JP2003200353A - Fixed abrasive grain type cutting tool and manufacturing method for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting tool that reduces a cutting allowance in cutting while ensuring rigidity necessary and sufficient for cutting, excels in holding force of abrasive grains, and enables the suitable cutting with high machining precision, in a cutting tool capable of simultaneous cutting into a plurality of pieces. <P>SOLUTION: The cutting tool, in which the abrasive grains are fixed on the surface of a flexible core to enable cutting of a brittle material, has a substantially rectangular sectional form. The cutting tool 1 comprises the core 2, many abrasive grains 3 comprising a diamond grain, and a bond 4 for fixing the abrasive grains 3 on the core 2. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting tool constructed so that abrasive particles can be fixed on the surface of a flexible core material to cut brittle materials, and in particular, its cross-sectional shape is substantially rectangular. The present invention relates to a cutting tool having the above structure.

[0002]

2. Description of the Related Art Conventionally, when cutting brittle materials such as large glass, ceramics and semiconductors having a diameter of more than 300 mm, abrasive grains made of diamond are used on the surface of a rigid core material such as a piano wire. A fixed tool, the so-called "wire saw" is used.

FIG. 10 shows such a wire saw 101.
1 is a cross-sectional perspective view of a wire saw 101, a wire saw 101 includes a core material 102 made of a piano wire, a large number of diamond abrasive grains 103, and a bonding material 104 made of a resin bond or an electrodeposition bond. It is composed by.

Further, FIG. 11 shows a state of cutting a silicon ingot by the wire saw 101. In this figure, 110 is a wire saw 10.
1 is a cutting device, 111 is a silicon ingot (material to be cut), 112a, 112b and 1
Reference numeral 12c denotes first, second and third pulleys 113a and 113b each having a groove for guiding the wire saw.
Are first and second bobbins for unwinding or winding up the wire saw, respectively. Further, the first bobbin 113a and the second bobbin 113b are connected to a rotation driving means (not shown).

As shown in the drawing, the wire saw 101 is wound around a first pulley 112a, a second pulley 112b and a third pulley 112c a plurality of times, one end of which is wound around a first bobbin 113a. The other end is the second bobbin 113
It is fixed to b respectively.

Therefore, when the second bobbin 113b is rotated by the rotation driving means, the wire saw 101 sequentially moves in the direction indicated by the arrow D1 in the drawing to move to the second
Will be wound around the bobbin 113b.

Then, the silicon ingot 111, which is the material to be cut, is lowered to the wire saw 101 moving between the first pulley 112a and the second pulley 112b (or to the fixed silicon ingot 111). ,
The cutting device 110 is raised), and the silicon ingot 111 is cut by cutting with the diamond abrasive grains 103 fixed to the surface of the wire saw 101.

In addition to the method using the wire saw as described above, the brittle material is cut one by one by an inner peripheral blade tool in which diamond abrasive grains are electrodeposited on the inner peripheral portion of the donut-shaped thin plate. A method of performing a cutting process has been conventionally known.

[0009]

However, the conventional cutting tools, such as the wire saw and the inner peripheral cutting tool, have so far been recognized to have the following drawbacks.

First, the wire saw has a problem that it has a large cutting margin at the time of cutting. Currently, the minimum diameter of a wire saw that has been put into practical use is 0.19 mm, and the cutting allowance at the time of cutting reaches 0.22 mm, which is even compared to the cutting allowance of the cutting work with the inner peripheral blade tool. It will be much more.

In order to reduce the cutting margin, the diameter of the core material of the wire saw must be made thin. However, if the core material is made thin, the rigidity will naturally decrease, and straight cutting due to bending during cutting will occur. There is a problem in that the processing accuracy of the wire saw is reduced and the wire saw itself is cut by the processing load. If the wire saw is cut, a large scratch will occur on the cut surface, and an extra processing step will be required in the grinding / polishing step after cutting.

