JP2015129738A - Electrical inspection tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrical inspection tool with reliability secured by accurately measuring the positions of probe pins inserted in the electrical inspection tool.SOLUTION: There is provided an electrical inspection tool for a printed circuit board in which a large number of plates are stacked and coupled and in which through holes to insert probe pins in are bored in the plates. Position measuring holes for measuring the positions of the through holes and the positions of the probe pins are formed in the outermost one of the large number of plates that is to be in close contact with a product.

Description

  The present invention relates to an electrical inspection jig, and more particularly to an electrical inspection jig that can ensure reliability by accurately measuring the position of a probe pin inserted into the electrical inspection jig.

  Usually, a semiconductor integrated circuit chip manufacturing process includes a step of manufacturing a silicon wafer, a step of forming a plurality of semiconductor chips on the silicon wafer, an inspection step for determining the quality of each semiconductor chip, and a non-defective semiconductor chip. Packaging, and finally testing the packaged semiconductor chip.

  Here, the inspection step is a step of inspecting electrical characteristics of the semiconductor chip, and includes a process of performing an open / short circuit (open / short circuit) test (OS test) on the semiconductor integrated circuit chip.

  Currently, in order to perform an open / short test on a semiconductor integrated circuit chip, a probe apparatus provided with probe pins that are electrically connected to the semiconductor integrated circuit chip is widely used.

  When inspecting a semiconductor integrated circuit, a jig to which probe pins are coupled is used. The jig has a structure in which a large number of plates are laminated and bonded, and a through hole for connecting a probe pin is drilled for each plate. Each through hole is drilled at a slightly shifted position so that the probe pins are coupled while maintaining a predetermined angle.

  However, recently manufactured electrical inspection jigs have a problem that the measurement accuracy of the integrated circuit cannot be relied upon because there is no separate measurement tool for confirming whether the holes of each plate are drilled at the correct positions. There is a point.

  That is, since the conventional electric inspection jig has a structure in which a large number of plates are stacked and fixed, in order to accurately measure the positions of the holes drilled in the plates, the plates are separated from each other. The position of must be measured. However, since the thickness of each plate is only about 1.5 mm, there is a problem that the plate is damaged during the separation process or the probe pin is bent in an unexpected direction. It is difficult to accurately measure the position of the hole.

  As described above, since the conventional electric inspection jig is actually difficult to disassemble and measure, it only depends on the data of the manufacturer that provides the plate. Therefore, there is a problem that it is difficult to ensure reliability.

Korean Published Patent No. 2011-0010014

  The present invention has been made in view of the above-mentioned problems, and provides an electrical inspection jig with which reliability is ensured by accurately measuring the position of the probe pin through the position measurement hole. Objective.

  In order to effectively achieve the above object, the present invention provides an electrical inspection of a printed circuit board in which a plurality of (multiple) plates are laminated and bonded, and through holes into which probe pins are inserted are formed in the plates. A position measuring hole for measuring the position of the through hole and the position of the probe pin is formed on the outermost plate that is a jig and is in close contact with the product among the many plates. Can be configured.

  A plurality of the position measuring holes may be formed along the peripheral surface of the plate.

  At this time, the position measuring hole may be formed at a central portion that is not interfered with by the probe pin inserted into the through hole.

  The outermost plate may satisfy a thickness of 3 to 4 mm.

  The position measuring hole may have a circular shape or a square shape.

  In the electrical inspection jig according to the embodiment of the present invention, the position of the probe pin is accurately measured by the position measurement hole, so that reliability is ensured and the integrated circuit can be inspected with higher accuracy.

It is a disassembled perspective view of the electric inspection jig by the embodiment of the present invention. It is an illustration figure of the electric inspection jig by the embodiment of the present invention. FIG. 5 is an exemplary diagram illustrating a process of measuring a distance between a probe pin and a position measurement hole of an electric inspection jig according to an embodiment of the present invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  1 is an exploded perspective view of an electrical inspection jig according to an embodiment of the present invention, FIG. 2 is an exemplary view of an electrical inspection jig according to an embodiment of the present invention, and FIG. 3 is an electrical inspection according to an embodiment of the present invention. It is the illustration figure which showed the process in which the distance between the probe pin of a jig | tool and the hole for position measurement is measured.

  As shown in the drawing, the electrical inspection jig 100 according to the embodiment of the present invention includes a plurality of stacked plates 10, and a safe block 20, a post 30, and an alignment for connecting and fixing the plates 10. A pin 40 or the like can be coupled.

  The safe block 20 is disposed at the end of a large number of plates 10 and is provided to protect the probe pins 50 in the jig 100 from the stacked plates 10. The post 30 is disposed at each corner or central portion of the stacked multiple plates 10 to form a predetermined play (interval) between the multiple plates 10.

  Further, the post 30 serves as a shaft for connecting and fixing a large number of plates 10 divided by the safe block 20 and the post 30. In particular, a part of the post 30 is provided as an alignment pin 40, and by adjusting the distance from the plate 10 to the probe pin 50 with reference to the alignment pin 40, the angle at which the probe pin 50 warps during inspection is adjusted. Can do.

