JP2015009319A - Conveyance apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveyance apparatus capable of conveying a large workpiece without enlarging a swiveling range.SOLUTION: The conveyance apparatus includes: a base body 11; a first wrist part 14A; a second wrist part 14B positioned on a first direction X1 side relative to the first wrist part; and a movement mechanism 13 that moves the first wrist part and the second wrist part along a flat surface parallel to the first direction toward the base body. The movement mechanism includes a right side turning member 41, a right side first guide arm 43A and a right side second guide arm 43B. The right side turning member is supported by the base body so as to be turnable relative to the base body. The right side first guide arm is connected to the first wrist part and also connected to the right side turning member so as to be turnable around a right side first intermediate axis line 43Aa extending along a second direction X2. The right side second guide arm is connected to the second wrist arm and also connected to the right side turning member so as to be turnable around a right side intermediary axis line 43Ba extending along the second direction. The right side first intermediary axis line is positioned on the first direction side relative to the right side second intermediate axis line in a planar view.

Description

  The present invention relates to a transport apparatus.

  Conventionally, a transfer device for transferring a workpiece such as a substrate is known (for example, see Patent Document 1). As shown in FIG. 1, the conventional apparatus 900 is sometimes called a frog-leg type robot, and includes front arms 912 to 915, drive arms 917 and 918, a base 919, and mounting bases 925 and 926. And comprising.

  The drive arms 917 and 918 are supported so as to be rotatable with respect to the base 919. The base ends of the front arms 912 and 913 are rotatably connected to drive arms 917 and 918, respectively. The front ends of the front arms 912 and 913 are connected to the mounting table 925. Similarly, the base ends of the front arms 914 and 915 are rotatably connected to the drive arms 917 and 918, respectively. The tips of the front arms 914 and 915 are connected to the mounting table 926. The work is placed on the mounting tables 925 and 926 in a state where the work is mounted. In the apparatus 900, the mounting bases 925 and 926 move forward and backward as the driving arms 917 and 918 rotate with respect to the base 919. FIG. 1 shows a state where the apparatus 900 is in the origin posture, and FIG. 2 shows a state where the front arms 912 and 913 are extended. The device 900 is advantageous in work efficiency because it can extend and retract two pairs of arms symmetrically with a slight drive.

JP 7-504128 A

  In general, as the device 900, a device having a small turning range tends to be preferred. On the other hand, there is a desire to increase the size of the work that can be conveyed by the apparatus 900. In order to convey a larger workpiece, it is conceivable to extend the extension / contraction operation distance of the mounting tables 925 and 926. The expansion / contraction operation distance of the mounting bases 925 and 926 depends on the lengths of the front arms 912 to 915 and the lengths of the drive arms 917 and 918. Therefore, it is conceivable to lengthen the lengths of the front arms 912 to 915 and the lengths of the drive arms 917 and 918 when extending the telescopic operation distance. However, if the length of the front arms 912 to 915 and the length of the drive arms 917 and 918 are increased, the turning range of the device 900 must be increased.

  The present invention has been conceived under the circumstances described above, and its main problem is to provide a transport device capable of transporting larger workpieces without increasing the turning range. .

  According to the first aspect of the present invention, the base, the first moving unit, the second moving unit positioned on the first direction side with respect to the first moving unit, the first moving unit, and the second moving unit A moving mechanism that moves the portion relative to the base body along a plane parallel to the first direction, and the moving mechanism includes a rotating member, a first guide arm, and a second guide arm. The rotating member is supported by the base body so as to be rotatable with respect to the base body, and the first guide arm is connected to the first moving portion and is orthogonal to the first direction. The second guide arm is connected to the second moving part, and is connected to the second moving portion so as to be rotatable about a first intermediate axis extending along the second direction. Connected to the rotating member so as to be rotatable around a second intermediate axis extending along the first axis. During axes, in plan view, it is located in said first direction relative to the second intermediate axes, transport apparatus is provided.