Further, in order to secure high processing accuracy and perform suitable cutting processing, the wire saw is required to have a high accuracy in outer diameter size, a dispersion state of abrasive grains, and a uniform projection amount. Since the length can reach several kilometers, it is very difficult to manufacture a wire saw that can satisfy all such requirements.

Further, the wire saw generally uses a resin bond or an electrodeposition bond as a binding material for fixing the abrasive grains to the core material, but the former has a weak holding force for the abrasive grains. However, it has the drawback that the abrasive grains fall off after one or two times of cutting and cannot be used. The latter has the advantage that the abrasive grain holding power is longer than that of resin bond and the tool life is long. However, on the other hand, it has a drawback that a long time is required to manufacture a long product due to a low electrodeposition speed.

Further, the inner peripheral blade tool is characterized by its machining characteristics.
It has a drawback that it is difficult to cut a large material having a diameter of more than 300 mm, and at the same time, the material to be cut can be cut into only one piece at a time, so that it is impossible to cut a plurality of pieces.

The present invention has been made to solve the problems of the conventional cutting tools such as the wire saw and the inner peripheral cutting tool as described above, and it is possible to simultaneously cut a plurality of sheets. It is a cutting tool that can be made, and by having a substantially rectangular cross-sectional shape, while having sufficient rigidity necessary for cutting processing, there is little cutting margin at the time of cutting processing, and excellent retention of abrasive grains, Moreover, it aims at providing the cutting tool which can perform suitable cutting with high processing accuracy.

[0016]

A cutting tool according to the present invention has a structure in which abrasive grains are fixed to the surface of a flexible core material so that brittle material can be cut, and a cross section of the cutting tool. The feature is that the shape is substantially rectangular.

Further, the length of the short side of the substantially rectangular shape is 15
0 μm or less, the length of the long side of the substantially rectangular shape is twice or more the length of the short side, or the flexible core material has a diameter of 2 μm.
When the woven fabric is made by weaving reinforcing fibers of 0 μm or less, it is possible to obtain a cutting tool which has sufficient rigidity for cutting and has a small cutting margin.

Furthermore, when the abrasive grains are fixed to the surface of the core material with a hot melt adhesive or a hot melt adhesive tape, the abrasive grains can be fixed with a strong holding force. , The problem of outer shape change due to the removal of abrasive grains can be avoided, cutting can be performed with high accuracy, the tool life is long, the production cost is reduced, and the number of tool changes is reduced, which simplifies the manufacturing work. Can be achieved.

The flexible core material is composed of a woven fabric in which fibers are woven in a tubular shape, and a filler material which is configured to be solidified by heat, and the abrasive grains contained in the filler material. A part of the fabric may be fixed in a protruding state.

In this case, the fiber has a diameter of 20 μm.
A cutting tool having high rigidity can be obtained by using the following reinforcing fibers.

In the method for manufacturing a cutting tool according to the present invention, after negatively (or positively) charged abrasive grains are attached to a positively (or negatively) charged core material by Coulomb force, It is characterized in that a hot-melt adhesive agent is applied to the core material to which the abrasive grains are attached, and this is melted by heating, and then the cutting tool is shaped.

Further, in the cutting tool according to the present invention, the negatively (or positively) charged abrasive grains are adhered to the positively (or negatively) charged core material by the Coulomb force, and then the abrasive is used. A hot-melt adhesive tape may be attached to the core material to which the particles are attached, and this may be melted by heating, and then the cutting tool may be shaped.

In the above method for manufacturing a cutting tool, the flexible core material is made of a woven fabric in which reinforcing fibers having a diameter of 20 μm or less are knitted, and the cutting tool has a substantially rectangular cross-sectional shape. With such a configuration, it is possible to manufacture a cutting tool having high rigidity.

Further, the cutting tool according to the present invention is obtained by molding the inside of a tubular body made of a woven material with a filler constituted so as to be solidified by heat, molding it with a die and heating it with a heating means. To solidify the filler,
It is also possible to manufacture the abrasive grains contained in the filler so as to protrude from the woven fabric.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows the first of the present invention.
2 is a sectional perspective view of the cutting tool 1 according to the embodiment of FIG.
It is an enlarged view of the part of A shown in FIG. As shown in these drawings, the cutting tool 1 includes a core material 2, a large number of abrasive grains 3 composed of diamond grains, and a bonding material 4 for fixing the abrasive grains 3 to the core material 2. It is configured.

