JP2015020195A - Laser processor, laser processing method and laser oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser processor which can remove debris which is adhered in a wide range while reducing a laser output, a laser processing method, and a laser oscillator which oscillates a laser beam for abrasion processing.SOLUTION: A laser processor related to one embodiment of this invention comprises: an oscillator 1 which oscillates a processing beam 51 for abrasion-processing a product 4 to be processed, and a debris removing beam 52 for removing debris 102 which is generated by the abrasion processing; and a holding device 3 for holding the product 4 to be processed. The laser processing beam 51 is radiated to the product 4 to be processed which is held at the holding device 3, the debris removing beam 52 is radiated to a radiation position of the laser processing beam 51 of the product 4 to be processed or the vicinity of the radiation position, and a radiation shape of the debris removing beam 52 in the product 4 to be processed is linear.

Description

  The present invention relates to a laser processing apparatus, a laser processing method, and a laser oscillation apparatus. More specifically, the present invention relates to a laser processing apparatus, a laser processing method, and an ablation process that ablate a workpiece by irradiating a laser beam. The present invention relates to a laser oscillating device that oscillates the laser beam.

  Ablation processing is a laser processing technique used in micro-processing such as micro-drilling and micro-groove formation of glass, semiconductor, metal, and the like, and micro-cutting. In ablation processing, a workpiece is irradiated with a laser beam with a high energy density, and processing is performed by instantaneously decomposing, evaporating, and scattering substances on the surface of the material. However, the processing debris (debris) scattered by processing sometimes reattaches around the processing portion. Thus, several methods for removing the attached debris have been proposed.

  In Patent Document 1, as a method of forming a laser processing groove, a step of forming a processing groove with an elliptical laser processing beam and a step of removing debris accumulated in the processing groove with an elliptical debris removal beam Are alternately implemented. The elliptical beam shape at the time of laser processing has a ratio of the major axis to the minor axis of 30 to 60: 1, and the elliptical beam shape at the time of debris removal has a ratio of the major axis to the minor axis of 1 to 20: 1.

  Patent Document 2 discloses that a laser beam is divided into a laser processing beam and a debris removal beam, and debris is removed with a laser simultaneously with the laser processing. The irradiation region of the beam for removing debris includes the irradiation region of the beam for laser processing, and the power density of the beam for removing the debris is lower than the ablation threshold value of the workpiece.

JP 2007-305646 A Japanese Patent No. 3052226

  In the technique disclosed in Patent Document 1, the width of the irradiation region of the beam for removing debris is the same as the width of the irradiation region for laser processing. Therefore, debris deposited and attached to the processing groove can be removed, but debris attached to the periphery of the processing groove cannot be removed.

  In the technique disclosed in Patent Document 2, the irradiation area of the debris removal beam is set to a wide area including the processing portion and the surrounding debris adhesion possible area. In order to remove debris, it is necessary to irradiate the beam with a power density equal to or higher than a threshold value. Therefore, if the area of the irradiation region is increased, the output of the irradiated beam must be increased in accordance with the area. For example, when one laser beam is divided into a laser processing beam and a debris removal beam, a large part of the output of the original laser beam is assigned to the debris removal beam. There may be a problem with insufficient output to allocate. Such a problem becomes prominent when a low-power laser oscillator such as an ultrashort pulse laser is used as a laser light source.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a laser processing apparatus and method capable of removing debris attached over a wide range while reducing the output of the laser beam. It is to provide.

  In order to achieve this object, a laser processing apparatus according to the first aspect of the present invention includes a first beam for ablating a workpiece and a second beam for removing debris generated by the ablation processing. An oscillating device that oscillates the beam and a holding device for holding the workpiece, wherein the first beam is applied to the workpiece held by the holding device, and the second beam Is irradiated to the irradiation position of the first beam of the workpiece or in the vicinity of the irradiation position, and the irradiation shape of the workpiece is linear.

  The laser processing method according to the second aspect of the present invention oscillates a first beam for ablating a workpiece and a second beam for removing debris generated by the ablation processing. An oscillation step, wherein the workpiece is irradiated with the first beam, and the second beam is irradiated on or near the irradiation position of the first beam on the workpiece. The irradiation shape of the second beam on the workpiece is linear.

