JP2015130462A - Slit nozzle cleaning apparatus, coating apparatus for work and slit nozzle cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slit nozzle cleaning apparatus which enhances reliability furthermore in the cleaning of a slit nozzle, to provide a coating apparatus for work including the slit nozzle cleaning apparatus, and to provide a slit nozzle cleaning method using the slit nozzle cleaning apparatus.SOLUTION: Even if a cleaning solution (e.g., water) having higher surface tension or lower steam pressure when compared with a solvent is used, the cleaning solution can be prevented from adhering to a slit nozzle by abutting a scraper, to which the cleaning solution is adhering, because the cleaning solution is removed from the scraper by drying.

Description

  The present invention relates to a slit nozzle cleaning device that scrapes and cleans a coating solution adhering to a slit nozzle that applies a coating solution to a workpiece with a scraper, a workpiece coating device including the slit nozzle cleaning device, and the slit nozzle cleaning device. The present invention relates to a used slit nozzle cleaning method.

  2. Description of the Related Art Conventionally, for example, a substrate coating apparatus that applies a resist solution (coating solution) to a glass substrate (work) from a slit nozzle is known. The substrate coating apparatus forms a coating film on a glass substrate by applying a resist solution while conveying the glass substrate in a direction orthogonal to the slit direction of the slit nozzle. However, in the substrate coating apparatus, the slit nozzle may move in a direction orthogonal to the slit direction.

  In such a substrate coating apparatus, the slit nozzle may be cleaned by removing the coating liquid adhering to the side surface of the slit nozzle.

  For example, Patent Document 1 describes a slit nozzle cleaning mechanism that removes a coating liquid by scraping the coating liquid by moving the scraper while bringing a flat scraper made of rubber into contact with the tip and side surfaces of the slit nozzle. .

  Patent Document 1 also describes that the scraper is cleaned with a sprayed solvent (same type as the solvent of the resist solution).

JP 2004-55607 A

  However, the scraper cleaning mechanism described in Patent Document 1 has the following concerns. If the slit nozzle is cleaned with the cleaning liquid remaining in the scraper, the coating liquid on the tip and side surfaces of the slit nozzle may not be sufficiently removed. Also, the cleaning liquid may adhere to the tip and side surfaces of the slit nozzle during the cleaning of the slit nozzle. In particular, in the portion of the slit nozzle that first contacts the scraper, the coating liquid tends to remain and the cleaning liquid tends to adhere.

  When the coating liquid is applied to the workpiece when the slit nozzle is not sufficiently cleaned or the cleaning liquid is attached to the slit nozzle, the coating film formed at the initial stage of the coating process remains and deteriorates with time. Liquid or cleaning liquid. As a result, a uniform coating film is not formed on the workpiece.

  In order to form a uniform coating film, even if a preliminary coating process (priming process) is performed before the coating process to discharge a coating solution that has deteriorated over time, the coating liquid remaining after cleaning the slit nozzle, etc. In order to completely discharge the liquid, it is necessary to discharge more coating liquid. Further, even if the priming process is performed, the coating liquid remaining after the slit nozzle cleaning may not be discharged completely.

  The above-described problem is likely to occur particularly when a cleaning liquid (for example, water) having a high surface tension (N / m) or a low vapor pressure (Pa) is used.

  Therefore, the present invention has been made in view of the above-described conventional problems, and a slit nozzle cleaning device with higher reliability in cleaning the slit nozzle, a workpiece coating device including the slit nozzle cleaning device, and It is an object of the present invention to provide a slit nozzle cleaning method using the slit nozzle cleaning device.

  The present invention is a slit nozzle cleaning device for cleaning a slit nozzle that applies a coating liquid to a workpiece, and scrapes the coating liquid adhering to the slit nozzle, and abuts the scraper against a side surface of the slit nozzle. A moving mechanism for moving the scraper in the slit direction of the slit nozzle, a cleaning mechanism for spraying a cleaning liquid onto the scraper to remove the coating liquid, and a drying mechanism for drying the cleaning liquid attached to the scraper; Is provided.

  The slit nozzle cleaning device of the present invention dries the scraper used for cleaning the slit nozzle to which the coating liquid (for example, medicine and ink) adheres by a drying mechanism. Then, the cleaning liquid adhering to the scraper dries and evaporates. Therefore, the slit nozzle cleaning apparatus of the present invention can remove the cleaning liquid from the scraper by drying, even when using a cleaning liquid (for example, water) having a higher surface tension or lower vapor pressure than the solvent. It is possible to prevent the slit nozzle from being cleaned again.