  Preferably, the first guide arm intersects the second guide arm in plan view.

  Preferably, the first guide arm has a curved portion curved toward the first direction.

  Preferably, the second guide arm has a curved portion curved in a third direction opposite to the first direction.

  Preferably, the rotation member is coupled to the base body so as to be rotatable around a rotation axis extending along the second direction.

  Preferably, the rotating member is one rotating arm, and both the first guide arm and the second guide arm are connected to the rotating arm.

  Preferably, the rotating member includes a first rotating arm and a second rotating arm, and the first rotating arm and the second rotating arm are rotatable with respect to the base body, The first guide arm is coupled to the first pivot arm so as to be pivotable about the first intermediate axis with respect to the first pivot arm, and the second guide arm is coupled to the base. The guide arm is connected to the second rotating arm so as to be rotatable about the second intermediate axis with respect to the second rotating arm.

  Preferably, the rotation member, the first guide arm, the second guide arm, the first intermediate axis, and the second intermediate axis are respectively connected to the right rotation member, the right first guide arm, and the right second guide arm. The right first intermediate axis and the right second intermediate axis, and the moving mechanism includes a left rotation member, a left first guide arm, and a left second guide arm, and the left rotation member is the base body On the other hand, the left rotation member is disposed on the opposite side of the right rotation member, and the left rotation member is supported by the base so as to be rotatable with respect to the base. Is coupled to the left pivot member so as to be pivotable about a left first intermediate axis that is coupled to the first moving portion and extends along the second direction, and the left second guide arm. Is connected to the second moving part, and the second The left side first intermediate axis is connected to the left side second intermediate axis in a plan view so as to be rotatable around a left side second intermediate axis extending in the direction. It is located on the first direction side.

  Preferably, the left first guide arm intersects the left second guide arm in plan view.

  Preferably, the driving unit further includes a driving unit disposed inside the base, and the driving unit rotates the left side rotation member and the right side rotation member with respect to the base.

  Preferably, each further includes a first holding part and a second holding part for holding a workpiece, wherein the first holding part is attached to the first moving part, and the second holding part is It is attached to the second moving part.

  According to the second aspect of the present invention, the base, the first moving part, the second moving part located on the first direction side with respect to the first moving part, the first moving part and the second moving part A moving mechanism that moves the portion relative to the base body along a plane parallel to the first direction, and the moving mechanism includes a rotating member, a first guide arm, and a second guide arm. The rotating member is supported by the base body so as to be rotatable with respect to the base body, and the first guide arm is connected to the first moving portion and is orthogonal to the first direction. The second guide arm is connected to the second moving part, and is connected to the second moving portion so as to be rotatable about a first intermediate axis extending along the second direction. Connected to the rotating member so as to be rotatable around a second intermediate axis extending along the first axis. The inter-axis is located on the first direction side with respect to the second intermediate axis in plan view, and the rotating member includes a first rotating arm and a second rotating arm, The first turning arm is connected to the base body so as to be rotatable around a first turning axis extending along the second direction with respect to the base body, and the second turning arm is connected to the base body. The first rotation axis is connected to the base body so as to be rotatable around a second rotation axis extending along the second direction. The first rotation axis is the first rotation axis with respect to the second rotation axis. A transport device is provided that is located on the direction side.

  Preferably, the rotating member includes a connecting portion, and the connecting portion is rotatable about a first intermediate axis extending along the second direction with respect to the first rotating arm. The second rotating arm is connected to one rotating arm, and the connecting portion is rotatable with respect to the second rotating arm about a second intermediate axis extending along the second direction. The first intermediate axis and the second intermediate axis are separated from each other.

  Preferably, the separation distance between the first intermediate axis and the second intermediate axis is the same as the separation distance between the first rotation axis and the second rotation axis.

  Preferably, the first guide arm intersects the second guide arm, the first rotating arm, and the second rotating arm in plan view.