  The laser oscillation apparatus according to the third aspect of the present invention is a laser oscillation apparatus that oscillates a first beam for performing ablation processing and a second beam for removing debris generated by the ablation processing. And a shaping means for shaping the shape of a cross section of the second beam perpendicular to the optical axis of the second beam into a linear shape.

  In the present invention, since the irradiation shape of the second beam for removing the debris generated by the ablation processing is linear, it is possible to reduce the output of the laser beam and to remove the debris attached over a wide range. Become.

(A) is a schematic diagram of the laser processing apparatus which concerns on one Embodiment of this invention, (b) is a figure for demonstrating the ablation process and debris removal method which concern on one Embodiment of this invention. (A)-(d) is a figure for demonstrating the beam shaping division | segmentation part of the laser processing apparatus which concerns on one Embodiment of this invention. (A)-(e) is a figure for demonstrating the irradiation shape of the beam 52 for a debris removal of the laser processing apparatus which concerns on one Embodiment of this invention. It is a schematic diagram of the laser processing apparatus of the Example which concerns on one Embodiment of this invention. It is an image which shows the irradiation shape in the workpiece of the beam irradiated in the Example which concerns on one Embodiment of this invention. (A), (b) is the upper surface image of the processing groove formed in the Example which concerns on one Embodiment of this invention. It is a graph which shows the correspondence of the irradiation distance of the beam for laser processing of the Example which concerns on one Embodiment of this invention, the beam for a debris removal, and the removal amount of a debris. (A), (b) is a figure for demonstrating the removal method of the debris which concerns on one Embodiment of this invention. (A), (b) is a figure for demonstrating a mode that the scattering direction of the debris which concerns on one Embodiment of this invention is controlled. (A), (b) is a figure for demonstrating a mode that the scattering direction of the debris of the Example which concerns on one Embodiment of this invention was controlled. It is a schematic diagram of the laser processing apparatus which concerns on one Embodiment of this invention. It is a figure for demonstrating the irradiation area | region of the beam for laser processing and the beam for a debris removal which concerns on one Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the embodiments. In the drawings described below, components having the same function are denoted by the same reference numerals, and repeated description thereof may be omitted.

  In the present invention, “ablation processing” is a kind of non-thermal processing, in which a workpiece is irradiated with a high-power density laser beam to decompose, evaporate, and scatter the surface material of the workpiece. Is to do. Further, in the present invention, “debris” refers to work waste of a workpiece that is generated as a result of ablation. Further, in the present invention, the “ablation threshold value” is a value specific to a material and is a minimum power density that enables ablation processing.

(First embodiment)
FIG. 1A is a schematic diagram of a laser processing apparatus according to the present embodiment. The laser processing apparatus includes an oscillation device 1, a reflection mirror 21, a condenser lens 22, and a holding device 3. The oscillation device 1 includes a laser light source 11, a laser control unit 12, and a beam shaping / dividing unit 13. The holding device 3 includes a holding unit 31 and an XYZ axis stage 32. A broken line with an arrow indicates a laser processing beam 51 for performing ablation processing, and a one-dot broken line with an arrow indicates a debris removal beam 52 for removing debris.

  The laser light source 11 oscillates a laser beam for performing ablation processing. In this embodiment, a femtosecond laser is used as a laser beam oscillated from the laser light source 11, but the present invention is not limited to this. A picosecond laser, excimer laser, YAG laser, CO2 laser, or the like may be used as long as it can perform ablation processing. The controller 12 can control the output, frequency, etc. of the laser beam oscillated by the laser light source 11. The laser beam oscillated from the laser light source 11 enters the beam shaping division unit 13. The beam shaping division unit 13 divides the incident laser beam into two beams, a laser processing beam 51 and a debris removal beam 52, and shapes the shape of the debris removal beam 52. The beam shaping division unit 13 will be described in detail later.

  The laser processing beam 51 and the debris removal beam 52 change the optical path by the reflection mirror 21, and are irradiated onto the workpiece 4 installed on the holding unit 31 via the condenser lens 22.

  The workpiece 4 is installed on the holding unit 31. The holding unit 31 is a member that can hold the workpiece 4, and is fixed to the XYZ axis stage 32. The XYZ axis stage 32 can be driven in the XY axis direction and the Z axis direction. Here, the XY axis direction is a surface direction of the installation surface on which the workpiece 4 of the holding unit 31 is installed, and the Z axis direction is a direction orthogonal to the XY axis direction. Accordingly, by driving the XYZ axis stage 32 while irradiating the workpiece 4 installed on the holding unit 31 with the laser processing beam 51 and the debris removing beam 52, the workpiece 4 is subjected to the laser processing beam 51. Further, a desired processing can be performed by scanning with the debris removing beam 52.

