JP2015057303A - Fixed abrasive grain saw wire and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixed abrasive grain saw wire to which abrasive grains adhere in proper density and in an appropriate pattern.SOLUTION: A fixed abrasive grain saw wire includes: a steel wire 1; dot-like adhesive liquid droplets 3 that are bonded to a surface of the steel wire 1; abrasive grains that adhere to the dot-like adhesive liquid droplets 3, respectively; and a plating layer that is superposed on a surface of the steel wire 1 to which the abrasive grains adhere. The dot-like adhesive liquid droplets 3 are bonded in a predetermined pattern to the surface of the steel wire 1, and the abrasive grains adhere in a predetermined pattern to the surface of the steel wire 1.

Description

  The present invention relates to a fixed abrasive saw wire and a method for manufacturing the same.

  Fixed abrasive saw wires are used to make wafers by thinly cutting ingots of brittle materials with high hardness such as silicon and sapphire. The fixed abrasive saw wire is obtained by fixing a finely pulverized material such as diamond having a hardness higher than that of the ingot to the surface of the steel wire. By pressing an ingot such as silicon against the traveling fixed abrasive saw wire, the ingot is thinly cut and a wafer is manufactured.

  Patent Document 1 describes a method in which an adhesive is sprayed and applied from the spray nozzle toward the outer peripheral surface of the core wire by compressed air, thereby attaching a large number of point-like adhesives on the outer peripheral surface of the core wire. Abrasive grains are fixed to the point-like adhesive portions attached on the outer peripheral surface of the core wire. However, in the method of Patent Document 1, even if the adhesive does not adhere to the entire outer peripheral surface of the core wire, it is not easy to attach the point adhesive without excess or deficiency. Unless great consideration is given to the amount of adhesive sprayed from the spray nozzle per hour and the spraying time, the point adhesive that adheres to the core wire is insufficient, or conversely, the point adhesive is excessively adhered. Probability is high. Since the abrasive grains are fixed to the point-like adhesive part, if the point adhesive is insufficient, too few abrasive grains will adhere to the core wire. Conversely, if the point adhesive is excessive, it will adhere to the core wire. There are too many abrasive grains to do. If there are too few abrasive grains adhering to the core wire, slicing of the ingot will take a long time. If too many abrasive grains adhere to the core wire, the discharge of the chips generated when slicing the ingot deteriorates, which may adversely affect the quality of the slicing product (wafer, etc.).

Japanese Patent No. 4073328

  An object of the present invention is to provide a fixed abrasive saw wire to which abrasive grains adhere with an appropriate density and an appropriate pattern.

  Another object of the present invention is to provide a fixed abrasive saw wire with excellent machinability.

  The fixed abrasive saw wire according to the present invention adheres a plurality of point-like adhesive droplets to a surface of a steel wire in a predetermined pattern, attaches abrasive particles to the point-like adhesive droplets, and the abrasive particles adhere to the predetermined pattern. The surface of the steel wire is covered with a fixing material. As the abrasive grains, for example, diamond pulverized material can be used. A crushed diamond product coated with a metal (for example, nickel) (metal-coated crushed diamond product) may be used as the abrasive grains. Both the diamond pulverized product and the metal-coated diamond pulverized product can be mixed.

  The present invention also provides a method for producing a fixed abrasive saw wire. The method for producing a fixed abrasive saw wire according to the present invention comprises a plurality of point-like adhesive droplets adhered to a surface of a steel wire in a predetermined pattern, and abrasive particles are adhered to the point-like adhesive droplets, and It is characterized in that the surface of the steel wire to which the grains have adhered is covered with a fixing material.

  According to the present invention, a plurality of point-like adhesive droplets adhere to the surface of the steel wire in a predetermined pattern, and abrasive particles adhere to the point-like adhesive droplets. Abrasive grains adhere to the pattern. There are no locations where a large number of abrasive grains aggregate and adhere to the surface of the steel wire over a relatively wide range, or on the contrary, no location where the abrasive grains do not adhere. There is provided a fixed abrasive saw wire suitable for slicing of an ingot such as silicon and having an adhesive with an appropriate density and an appropriate pattern. In one embodiment, the size (spreading range) of the point-like adhesive droplets is equal to or less than the size (average diameter) of the abrasive grains, and one or several abrasive particles adhere to one point-like adhesive droplet.

