapid air supply leveling valve 12a, and the rapid exhaust leveling valve 13a. In addition, the order of arrangement | positioning of each leveling valve 11a-13a is not limited to the said order, Another order may be sufficient.

  Similarly, the plurality of leveling valves arranged adjacent to the air spring 10b are configured by a fine adjustment leveling valve 11b, a quick air supply leveling valve 12b, and a quick exhaust leveling valve 13b. The leveling valves 11b to 13b are arranged from the center of the gantry 2 to the outside in the order of the fine adjustment leveling valve 11b, the rapid air supply leveling valve 12b, and the rapid exhaust leveling valve 13b.

  Similarly, the plurality of leveling valves disposed adjacent to the air spring 10c are configured by a fine adjustment leveling valve 11c, a quick air supply leveling valve 12c, and a quick exhaust leveling valve 13c. Then, the leveling valves 11c to 13c are arranged in order of the fine adjustment leveling valve 11c, the quick air supply leveling valve 12c, and the quick exhaust leveling valve 13c from the center of the gantry 2 to the outside.

  An additional tank 14a for stabilizing the pressure in the air spring 10a is disposed under the air spring 10a. An attachment stage 15 to which the leveling valves 11a to 13a, 11b to 13b, and 11c to 13c are attached is provided at a predetermined position on the side of the additional tank 14a. In addition, a vibration isolation foot 16 installed on a floor or the like is provided at a predetermined position below the additional tank 14a. In addition, although illustration is abbreviate | omitted, the additional tank is also arrange | positioned under the air springs 10b and 10c.

  In addition, although each leveling valve 11a-13a, 11b-13b, and 11c-13c are each arrange | positioned at three places adjacent to the air springs 10a, 10b, and 10c, the place arrange | positioned is limited to three places. What is necessary is just to be arrange | positioned at least 1 place rather than a thing.

  The vibration isolator 1 of the present embodiment uses the quick air supply leveling valve 12a and the quick exhaust leveling valve 13a in addition to the fine adjustment leveling valve 11a, and when the gantry 2 is greatly inclined from the horizontal state, The settling time is shortened by supplying air or exhausting rapidly.

  The vibration isolation table 1 may have a configuration in which only one of the quick air supply leveling valve 12a and the quick exhaust leveling valve 13a is added. That is, the static settling time can be shortened compared with the configuration of the fine adjustment leveling valve 11a only by rapidly supplying air or exhausting rapidly.

  Here, the detailed structure of each leveling valve 11a-13a, 11b-13b, 11c-13c is demonstrated. Since the leveling valves 11a to 13a, 11b to 13b, and 11c to 13c have the same configuration, the leveling valves 11a to 13a will be described as representatives.

  FIG. 2 is a diagram for explaining a detailed configuration of the leveling valves 11a to 13a.

  The fine adjustment leveling valve 11 a communicates with the additional tank 14 a via the air supply / exhaust pipe 21. The additional tank 14 a communicates with the air spring 10 a via the air supply / exhaust line 22. A speed controller 23 for controlling only the exhaust amount is provided at a predetermined position in the middle of the air supply / exhaust pipe line 22. Further, the quick air supply leveling valve 12 a and the quick exhaust leveling valve 13 a communicate with the air spring 10 a via the air supply / exhaust line 24. The rapid air supply leveling valve 12a and the rapid exhaust leveling valve 13a communicate with the air spring 10a via the air supply / exhaust pipe 24, but may communicate with the additional tank 14a.

  The fine adjustment leveling valve 11a includes an air supply line 30a for supplying air from an air supply source, a cylinder 30 having a space 30b communicating with the air supply line 30a, a valve head 31a disposed in the space 30b, And a valve shaft 31b that slides inside the cylinder 30 and a valve 31 having a valve end 31c disposed outside the cylinder 30. A through hole 31d for exhausting air from the additional tank 14a is provided at the approximate center of the valve 31.

  The valve head 31a is provided with a seal member 32 for closing the air supply conduit 30a. A spring member 33 is provided between the upper surface of the cylinder 30 and the valve end 31c.

  A support member 34 and an L-shaped seesaw 35 supported by the support member 34 are provided at predetermined positions on the upper surface of the cylinder 30. At the tip of the seesaw 35 on the gantry 2 side, a pressing pin 36 against which the bottom surface of the gantry 2 is pressed is provided. Further, a seal member 37 for closing the through hole 31 d provided in the valve 31 is provided at a predetermined position on the bottom surface of the seesaw 35. When the pressing pin 36 is pressed by the change in the height of the gantry 2, the seesaw 35 moves up and down by the action of the seesaw with the support member 34 as a fulcrum. The seesaw 35 is constantly acted on by a compression spring (not shown) in a direction in which the seesaw 35 is pushed up.