  Instead of moving the workpiece 4 by the XYZ axis stage 32, the laser processing beam 51 and debris are configured by using a configuration in which the oscillation device 11, the reflecting mirror 21, and the condenser lens 22 are moved together, or using a galvano scanner. The irradiation position of the removal beam 52 may be moved. Alternatively, the laser processing beam 51 and the debris removal beam 52 may be moved while moving the workpiece 4. That is, by moving at least one of the workpiece 4 and the laser processing beam 51 and the debris removal beam 52, the laser processing beam 51 and the debris removal beam 52 are scanned on the processing surface of the workpiece 4. Any configuration may be used.

  Next, the beam shaping division unit 13 will be described in detail with reference to FIGS. For convenience of explanation, the reflection mirror 21 shown in FIG. 1A is not shown in FIGS. 2A and 2B.

  FIG. 2A is a diagram for explaining how the laser beam 51 and the debris removal beam 52 are generated in the beam shaping division unit 13. The arrow indicates the incident direction of the beam. FIG. 2C is a top view showing the irradiation shape on the workpiece 4 of the laser processing beam 51 and the debris removal beam 52 oscillated from the beam shaping division unit 13 shown in FIG. is there. An arrow (upward direction in the figure) indicates the scanning direction of each beam. The beam shaping division unit 13 includes a diffractive optical element 131. The diffractive optical element 131 has both a function of dividing the laser beam and a function of shaping the shape of an orthogonal cross section of one optical axis of the divided laser beam. The laser beam oscillated from the laser light source 11 enters the beam shaping / dividing unit 13 and is divided into two beams of a laser processing beam 51 and a debris removal beam 52 by the diffractive optical element 131. Simultaneously with the division, the debris removal beam 52 is shaped into a linear line beam by the diffractive optical element 131. The laser processing beam 51 and the debris removal beam 52 divided by the beam shaping division unit 13 are irradiated onto the surface of the workpiece 4 through the condenser lens 22 (FIG. 2C). Note that, by changing the optical path length between the diffractive optical element 131 and the condensing lens 22, the irradiation region of the laser processing beam 51 on the workpiece 4 and the irradiation region of the debris removal beam 51 on the workpiece 4. The distance d between can be changed.

  In FIG. 2A, the method of generating the laser processing beam 51 and the debris removal beam 52 using the diffractive optical element 131 has been described. However, as shown in FIG. 2B, the beam splitter 132 is used. The laser processing beam 51 and the debris removal beam 52 may be generated. In this case, the laser beam incident on the beam shaping splitting unit 13 is split by the beam splitter 132 into two beams, a laser processing beam 51 and a debris removal beam 52. Further, the debris removal beam 52 is shaped into a linear line beam by the cylindrical lenses 134 and 135 while changing the optical path by the reflection mirror 136. The linearly shaped debris removal beam 52 is superimposed again on the laser processing beam 51 by the reflection mirror 137 and the beam splitter 133, and is emitted from the beam shaping division unit 13 together with the laser processing beam 51. 51 and the debris removal beam 52 are irradiated to the surface of the workpiece 4 through the condenser lens 22 (FIG. 2D). The beam splitters 132 and 133 are not limited to the present embodiment as long as they can divide and combine beams, such as a deflection beam splitter. Further, the beam 51 for laser processing and the beam 52 for removing debris are superposed in the beam splitter 133 while shifting their axes rather than completely matching each optical axis. By adjusting the distance between the axes, the irradiation interval d of each beam on the workpiece 4 can be changed.

  Next, returning to FIG. 1, the ablation processing and debris removal method in the laser processing apparatus according to the present embodiment will be described. FIG. 1B is a view for explaining an ablation processing method and a debris removal method according to the present embodiment. In this embodiment, the irradiation shape of the debris removal beam 52 is linear, and the workpiece 4 is applied to the workpiece 4 while irradiating the workpiece 4 from above with the laser processing beam 51 and the debris removal beam 52 separated from each other. The processing groove 101 is formed by moving in the XY axis direction (the direction of the white arrow). A solid line arrow indicates a relative movement direction (laser scanning direction) of the irradiation position of the laser processing beam 51 and the debris removal beam 52 with respect to the workpiece 4.

