JP2015038477A5 - - Google Patents
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- Publication number
- JP2015038477A5 JP2015038477A5 JP2014163258A JP2014163258A JP2015038477A5 JP 2015038477 A5 JP2015038477 A5 JP 2015038477A5 JP 2014163258 A JP2014163258 A JP 2014163258A JP 2014163258 A JP2014163258 A JP 2014163258A JP 2015038477 A5 JP2015038477 A5 JP 2015038477A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- probe
- bond
- holder
- attaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000523 sample Substances 0.000 claims 85
- 238000000034 method Methods 0.000 claims 18
- 238000010884 ion-beam technique Methods 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 238000003801 milling Methods 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 7
- 230000008021 deposition Effects 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 claims 1
- 239000002243 precursor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361865929P | 2013-08-14 | 2013-08-14 | |
| US61/865,929 | 2013-08-14 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015038477A JP2015038477A (ja) | 2015-02-26 |
| JP2015038477A5 true JP2015038477A5 (enExample) | 2017-08-31 |
| JP6453580B2 JP6453580B2 (ja) | 2019-01-16 |
Family
ID=51301214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014163258A Active JP6453580B2 (ja) | 2013-08-14 | 2014-08-10 | 試料調製中におけるｔｅｍ試料からのプローブの分離 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10053768B2 (enExample) |
| EP (1) | EP2837926B1 (enExample) |
| JP (1) | JP6453580B2 (enExample) |
| CN (1) | CN104374633B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10175295B2 (en) * | 2015-06-25 | 2019-01-08 | Fei Company | Optical nanoprobing of integrated circuits |
| CN105500389A (zh) * | 2016-02-03 | 2016-04-20 | 苏州大学 | 微纳机器人末端执行器自动更换装置 |
| US10401265B1 (en) | 2018-03-30 | 2019-09-03 | Micron Technology, Inc. | Methods for acquiring planar view stem images of device structures |
| US10410829B1 (en) * | 2018-03-30 | 2019-09-10 | Micron Technology, Inc. | Methods for acquiring planar view stem images of device structures |
| US11972923B2 (en) | 2021-12-31 | 2024-04-30 | Fei Company | Systems and methods for performing sample lift-out for highly reactive materials |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999005506A1 (fr) * | 1997-07-22 | 1999-02-04 | Hitachi, Ltd. | Procede et dispositif de preparation d'echantillons |
| JP2004093353A (ja) * | 2002-08-30 | 2004-03-25 | Seiko Instruments Inc | 試料作製装置 |
| US20070278421A1 (en) * | 2006-04-24 | 2007-12-06 | Gleason K R | Sample preparation technique |
| US7511282B2 (en) * | 2006-05-25 | 2009-03-31 | Fei Company | Sample preparation |
| US8357913B2 (en) | 2006-10-20 | 2013-01-22 | Fei Company | Method and apparatus for sample extraction and handling |
| JP5270558B2 (ja) | 2006-10-20 | 2013-08-21 | エフ・イ−・アイ・カンパニー | Ｓ／ｔｅｍのサンプルを作成する方法およびサンプル構造 |
| US8835845B2 (en) * | 2007-06-01 | 2014-09-16 | Fei Company | In-situ STEM sample preparation |
| EP2151848A1 (en) | 2008-08-07 | 2010-02-10 | FEI Company | Method of machining a work piece with a focused particle beam |
| US8258473B2 (en) * | 2010-11-12 | 2012-09-04 | Nanotem, Inc. | Method and apparatus for rapid preparation of multiple specimens for transmission electron microscopy |
| US8859998B2 (en) * | 2011-01-28 | 2014-10-14 | Fei Company | TEM sample preparation |
| US8859963B2 (en) | 2011-06-03 | 2014-10-14 | Fei Company | Methods for preparing thin samples for TEM imaging |
| JP2013057533A (ja) * | 2011-09-07 | 2013-03-28 | Toppan Printing Co Ltd | 試料作製方法および集束イオンビーム加工装置 |
-
2014
- 2014-08-10 JP JP2014163258A patent/JP6453580B2/ja active Active
- 2014-08-11 US US14/456,946 patent/US10053768B2/en active Active
- 2014-08-13 EP EP14180857.6A patent/EP2837926B1/en active Active
- 2014-08-13 CN CN201410396562.2A patent/CN104374633B/zh active Active
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