  More specifically, the drying mechanism may dry the cleaning liquid adhering to the scraper by blowing air downward from the blowout port using a blowout member formed with a blowout port.

  The drying mechanism may blow warm air downward to dry the scraper, but may simply blow out room temperature air downward to simplify the slit nozzle cleaning device.

  Moreover, the said cleaning mechanism may spray the said washing | cleaning liquid downward from the said blower outlet using the said blowing member.

  In this configuration, the outlet of the blowing member blows out the cleaning liquid and air. That is, there is no need to move the scraper for drying. Therefore, this configuration can minimize the movement of the scraper and can simplify the configuration of the slit nozzle cleaning device.

  The moving mechanism may pass the scraper at a drying position, and the drying mechanism may blow the air while the scraper is passing through the drying position.

  Thereby, the drying mechanism can spray air over the entire scraper and remove the cleaning liquid.

  Further, the moving mechanism reciprocates the scraper at the drying position, temporarily stops the scraper at the drying position, and the drying mechanism is configured to stop the scraper while the scraper is temporarily stopped at the drying position. The air may be blown to a contact portion of the scraper with the side surface of the slit nozzle.

  In this configuration, in addition to removing the cleaning liquid from the entire scraper while the scraper is passing through the drying position of the scraper, the drying mechanism has a high possibility of causing the cleaning liquid to adhere to the side surface of the slit nozzle during the temporary stop at the drying position of the scraper. Air is blown to the part. Thereby, the cleaning liquid remaining in the scraper is more reliably dried and evaporated.

  The present invention is not limited to the slit nozzle cleaning device, and the slit nozzle cleaning device, a transport mechanism that relatively moves the workpiece and the slit nozzle, and a coating liquid supply that supplies the coating liquid from the slit nozzle. And a workpiece coating device including a mechanism.

  The present invention may also be a slit nozzle cleaning method for cleaning a slit nozzle that applies a coating liquid to a workpiece, and the slit nozzle cleaning method scrapes the coating liquid adhering to the side surface of the slit nozzle with a scraper. A nozzle cleaning step, a cleaning step of cleaning the scraper to which the coating liquid has adhered, and a drying step of drying the cleaned scraper.

  According to the present invention, by removing the cleaning liquid by drying the scraper, the cleaning liquid is prevented from adhering to the slit nozzle, so that the reliability of cleaning the slit nozzle is increased.

It is a top view of the coating device for substrates concerning this embodiment. It is a side view of the coating device for substrates concerning this embodiment. It is a figure for demonstrating scraper washing | cleaning by a slit nozzle washing | cleaning apparatus. It is a figure for demonstrating scraper drying by a slit nozzle washing | cleaning apparatus. It is a block diagram which shows a part of structure of the control part of the coating device for substrates which concerns on this embodiment. It is a flowchart which shows the process of the coating device for substrates which concerns on this embodiment. It is a figure for demonstrating the modification of the movement of a scraper holding member. It is a figure for demonstrating the modification of a washing-drying member.

  As shown in FIGS. 1 and 2, the substrate coating apparatus 10 according to the present embodiment includes a main frame 1, a sub frame 2, an upstream conveyor 3, an intermediate conveyor 4, a downstream conveyor 5, a slit nozzle 6, and a slit nozzle. A cleaning mechanism 7 and a controller unit 100 are provided.

  The controller unit 100 is connected to the main frame 1. The control unit 101 (see FIG. 5) of the controller unit 100 operates the driving components of the main frame 1 and the sub frame 2, supplies the coating liquid from the slit nozzle 6, and the cleaning liquid and air of the slit nozzle cleaning mechanism 7. Control the blowout.

  The main frame 1 holds a subframe 2 on the upper surface. The upstream conveyor 3, the intermediate conveyor 4, and the downstream conveyor 5 are respectively held above the main frame 1 by rails (not shown). The main frame 1 holds the slit nozzle 6 above the intermediate conveyor 4 via a holding member 6A.