  The processing groove 101 is formed by moving the irradiation position while irradiating the workpiece 4 with the laser processing beam 51, and is generated around the processing groove 101 with the irradiation of the laser processing beam 51. The debris 102 is scattered and attached. The attached debris 102 is removed by irradiation with the debris removing beam 52. The laser beam 51 is irradiated onto the workpiece 4 with a power density higher than the ablation threshold of the workpiece 4, and the debris removal beam 52 removes the debris 102 generated from the workpiece 4. The workpiece 4 is irradiated with a sufficient power density. In general, since the debris 102 can be removed at a power density lower than the ablation threshold value of the workpiece 4, the power density of the debris removal beam 52 is less than the ablation threshold value of the workpiece 4. The ablation threshold value of the debris 102 is preferable. However, since the second beam (debris removal beam 52) is used to remove debris in the present invention, the power density of the debris removal beam 52 is within the above range as long as the debris removal effect can be exhibited. It is not limited to. That is, when removing the debris 102, it is desirable to irradiate the beam with a power density that can sufficiently remove the debris 102 without damaging the workpiece 4 or minimizing the damage. .

  The debris removal beam 52 irradiates behind the irradiation position of the laser processing beam 51 in the direction in which the formation of the processing groove 101 formed by the laser processing beam 51 proceeds. Further, the debris removal beam 52 is irradiated so that the axis of the linear irradiation shape of the debris removal beam 52 is orthogonal to the forming direction of the processing groove 101. By irradiating and moving the debris removal beam 52 in such an arrangement, the debris 102 generated by the laser processing beam 51 and scattered around can be removed while the debris removal beam 52 follows ( Debris removal region 103).

  That is, as in the present embodiment, when the laser processing beam 51 is scanned, the debris removing beam 52 is irradiated away from the laser processing beam 51 on the rear side in the scanning direction of the laser processing beam 51. Is preferred. At a certain moment, the debris 102 scatters in four directions around a part of the processing groove 101 formed by the laser processing beam 51, and a part of the scattered debris 102 centers around a part of the processing groove 101. It adheres to the workpiece 4 with a distribution. That is, the debris 102 attached to the workpiece 4 is formed around the processing groove 101 formed by the irradiation of the laser processing beam 51. On the other hand, in this embodiment, since the laser processing beam 51 and the debris removal beam 52 are irradiated as described above, the region where the attached debris 102 exists is debris removal beam 52. Will be scanned. At this time, since the debris removal beam 52 is a linear beam extending in a direction orthogonal to the scanning direction, the debris removal laser 52 can be irradiated to the debris 102 attached to the region away from the processing groove 101. it can. Therefore, the debris generated by processing the laser processing beam 51 and adhering to the workpiece 4 can be satisfactorily removed.

  In the present embodiment, irradiation is performed so that the longitudinal direction of the irradiation shape of the debris removal beam 52 is orthogonal to the scanning direction of the laser processing beam 51, but the present invention is not limited to this. Irradiation may be performed at an arbitrary angle other than 0 degrees (parallel). That is, the debris removal beam 52 has a debris removal effect by making the angle formed by the irradiation shape and the scanning direction larger than 0 degree.

  It is preferable that the length of the debris removing beam 52 be equal to or greater than the width of the range where the debris 102 is scattered. Further, the irradiation interval between the laser processing beam 51 and the debris removal beam 52 is d [μm], and the moving speed of the workpiece 4 (relative to the workpiece 4 in the irradiation area of the laser workpiece 4). When the moving speed is v [μm / s], it is preferable to set the interval d and the speed v so that the time T becomes a constant value at T = d / v [s]. More specifically, T [s] is determined when the debris 102 is generated by the laser processing beam 51 in a certain region of the workpiece 4, and then the debris 102 attached to the workpiece 4 is again returned by the debris removal beam 52. It can be regarded as the time until irradiation.

