JP2015087189A5 - - Google Patents
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- Publication number
- JP2015087189A5 JP2015087189A5 JP2013224770A JP2013224770A JP2015087189A5 JP 2015087189 A5 JP2015087189 A5 JP 2015087189A5 JP 2013224770 A JP2013224770 A JP 2013224770A JP 2013224770 A JP2013224770 A JP 2013224770A JP 2015087189 A5 JP2015087189 A5 JP 2015087189A5
- Authority
- JP
- Japan
- Prior art keywords
- mode
- vibration
- frequency
- vibration element
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 14
- 230000010355 oscillation Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013224770A JP6264842B2 (ja) | 2013-10-29 | 2013-10-29 | 振動素子、振動子、発振器、電子機器および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013224770A JP6264842B2 (ja) | 2013-10-29 | 2013-10-29 | 振動素子、振動子、発振器、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015087189A JP2015087189A (ja) | 2015-05-07 |
| JP2015087189A5 true JP2015087189A5 (enExample) | 2016-12-15 |
| JP6264842B2 JP6264842B2 (ja) | 2018-01-24 |
Family
ID=53050131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013224770A Active JP6264842B2 (ja) | 2013-10-29 | 2013-10-29 | 振動素子、振動子、発振器、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6264842B2 (enExample) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5763781A (en) * | 1995-02-23 | 1998-06-09 | Netzer; Yishay | Coupled resonator vibratory rate sensor |
| JP5617534B2 (ja) * | 2010-10-29 | 2014-11-05 | Tdk株式会社 | 圧電振動型ヨーレートセンサ |
| JP2013024721A (ja) * | 2011-07-21 | 2013-02-04 | Seiko Epson Corp | 振動ジャイロ素子、ジャイロセンサー及び電子機器 |
-
2013
- 2013-10-29 JP JP2013224770A patent/JP6264842B2/ja active Active
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