  The fine adjustment leveling valve 11a is in close contact with the through hole 31d and the seal member 37 when the height of the gantry 2 is a reference height (horizontal). Further, in the fine adjustment leveling valve 11a, since the valve 31 is pushed up to a predetermined position by the inactive force of the spring member 33, the air supply conduit 30a and the seal member 32 are in close contact with each other. As described above, in the fine adjustment leveling valve 11a, when the height of the gantry 2 is the reference height (horizontal), the air supply conduit 30a is blocked by the seal member 32, and the through hole 31d is blocked by the seal member 37. Therefore, the operation OFF state in which no air supply or exhaust is performed is entered.

  Further, when the height of the gantry 2 is higher than the reference height (horizontal), the force with which the gantry 2 presses the pressing pin 36 becomes small, and the seesaw 35 moves upward. Thereby, the close contact state between the through hole 31d and the seal member 37 is released, and the through hole 31d communicates with the outside. As described above, when the height of the gantry 2 is higher than the reference height (horizontal), the fine adjustment leveling valve 11a allows the air in the additional tank 14a to be externally supplied via the air supply / exhaust pipe 21, the space 30b, and the through hole 31d. The exhaust state is released.

  Further, when the height of the gantry 2 is lower than the reference height (horizontal), the force with which the gantry 2 presses the pressing pin 36 is increased, and the seesaw 35 moves downward. As a result, the valve 31 moves downward against the inelastic force of the spring member 33, the close contact state between the air supply line 30a and the seal member 32 is released, and the air supply line 30a communicates with the space 30b. As described above, in the fine adjustment leveling valve 11a, when the height of the gantry 2 is lower than the reference height (horizontal), the air from the air supply source passes through the air supply line 30a, the space 30b, and the air supply / exhaust line 21. Thus, the air supply state supplied to the additional tank 14a is established.

  The fine adjustment leveling valve 11a is a first on-off valve that supplies air to the air spring 10a or exhausts air from the air spring 10a when the height of the gantry 2 is lower or higher than a reference height (horizontal). Configure.

  Next, the configuration of the rapid air supply leveling valve 12a will be described. In the rapid air supply leveling valve 12a, only the configuration different from the fine adjustment leveling valve 11a will be described with reference numerals. As will be described in detail in FIG. 4 to be described later, the leveling valve 12a for rapid air supply is such that the height of the gantry 2 is lower than the first threshold value as indicated by a dashed line 41 (see FIG. 4). The air supply is performed only when it becomes.

  The rapid supply leveling valve 12a is provided with a seesaw 35a in which the position of the pressing pin 36a is lower than the position of the pressing pin 36 of the fine adjustment leveling valve 11a. Further, the leveling valve 12a for rapid air supply is provided with a seal member 38 on the upper surface of the valve end 31c so as to always close the through hole 31d of the valve 31. With such a configuration, the leveling valve 12a for rapid air supply is not always exhausted, and in the present embodiment, the height of the gantry 2 is increased only when the height of the gantry 2 is extremely lower than the reference height. Air supply is performed only when the reference height is lower than the first threshold.

  Next, the configuration of the quick exhaust leveling valve 13a will be described. In the rapid exhaust leveling valve 13a, only the configuration different from the fine adjustment leveling valve 11a will be described with reference numerals. As will be described in detail in FIG. 4 to be described later, the quick exhaust leveling valve 13a has a height of the gantry 2 higher than the second threshold value as indicated by a two-dot chain line denoted by reference numeral 42 (see FIG. 4). Exhaust is performed only when it becomes.

  The rapid exhaust leveling valve 13a is provided with a seesaw 35b in which the position of the pressing pin 36b is higher than the position of the pressing pin 36 of the fine adjustment leveling valve 11a. Further, the quick exhaust leveling valve 13a is provided with a plug 39 so as to always block the air supply line 30a of the cylinder 30. With this configuration, the quick exhaust leveling valve 13a is not always supplied with air, and in the present embodiment, the height of the gantry 2 is increased only when the height of the gantry 2 becomes extremely higher than the reference height. Exhaust is performed only when the reference height is higher than the second threshold.