  Here, when attention is paid to one particle of the debris 102, the generated debris particles are scattered in the air at the same time as they are generated, and fall for a while and adhere to the surface of the workpiece 4. Furthermore, the debris particles adhering to the surface of the workpiece 4 do not adhere to the workpiece 4 immediately after the adhesion, and if soon after the adhesion, the power lower than the normal ablation threshold of the debris 102 is obtained. Can be removed by density. The relationship between the power density and time, that is, the relationship between the power density necessary for removing the attached debris and the time elapsed after the deposition of the debris can be derived by repeated measurement. Therefore, the value of the irradiation time interval T [s] is preferably set shortly after the scattered debris 102 adheres to the surface of the workpiece 4. Factors that determine the value of T [s] include the output of the laser processing beam 51, the wavelength, the energy absorption rate of the workpiece 4, and the like.

  As described above, the laser processing apparatus according to the first embodiment of the present invention irradiates the workpiece 4 with the two beams of the ablation processing beam 51 and the debris removal beam 52. Since the debris removal beam 52 is a line beam shaped so that the irradiation shape is linear, if the output of the original beam is the same, the beam expanded over a wide range (for example, the diameter of the line beam is The output (power density) per unit area of the beam is higher than that of the disk-shaped beam having the same length as the length. In other words, when beams having the same power density are oscillated, the required beam output can be reduced by forming a linear beam shape instead of a wide range of beams. Further, with the debris removal beam 52 irradiated onto the workpiece, for example, if the irradiation shape of the debris removal beam 52 is linear, the workpiece 4 is moved in a direction perpendicular to the straight line. To remove debris. That is, in this embodiment, even if a low-power laser is used by irradiating the debris removal beam 52 so that the projected image of the debris removal beam 52 onto the workpiece 4 is linear, the debris removal beam 52 is debris. A power density sufficient to realize removal can be ensured, and an irradiation area along a predetermined direction (for example, a direction orthogonal to the laser scanning direction) can be increased. Therefore, if the irradiation position of the linear debris removal beam 52 is moved as described above, the irradiation area can be expanded over a wide range, and the debris attached over a wide range can be removed while suppressing the output of the laser beam. Is possible.

  The shape of the debris removal beam 52 is not limited to a straight line, and the irradiation shape may be curved or arcuate. In this case, as shown in FIG. 3A, the debris removing beam 52 is moved with the curved / arc-shaped opening side of the debris removing beam 52 forward (the arrow in FIG. 3A). Direction), debris removal. Further, the irradiation shape of the debris removal beam 52 is a U-shape (FIG. 3B), a U-shape (FIG. 3C), a line combining a straight line and a curve (FIG. 3D), etc. It may be. The beam shape does not have to be a line in a strict sense. For example, an elliptical shape in which the ratio of the length of the major axis to the length of the minor axis is very large (FIG. 3 (e )) And the like are also included in the “line”. That is, it can be said that the shape of the debris removal beam 52 is a one-dimensional shape that produces an effect that the substantial irradiation region is expanded two-dimensionally by moving the irradiation region in a specific direction. .

Example 1
FIG. 4 is a schematic diagram of an example according to an embodiment of the present invention. The laser beam oscillated from the laser light source 11 is a femtosecond laser having a pulse width of 500 fs, a repetition frequency of 100 kHz, an average output of 1 w, and a wavelength of 1 μm. Moreover, the material of the workpiece 4 is soda-lime glass. It has been found that the ablation threshold value of soda-lime glass is about 0.05 W in terms of the output of the laser beam when the femtosecond laser and the condenser lens 22 described later are used. The spot diameter of the beam condensed by the condenser lens 22 is about 1 μm. The laser shaping / dividing unit 13 includes a half-wave plate 41, a deflecting beam splitter 42, a reflecting mirror 43, and a spatial light modulator 44. A laser beam with an output of 1 W (pulse energy 10 μJ) oscillated from the laser light source 11 was adjusted to 0.2 W (pulse energy 2 μJ) with a half-wave plate 41 and a deflection beam splitter 42. Further, the laser beam whose output is adjusted is incident on the spatial light modulator 44 via the reflection mirror 43, and the laser beam 51 for output with an output of 0.1 W (pulse energy 1 μJ) and the beam with an output of 0.1 W (pulse energy 1 μJ). The beam was divided into debris removal beams 52. The workpiece 4 was irradiated with the divided laser beam 51 and debris removal beam 52 via the condenser lens 22 (50 times), and scanning was performed. The workpiece 4 is placed on a holding unit 31 fixed to the XYZ axis stage 32, and the machining groove 10 is formed and the debris 102 is removed while the XYZ axis stage 32 is moved in the XY axis direction at a speed of 20 μm / s. Went. In order to confirm the effect of the debris removal beam 52, a comparison was made between the case where only the laser processing beam 51 was scanned and the case where both the laser processing beam 51 and the debris removal beam 52 were scanned.