The core material 2 is made of a woven fabric in which fibers having a diameter of 20 μm or less are knitted, and as shown in the drawing, its cross-sectional shape is substantially rectangular. Here, as the fibers that form the woven fabric of the core material 2, carbon fibers, silicon carbide fibers, alumina fibers, silica fibers, aramid fibers, glass fibers, and the like, so-called reinforcing fibers that can withstand the load received during the cutting process, are used. It is preferable to use.

The thickness t of the core material 2 (see FIG. 2) is
It can be 150 μm or less depending on how the fibers are knitted. In addition, the width dimension w (see FIG. 1) of the core material 2 is preferably twice or more the thickness dimension t of the core material 2 in order to withstand the load during cutting. It is more preferable to be 5 times or more than t.

As the abrasive grains 3, diamond grains are used here. However, abrasive grains other than diamond grains, for example, known abrasive grains such as CBN may be used depending on the properties of the material to be cut. It is possible.

The binder 4 is a binder composed of a hot-melt adhesive or a hot-melt adhesive tape, and serves to fix the abrasive grains 3 to the core 2 as described above.

Next, a method of manufacturing the cutting tool 1 described above will be described. FIG. 3 is a diagram showing an example of a method for manufacturing the cutting tool 1, in which 20 is
It is a manufacturing device of the cutting tool 1.

As shown in the figure, the core material 2 is supplied to the manufacturing apparatus 20 in a state of being wound around the first roller 21, and after passing between the positive electrode rollers 22 and 22, a large number of abrasive grains 3 are provided. Is guided to above the abrasive grain tank 23.

At this time, the positive electrode rollers 22 and 22 are
Since it is in a positively charged state, the core material 2 that has passed therethrough is charged with a positive charge. On the other hand, since the abrasive grain tank 23 is in a negatively charged state, the abrasive grains 3 accommodated in the abrasive grain tank 23 are negatively charged.

Therefore, the abrasive grains 3 stored in the abrasive grain tank 23
Is attracted to the positively charged core material 2 by the Coulomb force when the core material 2 passes over the abrasive grain tank 23, and adheres to the surface of the core material 2 as illustrated. become.

Then, on the core material 2 to which the abrasive grains 3 adhere,
A hot-melt adhesive is applied by a spray 24, and this is applied to a heating roller 25 provided with a heating mechanism,
After the adhesive has been melted by passing through the gaps 25, it is passed between the plurality of thickness correcting rollers 26 before the adhesive solidifies. In this way, the cutting tool 1 having a desired thickness can be obtained. 27 is the cutting tool 1 thus obtained
Is a second roller for winding.

The thickness correcting roller 26 is made of Teflon (registered trademark) or the like so that the thickness can be appropriately corrected even when hard abrasive grains such as diamond are used for the abrasive grains 3. It is desirable to construct it with a durable material.

The cutting tool 1 can be manufactured by the following method in addition to the method described above. FIG. 4 is a diagram showing another example of the manufacturing method of the cutting tool 1, in which 28
Is a manufacturing device 28 for the cutting tool 1.

In this figure, 29 is a hot-melt adhesive tape having a width substantially equal to that of the core material 2, 30
Is a third roller around which the adhesive tape 29 is wound. The same components as those of the manufacturing apparatus 20 described above are denoted by the same reference numerals, and the description thereof will be omitted.

As shown in the figure, in the present manufacturing method, on both side surfaces of the core material 2 after the abrasive grains 3 adhere to the surface,
Instead of the adhesive, the two hot-melt adhesive tapes 29, 29 guided by the guide roller 31 are attached. Then, after the core material 2 to which the adhesive tapes 29, 29 are attached on both side surfaces is passed between the heating rollers 25, 25 to be melted and before the adhesive is solidified, a plurality of thickness correction rollers 26 Pass between. In this way, the cutting tool 1 having a desired thickness can be obtained.