  At this time, each plate 10 is formed with a through hole 12 for coupling the probe pin 50. The through hole 12 has such a diameter that it can be smoothly slid along the through hole 12 after the probe pin 50 is coupled.

  Further, the through hole 12 is formed at a position that is gradually separated from the outermost plate 10a by a predetermined distance in the axial direction from the outermost plate 10a, and when the probe pin 50 is coupled, the probe pin 50 is predetermined. It is arranged while maintaining the curve.

  Since the structure of such a through hole 12 is the same as the structure of a normal electric inspection jig 100, a specific description thereof will be omitted.

  On the other hand, a position measurement hole 14 can be formed in the plate 10a disposed on the outermost side among the multiple plates 10 that are stacked. The outermost plate 10a is a part that is substantially in close contact with the product, and can be configured to satisfy a thickness of 3 to 4 mm so that sufficient rigidity can be maintained.

  The position measuring hole 14 may be formed in a circular shape, an elliptical shape, a polygonal shape, or the like. That is, the shape of the position measuring hole 14 may be any shape and form as long as it is convenient to process and the center point of the hole can be easily calculated.

  A plurality of the position measurement holes 14 may be perforated along the edge of the plate 10, that is, the peripheral surface, or one or a pair of holes may be perforated.

  For example, one position measurement hole 14 may be drilled in any one corner portion of the plate 10, and a pair of position measurement holes 14 may be drilled in the other corner portion. As described above, the position measuring hole 14 can be formed with its number, shape, position, and the like determined according to the position where the probe pin 50 is inserted.

  As shown in FIG. 2, in the present invention, the position measuring hole 14 is formed at each apex portion of the plate 10.

  However, although the position measurement hole 14 is not shown in the drawing, the position measurement hole 14 may be formed at the central portion as long as it is not interfered with the through hole 12 to which the probe pin 50 is coupled. It may be formed in the space between.

  In other words, when the position measuring hole 14 is formed in the outermost plate 10a, the position measuring hole 14 can be formed at an appropriate position as long as it does not interfere with the position where the probe pin 50 is inserted.

  FIG. 3 shows a process of measuring the distance between the probe pin 50 and the position measuring hole 14 with the position measuring hole 14 formed in the outermost plate 10a. When the distance between the center of the probe pin 50 and the center of the position measuring hole 14 is measured, the position of the probe pin 50 can be adjusted or grasped accurately.

  That is, after the distance between the center of each through hole 12 and the center of the position measuring hole 14 is measured in advance, the probe pin 50 is inserted into the through hole 12 and the probe pin 50 is inserted into the center of the through hole 12. In the case of being inserted eccentrically from the center, the distance between the center of the position measuring hole 14 and the center of the probe pin 50 is different from the distance between the center of the position measuring hole 14 and the center of the through hole 12. Is calculated.

  On the other hand, when the probe pin 50 is accurately inserted into the through hole 12, the distance between the center of the position measuring hole 14 and the center of the probe pin 50 is the center of the position measuring hole 14 and the through hole. It is calculated equal to the distance between 12 centers.

  At this time, the position of the probe pin 50 inserted into the through hole 12 can be measured by an SEM (scanning electron microscope) which is a three-dimensional measuring machine.

  As described above, since the position of the probe pin 50 inserted into the through hole 12 can be accurately grasped by the position measurement hole 14, it becomes possible to perform an accurate measurement when performing an electrical inspection of the circuit pattern of the printed circuit board. Reliability can be ensured.

  Further, when the electrical inspection jig 100 has to be replaced due to frequent operation of the probe pin 50, the replacement period of the electrical inspection jig 100 can be quickly grasped by the position measurement hole 14.

  As mentioned above, although the electric inspection jig by embodiment of this invention was demonstrated, this invention is not limited to this, It cannot be overemphasized that the application and deformation | transformation are possible for those skilled in the art.

DESCRIPTION OF SYMBOLS 10 Plate 10a Outermost plate 12 Through-hole 14 Position measurement hole 20 Safe block 30 Post 40 Alignment pin 50 Probe pin 100 Electric inspection jig

Claims (6)

A plurality of plates are laminated and bonded, and a printed circuit board electrical inspection jig in which a through hole into which a probe pin is inserted is drilled in the plate,
An electric inspection jig in which a position measuring hole for measuring the position of the through hole and the position of the probe pin is formed in an outermost plate that is in close contact with a product among the plurality of plates.   The electrical inspection jig according to claim 1, wherein a plurality of the position measurement holes are formed.   The electric inspection jig according to claim 1, wherein the position measuring hole is formed along a peripheral surface of the plate.   The electrical inspection jig according to claim 1, wherein the position measuring hole is formed at a central portion that is not interfered with by a probe pin inserted into the through hole.   The electric inspection jig according to claim 1, wherein the outermost plate satisfies a thickness of 3 to 4 mm.   The electrical inspection jig according to claim 1, wherein the position measuring hole has one of a circular shape and a rectangular shape.

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