  FIG. 5 is an image of the beam shape irradiated on the workpiece 4. The upper point is the laser processing beam 51, and the lower straight line is the debris removal beam 52. The irradiation interval d between the laser processing beam 51 and the debris removal beam 52 is 10 μm, and the length of the debris removal beam 52 is 30 μm. Therefore, the irradiation time interval T [s] between the laser processing beam 51 and the debris removal beam 52 is 0.5 seconds.

  FIG. 6A is an upper surface image of the processing groove 10 formed by the laser processing beam 51. It can be seen that debris 102 is adhered around the processing groove 10. FIG. 6B is an upper surface image of the processing groove 10 after the debris removal beam 52 is scanned simultaneously with the laser processing beam 51 and the debris removal is performed. It was confirmed that the scattered debris 102 can be removed by irradiating the debris removing beam 52 0.5 seconds after forming the machining groove 101 with the laser processing beam 51.

(Example 2)
In the laser processing apparatus having the same configuration as that of Example 1 described above, an experiment was performed in which the irradiation interval d [μm] between the laser processing beam 51 and the debris removal beam 52 was changed to check the change in the debris removal amount. . The laser processing beam 51 has an output of 0.05 W (pulse energy 0.5 μJ), the debris removal beam 52 has an output of 0.06 W (pulse energy 0.6 μJ), and the movement speed of the XYZ axis stage 32 is 100 μm / s. It was. Comparison was performed at three levels of irradiation intervals d = 2.6 μm, 7.8 μm, and 13 μm. The irradiation time intervals T [s] are 0.026 seconds, 0.078 seconds, and 0.13 seconds, respectively.

  FIG. 7 is a graph showing the removal amount of the debris 102 when the irradiation interval d [μm] between the laser processing beam 51 and the debris removal beam 52 is changed. The horizontal axis represents the distance from the center of the machining groove 10, and the vertical axis represents the height of the machined part after machining when the height of the surface of the workpiece 4 before machining is zero. It was confirmed that debris could be removed most when d = 7.8 μm.

(Second Embodiment)
The ablation threshold value of the debris 102 reattached to the surface of the workpiece 4 is lower than the ablation threshold value of the original workpiece 4. Therefore, in order to remove the reattached debris 102, it is considered that the debris removal beam 52 may be irradiated with a power density slightly lower than the ablation threshold of the workpiece 4. However, the portion where the debris 102 is fixed to the surface is easily absorbed by the workpiece 4 starting from the fixed debris 102, so even if it is less than the ablation threshold of the workpiece 4. There is a possibility of damaging the workpiece 4.

  It has been found by experiments so far that the scattered debris 102 can be removed with an ablation threshold lower than the original ablation threshold immediately after adhering to the workpiece 4. Therefore, it is important to remove the debris 102 immediately after the scattered debris 102 adheres to the workpiece 4.

  Some debris evaporates and disappears when the debris removal beam 52 is irradiated to the debris 102, but most of the debris is blown away. For example, when approaching the debris 102 while irradiating the debris removal beam 52, much of the debris 102 is bounced forward in the moving direction of the debris removal beam 52. This indicates that by devising the shape and moving direction of the debris removal beam 52, the scattering direction of the debris 102 can be controlled. For example, this means that the debris 102 can be swept out in a desired direction with the debris removal beam 52.

  FIGS. 8A and 8B are views for explaining how the debris 102 is removed by the debris removal beam 52. FIG. In FIG. 8A, the irradiation shape of the debris removal beam 52 is arcuate, and in FIG. 8B, the irradiation shape of the debris removal beam 52 is linear. In each of the cases (a) and (b), when the debris removal beam 52 is scanned in the direction of the solid arrow, the attached debris 102 is gradually collected while being blown off to the front side in the scanning direction of the debris removal beam 52. (Debris 102a). When the beam shape is a straight line as shown in FIG. 8B, the debris 102 can be discharged well by the debris removal beam 52, but the debris 102 also extends in the outer direction of the irradiation region near both ends of the line beam. It may be thrown away (broken arrow) and debris may remain. On the other hand, if the beam shape is an arc shape as shown in FIG. 8A, the debris 102 is likely to be blown inward in the irradiation area covered by the beam (broken arrow). Can be removed more efficiently without missing. Therefore, the shape of the debris removal beam 52 having a curved shape, a circular arc shape, a square shape, a U shape, or the like is very effective in controlling the scattering direction of the debris 102. In other words, the shape of the debris removal beam 52 is such that the debris removal beam 52 can be gathered in front of the debris removal beam 52 in the scanning direction without further scattering the debris 102 to the surroundings or reducing the amount of scattering. Is preferred.

