JP2015038165A5 - - Google Patents

Info

Publication number

JP2015038165A5

JP2015038165A5 JP2013157251A JP2013157251A JP2015038165A5 JP 2015038165 A5 JP2015038165 A5 JP 2015038165A5 JP 2013157251 A JP2013157251 A JP 2013157251A JP 2013157251 A JP2013157251 A JP 2013157251A JP 2015038165 A5 JP2015038165 A5 JP 2015038165A5

Authority

JP

Japan

Prior art keywords

alumina

nitride

silicon carbide

oxide

aluminum nitride

Prior art date

2013-07-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
• CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 7
• HBMJWWWQQXIZIP-UHFFFAOYSA-N Silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
• PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 6
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
• HQVNEWCFYHHQES-UHFFFAOYSA-N Silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
• 239000002105 nanoparticle Substances 0.000 claims description 5
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
• 239000000395 magnesium oxide Substances 0.000 claims description 4
• XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
• 229910052582 BN Inorganic materials 0.000 claims description 3
• PZNSFCLAULLKQX-UHFFFAOYSA-N N#B Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
• 235000012239 silicon dioxide Nutrition 0.000 claims description 3
• 239000000377 silicon dioxide Substances 0.000 claims description 3
• 229910015136 FeMn Inorganic materials 0.000 claims description 2
• JEIPFZHSYJVQDO-UHFFFAOYSA-N Iron(III) oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
• OGIDPMRJRNCKJF-UHFFFAOYSA-N TiO Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
• 229910002026 crystalline silica Inorganic materials 0.000 claims description 2
• 229910000460 iron oxide Inorganic materials 0.000 claims description 2
• 229910000529 magnetic ferrite Inorganic materials 0.000 claims description 2
• PWHULOQIROXLJO-UHFFFAOYSA-N manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
• 229910052748 manganese Inorganic materials 0.000 claims description 2
• 239000011572 manganese Substances 0.000 claims description 2
• 229910001929 titanium oxide Inorganic materials 0.000 claims description 2
• 239000011787 zinc oxide Substances 0.000 claims description 2
• 229910000859 α-Fe Inorganic materials 0.000 claims description 2
• 230000001070 adhesive Effects 0.000 claims 2
• 239000000853 adhesive Substances 0.000 claims 2
• 239000011347 resin Substances 0.000 claims 2
• 229920005989 resin Polymers 0.000 claims 2
• 229910017083 AlN Inorganic materials 0.000 claims 1
• 229910052593 corundum Inorganic materials 0.000 claims 1
• 239000000945 filler Substances 0.000 claims 1
• 239000011256 inorganic filler Substances 0.000 claims 1
• 229910003475 inorganic filler Inorganic materials 0.000 claims 1
• 229910003465 moissanite Inorganic materials 0.000 claims 1
• 125000000962 organic group Chemical group 0.000 claims 1
• 125000005375 organosiloxane group Chemical group 0.000 claims 1
• 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 claims 1
• 235000010215 titanium dioxide Nutrition 0.000 claims 1
• 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
• MUBZPKHOEPUJKR-UHFFFAOYSA-N oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
• 210000002381 Plasma Anatomy 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 238000005260 corrosion Methods 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 239000010419 fine particle Substances 0.000 description 1
• 229910052736 halogen Inorganic materials 0.000 description 1
• 150000002367 halogens Chemical class 0.000 description 1
• 229910010272 inorganic material Inorganic materials 0.000 description 1
• 239000011147 inorganic material Substances 0.000 description 1
• 235000006408 oxalic acid Nutrition 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• 229910052904 quartz Inorganic materials 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1