  The predetermined pattern is a predetermined regular arrangement, and each of a plurality of dotted adhesive droplets (abrasive grains) is adjacent to the adjacent dotted adhesive droplets (abrasive grains) at a predetermined interval to the steel wire. This means that the point-like adhesive droplets (abrasive grains) are adhered (attached) to the surface of each other and maintain a predetermined arrangement positional relationship. For example, a pattern in which a plurality of point-like adhesive droplets (abrasive grains) are arranged in a row in the circumferential direction on the surface of a steel wire, and a plurality of point-like adhesive droplets spirally on the surface of a steel wire ( A pattern in which (abrasive grains) are arranged at intervals from each other, and other patterns are included. Preferably, the predetermined pattern of the dotted adhesive droplets (abrasive grains) repeatedly appears in the longitudinal direction of the steel wire.

  The predetermined pattern of dotted adhesive droplets (abrasive grains) is controlled by a droplet coating device that ejects the dotted adhesive droplets toward the surface of the steel wire. For example, an ultrafine fluid jet apparatus described in Japanese Patent No. 3975272 can be used. For example, by using a droplet coating apparatus having a plurality of nozzles, a point-like adhesive droplet is ejected from each of the plurality of nozzles toward the surface of one steel wire, thereby causing the point-like adhesive droplet to be formed into a steel wire in a predetermined pattern. Can be ejected toward the surface of The ejection timing of the point-like adhesive droplets from each of the plurality of nozzles can be the same or different from each other. The arrangement (arrangement) of the nozzles with respect to the steel wire can also be arbitrarily changed. In any case, the droplet application device can accurately control the droplets to be ejected in units of one particle, and does not cause unevenness on the surface of the steel wire. The (adhesion position of the abrasive grains) is controlled, whereby the point-like adhesive droplets (abrasive grains) are adhered to the surface of the steel wire in various predetermined patterns.

  The fixing material is for fixing (adhering) a plurality of abrasive grains adhering to the surface of the steel wire to the surface of the steel wire by dot-like adhesive droplets. As the fixing material, a metal such as nickel is preferably used. In this case, the fixing material constitutes a plating layer. For example, the surface of the steel wire is coated by electrodeposition by immersing a steel wire with abrasive grains in a plating bath in which a nickel plating solution is stored and energizing the plating bath with current. The abrasive grains are firmly fixed to the surface of the steel wire by nickel plating.

  When the metal-coated diamond pulverized product is used, it is preferable that the metal that coats the metal-coated diamond pulverized product and the metal used in the plating layer are the same. Since the plating is deposited well, the crushed diamond can be more firmly fixed to the surface of the steel wire.

  In one embodiment, the dot-like adhesive droplet is an ultraviolet curable resin. By using an ultraviolet curable resin as the point-like adhesive droplet, the point-like adhesive droplet can be cured using ultraviolet rays. By covering the surface of the steel wire with the fixing material, it is possible to temporarily fix the abrasive grains to the surface of the steel wire in the previous stage of firmly fixing the abrasive grains to the surface of the steel wire. Abrasion loss is suppressed.

  In one embodiment, the average diameter (droplet size) of the dot-like adhesive droplet is 10 μm or less. By using a nozzle or the like provided in the ultrafine fluid jet apparatus described in Japanese Patent No. 3975272, point-like adhesive droplets having an average diameter of 10 μm or less can be adhered to the surface of the steel wire. When a fixed abrasive saw wire for slicing an ingot such as silicon is used with a steel wire having a large diameter, the kerf loss becomes large. In order to keep the kerf loss small, it is ideal to use a steel wire with the smallest possible diameter. The ultra-fine fluid jet device can accurately eject a small volume of fluid, so even if a steel wire with a small diameter of about 0.08 mm to 0.25 mm is used, a point-like adhesive liquid with an average diameter of 10 μm or less is used on the surface. Drops can be adhered in a predetermined pattern. That is, the steel wire constituting the fixed abrasive saw wire according to the present invention has a diameter of 0.08 mm to 0.25 mm in one embodiment.