  Preferably, the rotation member, the first guide arm, the second guide arm, the first intermediate axis, and the second intermediate axis are respectively connected to the right rotation member, the right first guide arm, and the right second guide arm. The right first intermediate axis and the right second intermediate axis, and the moving mechanism includes a left rotation member, a left first guide arm, and a left second guide arm, and the left rotation member is the base body On the other hand, the left rotation member is disposed on the opposite side of the right rotation member, and the left rotation member is supported by the base so as to be rotatable with respect to the base. Is connected to the left rotation member so as to be rotatable around a left first intermediate axis extending in the second direction, and is connected to the first moving portion, and the left second guide arm. Is a left second intermediate shaft extending along the second direction. It is connected to the left rotation member so as to be able to turn around, and is connected to the second moving part, and in the plan view, the left first intermediate axis is relative to the left second intermediate axis. It is located on the first direction side.

  Preferably, the left side rotation member includes a left side first rotation arm and a left side second rotation arm, and the left side first guide arm in plan view, the left side second guide arm, It intersects the left first rotating arm and the left second rotating arm.

  Preferably, the driving unit further includes a driving unit disposed inside the base, and the driving unit rotates the left side rotation member and the right side rotation member with respect to the base.

  Preferably, one of the right first rotating arm and the right second rotating arm is a driving arm rotated by the driving unit, and the right first rotating arm and the right second turn. The other of the moving arms is a driven arm that rotates following the one rotation, and either the left first rotating arm or the left second rotating arm is rotated by the drive unit. The other of the left first rotating arm and the left second rotating arm is a driven arm that rotates following one rotation.

  Preferably, each further includes a first holding part and a second holding part for holding a workpiece, wherein the first holding part is attached to the first moving part, and the second holding part is It is attached to the second moving part.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

It is a top view which shows the conventional conveying apparatus. It is a top view which shows the conventional conveying apparatus. (A) is a top view which shows the conveying apparatus of 1st Embodiment of this invention. (B) is sectional drawing which follows the bb line of (a). It is a typical fragmentary sectional view which follows the IV-IV line of FIG. (A) is a top view which shows the 1st extension attitude | position of the conveying apparatus shown in FIG. (B) is sectional drawing of the conveying apparatus shown to (a). FIG. 6 is a plan view illustrating the origin posture of the transport device following FIG. 5. It is a top view which shows the 2nd extension attitude | position of a conveying apparatus following FIG. FIG. 8 is a plan view showing the origin posture of the transport device following FIG. 7. FIG. 9 is a plan view showing the transport device following FIG. 8. It is a top view which shows the modification of 1st Embodiment of this invention. It is a top view which shows the conveying apparatus of 2nd Embodiment of this invention. It is a typical fragmentary sectional view which follows the XII-XII line | wire of FIG. It is a top view which shows the 1st extension attitude | position of the conveying apparatus shown in FIG. It is the top view which omitted the right side 2nd rotation arm, the left side 2nd rotation arm, the 2nd wrist part, etc. from FIG. FIG. 14 is a plan view in which the right first rotating arm, the left first rotating arm, the first wrist, and the like are omitted from FIG. 13.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

<First Embodiment>
A first embodiment of the present invention will be described with reference to FIGS.

  FIG. 3A is a plan view showing the transport apparatus according to the first embodiment of the present invention. (B) is sectional drawing which follows the bb line of (a). 4 is a schematic partial sectional view taken along line IV-IV in FIG.

  The transfer device 1 shown in these drawings is a transfer robot for transferring a work 89 (see FIG. 5). The work 89 has, for example, a plate shape, and is a glass panel or a liquid crystal FPD substrate. Although not shown, for example, a work accommodation mechanism is disposed around the transfer device 1. The workpiece accommodation mechanism has a plurality of accommodation spaces each accommodating the workpiece 89.

