JP2015052460A - Tension applying device, and tension applying method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide tension applying device and a tension applying method, capable of applying tension to a body to be inspected which is inspected by inspection equipment for making a state of the body to be inspected a flat state with a simple structure, thereby the inspection equipment does not require a mechanism for applying tension to the body to be inspected, such as a feeding roller and a reception roller.SOLUTION: A tension applying device 10 for applying tension to a body to be inspected F which is inspected by inspection equipment, comprises: paired body to be inspected holding parts 21 disposed in a state separated from each other, and respectively holding side edge parts of the body to be inspected F; and a connection part for mutually connecting the paired body to be inspected holding parts 21 (for example, a connection member 24). At least one of the paired body to be inspected holding members 21 is formed of a material which elastically deforms.

Description

  The present invention relates to a tension applying device and a tension applying method for applying tension to an object to be inspected such as a sheet film to be inspected by an inspecting apparatus so that the object is flat.

  As a defect inspection apparatus for an object to be inspected such as a sheet film, for example, one disclosed in Patent Document 1 is known. The defect inspection apparatus disclosed in Patent Document 1 optically inspects a defect of a sheet film that is deformed such as warpage over the entire surface of the film. More specifically, in the defect inspection apparatus disclosed in Patent Document 1, a pair of rollers including an uplifting correction roller on the upper side and a height holding roller on the lower side are arranged in the vertical direction in order along the direction of conveying the sheet film. The pair of feeding rollers and the pair of receiving rollers arranged above and below are respectively provided so that the sheet film is conveyed horizontally. A light source and a camera for inspecting defects by irradiating the sheet film with light and receiving the transmitted light are provided above and below between the sending roller and the receiving roller.

JP 2005-201783 A

  However, in the conventional defect inspection apparatus as disclosed in Patent Document 1, depending on the inspection object, the defect may be visible only when the reflected light is received from a specific angle. In such a case, It is necessary to inspect an object to be inspected by using a plurality of cameras and changing the angle of the camera or illumination. However, the defect inspection apparatus disclosed in Patent Document 1 generally has a diameter of the delivery roller and the reception roller of about 5 to 30 mm, and the distance between the outer peripheral surface of the delivery roller and the outer peripheral surface of the reception roller. Since the shortest distance is about 1 to 30 mm, when the angle of the camera or illumination is changed, the sending roller and the receiving roller may interfere with the visual field of the camera and the illumination irradiation range. For this reason, there exists a possibility that the angle of a camera or illumination cannot be optimized.

  The present invention has been made in consideration of such points, and with a simple configuration, it can be in a flat state in which a tension is applied to an object to be inspected by an inspection apparatus and tensioned, Accordingly, it is an object of the present invention to provide a tension applying device and a tension applying method that do not require a mechanism for applying tension to an object to be inspected such as a sending roller and a receiving roller in the inspection device.

  The tension applying device of the present invention is a tension applying device for applying tension to an object to be inspected by an inspection device, and is provided apart from each other, and each side edge portion of the object to be inspected is provided. A pair of inspection object holding portions to be held; and a connecting portion connecting the pair of inspection object holding portions; and at least one of the pair of inspection object holding portions is elastic. It is formed from the material which deforms.

  According to such a tension applying device, at least one of the inspected object holding portions among the pair of inspected object holding portions each holding the side edge portion of the inspected object is formed of a material that elastically deforms. Therefore, after inspecting the object holding part formed of a material that is elastically deformed by pressing it toward the other object holding part side, the object to be inspected is placed on each of the pair of object holding parts. By holding the side edges of each other and returning the deformed object holding part to the original state, tension is applied to the objects to be inspected held by the pair of object holding parts. be able to. For this reason, with a simple configuration, it is possible to provide a flat state in which the object to be inspected by the inspection apparatus is tensioned and tensioned. This eliminates the need to provide a mechanism for applying tension to the object to be inspected, such as a feed roller and a receiving roller, in the inspection apparatus.

  In the tension applying device according to the present invention, the pair of inspected object holding portions are each formed of a material that elastically deforms, and each of the pair of inspected object holding portions is on the other inspected object holding portion side It may be configured to be pressed so as to be deformed.

  The tension applying device according to the present invention may further include a pressing portion that presses and deforms the object holding portion formed of a material that undergoes elastic deformation toward the other object holding portion side. Good.

  In the tension applying device of the present invention, each of the inspected object holding portions has an inspected object mounting member and a pressing member, and at least one of the inspected object of the pair of inspected object holding portions. The inspection object mounting member in the holding portion is formed of a material that undergoes elastic deformation, and a side edge portion of the inspection object mounted on the inspection object mounting member is pressed by the pressing member. Thereby, the side edge part of the said to-be-inspected object may be hold | maintained by the said to-be-inspected object holding | maintenance part.