  Preferably, the distance to other abrasive grains adjacent in the longitudinal direction is 0.8 times or more, preferably 1 time or more, more preferably 1.5 times or more, particularly preferably 2. 5 times or more. Good evacuation of the facet generated when slicing ingots such as silicon can be secured, and machinability is improved.

The manufacturing apparatus of a fixed abrasive saw wire is shown schematically. The manufacturing apparatus of a fixed abrasive saw wire is shown schematically. The positional relationship between a droplet applying device and a steel wire is shown. It is a cross-sectional view of a fixed abrasive saw wire. It is the one side longitudinal cross-sectional view of a fixed abrasive saw wire. (A), (B) and (C) show adhesion patterns of droplets, and are developed views of the surface of a steel wire. (A) And (B) shows the adhesion pattern of a droplet, and is a development view of the surface of a steel wire. The positional relationship with the nozzle of the droplet coating device which ejects a droplet toward a steel wire and a steel wire is shown. The positional relationship with the nozzle of the droplet coating device which ejects a droplet toward a steel wire and a steel wire is shown. It is a perspective view of the steel wire which shows the adhesion pattern of a droplet and the droplet has adhered. It is an enlarged photograph of the steel wire to which the abrasive grain has adhered. 2 is a partially enlarged cross-sectional photograph of a fixed abrasive saw wire using a crushed diamond as abrasive grains. It is a partially expanded cross-sectional photograph of the fixed abrasive saw wire using the diamond ground material pre-coated with nickel as an abrasive grain.

  1 and 2 show a manufacturing apparatus (system) of a fixed abrasive saw wire.

  A steel wire 1 having a circular cross section is wound around a feeding bobbin 11 of the wire feeding device 10. Steel wire 1 is made of steel and has a diameter of 0.08mm to 0.25mm. The steel wire 1 fed from the feeding bobbin 11 proceeds to the dancer mechanism 12. The dancer mechanism 12 includes a fixed roll 12A, a dancer roll 12B, and a fixed roll 12C, and the steel wire 1 is hung on these rolls 12A, 12B, and 12C. The dancer roll 12B is supported so as to be movable in the vertical direction, and forms a part of the tension applying device. The tension applied to the steel wire 1 is controlled by the rotational torque applied to the dancer roll 12B.

  The steel wire 1 that has passed through the dancer mechanism 12 proceeds to the capstan mechanism 13. The capstan mechanism 13 includes two rotatable capstan rolls 13A and 13B, and the steel wire 1 is applied to these rolls 13A and 13B a plurality of times. The rotation of at least one of the capstan rolls 13A and 13B is controlled by a servo motor (not shown). In the capstan mechanism 13, the feeding speed of the steel wire 1 is controlled.

  The steel wire 1 having passed through the capstan mechanism 13 proceeds to the cleaning device 20 through the guide rolls 14 and 15.

  The cleaning device 20 includes a dipping tank 22 having two dipping rolls 24 and 25 arranged at intervals in the traveling direction of the steel wire 1. A dipping hydrochloric acid aqueous solution 23 is stored in the dipping tank 22, and the dipping rolls 24 and 25 are dipped in the dilute hydrochloric acid aqueous solution 23. In the cleaning device 20, the steel wire 1 that has passed through the guide roll 21 is put on dipping rolls 24 and 25 in a dipping tank 22, where it is dipped in a dilute hydrochloric acid aqueous solution 23. The oxide on the surface of the steel wire 1 is removed by the dilute hydrochloric acid aqueous solution 23. The steel wire 1 from which the oxide on the surface has been removed proceeds to the droplet applying device 30 through the guide roll 26.

  FIG. 3 shows an arrangement relationship between the nozzle 31 of the droplet applying device 30 and the steel wire 1 as viewed from the traveling direction side of the steel wire 1.