  The slit nozzle 6 is moved up and down between a discharge position and a retracted position above the intermediate conveyor 4 by a drive unit (not shown) of the holding member 6A. The retreat position is a position above the discharge position. As shown in FIG. 2, the slit nozzle 6 has a shape with a narrowed tip when the substrate coating apparatus 10 is viewed from the side. The slit nozzle 6 discharges the resist solution from the slit opened at the tip. However, the slit nozzle 6 is not limited to the resist solution, and may eject ink, for example.

  The upstream conveyor 3, the intermediate conveyor 4, and the downstream conveyor 5 include a plurality of rollers 31, 41, and 51, respectively. The rollers 31, 41, 51 are rotated by a driving force from a motor. Then, the upstream conveyor 3, the intermediate conveyor 4, and the downstream conveyor 5 convey the glass substrate linearly from the upstream side toward the downstream side. However, the substrate coating apparatus 10 may be configured such that the glass substrate and the slit nozzle 6 move relative to each other. For example, the glass substrate is fixed and the slit nozzle 6 is moved in a direction perpendicular to the slit direction. Absent. Moreover, conveyance of a glass substrate may be implement | achieved not by a conveyor but by mechanisms, such as a belt or a chain. Further, the substrate coating apparatus 10 is not limited to a glass substrate, and may transport a film-like member (work) to be applied.

  The slit nozzle cleaning mechanism 7 includes a cleaning table 70, a priming roller 71, a scraper holding member 72, a cleaning / drying member 74, and a holding member 75. A set of the slit nozzle cleaning mechanism 7 and the controller unit 100 corresponds to the slit nozzle cleaning device of the present invention.

  The cleaning table 70 has a box shape with an open upper surface, and is held by the subframe 2. The priming roller 71 and the scraper holding member 72 are provided inside the cleaning table 70. The cleaning table 70 reciprocates in parallel with the substrate transport direction above the intermediate conveyor 4 with the priming roller 71 and the scraper holding member 72 provided therein. The cleaning table 70 stops at the priming position, the slit nozzle cleaning position, and the scraper cleaning position.

  The priming roller 71 has, for example, a cylindrical shape whose height direction is perpendicular to the substrate transport direction. When the cleaning table 70 is positioned at the priming position and the slit nozzle 6 is positioned at the discharge position, the tip 63 of the slit nozzle 6 contacts the peripheral surface of the priming roller 71. In this state, under the control of the controller unit 100, the priming roller 71 rotates and the slit nozzle 6 discharges the resist solution. Thereby, for example, the resist solution deteriorated with time in the slit nozzle 6 is discharged onto the peripheral surface of the priming roller 71. However, the priming roller 71 is not an essential component in the present embodiment.

  As shown in FIG. 2, the scraper holding member 72 reciprocates inside the cleaning table 70 along a guide 73 in a direction orthogonal to the substrate transport direction. As shown in FIG. 2, the scraper holding member 72 has a V-shaped upper surface when the substrate coating apparatus 10 is viewed from the side. When the cleaning table 70 is located at the slit nozzle cleaning position and the slit nozzle 6 is located at the discharge position, the scraper holding member 72 has a V-shaped upper surface close to the side surfaces 61 and 62 constituting the tip 63 of the slit nozzle 6. To do.

  The scraper holding member 72 includes a scraper 76 and a scraper 77 on a V-shaped upper surface. Each of the scraper 76 and the scraper 77 is made of rubber having a substantially triangular prism shape. The scraper 76 and the scraper 77 are respectively held on the V-shaped surface of the scraper holding member 72 on the side surfaces (holding surfaces) of the triangular prisms. A surface (contact surface) different from the holding surface of the scraper 76 and the scraper 77 substantially contacts the side surface 61 and the side surface 62 of the slit nozzle 6.

  The scraper holding member 72 moves in the cleaning direction along the guide 73 under the control of the controller unit 100 in a state where the scraper 76 and the scraper 77 are in contact with the side surface 61 and the side surface 62 of the slit nozzle 6. However, the cleaning direction may be the opposite direction to that shown in FIG.

  When the scraper 76 and the scraper 77 move in this way, the resist solution adhering to the side surfaces 61 and 62 of the slit nozzle 6 is scraped off. The resist solution thus scraped off is temporarily accumulated in the cleaning table 70 and then discharged. However, the scraper 76 and the scraper 77 shown in FIGS. 1 and 2 are merely examples, and any shape may be used as long as the resist solution adhering to the side surfaces 61 and 62 of the slit nozzle 6 is scraped off.