  In the tension | tensile_strength provision apparatus of this invention, the friction member may be provided in the mutually opposing surface in the said to-be-inspected object mounting member and the said pressing member, respectively.

  In this case, the friction member may include rubber.

  Further, the end portion of the pressing member may be connected to the end portion of the object mounting member so as to be swingable by a hinge.

  In addition, a fastener is provided at an end of the pressing member opposite to the end where the hinge is provided, and the pressing member is engaged with the object mounting member by the fastener. It may be.

  In the tension applying device according to the present invention, the connecting portion is composed of a pair of members provided to be separated from each other, and the test object holding frame is formed by the pair of the test object holding portions and the pair of the connecting portions. It may be configured.

  A tension applying device according to the present invention includes a base on which a pair of the inspected object holding portions and the connecting portion are placed, and the base includes positioning of the pair of inspected object holding portions and the connecting portion. A positioning guide for performing the above may be provided.

  The tension applying method according to the present invention includes a pair of inspection object holding portions that are provided apart from each other, each holding a side edge portion of the inspection object, and a connecting portion that connects the pair of inspection object holding portions. , A tension applying method for applying tension to the inspection object to be inspected by an inspection apparatus, the inspection object holding part being formed from a material that undergoes elastic deformation And a step of deforming by pressing toward the other side of the inspected object holding portion, a step of holding a side edge portion of the inspected object in each of the pair of inspected object holding portions, A step of applying tension to the test object in which each side edge is held by the pair of test object holding parts by returning the test object holding part to the original state. And

  According to such a tension applying method, it is possible to obtain a flat state in which a tension is applied to the object to be inspected by the inspection apparatus and tensioned with a simple configuration. This eliminates the need to provide a mechanism for applying tension to the object to be inspected, such as a feed roller and a receiving roller, in the inspection apparatus.

  According to the tension applying device and the tension applying method of the present invention, with a simple configuration, it is possible to give a tension to the object to be inspected by the inspection device and to make a flat state tensioned. In the inspection apparatus, there is no need to provide a mechanism for applying tension to the object to be inspected, such as a delivery roller and a reception roller.

It is a perspective view which shows the outline of a structure of the tension | tensile_strength provision apparatus by embodiment of this invention. FIG. 2 is a top view of the tension applying device shown in FIG. 1, and after deforming the inspection object mounting member and the connecting member, the upper surface of the inspection object placed on the inspection object mounting member is pressed by a pressing member. It is a figure which shows the state before pressing down. It is a side view which shows the structure of the fastener etc. which were provided in the edge part of the pressing member in the tension | tensile_strength provision apparatus shown in FIG. It is a perspective view which shows the structure of the to-be-inspected object holding | maintenance frame used with the tension | tensile_strength provision apparatus shown in FIG. 1 etc., Comprising: The figure which shows a state when the to-be-inspected object is hold | maintained by the to-be-inspected object holding frame. It is. It is a perspective view which shows an example of a structure of the test | inspection apparatus which test | inspects the to-be-inspected object hold | maintained by the to-be-inspected object holding frame shown in FIG. It is a perspective view which shows the other example of a structure of the test | inspection apparatus which test | inspects the to-be-inspected object hold | maintained by the to-be-inspected object holding frame shown in FIG. It is a side view which shows the structure of the toggle clamp used for the tension | tensile_strength provision apparatus by embodiment of this invention. It is a perspective view which shows the outline of the other structure of the tension | tensile_strength provision apparatus by embodiment of this invention. FIG. 9 is a top view of the tension applying device shown in FIG. 8, and after deforming the inspection object mounting member and the connecting member, the upper surface of the inspection object placed on the inspection object mounting member is pressed by a pressing member. It is a figure which shows the state before pressing down. It is a perspective view which shows the outline of other structure of the tension | tensile_strength provision apparatus by embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 6 are diagrams showing a tension applying device and a tension applying method according to the present embodiment. Among these, FIG. 1 is a perspective view schematically showing the configuration of the tension applying device according to the present embodiment, and FIG. 2 is a top view of the tension applying device shown in FIG. 3 is a side view showing the configuration of a fastener or the like provided at the end of the pressing member in the tension applying device shown in FIG. 1 or the like, and FIG. 4 is used in the tension applying device shown in FIG. 1 or the like. It is a perspective view which shows the structure of the to-be-inspected object holding frame. 5 and 6 are perspective views showing various examples of the configuration of the inspection apparatus that inspects the inspection object held by the inspection object holding frame shown in FIG.