  The droplet applying device 30 has a plurality of nozzles 31 arranged at predetermined angular intervals around the outer periphery of the traveling steel wire 1 with the tip directed toward the steel wire 1, and each of the plurality of nozzles 31. A control device 32 that independently applies a voltage, and the control device 32 charges the fluid in the plurality of nozzles 31 with the voltage applied to each of the plurality of nozzles 31, and the charged fluid and the steel wire The liquid droplet 3 which is a part of the fluid is caused to fly from the tip of the nozzle 31 toward the steel wire 1 by an electrostatic force acting between the steel wire 1 and the steel wire 1. Needless to say, a passage through which the fluid to be supplied passes is formed in the nozzle 31, and this fluid passage is connected to the tip opening of the nozzle 31. The nozzle 31 is provided with an electrode (not shown) to which a voltage applied by the control device 32 is applied. The droplet applying device 30 of this embodiment includes six nozzles 31 capable of ejecting a minute volume of droplets 3, and all of the six nozzles 31 are connected to the control device 32. When a voltage is applied to each nozzle 31, the fluid is charged, and the droplet 3 is transferred to the tip of the nozzle 31 of the droplet applying device 30 by the electrostatic force acting between the charged fluid and the steel wire 1 as a conductor. Fly toward steel wire 1 from As the structure of the nozzle 31 and the voltage value for causing the droplet 3 to fly from the nozzle 31 toward the steel wire 1, for example, those described in Japanese Patent No. 3975272 can be used.

  In FIG. 3, six tapered nozzles 31 are provided at equiangular intervals between adjacent nozzles 31 outside the outer peripheral surface of the steel wire 1. The nozzle 31 may be provided perpendicular to the steel wire 1 or obliquely with respect to the steel wire 1 (for example, the tip of the nozzle 31 faces the direction along the traveling direction of the steel wire 1 or vice versa). May be provided. In any case, the tip of the nozzle 31 faces the surface of the steel wire 1. A small volume droplet 3 is ejected from each of the nozzles 31 toward the traveling steel wire 1, and the ejected droplet 3 lands on the surface of the steel wire 1. As the droplet 3 ejected from the droplet applying device 30, an adhesive resin having ultraviolet curing characteristics is used. When the droplet 3 ejected from the droplet applying device 30 lands on the surface of the steel wire 1, the droplet 3 slightly spreads (scatters) on the surface of the steel wire 1 and adheres (fixes) to that position. The droplet 3 that has landed on the surface of the steel wire 1 does not flow down from the surface of the steel wire 1 or spread indefinitely on the surface of the steel wire 1. The number of nozzles 31 may be 4, 5, 8, or any other number.

  Returning to FIG. 1, the steel wire 1 that has passed through the droplet applying device 30 proceeds to the abrasive grain applying device 40.

  The abrasive grain adhesion device 40 includes an abrasive grain accumulation tank 42. A large number of diamond pulverized materials 4 having an average diameter of about 8 μm to 16 μm are deposited inside the abrasive grain deposition tank 42. The diamond pulverized material 4 is fixed to the surface of the steel wire 1 through a process described later, and is used as abrasive grains for cutting out a thin wafer from an ingot such as silicon. In the following description, the diamond pulverized material 4 is referred to as “abrasive grain 4”.

  A toothed wheel 41 is further rotatably provided in the abrasive grain accumulation tank 42. By rotating the toothed wheel 41, the abrasive grains 4 accumulated in the abrasive grain accumulation tank 42 are lifted up, and a large number of abrasive grains 4 float inside the abrasive grain accumulation tank 42. When the steel wire 1 having the droplet 3 adhered to the surface passes through the abrasive deposition tank 42 in which a large number of abrasive particles 4 are floating, the abrasive particle 4 adheres to the droplet 3 on the surface of the steel wire 1. The relationship between the size of the landed droplet 3 and the size of the abrasive grains 4 is that the diameter (imaginary circle equivalent diameter) (average diameter) of the droplet 3 is the diameter (imaginary circle equivalent diameter) (average diameter) of the abrasive grains 4. It is preferably 0.8 times or more, and preferably 2 times or less. By using a small amount of the droplet 3 that does not protrude from the abrasive grains 4, it is possible to improve the deposition of the plating described later. One or several abrasive grains 4 adhere to one droplet 3.

  The steel wire 1 having a large number of abrasive grains 4 adhered to the surface by the droplets 3 proceeds to the ultraviolet irradiation device 50 next.