  FIG. 9A is a view for explaining a method of removing the debris 102 of the laser processing apparatus according to the present embodiment. In FIG. 9A, the irradiation shape of the debris removal beam 52 is an annular shape. A solid arrow indicates the relative movement direction of the beam. Within the ring of the debris removal beam 52, the debris 102 moves together with the annular debris removal beam 52 while repeating scattering and adhesion. That is, the generated debris 102 can be guided to the end of the workpiece 4 while being confined in the ring.

  Further, as shown in FIG. 9B, the irradiation shape of the debris removal beam 52 may be inclined with respect to the scanning direction. FIG. 9B shows a top view of the workpiece 4, and a debris suction device 201 is installed on the lateral side with respect to the relative movement direction of the beam. Since the debris removal beam 52 is irradiated so that the irradiation shape has an angle with respect to the moving direction, the debris 102 is flipped obliquely forward and efficiently recovered by the debris aspirator 201.

  In the present embodiment, the variation of the irradiation shape of the debris removal beam 52 has been described. However, a configuration in which the same effect can be obtained by using a plurality of beams is also possible. In other words, by arranging a plurality of debris removal beams 52, it is possible to control the scattering direction of the debris 102 and efficiently remove the debris 102. One of the advantages of the debris removal beam 52 is that it can flexibly cope with the shape of the workpiece 4 and the required debris removal level by devising the irradiation shape and number of beams.

Example 3
When the workpiece 4 is irradiated with the laser processing beam 51 and the debris removal beam 52 to simultaneously form the processing groove 101 and remove the debris 102, the processing groove 101 is irradiated with only the laser processing beam 51. The adhesion state of the debris 102 in the case where only the formation was performed was compared. FIGS. 10A and 10B are views showing a top image of the workpiece 4 after processing. The white arrow direction (upward direction of the image) is the scanning direction, and the machining groove 101 is formed by scanning a certain distance. In FIG. 10A, debris is removed at the same time. Debris 102 adhering to the surface of the workpiece 4 is indicated by black dots. When the debris removal beam 52 is irradiated (FIG. 10 (a)), the amount of debris 102 attached increases considerably compared to when the debris removal beam 52 is not irradiated (FIG. 10 (b)). You can see that. Furthermore, it can be confirmed that the debris 102 is sufficiently removed in the region scanned with the debris removal beam 52 (below the line beam 52 in the image). In FIGS. 10A and 10B, since the process was performed under the same conditions except for the use of the debris removal beam 52, the amount of debris 102 generated is considered to be approximately the same. Therefore, in FIG. 10A, since the debris 102 is accumulated in the front of the operation direction, the debris 102 is swept out along the scanning direction by the debris removal beam 52, that is, debris is scattered and removed. It was confirmed that the direction was controlled.

(Third embodiment)
FIG. 11 is a schematic diagram of a laser processing apparatus according to the present embodiment. The laser processing apparatus includes an oscillation device 1, a beam splitter (half mirror) 91, a condenser lens 22, and a holding device 3. The oscillation device 1 includes laser light sources 11a and 11b, laser control units 12a and 12b, and beam shaping units 93a and 93b. The holding device 3 includes a holding unit 31 and an XYZ axis stage 32. The workpiece 4 is installed on the holding unit 31. A broken line with an arrow indicates a laser processing beam 51 for performing ablation processing, and a one-dot broken line with an arrow indicates a debris removal beam 52 for removing debris.