  The tension applying device 10 according to the present embodiment is a flat state in which a tension is applied to an object to be inspected F such as a sheet film to be inspected by an inspecting device. As shown in FIG. 1 and FIG. 2, the tension applying device 10 includes a flat plate-like base 12 and an inspected object holding frame 20 that is detachably provided on the base 12. Here, the inspected object holding frame 20 has a pair of inspected object mounting members 22 provided apart from each other and a pair of connecting members 24 provided apart from each other. A pair of test subject mounting members 22 are connected by the member 24. Here, the pair of inspected object mounting members 22 and the pair of connecting members 24 in the inspected object holding frame 20 are each of an elongated quadrangular prism, and the pair of inspected object mounting members 22. The pair of connecting members 24 are provided in a frame shape.

  As shown in FIG. 1, a mounting table 14 on which an object F to be inspected such as a sheet film to be held by a frame 20 for holding an object to be inspected is provided on a flat base 12. ing. The mounting table 14 is raised from the base 12 and has substantially the same height as the inspected object mounting members 22 and the connecting members 24 in the inspected object holding frame 20. Further, when the inspecting object holding frame 20 is placed on the base 12, the mounting table 14 includes the pair of inspecting object mounting members 22 and the pair of connections in the inspecting object holding frame 20. It is located in a substantially rectangular space formed between the members 24.

  The pair of test subject placement members 22 and the pair of connecting members 24 in the test subject holding frame 20 are each formed of an elastic material such as an aluminum alloy. On the base 12, a pair of cylinders 30 is installed as a pressing portion that presses and deforms each of the pair of inspection object mounting members 22 toward the other inspection object mounting member 22. . Here, the cylinder 30 is provided with a piston portion 32 that reciprocates in the left-right direction in FIG. 2, and the piston portion 32 of each cylinder 30 moves the corresponding object mounting member 22 toward the mounting table 14. By pressing, the test subject placement members 22 are deformed so that the central portions of the pair of test subject placement members 22 approach each other as shown in FIG. In accordance with this, the pair of connecting members 24 are deformed so as to bulge outward in the vertical direction of FIG.

  Further, on the base 12, four positioning guides 16 for positioning the pair of inspection object mounting members 22 and the pair of connecting members 24 in the inspection object holding frame 20 are provided on the inspection object holding frame. The body 20 is disposed at each of the four corners. When the inspection object holding frame 20 is placed on the base 12, the positioning guides 16 position the inspection object mounting members 22 and the connecting members 24, so that each cylinder is positioned. Even if each test subject placement member 22 is pressed and deformed by the 30 piston portions 32, the positions of the test subject placement member 22 and the connecting member 24 are suppressed from being greatly displaced.

  Further, as shown in FIG. 1, a pressing member 26 is provided in each inspection object mounting member 22. More specifically, the end of each holding member 26 (the end on the back side in FIG. 1) is swingable by a hinge. The end (the end on the back side in FIG. 1) of each object mounting member 22 is swingable. It is connected to. Here, when the inspection object F is mounted on the mounting table 14, both side edges of the inspection object F are respectively mounted on the inspection object mounting members 22 as shown in FIG. However, the side edge portion of the inspection object F placed on each inspection object mounting member 22 can be pressed from above by the pressing member 26. In this way, both side edge portions of the inspection object F are sandwiched between the inspection object mounting member 22 and the pressing member 26, whereby the inspection object F is used for holding the inspection object. It is held by the frame body 20.

  Further, when the end portions of the pressing members 26 are connected to the end portions of the inspected object mounting members 22 so as to be swingable by hinges, the pressing members 26 are also slightly swung in the horizontal direction in FIG. It may be like this. As a result, each object mounting member 22 is deformed inward in the left-right direction in FIG. 2, and the tip end portion (lower end portion in FIG. 2) of each pressing member 26 faces inward in the left-right direction in FIG. 2, the fastener 28 (described later) provided at the distal end portion of the pressing member 26 can be moved by swinging the distal end portion of the pressing member 26 in the left-right direction in FIG. 2. It becomes possible to engage with the end portion 22 (the lower end portion in FIG. 2).

  As shown in FIGS. 1 to 3, friction members 22 a and 26 a such as elastic rubber are provided on the facing surfaces of the inspecting object mounting member 22 and the pressing member 26, respectively. Thus, when the side edge portion of the inspection object F is sandwiched between the inspection object mounting member 22 and the pressing member 26, the area between the inspection object mounting member 22 and the pressing member 26 is determined. Therefore, it is possible to prevent the side edge portion of the inspection object F from slipping out. In this case, after the side edge portion of the inspection object F is sandwiched between the inspection object mounting member 22 and the pressing member 26 in a state where the inspection object mounting member 22 is deformed, the inspection object is placed. When the body mounting member 22 returns to the original state, the inspection subject F appropriately slides with respect to the friction members 22a and 26a, so that the tension applied to the inspection subject F is made uniform. become able to.