  As shown in FIGS. 3 and 4, the transfer device 1 includes a base body 11, a moving mechanism 13, a first wrist portion 14 </ b> A, a second wrist portion 14 </ b> B, and a first holding portion 15 </ b> A (two points in FIG. 3). 2), a second holding unit 15 </ b> B (indicated by a two-dot chain line in FIG. 3), and a drive unit 71.

  The base 11 includes, for example, a body and a top flange (detailed illustration is omitted). The trunk is, for example, a cylindrical shape. The top flange is fixed to the upper part of the trunk. The top flange is fastened to the bottom surface of the chamber, and the fuselage is suspended from the chamber.

  The moving mechanism 13 is a mechanism for moving the first wrist portion 14 </ b> A and the second wrist portion 14 </ b> B with respect to the base body 11. The moving mechanism 13 will be described later.

  The first wrist portion 14A (corresponding to an example of the first moving portion of the present invention) and the second wrist portion 14B (corresponding to an example of the second moving portion of the present invention) are moved in the first direction X1 by the moving mechanism 13. Are moved relative to the base body 11 along a plane parallel to the horizontal plane (in this embodiment, a horizontal plane). As shown in FIG. 3, the second wrist portion 14B is located on the first direction X1 side with respect to the first wrist portion 14A. Note that the first wrist portion 14A and the second wrist portion 14B are configured such that the posture with respect to the base body 11 does not change even when the first wrist part 14A and the second wrist part 14B are moved forward and backward relative to the base body 11.

  The first holding portion 15A is attached to the first wrist portion 14A, and is fixed to the first wrist portion 14A. The first holding portion 15A moves integrally with the first wrist portion 14A. The first holding unit 15 </ b> A is for holding the work 89. The first holding unit 15A moves while holding the work 89, so that the work 89 is conveyed to a desired position. In the present embodiment, the first holding unit 15A conveys the work 89 by placing the work 89 thereon. Unlike the present embodiment, the first holding unit 15A is not limited to the one on which the work 89 is placed. For example, the first holding unit 15 </ b> A may hold the work 89 by attracting the work 89 from the upper surface of the work 89.

  In the present embodiment, the first holding portion 15A has two first end effectors 153A. Each first end effector 153A has a thin plate shape extending along one direction. The work 89 is transported by placing the work 89 on the two first end effectors 153A.

  The second holding portion 15B is attached to the second wrist portion 14B and is fixed to the second wrist portion 14B. The second holding portion 15B moves integrally with the second wrist portion 14B. The second holding portion 15B is for holding the work 89. By moving the second holding unit 15B while holding the workpiece 89, the workpiece 89 is conveyed to a desired position. In the present embodiment, the second holding unit 15B transports the work 89 by placing the work 89 thereon. Unlike the present embodiment, the second holding portion 15B is not limited to the one on which the work 89 is placed. For example, the second holding unit 15 </ b> B may hold the work 89 by attracting the work 89 from the upper surface of the work 89.

  In the present embodiment, the second holding portion 15B has two second end effectors 153B. Each second end effector 153B has a thin plate shape extending in one direction. The work 89 is transported by placing the work 89 on the two second end effectors 153B.

  Next, the moving mechanism 13 will be described. As shown in FIG. 3, the moving mechanism 13 includes a right rotation member 41, a right first guide arm 43A, a right second guide arm 43B, a left rotation member 51, a left first guide arm 53A, Left second guide arm 53B.

  The right rotation member 41 is supported by the base 11 so as to be rotatable with respect to the base 11. The right rotation member 41 is rotatable with respect to the base body 11 in a plane parallel to the first direction X1. In the present embodiment, the right rotation member 41 is rotatable around a right rotation axis 411a extending along a second direction X2 orthogonal to the first direction X1. Further, in the present embodiment, the right rotation member 41 is one right rotation arm 411. The right turning arm 411 has a rod shape extending along one direction. The right rotation arm 411 is connected to the base 11 so as to be rotatable about the right rotation axis 411a with respect to the base 11.