In the manufacturing process of the cutting tool 1 described above, the voltage applied to the positive electrode roller 22 or the abrasive grain tank 23 is changed to change the amount of electric charge charged on the core material 2 or the abrasive grain 3. By changing the amount, the amount of the abrasive grains 3 attached to the core material 2 can be controlled.

Next, a method of cutting using the cutting tool 1 will be described. FIG. 5 is a diagram showing a state of the cutting process using the cutting tool 1. In FIG.
Is a cutting device that uses the cutting tool 1 as a tool, 41
Is a material to be cut, 42a and 42b are guide rollers for the cutting tool 1, and 43a and 43b are first and second bobbins for unwinding or winding up the cutting tool 1, respectively. Further, the first bobbin 43a and the second bobbin 43b are connected with a rotation driving means (not shown).

The cutting tool 1, as shown,
A plurality of guide rollers 42a arranged on the left side of the material to be cut 41 in the figure and a plurality of guide rollers 42b arranged on the right side of the material to be cut 41 are sequentially bridged, and one end thereof is provided. Is on the first bobbin 43a and the other end is on the second
Are fixed to the bobbins 43b.

Therefore, when the second bobbin 43b is rotated by the rotation driving means, the cutting tool 1 sequentially moves in the direction indicated by D2 in the drawing and is wound around the second bobbin 43b. .

Then, the material 41 to be cut is lowered to the cutting tool 1 moving between the guide rollers 42a and 42b (or to the fixed material 41 to be cut, and the cutting device 40 is raised. Then, the material 41 to be cut is cut by cutting with the abrasive grains 3 fixed to the surface of the cutting tool 1.

When all of the cutting tool 1 wound on the first bobbin 43a is unwound during the above-mentioned cutting process, the rotation driving means connected to the first bobbin 43a is turned next time. Causes the cutting tool 1 to move the first bobbin 43a.
As a result, the cutting tool 1 moves in the direction opposite to the direction indicated by the arrow D2. In this way, the cutting device 40 is configured to continuously cut the material 41 to be cut by reciprocating the cutting tool 1.

FIG. 6 is an enlarged view showing how the material 41 to be cut is cut by the cutting tool 1. As shown in the figure, the cutting tool 1 cuts the material 41 to be cut by the abrasive grains 3a fixed to the top end 1a of the cutting tool 1 to perform the cutting process.

At this time, the cutting tool 1 has both side surfaces 1
The inner surface (cut surface) of the cut material 41 to be cut is polished by the abrasive grains 3b fixed to b and 1b. Therefore, when cutting is performed with the cutting tool 1, a finished surface having a good finish can be obtained, and the grinding / polishing steps required after cutting can be shortened.

Next, a second embodiment of the present invention will be described. Like the cutting tool 1 according to the first embodiment, the cutting tool 51 according to the present embodiment has a substantially rectangular cross-sectional shape, but is manufactured by molding through a die. It is characterized by doing.

FIG. 7 shows a cutting tool 51 according to this embodiment.
8 is a sectional enlarged view taken along the line P-P in FIG. 7. In these figures, 55 is
The die 55a is a molding port of the die 55, 56 is a woven fabric formed by weaving fibers into a tubular shape, and 57 is a filler containing a predetermined amount of abrasive grains 3. The molding port 55a is heated by a heating means (not shown).

First, the filling material 57 is packed inside the tubular body formed by the woven fabric 56, and then the woven fabric 56 is pulled in the direction indicated by D3 in the drawing by a pulling means not shown here, from the molding port 55a. , The fabric 56 and the filler 57 are pulled out. At this time, pressure is applied to the filling material 57 by an appropriate means so that the filling material 57 and the woven fabric 56 are suitably pulled out from the molding opening 55a.

The woven fabric 56 is preferably constructed by weaving fibers so that a part of the abrasive grains 3 protrudes from the gap between the fibers when a pulling force is applied. Therefore, as shown in FIG. 8, a part of the abrasive grains 3 contained in the filler 57 projects from the gap between the fibers when pulled out from the molding port 55a.