  Further, as shown in FIGS. 1 and 3, a fastener 28 is provided at the end of the pressing member 26 opposite to the end where the hinge is provided (that is, the end on the back side in FIG. 1). The pressing member 26 is engaged with the device mounting member 22 by a fastener 28. More specifically, as shown in FIG. 3, a claw portion 28 a is provided at the lower end portion of the fastener 28, and the claw portion 28 a is engaged with the end portion of the test subject mounting member 22. An engaged portion 22b is provided. Then, when the claw member 28a of the fastener 28 is engaged with the engaged portion 22b of the inspection object mounting member 22, the friction member 26a of the pressing member 26 and the friction member 22a of the inspection object mounting member 22 The pressing member 26 comes to engage with the inspected object mounting member 22 so that they face each other. Further, the fastener 28 is attached to the end portion of the pressing member 26 via a spring 29. Due to the contraction force of the spring 29, the fastener 28 is rotated in a clockwise direction around the spring 29 in FIG. In the direction of the arrow). As a result, when no force is applied to the fastener 28, the fastener 28 is urged to abut against the test subject placement member 22 by the contraction force of the spring 29, and the claw member 28 a of the fastener 28 is moved. It comes to engage with the engaged portion 22b of the inspection subject mounting member 22. On the other hand, as shown in FIG. 1, when the pressing member 26 is swung upward from the object mounting member 22, the operator holds the fastener 28 and resists the contraction force of the spring 29. It is necessary to rotate the tool 28 in the counterclockwise direction (the direction opposite to the arrow in FIG. 3) around the spring 29 in FIG.

  In the present embodiment, the inspection object holding portion 21 that holds the side edge portion of the inspection object F is configured by the inspection object mounting member 22, the pressing member 26, and the like. In other words, the inspecting object holding frame 20 is provided with a pair of inspecting object holding portions 21 that are spaced apart from each other, and the inspected object holding portions 21 hold the side edges of the inspecting object F. It has come to be.

  Next, an operation by the tension applying device 10 having such a configuration, specifically, a method of applying tension to the inspection object F will be described.

  First, the inspection subject holding frame 20 is placed on the base 12. Then, when the operator removes the claw portion 28a of the fastener 28 from the engaged portion 22b of the test subject mounting member 22, the pressing member 26 is removed from the test subject mounting member 22 as shown in FIG. The friction member 26a of the pressing member 26 and the friction member 22a of the object mounting member 22 are separated from each other by swinging upward.

  Next, each test subject mounting member 22 is pressed toward the mounting table 14 by the piston portion 32 of each cylinder 30. As a result, as shown in FIG. 2, the test subject placement members 22 are deformed so that the central portions of the pair of test subject placement members 22 approach each other. In accordance with this, the pair of connecting members 24 are deformed so as to swell outward in the vertical direction of FIG. Then, the inspection object F to be inspected by the inspection apparatus is placed on the mounting table 14. At this time, as shown in FIG. 2, both side edges of the inspection object F are placed on the inspection object mounting members 22.

  Thereafter, each side edge portion of the inspection object F placed on each inspection object mounting member 22 is pressed from above by the pressing member 26, and both side edges of the inspection object F are respectively inspection object mounting members. 22 and the pressing member 26. As a result, the inspection object F is held by the inspection object holding frame 20. Then, when the piston portions 32 of the respective cylinders 30 are retracted so as to move away from the inspected object mounting members 22 and the respective piston portions 32 do not press the corresponding inspected object mounting members 22, the inspected objects The mounting member 22 and each connecting member 24 return to the original state as shown in FIG. 1, and both side edges are clamped between the testing object mounting member 22 and the pressing member 26, respectively. F is pulled so as to spread in the left-right direction in FIG. As a result, a tension can be applied to the object F to be in a flat state.

  Next, the test object holding frame 20 holding the test object F is removed from the base 12. FIG. 4 shows the configuration of the inspection subject holding frame 20 that holds the inspection subject F when it is removed from the base 12. As shown in FIG. 4, even if the inspection object holding frame 20 is removed from the base 12, the inspection object F held by the inspection object holding frame 20 is in a flat and tensioned state. Will be maintained. Then, in the inspection apparatus, the inspection object F is inspected while being held by the inspection object holding frame 20.