  The ultraviolet irradiation device 50 includes a lamp 51 and a reflection mirror 52 that emit ultraviolet rays (UV). The ultraviolet rays emitted from the ultraviolet lamp 51 and the ultraviolet rays reflected by the reflecting mirror 52 are irradiated on almost the entire steel wire 1. The droplet 3 of the ultraviolet curable adhesive resin is cured here. A large number of abrasive grains 4 are temporarily fixed to the surface of the steel wire 1.

  Proceed to electroplating apparatus 60. The electroplating apparatus 60 includes an electroplating tank 62 in which a nickel sulfamate aqueous solution 63 is stored. In the electroplating tank 62, immersion rolls 64 and 65 and a Ni (nickel) anode 66 are provided. The steel wire 1 is placed on a guide roll 61, dipping rolls 64 and 65, and a guide roll 67, and dipped in an aqueous nickel sulfamate 63 stored in an electroplating bath 62.

  A direct current is applied to the aqueous solution 63 with the guide rolls 61 and 67 as negative and the Ni anode 66 as positive. For example, a nickel plating layer (adhering material) having a thickness of 8 μm is laminated (deposited) on the surface of the steel wire 1 to be covered. A large number of abrasive grains 4 adhered (temporarily fixed) by the droplets 3 are firmly fixed to the surface of the steel wire 1 by the nickel plating layer.

  Referring to FIG. 2, the nickel-plated steel wire 1 proceeds to the cleaning device 70. The cleaning device 70 includes a cleaning tank 72 having immersion rolls 74 and 75 in which water 73 is stored. The nickel-plated steel wire 1 is placed on the guide roll 71, the immersion rolls 74 and 75, and the guide roll 76, and is washed with water 73 stored in the cleaning layer 72.

  The washed steel wire 1 then proceeds to the drying device 80. The drying device 80 includes guide rolls 81 and 82 and an electric heater 83. When passing through the drying device 80, the steel wire 1 washed with water by the heat from the electric heater 83 is dried.

  Finally, the dried steel wire 1 proceeds to the wire winding device 90. Similar to the wire feeding device 10, the wire winding device 90 also includes a guide roll 91, 92, a capstan mechanism 93 including capstan rolls 93A, 93B, a dancer mechanism 94 including fixed rolls 94A, 94C and a dancer roll 94B. The steel wire 1 that has undergone the above-described steps is wound by a winding bobbin 95. Hereinafter, the steel wire 1 in the final state wound by the winding bobbin 95 is referred to as a fixed abrasive saw wire 2.

  FIG. 4 schematically shows a cross section of the fixed abrasive saw wire 2. FIG. 5 schematically shows a longitudinal section on one side of the fixed abrasive saw wire 2.

  The fixed abrasive saw wire 2 includes a steel wire (steel single wire) 1, a droplet 3 adhered to the surface of the steel wire 1, an abrasive 4 attached to the droplet 3, and a nickel plating layer 6. As described above, the steel wire 1 has a diameter of 0.08 mm to 0.25 mm. The droplet 3 has a diameter (expansion) of 10 μm or less. The abrasive grain 4 has an average diameter of 8 μm to 16 μm. The nickel plating layer 6 has a thickness of about 70% of the average diameter of the abrasive grains 4. The layer thickness of the nickel plating layer 6 is preferably set so that the entire abrasive grains 4 are not covered. If the layer thickness is about 6 μm, the abrasive grains 4 can be firmly fixed to the surface of the steel wire 1. By not laminating the nickel plating layer 6 too thickly, the machinability of the fixed abrasive saw wire 2 at the initial stage of use is not lowered by the nickel plating layer 6 and the kerf loss can be reduced.

  The droplet 3 (abrasive grain 4) is separated from the droplet 3 (another abrasive grain 4) adjacent in the longitudinal direction of the steel wire 1 at a specific magnification with respect to the diameter of the abrasive grain 4. It is preferable to adhere (adhere) to the surface of the steel wire 1. This separation interval is preferably 0.8 times or more, more preferably 1 time or more, and further preferably 1.5 times or more the diameter of the abrasive grains 4 (equivalent virtual circle diameter). Preferably, it is 2 times or more, more preferably 2.5 times or more. Although there is no upper limit, it is practical that it is 5 times or less. When the above-mentioned separation distance is expressed by specific numerical values, it is preferably approximately 10 μm or more, more preferably 20 μm or more, further preferably 30 μm or more, and particularly preferably 50 μm or more. The upper limit is practically 200 μm or less. In this way, the abrasive grains 4 are separated by an appropriate distance so as not to be excessively adhered to the surface of the steel wire 1, so that the cut pieces generated when slicing an ingot such as silicon using the fixed abrasive saw wire 2 are removed. It can discharge well to the outside.