The filler 57 is a paste or gel having suitable softness so that it can be smoothly molded, and is configured to be solidified by heating. Therefore, the filler 57 is heated and solidified by the heating means of the molding port 55a when passing through the molding port 55a.

Furthermore, since the molding port 55a of the die 55 has a rectangular shape, the cutting tool 51 having a substantially rectangular shape can be obtained only by pulling out the fabric 56 and the filler 57 from the molding port 55a. it can.

Here, as the fibers constituting the woven fabric 56, it is preferable to use the reinforcing fibers as mentioned in the first embodiment, and the fibers have a diameter of 20 μm.
If the following reinforcing fibers are used, it is possible to manufacture a cutting tool having a thickness of 150 μm or less.

When glass fibers are used as the fibers constituting the woven fabric 56, the diameter of the fibers themselves is reduced by heat forming through the die 55 so that the glass tube is extended, and a cutting tool having a minute diameter is used. It is possible to manufacture. Further, according to this manufacturing method, since the filler 57 can be solidified at the same time when the cutting tool is molded, the cutting tool can be manufactured in a small number of steps.

FIG. 9 is an enlarged sectional view of the cutting tool 51 manufactured by the method described above. As shown in the figure, the cutting tool 51 is composed of fibers 56, a filler 57, and abrasive grains 3, and the abrasive grains 3 contained in the filler 57 are configured to protrude from the fabric 56. ing.

In this embodiment, by making the molding port 55a of the die 55 into a circular shape, it is possible to obtain a cutting tool having a circular cross-sectional shape, similar to a conventionally known wire saw.

[0057]

EFFECTS OF THE INVENTION Since the cutting tool according to the present invention has a substantially rectangular cross-section, it can have sufficient rigidity for cutting, has less deflection during cutting, and cuts with high straightness. Processing can be performed. Also,
Since it is possible to reduce the thickness of the cutting tool, it is possible to perform the cutting process with a smaller cutting margin as compared with the conventional cutting tool.

Furthermore, since a hot-melt adhesive or adhesive tape is used for fixing the abrasive grains, the abrasive grains are fixed with a remarkably stronger holding force than the method of fixing the abrasive grains by resin bond or electrodeposition bond. Since it is possible to avoid the problem of external shape change due to removal of abrasive grains, it is possible to perform cutting work with high accuracy, long tool life, reduced production cost, and reduced number of tool changes The work can be simplified.

Further, since the cutting tool according to the present embodiment also holds the abrasive grains on its side surface, the cutting surface can be polished at the same time as the cutting, and the grinding / grinding required thereafter.
It is possible to shorten the polishing process.

In addition, according to the cutting tool of the present invention, it is possible to simultaneously perform a cutting process on a plurality of sheets, even for a large material having a diameter of more than 300 mm.

Since the method of manufacturing a cutting tool according to the present invention employs a method of adhering abrasive grains to the core material by Coulomb force due to charging in the process, when diamond grains are used as the abrasive grains. , The sharp parts of the diamond grains will adhere to the core material. As a result, the probability of having a sharp portion on the opposite side of the sharp portion as a characteristic of diamond grains is high, and therefore a cutting tool having a sharp portion on the surface that is advantageous for cutting the material to be cut is manufactured. can do.

Further, in the manufacturing process, since the step of correcting the thickness of the tool is provided, it is possible to make the thickness of the tool uniform with high accuracy, and it is possible to meet high processing accuracy. A cutting tool can be manufactured.

[Brief description of drawings]

FIG. 1 is a cutting tool 1 according to a first embodiment of the present invention.
FIG.

FIG. 2 is an enlarged view of a portion A shown in FIG.

FIG. 3 is a view showing an example of a method for manufacturing the cutting tool 1.

FIG. 4 is a view showing another example of the method for manufacturing the cutting tool 1.

FIG. 5 is a diagram showing a state of cutting using the cutting tool 1.