  Various examples of the configuration of the inspection apparatus for inspecting the inspection object F held by the inspection object holding frame 20 as shown in FIG. 4 are shown in FIGS. 5 and 6. In the inspection apparatus as shown in FIG. 5, the inspection object holding frame 20 holding the inspection object F is placed on the stage 50, and the stage 50 is in the horizontal direction (for example, the left direction in FIG. 5). ) Then, the light irradiated from the light source 52 to the inspection object F is reflected by the inspection object F, and the reflected light is captured by the imaging unit 54 such as a CCD camera. In this way, the defect of the inspection object F is inspected based on the reflected light captured by the imaging unit 54. Further, in the inspection apparatus as shown in FIG. 6, the inspection subject holding frame 20 holding the inspection subject F is placed on the stage 60, and the stage 60 is placed in the horizontal direction (for example, in FIG. 6). Move left). In addition, an opening 61 is formed at a location on the stage 60 where the inspection object F faces. And the light irradiated to the to-be-inspected object F from the light source 62 permeate | transmits the said to-be-inspected object F, and this transmitted light comes to be caught by the imaging parts 64, such as a CCD camera. In this way, the defect of the inspection object F is inspected based on the transmitted light captured by the imaging unit 64. Here, in the inspection apparatus as shown in FIG. 5 or FIG. 6, the inspection object F held by the inspection object holding frame 20 is maintained in a taut flat state. Since the inspection object F is placed on the stages 50 and 60 together with the inspection object holding frame 20, the defect of the inspection object F can be inspected with high accuracy.

  According to the tension applying device 10 and the tension applying method of the present embodiment configured as described above, the inspected object mounting in the pair of inspected object holding portions 21 each holding the side edge of the inspected object F. Since the mounting member 22 is formed of a material that is elastically deformed, each of the inspected object mounting members 22 is pressed and deformed toward the other inspected object mounting members 22, and then a pair of inspected objects Each of the holding portions 21 holds the side edge portion of the inspection object F, and then the deformed inspection object mounting members 22 are returned to the original state, whereby the pair of inspection object holding portions 21 are used. A tension that spreads in the left-right direction in FIG. 1 can be applied to the inspection object F holding each side edge. In this way, with a simple configuration, it is possible to obtain a flat state in which a tension is applied to the inspected object F to be inspected by the inspecting device and is tight. This eliminates the need to provide a mechanism for applying tension to the object to be inspected, such as a feed roller and a receiving roller, in the inspection apparatus.

  Moreover, in the tension | tensile_strength provision apparatus 10 of this Embodiment, the to-be-inspected object mounting member 22 of each to-be-inspected object holding | maintenance part 21 formed from the material which performs elastic deformation is set to the other to-be-inspected object mounting member 22 side. A cylinder 30 is provided as a pressing portion that is pressed and deformed toward the front.

  Moreover, in the tension | tensile_strength provision apparatus 10 of this Embodiment, as above-mentioned, each to-be-inspected object holding | maintenance part 21 has the to-be-inspected object mounting member 22 and the pressing member 26, and to-be-inspected object mounting The side edge portion of the inspection object F placed on the member 22 is pressed by the pressing member 26 so that the side edge portion of the inspection object F is held by the inspection object holding portion 21. . In addition, friction members 22 a and 26 a such as elastic rubber are provided on surfaces of the inspected object mounting member 22 and the pressing member 26 that face each other. As a result, when the side edge of the inspection object F is sandwiched between the inspection object mounting member 22 and the pressing member 26, the inspection object mounting member 22 and the pressing member 26 are interposed between them. Therefore, it is possible to prevent the side edge portion of the inspection object F from slipping out. Further, in this case, after the side edge portion of the inspection object F is sandwiched between the inspection object mounting member 22 and the pressing member 26 in a state where the inspection object mounting member 22 is deformed, the inspection object mounting member 22 is deformed. When the body mounting member 22 returns to the original state, the inspection subject F appropriately slides with respect to the friction members 22a and 26a, so that the tension applied to the inspection subject F is made uniform. become able to.

  Moreover, in the tension | tensile_strength provision apparatus 10 of this Embodiment, as mentioned above, the edge part of the pressing member 26 is connected with the edge part of the to-be-tested object mounting member 22 so that rocking is possible by a hinge. Further, as shown in FIGS. 1 and 3, a fastener 28 is provided at the end of the pressing member 26 opposite to the end where the hinge is provided, and the pressing member 26 is inspected by the fastener 28. The body mounting member 22 is fastened.

  Moreover, in the tension | tensile_strength provision apparatus 10 of this Embodiment, as above-mentioned, the connection member 24 consists of a pair of things provided mutually spaced apart, and a pair of to-be-tested object holding | maintenance part 21 and a pair of connection member A frame 20 for holding an object to be inspected is constituted by 24.