  As shown in FIGS. 3 and 4, the cleaning / drying member 74 is held above the cleaning table 70 by a holding member 75.

  The cleaning / drying member 74 has a rectangular parallelepiped shape that is long in a direction orthogonal to the substrate transport direction. The cleaning / drying member 74 includes a water supply pipe 741 and a blower pipe 742 inside. The water supply pipe 741 transports the cleaning liquid, and the blower pipe 742 transports air.

  On the lower surface of the cleaning / drying member 74, an air outlet 741 </ b> A that is an opening of the water supply pipe 741 and an air outlet 742 </ b> A of the blower pipe 742 are arranged. The air outlet 742A has a slit shape in a direction perpendicular to the substrate transport direction.

  As shown in FIG. 3, when the cleaning table 70 is positioned at the scraper cleaning position and the scraper holding member 72 is positioned at the cleaning position 900, the cleaning liquid is blown downward from the outlet 741 </ b> A under the control of the controller unit 100.

  As shown in FIG. 4, when the cleaning table 70 is positioned at the scraper cleaning position and the scraper holding member 72 is positioned at the drying position 901, air is blown out vertically from the outlet 742 </ b> A under the control of the controller unit 100. .

  As shown in FIG. 5, the controller unit 100 includes a control unit 101, an electromagnetic valve 102, an air compressor 103, a cleaning liquid supply tank 104, pressure regulators 111, 112, 113, and air operation valves 121, 122. 3 indicates the flow of air, the dotted line indicates the flow of the control signal of the control unit 101, and the dashed line indicates the flow of the cleaning liquid.

  The air compressor 103 discharges air by driving a motor or an engine according to an activation instruction from the control unit 101. Air discharged from the air compressor 103 is sent to the pressure regulators 111, 112, and 113. The pressure regulators 111, 112, and 113 open the valve when the air pressure value exceeds a predetermined value to maintain the air pressure value at a predetermined value.

  The electromagnetic valve 102 includes two valves that are opened and closed independently under the control of the control unit 101. Air of atmospheric pressure adjusted by the pressure regulator 111 is sent to the air operating valves 121 and 122 when each valve of the electromagnetic valve 102 is opened. The air operating valves 121 and 122 are opened when air is sent from the electromagnetic valve 102.

  When the air operating valve 122 is opened, the cleaning liquid is sent from the cleaning liquid supply tank 104 to the water supply pipe 741 by the air pressure adjusted by the pressure regulator 113. When the air operating valve 121 is opened, the air whose pressure value has been adjusted by the pressure regulator 112 is sent to the blower pipe 742. The controller unit 100 may send air heated by the heater to the blower pipe 742 instead of sending air to the blower pipe 742 at room temperature.

  With such a configuration, the substrate coating apparatus 10 blows out the cleaning liquid from the blowout port 741A to clean the scrapers 76 and 77, and blows out air from the blowout port 742A to dry the scrapers 76 and 77. More specifically, the control unit 101 operates as follows.

  As shown in FIG. 6, first, the control unit 101 determines whether or not the slit nozzle needs to be cleaned (S1). For example, the control unit 101 determines that the cleaning of the slit nozzle is necessary when the elapsed time from the previous coating process is 10 minutes or more. Further, the control unit 101 may detect the replacement of the coating liquid and determine that the slit nozzle needs to be cleaned. Furthermore, the control unit 101 may determine that the slit nozzle needs to be cleaned by receiving an operation input from the user through a user I / F provided in the controller unit 100.

  When determining that the slit nozzle needs to be cleaned (S1: YES), the control unit 101 performs a slit nozzle cleaning process (S2). More specifically, the control unit 101 moves the cleaning table 70 to the slit nozzle cleaning position and lowers the slit nozzle 6 to the discharge position. Then, the control unit 101 moves the scraper holding member 72 along the cleaning direction. Thereby, the coating liquid adhering to the side surfaces 61 and 62 of the slit nozzle 6 is scraped off. The scraped coating liquid accumulates inside the cleaning table 70 and a part thereof remains on the surfaces of the scrapers 76 and 77. Thereafter, the control unit 101 moves the slit nozzle 6 to the retracted position.

  When the cleaning process of the slit nozzle is performed (S2), the control unit 101 performs the processes of steps S3 and S4 and the process of step S5 in parallel.