  In order to make the right rotation arm 411 rotatable with respect to the base 11, for example, a vertically upward shaft portion (not shown) is fitted into a hole formed at the base end of the right rotation arm 411. Yes. The rotatable configuration described below is also a configuration in which the shaft portion is fitted in the hole, and the description of the relationship between the shaft portion and the hole is omitted below.

  The right first guide arm 43A is connected to the right rotation member 41 so as to be rotatable around the right first intermediate axis 43Aa extending along the second direction X2 with respect to the right rotation member 41. Specifically, the right first guide arm 43A and the right rotation member 41 are connected to each other at one end. The right first guide arm 43A is connected to the first wrist portion 14A so as to be rotatable around the right first wrist axis 43Ac extending along the second direction X2 with respect to the first wrist portion 14A. . Specifically, the right first guide arm 43A is connected to the first wrist portion 14A at the other end of the right first guide arm 43A. The right first guide arm 43A intersects the right rotation member 41 in plan view.

  The right second guide arm 43B is connected to the right rotation member 41 so as to be rotatable around the right second intermediate axis 43Ba extending along the second direction X2 with respect to the right rotation member 41. Specifically, the right second guide arm 43B and the right rotation member 41 are connected to each other at one end. In the plan view, the right first intermediate axis 43Aa is located on the first direction X1 side with respect to the right second intermediate axis 43Ba. The right second guide arm 43B is connected to the second wrist portion 14B so as to be rotatable around the right second wrist axis 43Bc extending along the second direction X2 with respect to the second wrist portion 14B. . Specifically, the right second guide arm 43B is connected to the second wrist portion 14B at the other end of the right second guide arm 43B. The right second guide arm 43B intersects the right turning member 41 and the right first guide arm 43A in plan view.

  The right first guide arm 43A is shaped to prevent interference with the connecting portion between the right turning member 41 and the right second guide arm 43B. Specifically, as shown in FIG. 3, in the present embodiment, the right first guide arm 43A has a curved portion 43Ab that is curved toward the first direction X1.

  The right second guide arm 43B has a shape that prevents interference between the right turning member 41 and the connecting portion between the right first guide arm 43A. As shown in FIG. 3, in the present embodiment, the second right guide arm 43B has a curved portion 43Bb that is curved in the third direction X3 opposite to the first direction X1.

  The left rotation member 51, the left first guide arm 53A, and the left second guide arm 53B are different from the right rotation member 41, right first guide arm 43A, and right second guide arm 43B described above with respect to the base 11. Are symmetrical with respect to each other (that is, vertically symmetrical in FIG. 3A). This will be specifically described below.

  The left rotation member 51 is supported by the base 11 so as to be rotatable with respect to the base 11. The left rotation member 51 is rotatable with respect to the base body 11 in a plane parallel to the first direction X1. In the present embodiment, the left rotation member 51 is rotatable around a left rotation axis 511a extending along the second direction X2. Further, in the present embodiment, the left side rotation member 51 is one left side rotation arm 511. The left turning arm 511 has a rod shape extending along one direction. The left rotation arm 511 is connected to the base 11 so as to be rotatable about the left rotation axis 511a with respect to the base 11.

  In the present embodiment, the left rotation axis 511a is located at a position different from the right rotation axis 411a. Specifically, the left rotation axis 511a and the right rotation axis 411a are shown in FIG. Are spaced apart from each other in the vertical direction. Unlike the present embodiment, the left rotation axis 511a and the right rotation axis 411a may be separated from each other in the lateral direction of FIG. 3A, for example. Alternatively, the left rotation axis 511a and the right rotation axis 411a may be located at the same position. That is, the rotation axis of the right rotation member 41 and the rotation axis of the left rotation member 51 may be located at the same position.