  6 (A) to 7 (B) show development views of the surface of the steel wire 1 and show an adhesion pattern (repetitive pattern) of the droplet 3 adhering to the surface of the steel wire 1. The droplets 3 are bonded in a line in the longitudinal direction of the steel wire 1 at intervals. The surface of the steel wire 1 of the droplet 3 is controlled by controlling the ejection timing of the droplet 3 from each of the six nozzles 31 of the droplet applying device 30 or adjusting the arrangement position of the six nozzles 31. The adhesion pattern in can be controlled. A pattern in which the droplets 3 are arranged in a line in the circumferential direction of the steel wire 1 (FIG. 6A), and a pattern in which the droplets 3 are arranged in a spiral shape on the steel wire 1 (FIGS. 6B to 7B) )), A pattern in which the ejection timings of the three nozzles 31 of the six nozzles 31 and the remaining three nozzles 31 are made different (FIG. 6C), and the six nozzles 31 are grouped in pairs, 3 The droplet 3 can be adhered to the surface of the steel wire 1 in various patterns such as a pattern (FIG. 7B) in which the ejection timing of the nozzles 31 of the set is varied. Since one or several abrasive grains 4 adhere to the droplet 3, the adhesion pattern of the droplet 3 shown in FIGS. 6A to 7B is the same as the abrasive grains 4 in the fixed abrasive saw wire 2. The arrangement pattern of is shown.

  8 and 9 show the positional relationship between the steel wire 1, the droplet 3 bonded to the steel wire 1, and the six nozzles 31 that eject the droplet 3 toward the steel wire 1.

  The positions (adhesion patterns) of the droplets 3 adhered to the surface of the steel wire 1 shown in FIGS. 8 and 9 are the same spiral pattern, but the arrangement positions of the six nozzles 31 are the same as those in FIG. This is different from FIG.

  In FIG. 8, six nozzles 31 are arranged at equiangular intervals along one cross section of the steel wire 1. By shifting the ejection timing of the droplet 3 ejected from each of the six nozzles 31, the droplet 3 is spirally bonded to the surface of the traveling steel wire 1.

  In FIG. 9, six nozzles 31 are arranged at equal angular intervals around the outside of the steel wire 1, and are also provided at different positions in the longitudinal direction of the steel wire 1 (with equal intervals). ing. In the embodiment shown in FIG. 9, the droplets 3 can be ejected simultaneously from the six nozzles 31. By the arrangement of the nozzle 31 itself, adhesion of the spirally arranged droplets 3 to the surface of the steel wire 1 is realized.

  By controlling the number of nozzles 31, the ejection timing of droplets 3 from each nozzle 31, and the arrangement position of each nozzle 31, droplets 3 can be adhered to the surface of the steel wire 1 with various densities and patterns. For example, as shown in FIG. 10, an adhesive pattern of a plurality of droplets 3 arranged in different spiral directions can be realized on the surface of the steel wire 1.

  FIG. 11 shows an enlarged photograph of the steel wire 1 in which a plurality of abrasive grains 4 are adhered to the surface by droplets 3.

  In the embodiment described above, an example in which the nickel plating layer 6 is laminated on the steel wire 1 by electroplating has been described, but electroless plating or hot dipping may be used instead of electroplating. Moreover, although the example which uses a diamond ground material as the abrasive grain 4 was demonstrated in the Example mentioned above, you may use the diamond ground material (metal coating diamond ground material) pre-coated with nickel as the abrasive grain 4. FIG. In particular, pre-coating the diamond crushed material with the same metal as the metal of the plating layer (adhering material) will result in better deposition of the diamond crushed material around the diamond crushed material. It can be fixed to the surface of the wire 1.