  In step S <b> 3, as a scraper cleaning process, the control unit 101 moves the cleaning table 70 to the scraper cleaning position and moves the scraper holding member 72 to pass the cleaning position 900. While the scraper holding member 72 passes the cleaning position 900, the control unit 101 controls the electromagnetic valve 102 to blow out the cleaning liquid from the outlet 741A. When the scraper holding member 72 passes the cleaning position 900, the controller 101 stops the cleaning liquid from being blown out.

  As shown in FIG. 4, when the scraper cleaning process is performed (S3), the control unit 101 further moves the scraper holding member 72 to pass the drying position 901 as the scraper drying process (S4). The control unit 101 controls the electromagnetic valve 102 to blow out air from the air outlet 742A while the scraper holding member 72 passes through the drying position 901. As a result, the cleaning liquid is blown off entirely from the scrapers 76 and 77. Even if a part of the cleaning liquid is not blown off and remains in the scrapers 76 and 77, the remaining cleaning liquid is extremely small amount, and is then naturally dried and evaporated. When the scraper holding member 72 passes the drying position 901, the control unit 101 stops the cleaning liquid from being blown out. The scrapers 76 and 77 are washed and dried by the processing of step S3 and step S4. The control unit 101 moves the scraper holding member 72 to the cleaning start position of the slit nozzle 6 after the scraper drying process.

  In step S5, the control unit 101 moves the slit nozzle 6 to the discharge position as a coating process. And the control part 101 drives the motor of the upstream conveyor 3, the intermediate conveyor 4, and the downstream conveyor 5, conveys a glass substrate from upstream to downstream, and discharges a coating liquid from the slit nozzle 6 according to a conveyance timing. Let Note that the control unit 101 may perform a priming process before the process of step S5. In the priming process, the control unit 101 causes the cleaning table 70 to move to the priming position, and then discharges a predetermined amount of coating liquid from the slit nozzle 6.

  If the controller 101 determines that the cleaning of the slit nozzle is not necessary (S1: NO), the controller 101 performs a coating process (S6). The coating process in step S6 is different from the coating process in step S5 in that it is not processed in parallel with the cleaning and drying processes (S3 and S4) of the scrapers 76 and 77.

  As described above, since the substrate coating apparatus 10 is cleaned after the scrapers 76 and 77 are dried, the cleaning liquid is prevented from remaining on the scrapers 76 and 77, and is applied to the side surfaces 61 and 62 and the tip 63 of the slit nozzle 6. It is possible to prevent the cleaning liquid from adhering.

  Even when the substrate coating apparatus 10 performs the priming process before the coating process, in order to prevent the cleaning liquid from adhering to the slit nozzle 6, a large amount of coating liquid is used to discharge the adhered cleaning liquid by the priming process. Is not required.

  Further, the substrate coating apparatus 10 uses the water having a high surface tension and a low vapor pressure as the cleaning liquid, so that water is applied to the side surfaces 61 and 62 and the tip 63 of the slit nozzle 6 by drying the scrapers 76 and 77. It can be prevented from adhering.

  Moreover, since the scraper drying process is performed in parallel with the coating process even when the scraper drying process is performed, the substrate coating apparatus 10 increases the reliability of the cleaning of the slit nozzle 6 and increases the coating process speed. Decrease can be prevented.

  In the above example, air is blown out vertically from the air outlet 742A, but the air blowing direction is not limited to the vertically downward direction. For example, the air outlet 742A side of the blower pipe 742 may be inclined to the cleaning position 900 side or the side opposite to the cleaning position 900 side. Thereby, the blowing direction of the air is inclined from the vertically downward direction to the cleaning position 900 side or the side opposite to the cleaning position 900 side. As a result, even if the scraper 76, 77 has a surface that is difficult to reach by the vertically downward air, the substrate coating apparatus 10 delivers air to the surface and dries it by inclining the air blowing direction. Can do.

  As shown in FIG. 7, the substrate coating apparatus 10 may dry the scraper holding member 72 while reciprocating around the drying position 901. More specifically, the control unit 101 moves the scraper holding member 72 toward the drying position 901 when the scraper holding member 72 passes the drying position 901 and reaches the folding position 902. Then, the control unit 101 temporarily stops the scraper holding member 72 at the drying position 901. The control unit 101 blows out air during the reciprocating movement of the scraper holding member 72 and the temporary stop at the drying position 901.

