JP2015068885A5 - - Google Patents
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- Publication number
- JP2015068885A5 JP2015068885A5 JP2013201045A JP2013201045A JP2015068885A5 JP 2015068885 A5 JP2015068885 A5 JP 2015068885A5 JP 2013201045 A JP2013201045 A JP 2013201045A JP 2013201045 A JP2013201045 A JP 2013201045A JP 2015068885 A5 JP2015068885 A5 JP 2015068885A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- interference filter
- reflective film
- conductive layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013201045A JP2015068885A (ja) | 2013-09-27 | 2013-09-27 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| US14/487,367 US20150092273A1 (en) | 2013-09-27 | 2014-09-16 | Interference filter, optical filter device, optical module, and electronic apparatus |
| CN201410505597.5A CN104516041A (zh) | 2013-09-27 | 2014-09-26 | 干涉滤波器、光学滤波器装置、光模块以及电子设备 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013201045A JP2015068885A (ja) | 2013-09-27 | 2013-09-27 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015068885A JP2015068885A (ja) | 2015-04-13 |
| JP2015068885A5 true JP2015068885A5 (cg-RX-API-DMAC10.html) | 2016-11-04 |
Family
ID=52739904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013201045A Withdrawn JP2015068885A (ja) | 2013-09-27 | 2013-09-27 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20150092273A1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP2015068885A (cg-RX-API-DMAC10.html) |
| CN (1) | CN104516041A (cg-RX-API-DMAC10.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6671860B2 (ja) * | 2015-04-28 | 2020-03-25 | 浜松ホトニクス株式会社 | 光検出装置 |
| WO2020071181A1 (ja) * | 2018-10-03 | 2020-04-09 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
| WO2026127123A1 (ja) * | 2024-12-12 | 2026-06-18 | 学校法人沖縄科学技術大学院大学学園 | 反射鏡、光共振器、及び量子デバイス |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6915048B2 (en) * | 2001-06-18 | 2005-07-05 | Cidra Corporation | Fabry-perot filter/resonator |
| FR2839812B1 (fr) * | 2002-05-17 | 2005-07-01 | Atmel Grenoble Sa | Procede de fabrication collective de composants de filtrage optique et plaquette de composants |
| CN100538432C (zh) * | 2006-01-19 | 2009-09-09 | 精工爱普生株式会社 | 波长可变滤波器、波长可变滤波器模块及光谱分析器 |
| US20100296099A1 (en) * | 2008-02-06 | 2010-11-25 | Van Brocklin Andrew L | Optical device |
| JP5370246B2 (ja) * | 2009-05-27 | 2013-12-18 | セイコーエプソン株式会社 | 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法 |
| JP2012108220A (ja) * | 2010-11-16 | 2012-06-07 | Seiko Epson Corp | 光フィルターおよび光機器 |
| US20120154915A1 (en) * | 2010-12-21 | 2012-06-21 | Seiko Epson Corporation | Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus |
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2013
- 2013-09-27 JP JP2013201045A patent/JP2015068885A/ja not_active Withdrawn
-
2014
- 2014-09-16 US US14/487,367 patent/US20150092273A1/en not_active Abandoned
- 2014-09-26 CN CN201410505597.5A patent/CN104516041A/zh active Pending