  Thus, in this embodiment, it is set as the structure provided with the two laser light sources 11a and 11b. That is, the laser processing beam 51 and the debris removal beam 52 are generated from the laser beams oscillated from the laser light sources 11a and 11b, respectively. The laser processing beam 51 and the laser removal beam 52 oscillated from the oscillation device 1 are combined by a beam splitter (half mirror) 91 and enter the workpiece 4 through the condenser lens 22. The beam splitter 91 is not limited to the present embodiment as long as it can divide and combine beams, such as a deflecting beam splitter. Further, the irradiation interval d between the laser processing beam 51 and the laser removing beam 52 on the workpiece 4 changes the distance between the optical axes when each beam enters the beam splitter (half mirror) 91. Can be adjusted. Further, the workpiece 4 is scanned in a state where the workpiece 4 is irradiated with the laser processing beam 51 and the laser removal beam 52, so that ablation processing and debris removal are simultaneously performed.

  The debris removal beam 52 may be irradiated so that the irradiation region includes at least a part of the irradiation region of the laser processing beam 51. For example, when the irradiation position of the laser processing beam 51 is fixed as in drilling, the debris removal beam 52 can be irradiated so as to overlap the laser processing beam processing hole (FIG. 12). . Alternatively, it is also possible to adopt a configuration in which the debris that adheres by removing only the debris removing beam 52 is removed by scanning the surroundings while fixing the irradiation position of the laser processing beam 51. As shown in FIG. 12, the debris removing beam 52 is rotated around the processing point irradiated with the laser processing beam 51, or the processing point irradiated with the laser processing beam 51 is sandwiched between the processing points. The beam 52 may be configured to reciprocate and scan.

DESCRIPTION OF SYMBOLS 1 Oscillator 11 Laser light source 12 Laser control part 13 Beam shaping division part 131 Diffractive optical element 132, 133 Beam splitter 134, 135 Cylindrical lens 136, 137 Reflection mirror 21 Reflection mirror 22 Condensing lens 3 Holding apparatus 31 Holding part 32 XYZ axis Stage 4 Workpiece 41 Half-wave plate 42 Deflection beam splitter 43 Reflection mirror 44 Spatial light modulator 51 Laser processing beam 52 Debris removal beam 91 Beam splitter (half mirror)
93 Beam shaping part 101 Processing groove 102 Debris (debris adhesion area)
102a Debris (debris accumulation area)
103 Debris removal area 201 Debris suction nozzle

Claims (9)

An oscillation device that oscillates a first beam for ablating a workpiece and a second beam for removing debris generated by the ablation;
A holding device for holding the workpiece,
The first beam is applied to the workpiece held by the holding device, and the second beam is applied to the irradiation position of the first beam on the workpiece or in the vicinity of the irradiation position. An irradiation shape of the second beam on the workpiece is a linear laser processing apparatus.   The first beam is applied to the workpiece at a power density greater than or equal to the ablation threshold of the workpiece, and the second beam is less than the ablation threshold of the workpiece and is less than the debris. The laser processing apparatus according to claim 1, wherein the workpiece is irradiated with a power density equal to or higher than an ablation threshold.   The first beam scans the workpiece, and the second beam is in a state where the longitudinal direction of the irradiation shape forms an angle larger than 0 degrees with respect to the scanning direction of the first beam. The laser processing apparatus according to claim 1, wherein the workpiece is scanned in the scanning direction.   The first beam scans the workpiece, and the second beam is irradiated at a distance rearward with respect to the scanning direction of the first beam to irradiate the workpiece in the scanning direction. The laser processing apparatus according to claim 1, wherein scanning is performed.   The laser processing apparatus according to claim 1, wherein at least a part of the irradiation shape of the second beam is an arc shape.   6. The laser according to claim 1, wherein the oscillation device includes a light source that generates a laser beam, and a division unit that divides the laser beam into the first beam and the second beam. Processing equipment.   The laser processing apparatus according to claim 1, wherein the oscillation device includes a first light source that oscillates the first beam and a second light source that oscillates the second beam. . An oscillation step of oscillating a first beam for ablating a workpiece and a second beam for removing debris generated by the ablation processing;
The first beam is irradiated on the workpiece, and the second beam is irradiated on or near the irradiation position of the first beam on the workpiece. A laser processing method in which the irradiation shape is linear. A laser oscillation device that oscillates a first beam for performing ablation processing and a second beam for removing debris generated by the ablation processing,
A laser oscillation device comprising shaping means for shaping a shape of a section of the second beam perpendicular to the optical axis of the second beam into a linear shape.