  After the cleaning liquid is blown off from the entire scrapers 76, 77, the scraper holding member 72 is temporarily stopped at the drying position 901, so that the scrapers 76, 77 come into contact with the slit nozzle 6 (particularly, the tip of the scraper 76. 76A) is intensively dried. By such a drying process, the substrate coating apparatus 10 can more reliably prevent the cleaning liquid from adhering to the side surfaces 61 and 62 and the tip 63 of the slit nozzle 6.

  However, the control unit 101 is not limited to moving the scraper holding member 72 once at the folding position 902, but reciprocates between the folding position 902 and the cleaning position 900 with the drying position 901 as the center. It may be temporarily stopped at the drying position 901.

  As shown in FIG. 8, a cleaning / drying member 74A according to a modification of the cleaning / drying member 74 is different from the cleaning / drying member 74 in that air for scraper drying is blown out from an outlet 741A. That is, the air outlet 741A serves as both a cleaning liquid air outlet and an air air outlet.

  More specifically, the cleaning / drying member 74 </ b> A includes a blower pipe 743 instead of the blower pipe 742. The blower pipe 743 is different from the blower pipe 742 in that it is connected to the water supply pipe 741.

  With such a configuration, the substrate coating apparatus 10 only needs to have one outlet, and it is not necessary to move the scraper holding member 72 only for the drying process, and the scraper is cleaned and dried at the cleaning position 900. Both processes can be performed.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

DESCRIPTION OF SYMBOLS 1 ... Main frame 2 ... Sub-frame 3 ... Upstream conveyor 4 ... Intermediate conveyor 5 ... Downstream conveyor 6 ... Slit nozzle 6A ... Holding member 7 ... Slit nozzle cleaning mechanism 10 ... Substrate coating device 31, 41, 51 ... Roller 61 , 62 ... side 63 ... tip 70 ... cleaning table 71 ... priming roller 72 ... scraper holding member 73 ... guides 74, 74A ... cleaning and drying member 75 ... holding members 76, 77 ... scraper 76A ... tip part 100 ... controller part 101 ... control Part 102 ... Solenoid valve 103 ... Air compressor 104 ... Cleaning liquid supply tank 111, 112, 113 ... Pressure regulator 121, 122 ... Air operation valve 741 ... Water supply pipe 741A ... Air outlet 742, 743 ... Air blower pipe 742A ... Air outlet 900 ... Cleaning position 901 ... Drying position 902 ... Folding position

Claims (8)

A slit nozzle cleaning device for cleaning a slit nozzle for applying a coating liquid to a workpiece,
A scraper that scrapes off the coating liquid adhering to the slit nozzle;
A moving mechanism for moving the scraper in the slit direction of the slit nozzle while keeping the scraper in contact with the side surface of the slit nozzle;
A cleaning mechanism for removing the coating liquid by spraying a cleaning liquid on the scraper;
A drying mechanism for drying the cleaning liquid adhering to the scraper;
With
Slit nozzle cleaning device. The cleaning liquid is water;
The slit nozzle cleaning device according to claim 1. The drying mechanism uses a blowing member in which a blower outlet is formed, blows air downward from the blower outlet, and dries the cleaning liquid attached to the scraper.
The slit nozzle cleaning device according to claim 1 or 2. The cleaning mechanism sprays the cleaning liquid downward from the outlet using the outlet member.
The slit nozzle cleaning device according to claim 3. The moving mechanism passes the scraper in a dry position;
The drying mechanism blows the air while the scraper passes through the drying position.
The slit nozzle cleaning device according to claim 3 or 4. The moving mechanism is
Reciprocating the scraper at the drying position;
Temporarily stopping the scraper at the drying position;
The drying mechanism blows the air onto a contact portion of the scraper with a side surface of the slit nozzle while the scraper is temporarily stopped at the drying position.
The slit nozzle cleaning device according to claim 5. A slit nozzle cleaning device according to any one of claims 1 to 6,
A transport mechanism for relatively moving the workpiece and the slit nozzle;
A coating liquid supply mechanism for supplying the coating liquid from the slit nozzle;
A coating apparatus for workpieces. A slit nozzle cleaning method for cleaning a slit nozzle for applying a coating liquid to a workpiece,
A nozzle cleaning step of scraping the coating liquid adhering to the side surface of the slit nozzle with a scraper;
A cleaning step of cleaning the scraper to which the coating solution is attached;
A drying step of drying the washed scraper;
A slit nozzle cleaning method comprising:

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