  Moreover, in the tension | tensile_strength provision apparatus 10 of this Embodiment, as above-mentioned, each to-be-inspected in a pair of to-be-inspected object holding | maintenance part 21 is in the base 12 in which the to-be-inspected object holding frame 20 is mounted. A positioning guide 16 for positioning the body placing member 22 and the pair of connecting members 24 is provided. By this, when the to-be-inspected object holding frame 20 is placed on the base 12, the positioning guide 16 positions the to-be-inspected object mounting members 22 and the respective connecting members 24. Even if each test subject placement member 22 is pressed and deformed by the piston portion 32 of each cylinder 30, it is possible to prevent the positions of the test subject placement member 22 and the connecting member 24 from being greatly displaced.

  In addition, the tension | tensile_strength provision apparatus 10 by this Embodiment and the tension | tensile_strength provision method are not limited to the above aspects, A various change can be added.

  For example, in the tension applying device 10 shown in FIG. 1 and the like, a pair of cylinders 30 as pressing portions are provided corresponding to the inspected object mounting members 22, but the present invention is not limited to such an example. . A pressing portion such as the cylinder 30 may be provided only in the vicinity of one of the inspected object mounting members 22 of the pair of inspected object mounting members 22. In this case, only one inspection object mounting member 22 of the pair of inspection object mounting members 22 can be deformed by the pressing portion. However, even in this case, the one inspection object mounting member 22 is After being pressed and deformed toward the other inspecting object mounting member 22, each of the pair of inspecting object holding portions 21 holds the side edge portion of the inspecting object F, and then deformed. 1 is returned to the original state so as to spread in the left-right direction in FIG. 1 with respect to the inspected object F in which the side edge portions are held by the pair of inspected object holding portions 21. Tension can be applied. Even in this case, a tension can be applied to the inspection object F to be inspected by the inspection apparatus so as to make the object flat. In addition, when the number of the pressing portions such as the cylinders 30 is only one, one of the inspected object mounting members 22 is formed of a material that undergoes elastic deformation. It may come to be. That is, the inspected object mounting member 22 that does not deform is not necessarily formed from a material that undergoes elastic deformation.

  In the present embodiment, the pair of connecting members 24 are not necessarily formed from a material that undergoes elastic deformation. Even when the pair of connecting members 24 is made of, for example, a rigid member, when the inspected object mounting member 22 that is pressed and deformed by the pressing portion such as the cylinder 30 is formed of a material that undergoes elastic deformation, Each of the inspected object holding portions 21 holds the side edge portion of the inspected object F, and then returns the deformed inspected object mounting member 22 to the original state, thereby holding a pair of inspected objects. It becomes possible to apply tension that spreads in the left-right direction in FIG. 1 to the object F to which each side edge is held by the portion 21.

  Moreover, instead of installing a pair of cylinders 30 on the base 12 as a pressing part that presses and deforms each of the pair of inspected object mounting members 22 toward the other inspected object mounting member 22, Other devices such as a toggle clamp 70 as shown in FIG. 7 may be installed on the base 12. Here, the configuration of the toggle clamp 70 shown in FIG. 7 will be briefly described. The toggle clamp 70 is attached to a handle 72 gripped by the operator and a proximal end portion of the handle 72. When the operator swings the handle 72 in the direction of the arrow in FIG. 7, the toggle clamp 70 rotates integrally around the shaft 74a. Such an elliptical cam 74 and a piston portion 76 whose base end portion is in contact with the peripheral edge of the cam 74 are provided. In addition, a pressing portion 78 is provided at the tip of the piston portion 76, and the object mounting member 22 is pressed by the pressing portion 78. Further, a spring 79 is provided at the root portion of the piston portion 76, and the piston portion 76 is biased by the spring 79 in a direction away from the device mounting member 22 (that is, the left direction in FIG. 7). It is like that.

  According to such a toggle clamp 70, when the operator does not hold the handle 72, the handle 72 and the pressing portion 78 are located in the solid line portion in FIG. 22 apart. On the other hand, when the operator pushes down the handle 72 from the solid line portion in FIG. 7 to the two-dot chain line portion, the cam 74 rotates about the shaft 74a, and the base end portion is in contact with the peripheral portion of the cam 74. The piston portion 76 is pushed to the right in FIG. 7 against the urging force of the spring 79. Accordingly, the pressing portion 78 attached to the tip of the piston portion 76 is also pushed out from the solid line portion in FIG. 7 to the two-dot chain line portion, and the subject mounting member 22 is pressed by the pressing portion 78. . As described above, a toggle clamp 70 as shown in FIG. 7 is used as a pressing portion that presses and deforms each of the pair of inspected object mounting members 22 toward the other inspected object mounting members 22. You can also.

  In addition, as each of the pair of inspecting object mounting members 22 is pressed against each other inspecting object mounting member 22 and deformed, each inspecting object mounting member 22 is pressed by screw feed. A mechanism that deforms may be used.