  The quick air supply leveling valve 12a or the quick exhaust leveling valve 13a is configured to supply air to the air spring 10a when the height of the gantry 2 is lower than the first threshold value or higher than the second threshold value. A second on-off valve that exhausts air from the air spring 10a is configured.

  The rapid air supply leveling valve 12a and the rapid exhaust leveling valve 13a have substantially the same configuration as the fine adjustment leveling valve 11a, but have a simpler configuration than the fine adjustment leveling valve 11a. Things may be used. For example, the rapid air supply leveling valve 12a does not exhaust, and therefore the through hole 31d of the valve 31 may not be provided. Thereby, it is not necessary to provide the sealing member 38 for closing the through hole 31d. Further, since the quick exhaust leveling valve 13a does not supply air, the air supply line 30a of the cylinder 30 may not be provided. This eliminates the need to provide the plug 39 for closing the air supply line 30a.

  Next, the operation of the vibration isolator 1 configured as described above will be described.

  First, the case where the height of the gantry 2 is extremely lower than the reference height (horizontal), that is, lower than the first threshold will be described with reference to FIG. FIG. 3 is a diagram for explaining the operation when the height of the gantry 2 is lower than the first threshold value.

  When the height of the gantry 2 becomes lower than the first threshold value, the force with which the gantry 2 presses the pressing pin 36 of the fine adjustment leveling valve 11a increases, and the seesaw 35 is lowered by the action of the seesaw with the support member 34 as a fulcrum. Move in the direction. As a result, the valve 31 moves downward against the inelastic force of the spring member 33, and the close contact state between the air supply conduit 30a and the seal member 32 is released. As a result, the air supply line 30a and the space 30b communicate with each other, and air from the air supply source is supplied to the additional tank 14a via the air supply / exhaust line 21. The air supplied to the additional tank 14 a is supplied to the air spring 10 a via the air supply / exhaust pipe 22.

  Similarly, in the rapid air supply leveling valve 12a, the seesaw 35a is moved downward, so that the valve 31 is moved downward against the inelastic force of the spring member 33, and the air supply conduit 30a, the seal member 32, The contact state of is released. As a result, the air supply line 30a and the space 30b communicate with each other, and air from the air supply source is supplied to the air spring 10a via the air supply / exhaust line 24.

  At this time, since the air supply line 30a of the quick exhaust leveling valve 13a is blocked by the plug 39, even if the valve 31 moves downward against the instability of the spring member 33, the air supply is not performed. Not done.

  When air is supplied to the air spring 10a by the air supplied from the fine adjustment leveling valve 11a and the quick air supply leveling valve 12a, the height of the gantry 2 increases. When the height of the gantry 2 is equal to or higher than the first threshold and lower than the reference height, the position of the pressing pin 36a is lower than the position of the pressing pin 36, so that the seesaw 35a of the rapid air supply leveling valve 12a is moved upward. Move. Then, the valve 31 moves upward due to the inactive force of the spring member 33 of the quick air supply leveling valve 12a, and the air supply line 30a is blocked by the seal member 32. Thereby, the air supply by the quick air supply leveling valve 12a is stopped, and the operation is turned off. On the other hand, the fine adjustment leveling valve 11a continues to supply air. When the height of the gantry 2 reaches the reference height, the supply of air is stopped and the operation is turned off.

  Next, the case where the height of the gantry 2 is extremely higher than the reference height (horizontal), that is, higher than the second threshold will be described with reference to FIG. 2 described above.

  When the height of the gantry 2 becomes higher than the second threshold value, the force with which the gantry 2 presses the pressing pin 36 of the fine adjustment leveling valve 11a is reduced, and the seesaw 35 is lifted by the action of the seesaw with the support member 34 as a fulcrum. Move in the direction. Thereby, the contact | adherence state of 31 d of through-holes and the sealing member 37 is cancelled | released. As a result, the through hole 31d communicates with the outside, and the air from the additional tank 14a is discharged to the outside through the air supply / exhaust pipe 21, the space 30b, and the through hole 31d.

  Similarly, in the quick exhaust leveling valve 13a, the contact state between the through hole 31d and the seal member 37 is released by moving the seesaw 35b upward. As a result, the air supply line 30a and the space 30b communicate with each other, and the air from the air spring 10a is discharged to the outside through the air supply / exhaust line 24, the space 30b, and the through hole 31d.

  At this time, since the through hole 31d of the quick air supply leveling valve 12a is closed by the seal member 38, no exhaust is performed even if the seesaw 35b moves upward.