  The left first guide arm 53A is connected to the left rotation member 51 so as to be rotatable around the left first intermediate axis 53Aa extending along the second direction X2 with respect to the left rotation member 51. Specifically, the left first guide arm 53A and the left rotation member 51 are connected to each other at one end. Further, the left first guide arm 53A is connected to the first wrist portion 14A so as to be rotatable around the left first wrist axis 53Ac extending along the second direction X2 with respect to the first wrist portion 14A. . Specifically, the left first guide arm 53A is connected to the first wrist portion 14A at the other end of the left first guide arm 53A. The left first guide arm 53A intersects the left turning member 51 in plan view.

  The left second guide arm 53B is connected to the left rotation member 51 so as to be rotatable around the left second intermediate axis 53Ba extending along the second direction X2 with respect to the left rotation member 51. Specifically, the left second guide arm 53B and the left rotation member 51 are connected to each other at one end. In plan view, the left first intermediate axis 53Aa is located on the first direction X1 side with respect to the left second intermediate axis 53Ba. The left second guide arm 53B is connected to the second wrist portion 14B so as to be rotatable around the left second wrist axis 53Bc extending along the second direction X2 with respect to the second wrist portion 14B. . Specifically, the left second guide arm 53B is connected to the second wrist portion 14B at the other end of the left second guide arm 53B. The left second guide arm 53B intersects the left turning member 51 and the left first guide arm 53A in plan view.

  The left first guide arm 53A has a shape that prevents interference between the left pivot member 51 and the left second guide arm 53B. As shown in FIG. 3, in the present embodiment, the left first guide arm 53A has a curved portion 53Ab that is curved toward the first direction X1.

  The left second guide arm 53B has a shape that prevents interference between the left pivot member 51 and the left first guide arm 53A. As shown in FIG. 3, in the present embodiment, the second left guide arm 53B has a curved portion 53Bb that is curved in the third direction X3 opposite to the first direction X1.

  The drive unit 71 shown in FIG. 4 is a drive source for rotating the right rotation member 41 and the left rotation member 51. The drive unit 71 is disposed, for example, inside the base body 11 (specifically, the body). In the present embodiment, the drive unit 71 includes two motors 714 and 715. The rotation of the motor 714 is transmitted to the right rotation member 41 with the rotation speed reduced by a speed reducer (not shown), for example. As a result, the right rotation member 41 rotates with respect to the base body 11. Similarly, the rotation of the motor 715 is transmitted to the left rotation member 51 with the rotation speed reduced by a reduction gear (not shown), for example. As a result, the left rotation member 51 rotates with respect to the base body 11.

  In addition, although the example which contains two motors as the drive part 71 was shown, the structure which the drive part 71 contains only one motor may be employ | adopted unlike this embodiment. In this case, the right rotation member 41 and the left rotation member 51 may be rotated using a plurality of gears together with one motor.

  Next, the operation of the transport device 1 will be described.

[Orientation]
First, the posture of the transport apparatus 1 shown in FIG. In the transport device 1 in the origin posture, the first holding portion 15A and the first wrist portion 14A are located on the first direction X1 side as compared with the case of the first extension posture described later, and the second extension described later. The second holding portion 15B and the second wrist portion 14B are located on the third direction X3 side as compared with the posture.

[Origin posture to first extension posture]
Next, by driving the drive unit 71, the right rotation member 41 is rotated counterclockwise with respect to the base body 11, and the left rotation member 51 is rotated clockwise with respect to the base body 11, as shown in FIG. Turn to. Accordingly, the right first guide arm 43 </ b> A rotates with respect to the right rotation member 41, and the left first guide arm 53 </ b> A rotates with respect to the left rotation member 51. By this rotation, the first holding portion 15A and the first wrist portion 14A advance in the third direction X3.

  On the other hand, as the right rotation member 41 and the left rotation member 51 rotate, the right second guide arm 43B rotates relative to the right rotation member 41, and the left second guide arm 53B moves to the left rotation member 51. Rotate with respect to. By this rotation, the second holding portion 15B and the second wrist portion 14B also move in the third direction X3. The moving speed (retracting speed) of the second holding part 15B and the second wrist part 14B is relatively low compared to the traveling speed of the first holding part 15A and the first wrist part 14A.