  Further, in each inspection object holding portion 21, when holding the side edge portion of the inspection object F between the pressing member 26 and the inspection object mounting member 22, the pressing member 26 is inspected by the fastener 28. Instead of engaging with the body mounting member 22, the pressing member 26 may be engaged with the test subject mounting member 22 by another configuration such as a magnet.

  Further, the connecting member 24 for connecting the pair of inspected object holding portions 21 provided apart from each other is not limited to the pair provided separately from each other. The pair of inspected object holding portions 21 may be connected by only one connecting member 24. Such a tension applying device 10a will be described with reference to FIGS.

  The tension applying device 10a as shown in FIGS. 8 and 9 includes a flat plate-like base 12 and an inspected object holding frame 20a that is detachably provided on the base 12. The inspection object holding frame 20a has a pair of inspection object mounting members 22 and one connecting member 24 which are provided apart from each other, and a pair of inspection objects are provided by the one connecting member 24. The mounting member 22 is connected.

  In the tension applying device 10a as shown in FIG. 8 and FIG. 9, the pair of inspected object mounting members 22 and the one connecting member 24 in the inspected object holding frame 20a are each made of an elastic material such as an aluminum alloy. Formed from. Further, when the piston portion 32 of each cylinder 30 presses the corresponding object mounting member 22 toward the mounting table 14, the central portions of the pair of object mounting members 22 face each other as shown in FIG. 9. Thus, the inspected object placement members 22 are deformed so as to approach each other. In accordance with this, the connecting member 24 is deformed so as to swell upward in FIG.

  In the tension applying device 10a according to the modification shown in FIGS. 8 and 9, the inspected object mounting member 22 in the pair of inspected object holding portions 21 each holding the side edge portion of the inspected object F is elastic. Since it forms from the material which deform | transforms, after each to-be-inspected object mounting member 22 is pressed and deform | transformed toward the other to-be-inspected object mounting member 22, each of a pair of to-be-inspected object holding | maintenance part 21 The side edges of the object to be inspected F are then held, and then each of the inspected object mounting members 22 that have been deformed is returned to the original state. Tension can be applied to the object F to be held. In this way, even when there is only one connecting member 24, it is possible to obtain a flat state in which a tension is applied to the inspection object F to be inspected by the inspection apparatus and tensioned.

  Further, as shown in FIG. 10, in the tension applying device 10 b according to the further modification, on the base 12, the pair of inspecting object mounting members 22 and the pair of connecting members in the inspecting object holding frame 20. An additional inspected object holding frame 80 may be detachably installed in a substantially rectangular space formed between 24. Such an additional inspected object holding frame 80 additionally gives tension to spread in the vertical direction in FIG. 10 to the inspected object F to be inspected by the inspection apparatus. F is in a flat state that is stretched in the vertical direction in FIG.

  Here, the additional inspected object holding frame 80 has a pair of inspected object mounting members 82 provided apart from each other and a pair of connecting members 84 provided apart from each other, A pair of test subject mounting members 82 are connected by each connecting member 84. Here, the pair of test subject mounting members 82 and the pair of connecting members 84 in the additional test subject holding frame 80 are elongated four pieces having the same height as the test subject mounting member 22 and the connecting member 24, respectively. The pair of test subject placement members 82 and the pair of connecting members 84 are arranged in a frame shape.

  The pair of test subject placement members 82 and the pair of connecting members 84 in the additional test subject holding frame 80 are each formed of an elastic material such as an aluminum alloy. Further, on the base 12, a pressing portion (such as a cylinder or a toggle clamp) for pressing and deforming each of the pair of inspected object mounting members 82 toward the other inspected object mounting members 82 ( (Not shown) is installed. And such a press part presses a pair of to-be-tested object mounting member 82 toward each other, and as shown in FIG. 10, the center part of a pair of to-be-tested object mounting member 82 approaches toward each other. Thus, each of the inspected object mounting members 82 is deformed. In accordance with this, the pair of connecting members 84 are deformed so as to expand outward in the left-right direction of FIG.

  Further, on the base 12, four additional positioning guides 18 for positioning the pair of inspected object mounting members 82 and the pair of connecting members 84 in the additional inspected object holding frame body 80 are provided. The test object holding frame 80 is provided at each of the four corners. When the additional test object holding frame 80 is placed on the base 12, the positioning of each test subject mounting member 82 and each connecting member 84 is performed by these additional positioning guides 18. Thus, even if each inspected object mounting member 82 is pressed and deformed by a pressing portion (not shown), the positions of the inspected object mounting member 82 and the connecting member 84 are suppressed from being greatly displaced.