  FIG. 12 is a partially enlarged cross-sectional photograph of a fixed abrasive saw wire using a pulverized diamond as the abrasive 4. FIG. 13 is a partially enlarged cross-sectional photograph of a fixed abrasive saw wire using a diamond ground product pre-coated with nickel as the abrasive 4. In the cross-sectional photographs shown in FIGS. 12 and 13, image correction (correction to brighten the edges) is performed to make the outer edge of the fixed abrasive saw wire easier to understand.

  Both the crushed diamond and the crushed diamond pre-coated with nickel may be fixed to the surface of the steel wire 1. By mixing a diamond crushed material and a diamond crushed material pre-coated with nickel in the abrasive grain deposition layer 42 (see FIG. 1) of the above-mentioned abrasive grain adhesion device 40, both of them are put on the surface of the steel wire 1. Can be fixed.

DESCRIPTION OF SYMBOLS 1 Steel wire 2 Fixed abrasive saw wire 3 Droplet 4 Diamond ground material (abrasive grain)
6 Nickel plating layer

Claims (17)

A plurality of point-like adhesive droplets are adhered to the surface of the steel wire in a predetermined pattern, abrasive grains are adhered to the point-like adhesive droplets, and a fixing material is attached to the surface of the steel wire to which the abrasive particles are adhered in the predetermined pattern. Covered,
Fixed abrasive saw wire. The predetermined pattern appears repeatedly in the longitudinal direction of the steel wire,
The fixed abrasive saw wire according to claim 1.   The fixed abrasive saw wire according to claim 1 or 2, wherein the dot-like adhesive droplet is an ultraviolet curable resin. The average diameter of the dotted adhesive droplet is 10 μm or less,
The fixed abrasive saw wire according to any one of claims 1 to 3.   The fixed abrasive saw wire according to any one of claims 1 to 4, wherein an interval between other abrasive grains adjacent in the longitudinal direction is 0.8 times or more of an average diameter of the abrasive grains.   The fixed abrasive saw wire according to any one of claims 1 to 5, wherein the abrasive is a pulverized diamond product or a pulverized metal-coated diamond product.   The fixed abrasive saw wire according to any one of claims 1 to 5, wherein the abrasive grains are a pulverized diamond product and a pulverized metal-coated diamond product. The fixing material is a plating layer;
The fixed abrasive saw wire according to any one of claims 1 to 7.   The abrasive grains include a metal-coated diamond pulverized product, and the fixing material is a plating layer, and the metal used for the coating of the metal-coated diamond pulverized product is the same as the metal used for the plating layer. The fixed abrasive saw wire according to any one of 1 to 5. Adhering multiple point-like adhesive droplets in a predetermined pattern to the surface of the steel wire,
Abrasive grains adhere to the dot-like adhesive droplets,
The fixing material is coated on the surface of the steel wire to which the abrasive grains adhere in the predetermined pattern.
A method of manufacturing a fixed abrasive saw wire. The predetermined pattern appears repeatedly in the longitudinal direction of the steel wire,
The manufacturing method of the fixed abrasive saw wire according to claim 10.   The manufacturing method of the fixed-abrasive saw wire according to claim 10 or 11, wherein the dotted adhesive droplet is an ultraviolet curable resin. The average diameter of the dotted adhesive droplet is 10 μm or less,
The manufacturing method of the fixed abrasive saw wire as described in any one of Claims 10-12.   The method for producing a fixed abrasive saw wire according to any one of claims 10 to 13, wherein an interval to other abrasive grains adjacent in the longitudinal direction is 0.8 times or more of an average diameter of the abrasive grains.   The method for producing a fixed abrasive saw wire according to any one of claims 10 to 14, wherein the abrasive grains are a pulverized diamond product or a pulverized metal-coated diamond product. The fixing material is a plating layer;
The manufacturing method of the fixed-abrasive saw wire as described in any one of Claims 10-15. The abrasive grains include a metal-coated diamond pulverized product, and the fixing material is a plated layer, and the metal used for the metal-coated diamond pulverized product is the same as the metal used for the plated layer.
The manufacturing method of the fixed abrasive saw wire as described in any one of Claims 10-14.