  In this way, as shown in FIG. 5, the transfer device 1 includes the arms (the right rotation arm 411, the left rotation arm 511, the right first guide arm 43 </ b> A, and the left first guide arm 53 </ b> A) in the moving mechanism 13. The posture is extended. The posture of the transport device 1 shown in FIG. 5 is referred to as a first extended posture. In a state where the transport device 1 is in the first extension posture, the workpiece 89 is held (placed) on the first holding portion 15A, for example, by moving the moving mechanism 13 and the first holding portion 15A.

[First extension posture-Origin posture]
Next, the right rotation member 41 and the left rotation member 51 are rotated in the direction opposite to the rotation direction in FIGS. Specifically, the right rotation member 41 is rotated clockwise with respect to the base body 11, and the left rotation member 51 is rotated counterclockwise with respect to the base body 11. In this way, as shown in FIG. 6, the transport device 1 returns to the home position while the workpiece 89 is held by the first holding unit 15 </ b> A.

[Origin posture to second extension posture]
Next, as shown in FIG. 7, the right rotation member 41 is rotated clockwise with respect to the base body 11, and the left rotation member 51 is rotated counterclockwise with respect to the base body 11. As a result, the right second guide arm 43 </ b> B rotates with respect to the right rotation member 41, and the left second guide arm 53 </ b> B rotates with respect to the left rotation member 51. By this rotation, the second holding portion 15B and the second wrist portion 14B advance in the first direction X1.

  On the other hand, as the right rotation member 41 and the left rotation member 51 rotate, the right first guide arm 43A rotates relative to the right rotation member 41, and the left first guide arm 53A moves to the left rotation member 51. Rotate with respect to. By this rotation, the first holding portion 15A and the first wrist portion 14A also move in the first direction X1. The moving speed (retracting speed) of the first holding part 15A and the first wrist part 14A is relatively low compared to the traveling speed of the second holding part 15B and the second wrist part 14B.

  In this way, as shown in FIG. 7, the transfer device 1 has a posture in which the arms (the right rotation arm 411, the left rotation arm 511, the right second guide arm 43B, and the left second guide arm 53B) are extended. Become. The posture of the transport device 1 shown in FIG. 7 is referred to as a second extension posture. In a state in which the transport device 1 is in the second extension posture, the workpiece 89 is held (placed) on the second holding portion 15B by, for example, raising both the moving mechanism 13 and the second holding portion 15B.

[Second extension posture-Origin posture]
Next, the right rotation member 41 and the left rotation member 51 are rotated in the direction opposite to the rotation direction in FIGS. Specifically, the right rotation member 41 is rotated counterclockwise with respect to the base 11, and the left rotation member 51 is rotated clockwise with respect to the base 11. In this way, as shown in FIG. 8, the transport device 1 returns to the home position while the workpiece 89 is held by the first holding unit 15A and the second holding unit 15B.

[Swivel of device]
Next, as shown in FIG. 9, the base 11 is rotated clockwise, for example, 90 degrees. That is, the transfer device 1 is turned 90 degrees clockwise. In the figure, the turning range when the transport device 1 turns in the origin posture is shown as a turning range R1. Then, although illustration is abbreviate | omitted, the conveying apparatus 1 is changed to the above-mentioned 1st extended attitude | position, and the workpiece | work 89 on the 1st holding | maintenance part 15A is mounted in the desired location outside the conveying apparatus 1. FIG. Similarly, the transfer device 1 is shifted to the above-described second extending posture, and the work 89 on the second holding unit 15B is placed at a desired location outside the transfer device 1. In this way, the work 89 is transported using the transport device 1.

  Next, the effect of this embodiment is demonstrated.