FIG. 6 is an enlarged view showing how the material to be cut 41 is cut by the cutting tool 1.

FIG. 7 is a view showing a method of manufacturing the cutting tool 51.

8 is an enlarged cross-sectional view taken along the line P-P of FIG.

FIG. 9 is an enlarged cross-sectional view of the cutting tool 51.

FIG. 10 is a cross-sectional perspective view of the wire saw 101.

FIG. 11 is a diagram showing a cutting process of a silicon ingot by the wire saw 101.

[Explanation of symbols]

1: Cutting tool, 1a: the top end of the cutting tool 1, 1b: a side surface of the cutting tool 1, 2: Core material, 3: Abrasive grains, 4: binding material, 20: manufacturing equipment, 21: the first roller, 22: Positive electrode roller, 23: Abrasive tank, 24: Spray, 25: heating roller, 26: Thickness correction roller, 27: second roller, 28: Manufacturing equipment, 29: Adhesive tape, 30: third roller, 31: guide roller, 40: cutting device, 41: material to be cut, 42a: Guide roller 42b: Guide roller 43a: first bobbin, 43b: second bobbin, 51: cutting tool, 55: Die, 55a: Molding port of die 55, 56: textile, 57: filler, 101: Wire saw, 102: core material, 103: diamond abrasive grains, 104: binder, 111: Silicon ingot (material to be cut), 112a: first pulley, 112b: second pulley, 112c: third pulley, 113a: the first bobbin, 113b: second bobbin,

Claims (11)

[Claims] 1. A cutting tool configured to fix abrasive grains on the surface of a flexible core material so as to cut a brittle material, wherein the cross-sectional shape of the cutting tool is substantially rectangular. And a cutting tool. 2. The length of the short side portion of the substantially rectangular shape is 150 μm.
The cutting tool according to claim 1, wherein the length of the long side portion of the substantially rectangular shape is not more than m and is twice or more the length of the short side portion. 3. The cutting tool according to claim 1, wherein the flexible core member is made of a woven fabric in which reinforcing fibers having a diameter of 20 μm or less are knitted. 4. The abrasive is a hot melt adhesive,
Alternatively, the cutting tool according to any one of claims 1 to 3, wherein the cutting tool is fixed to the surface of the core material with a hot-melt adhesive tape. 5. The flexible core material comprises a woven fabric in which fibers are woven in a tubular shape, and a filler configured to be solidified by heat, and the abrasive grains contained in the filler. The cutting tool according to claim 1, wherein a part of the cutting tool is fixed so as to project from the woven fabric. 6. The fiber for knitting the fabric has a diameter of 20.
The cutting tool according to claim 5, wherein the cutting tool is constituted by reinforcing fibers having a size of not more than μm. 7. A negatively charged abrasive grain is attached to a positively charged core material by Coulomb force, or a positively charged abrasive grain is coulombed to a negatively charged core material. After being adhered by force, a hot-melt adhesive is applied to the core material to which the abrasive grains are adhered, and this is melted by heating, and then the cutting tool is shaped Manufacturing method for industrial tools. 8. A negatively charged abrasive grain is adhered to a positively charged core material by Coulomb force, or a positively charged abrasive grain is coulombed to a negatively charged core material. After applying by force, attach a hot-melt adhesive tape to the core material to which the abrasive grains are attached,
A method for manufacturing a cutting tool, characterized in that the cutting tool is shaped after being melted by heating. 9. The cutting tool according to claim 7, wherein the flexible core material is made of a woven fabric in which reinforcing fibers having a diameter of 20 μm or less are knitted. Method. 10. The flexible core material is constituted by a woven fabric in which reinforcing fibers having a diameter of 20 μm or less are knitted, and has a substantially rectangular cross-sectional shape. The method for manufacturing the cutting tool according to claim 8. 11. A tubular body made of a woven fabric is filled with a filler which is configured to be solidified by heat, is molded by a die, and is heated by a heating means to solidify the filler. The method for manufacturing a cutting tool, wherein the abrasive grains contained in the filler are adapted to protrude from the woven fabric.