  An operation chart of each of the leveling valves 11a to 13a will be described with reference to FIG. FIG. 4 is a diagram for explaining an operation chart of each of the leveling valves 11a to 13a. In FIG. 4, the solid line indicated by reference numeral 40 is an operation chart of the fine adjustment leveling valve 11a, and the alternate long and short dash line indicated by reference numeral 41 is an operation chart of the quick air supply leveling valve 12a. A chain line is an operation chart of the quick exhaust leveling valve 13a.

  As shown in FIG. 4, when the height of the gantry 2 is lower than the reference height (horizontal) (including the case where the height of the gantry 2 is lower than the first threshold value), Supply air. Then, when the height of the gantry 2 reaches the reference height (horizontal), the fine adjustment leveling valve 11a is turned off so as not to supply or exhaust air. Further, the fine adjustment leveling valve 11a performs exhaust when the height of the gantry 2 is higher than the reference height (horizontal) (including the case where the height of the gantry 2 is higher than the second threshold).

  Further, the rapid air supply leveling valve 12a supplies air when the height of the gantry 2 is lower than the first threshold value. The rapid air supply leveling valve 12a is turned off when the height of the gantry 2 is equal to or higher than the first threshold value.

  Further, the quick exhaust leveling valve 13a performs exhaust when the height of the gantry 2 is higher than the second threshold value. The quick exhaust leveling valve 13a is turned off when the height of the gantry 2 is equal to or lower than the second threshold value.

  As described above, when the height of the gantry 2 is lower than the first threshold value, the air spring 10a is rapidly supplied with air by the fine adjustment leveling valve 11a and the quick air supply leveling valve 12a. On the other hand, when the height of the gantry 2 is higher than the second threshold, exhaust from the air spring 10a is rapidly performed by exhaust by the fine adjustment leveling valve 11a and the quick exhaust leveling valve 13a. When the height of the gantry 2 is equal to or higher than the first threshold and lower than the reference height, air is supplied only by the fine adjustment leveling valve 11a, and the height of the gantry 2 is equal to or lower than the second threshold and higher than the reference height. The exhaust is performed only by the fine adjustment leveling valve 11a so that the height of the gantry 2 becomes the reference height.

  FIG. 5 is a flowchart for explaining the operation of the leveling valves 11a to 13a.

  First, when there is a change in the center of gravity due to the first stage 4 or the second stage 7, the height of the gantry 2 changes (step S1). The operations of the leveling valves 11a to 13a differ depending on the height of the gantry 2.

  When the height of the gantry 2 is lower than the first threshold, the operation of each leveling valve 11a to 13a is as follows: the quick exhaust leveling valve 13a is OFF, the quick air supply leveling valve 12a is air supply, and fine adjustment The leveling valve 11a supplies air (step S2).

  The leveling valve 12a for rapid air supply is supplied with air and the air supplied by the leveling valve 11a for fine adjustment causes the level of the gantry 2 to exceed the first threshold and lower than the reference height (horizontal). In the operation of the valves 11a to 13a, the quick exhaust leveling valve 13a is turned off, the quick air supply leveling valve 12a is turned off, and the fine adjustment leveling valve 11a is supplied (step S3).

  When the height of the gantry 2 becomes the reference height (horizontal) due to the air supply of the fine adjustment leveling valve 11a, the operation of each leveling valve 11a to 13a is as follows. The air leveling valve 12a is turned off, and the fine adjustment leveling valve 11a is turned off (operation OFF) (step S4).

  On the other hand, when the height of the gantry 2 is higher than the second threshold, the operations of the leveling valves 11a to 13a are as follows: the quick exhaust leveling valve 13a is exhausted, the quick air supply leveling valve 12a is OFF, and fine adjustment is performed. The leveling valve 11a for exhaust becomes exhaust (step S5).

  When the height of the gantry 2 is lower than the second threshold and higher than the reference height (horizontal) by exhausting by the quick exhaust leveling valve 13a and the fine adjustment leveling valve 11a, the leveling valves 11a to 13a In operation, the quick exhaust leveling valve 13a is turned off, the quick air supply leveling valve 12a is turned off, and the fine adjustment leveling valve 11a is exhausted (step S6).

  When the height of the gantry 2 becomes the reference height (horizontal) due to the exhaust of the fine adjustment leveling valve 11a, the operation of each leveling valve 11a to 13a is as follows. The leveling valve 12a for operation is turned OFF, and the leveling valve 11a for fine adjustment is turned OFF (operation OFF) (step S7).