  Each inspection object mounting member 82 is provided with a pressing member (not shown). More specifically, the end portion of each pressing member is connected to the end portion of each object mounting member 82 so as to be swingable by a hinge. Here, as shown in FIG. 10, when the upper edge portion and the lower edge portion of the inspection object F are respectively placed on the inspection object mounting members 82, the upper edge portion and the lower edge thereof. The part can be pressed from above by a pressing member. In this way, the upper edge portion and the lower edge portion of the inspection object F are sandwiched between the inspection object mounting member 82 and the pressing member, respectively, whereby the inspection object F is inspected. In addition to the body holding frame 20, it is held by an additional test object holding frame 80.

  According to the tension applying device 10b according to the further modified example as shown in FIG. 10, the additional inspected object holding frame body 80 is provided. After each test subject placement member 82 is pressed and deformed toward another test subject placement member 82, a test subject is placed between each test subject placement member 82 and a pressing member (not shown). The upper edge and the lower edge are respectively added by holding the upper edge and the lower edge of the inspection object F, and then returning the deformed inspection object mounting members 82 to the original state. A tension that spreads in the vertical direction can be applied to the inspection object F held by the inspection object holding frame 80. In this way, the inspected object F can be brought into a flat state that is stretched in the vertical direction in FIG.

10, 10a, 10b Tension applying device 12 Base 14 Mounting table 16 Positioning guide 18 Additional positioning guide 20, 20a Test object holding frame 21 Test object holding part 22 Test object mounting member 22a Friction member 22b Engagement portion 24 Connecting member 26 Holding member 26a Friction member 28 Clamping portion 28a Claw portion 29 Spring 30 Cylinder 32 Piston portion 50 Stage 52 Light source 54 Imaging unit 60 Stage 61 Opening 62 Light source 64 Imaging unit 70 Toggle clamp 72 Handle 74 Cam 74a Shaft 76 Piston portion 78 Pressing portion 79 Spring 80 Additional object holding frame body 82 Test object mounting member 84 Connecting member F Test object

Claims (11)

A tension applying device for applying tension to an object to be inspected by an inspection device,
A pair of test object holding portions that are provided apart from each other and each hold a side edge of the test object;
A connecting portion for connecting the pair of inspected object holding portions;
With
The tension applying device, wherein at least one of the pair of the subject holding parts is formed of a material that undergoes elastic deformation.   A pair of said to-be-inspected object holding | maintenance parts are each formed from the material which performs elastic deformation, and each of a pair of said to-be-inspected object holding | maintenance parts is pressed so that it may deform | transform toward the said other to-be-inspected object holding | maintenance part side. The tension applying device according to claim 1, which is configured as described above.   The tension application according to claim 1 or 2, further comprising a pressing part that presses and deforms the object holding part formed of a material that is elastically deformed toward another object holding part side. apparatus. Each of the inspected object holding portions has an inspected object mounting member and a pressing member,
The inspected object mounting member in at least one of the inspected object holding parts among the pair of inspected object holding parts is formed of a material that undergoes elastic deformation,
The side edge portion of the inspection object placed on the inspection object mounting member is pressed by the pressing member so that the side edge portion of the inspection object is held by the inspection object holding portion. The tension | tensile_strength provision apparatus as described in any one of Claims 1 thru | or 3 which is.   The tension | tensile_strength provision apparatus of Claim 4 with which the friction member is provided in the mutually opposing surface in the said to-be-inspected object mounting member and the said pressing member, respectively.   The tension applying device according to claim 5, wherein the friction member includes rubber.   The tension applying device according to any one of claims 4 to 6, wherein an end portion of the pressing member is connected to an end portion of the object mounting member so as to be swingable by a hinge.   A fastener is provided at the end of the pressing member opposite to the end where the hinge is provided, and the pressing member is engaged with the object mounting member by the fastener. The tension applying device according to claim 7. The connecting part is composed of a pair of parts provided apart from each other,
The tension applying device according to any one of claims 1 to 8, wherein a frame for holding an object to be inspected is configured by the pair of objects to be inspected and the pair of connecting parts. A base on which a pair of the inspected object holding part and the connecting part are placed;
The tension applying device according to any one of claims 1 to 9, wherein the base is provided with a positioning guide for positioning the pair of inspected object holding portions and the connecting portion. A tension applying device that is provided apart from each other and includes a pair of inspected object holding portions each holding a side edge portion of the inspected object, and a connecting portion that connects the pair of inspected object holding portions. A tension applying method for applying tension to the object to be inspected by an inspection device,
A step of pressing and deforming the inspected object holding part formed from a material that performs elastic deformation toward the other inspected object holding part side; and
A step of holding a side edge of the object to be inspected in each of the pair of object to be inspected parts;
A step of applying tension to the test object in which each side edge is held by a pair of the test object holding parts by returning the test object holding part being deformed to an original state;
A method of applying tension, comprising:

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