JP2015071530A5 - - Google Patents
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- Publication number
- JP2015071530A5 JP2015071530A5 JP2014181852A JP2014181852A JP2015071530A5 JP 2015071530 A5 JP2015071530 A5 JP 2015071530A5 JP 2014181852 A JP2014181852 A JP 2014181852A JP 2014181852 A JP2014181852 A JP 2014181852A JP 2015071530 A5 JP2015071530 A5 JP 2015071530A5
- Authority
- JP
- Japan
- Prior art keywords
- distillation
- purity
- content
- ppb
- silane compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004821 distillation Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 5
- GCOJIFYUTTYXOF-UHFFFAOYSA-N hexasilinane Chemical compound [SiH2]1[SiH2][SiH2][SiH2][SiH2][SiH2]1 GCOJIFYUTTYXOF-UHFFFAOYSA-N 0.000 claims 4
- -1 hydrogenated silane compound Chemical class 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000000199 molecular distillation Methods 0.000 claims 1
- 229910052700 potassium Inorganic materials 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 238000000526 short-path distillation Methods 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014181852A JP6403192B2 (ja) | 2013-09-06 | 2014-09-08 | 高純度水素化シラン化合物の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013185100 | 2013-09-06 | ||
| JP2013185100 | 2013-09-06 | ||
| JP2014181852A JP6403192B2 (ja) | 2013-09-06 | 2014-09-08 | 高純度水素化シラン化合物の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018166232A Division JP6630415B2 (ja) | 2013-09-06 | 2018-09-05 | 高純度シクロヘキサシラン |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015071530A JP2015071530A (ja) | 2015-04-16 |
| JP2015071530A5 true JP2015071530A5 (enExample) | 2015-05-28 |
| JP6403192B2 JP6403192B2 (ja) | 2018-10-10 |
Family
ID=53014214
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014181852A Active JP6403192B2 (ja) | 2013-09-06 | 2014-09-08 | 高純度水素化シラン化合物の製造方法 |
| JP2018166232A Active JP6630415B2 (ja) | 2013-09-06 | 2018-09-05 | 高純度シクロヘキサシラン |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018166232A Active JP6630415B2 (ja) | 2013-09-06 | 2018-09-05 | 高純度シクロヘキサシラン |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP6403192B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7022512B2 (ja) * | 2017-03-09 | 2022-02-18 | 株式会社日本触媒 | ハロゲン元素含有量の少ないシクロヘキサシラン |
| TWI783027B (zh) * | 2017-08-28 | 2022-11-11 | 日商日本觸媒股份有限公司 | 氫化矽烷組合物 |
| JP7055674B2 (ja) * | 2018-03-15 | 2022-04-18 | 株式会社日本触媒 | ポリシラン組成物、及びヘテロ元素導入ポリシラン組成物の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005120029A (ja) * | 2003-10-17 | 2005-05-12 | Jsr Corp | シラン化合物の精製方法 |
| KR101467412B1 (ko) * | 2006-10-06 | 2014-12-01 | 코비오 인코포레이티드 | 실리콘 폴리머, 실리콘 화합물 중합법 및 실리콘 폴리머 박막 형성법 |
| DE102010063823A1 (de) * | 2010-12-22 | 2012-06-28 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
| JP5808646B2 (ja) * | 2011-10-31 | 2015-11-10 | 株式会社日本触媒 | 環状シラン中間体の製造方法および環状水素化シランもしくは環状有機シランの製造方法 |
-
2014
- 2014-09-08 JP JP2014181852A patent/JP6403192B2/ja active Active
-
2018
- 2018-09-05 JP JP2018166232A patent/JP6630415B2/ja active Active
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