  As described above, the vibration isolation table 1 is provided with the quick air supply leveling valve 12a and the quick exhaust leveling valve 13a in addition to the fine adjustment leveling valve 11a, and the gantry 2 is extremely lower than the reference height. In the case of lower than the threshold value), the air supply by the quick air supply leveling valve 12a and the air supply by the fine adjustment leveling valve 11a are performed. Thereby, when the mount frame 2 is extremely lower than the reference height, rapid air supply to the air spring 10a is performed.

  On the other hand, when the gantry 2 is extremely higher than the reference height (higher than the second threshold value), the vibration isolation table 1 performs exhaust by the quick exhaust leveling valve 13a and exhaust by the fine adjustment leveling valve 11a. did. Thereby, when the mount frame 2 is extremely higher than the reference height, rapid exhaust from the air spring 10a is performed.

  With such a configuration, the vibration isolation table 1 can shorten the time until the gantry 2 becomes horizontal, compared to a configuration in which only the fine adjustment leveling valve 11a is provided. Further, the vibration isolation table 1 is not provided with a pressure sensor for detecting the pressure of the additional tank, and it is not necessary to control the opening / closing of the electromagnetic valve in accordance with the detected pressure, so that it has a low-cost and simple configuration. .

  Therefore, according to the vibration isolation table of the present embodiment, the settling time can be shortened with an inexpensive and simple configuration.

  Note that the steps in the flowchart in this specification may be executed in a different order for each execution by changing the execution order and executing a plurality of steps at the same time as long as it does not contradict its nature.

  The present invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Vibration isolator, 2 ... Mount, 3, 6 ... Movable mechanism, 4 ... 1st stage, 5 ... Gantry, 7 ... 2nd stage, 8 ... Inspection head, 10a-10c ... Air spring, 11a-11d ... Fine Leveling valve for adjustment, 12a to 12c ... Leveling valve for quick air supply, 13a to 13c ... Leveling valve for quick exhaust, 14a ... Additional tank, 15 ... Mounting stage, 16 ... Anti-vibration feet 21, 22, 24 ... Feeding Exhaust pipe, 23 ... speed controller, 30 ... cylinder, 30a ... air supply pipe, 30b ... space, 31 ... valve, 31a ... valve head, 31b ... valve shaft, 31c ... valve end, 31d ... through hole, 32, 37 , 38 ... sealing member, 33 ... spring member, 34 ... support member, 35, 35a, 35b ... seesaw, 36, 36a, 36b ... pressing pin, 39 ... plug.

Claims (8)

A platform on which the inspection object is mounted;
A gas spring for holding the mount;
A first on-off valve for supplying air to the gas spring or exhausting the gas spring when the height of the gantry is lower or higher than a reference height;
A second on-off valve for supplying air to the gas spring or exhausting from the gas spring when the height of the gantry is lower than a first threshold value or higher than a second threshold value;
A vibration isolation table characterized by comprising:   2. The first on-off valve and the second on-off valve are arranged in the order of the first on-off valve and the second on-off valve from the center of the gantry to the outside. The vibration isolation table described. An additional tank communicating with the gas spring and stabilizing the pressure in the gas spring;
The first on-off valve communicates with the additional tank, and supplies air to the gas spring or exhausts air from the gas spring through the additional tank. Vibration isolation table. A plurality of the gas springs;
4. The vibration isolation table according to claim 1, wherein the first on-off valve and the second on-off valve are provided adjacent to the plurality of gas springs. 5. A substrate inspection device for inspecting a substrate,
A movable inspection head for inspecting the substrate;
A platform on which the base is mounted;
A gas spring for holding the mount;
A first on-off valve for supplying air to the gas spring or exhausting the gas spring when the height of the gantry is lower or higher than a reference height;
A second on-off valve for supplying air to the gas spring or exhausting from the gas spring when the height of the gantry is lower than a first threshold value or higher than a second threshold value;
A board inspection apparatus characterized by comprising:   The said 1st on-off valve and the said 2nd on-off valve are arrange | positioned in order of the said 1st on-off valve and the said 2nd on-off valve on the outer side from the center of the said mount frame. The described base inspection device. An additional tank communicating with the gas spring and stabilizing the pressure in the gas spring;
The first on-off valve communicates with the additional tank, and supplies air to the gas spring or exhausts air from the gas spring through the additional tank. Base inspection equipment. A plurality of the gas springs;
The base inspection apparatus according to claim 5, wherein the first on-off valve and the second on-off valve are provided adjacent to the plurality of gas springs.

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