  In the present embodiment, as shown in FIG. 3, the right first guide arm 43A is connected to the right rotation member 41 so as to be rotatable around the right first intermediate axis 43Aa extending along the second direction X2. Has been. The right second guide arm 43B is connected to the right rotation member 41 so as to be rotatable around the right second intermediate axis 43Ba extending along the second direction X2. The right first intermediate axis 43Aa is located on the first direction X1 side with respect to the right second intermediate axis 43Ba in plan view. According to such a configuration, the first wrist portion 14A when the transport device 1 is in the origin posture can be positioned on the first direction X1 side, and the first wrist portion 14A when the transport device 1 is in the origin posture can be positioned. The second wrist portion 14B can be positioned further on the third direction X3 side. That is, each position of the first wrist portion 14A and the second wrist portion 14B when the transport device 1 is in the origin posture can be shifted in the backward direction. This is suitable for transporting a larger workpiece 89 without increasing the turning range R1 of the transport apparatus 1.

  Specifically, it is as follows. First, the first holding unit 15A and the second holding unit 15B are designed to have a size that fits within the turning range R1 when the transport device 1 is in the origin posture. When the transport device 1 in the home position is turned, the first holding unit 15A and the second holding unit 15B are prevented from colliding with equipment (a work accommodation mechanism or the like, not shown) arranged outside the turning range R1. Because. In the present embodiment, as described above, the positions of the first wrist portion 14A and the second wrist portion 14B when the transport device 1 is in the origin posture can be shifted in the backward direction, respectively. The first holding part 15A and the second holding part 15B having larger dimensions in the first direction X1 can be used without increasing the range R1. When the first holding part 15A and the second holding part 15B having larger dimensions in the first direction X1 can be used, the size of the work 89 held (placed) on the first holding part 15A or the second holding part 15B. You can make it bigger. Therefore, according to this embodiment, a larger workpiece 89 can be transported without increasing the turning range R1.

  When a larger workpiece 89 can be transported without increasing the turning range R1 of the transport device 1, the equipment includes a transport device having only one arm of the rhomboid link structure having the same swing range as the transport device 1. It is possible to replace the transport device 1 without changing equipment other than the transport device.

  In the present embodiment, the left first guide arm 53A is connected to the left rotation member 51 so as to be rotatable around the left first intermediate axis 53Aa extending along the second direction X2. The left second guide arm 53B is connected to the left rotation member 51 so as to be rotatable around a left second intermediate axis 53Ba extending along the second direction X2. The left first intermediate axis 53Aa is located on the first direction X1 side with respect to the left second intermediate axis 53Ba in plan view. This is also suitable for transporting a larger workpiece 89 without increasing the turning range R1 of the transport apparatus 1.

  In the present embodiment, the right first guide arm 43A has a curved portion 43Ab that is curved toward the first direction X1. According to such a configuration, it is possible to avoid the right first guide arm 43A from interfering with a shaft portion (or a bearing thereof, and so on) along the right second intermediate axis 43Ba. As a result, the right first guide arm 43A can be sufficiently extended. Therefore, it becomes possible for the conveyance apparatus 1 to take a 1st extended attitude | position appropriately. Similarly, the left first guide arm 53A has a curved portion 53Ab that is curved in the first direction X1. The left first guide arm 53A can be prevented from interfering with the shaft portion along the left second intermediate axis 53Ba. Thereby, the left first guide arm 53A can be sufficiently extended. Therefore, it becomes possible for the conveyance apparatus 1 to take a 1st extended attitude | position appropriately.

  In the present embodiment, the right second guide arm 43B has a curved portion 43Bb that is curved in the third direction opposite to the first direction X1. According to such a configuration, the right second guide arm 43B can be prevented from interfering with the shaft portion along the right first intermediate axis 43Aa. As a result, the right second guide arm 43B can be sufficiently extended. Therefore, it becomes possible for the conveyance apparatus 1 to take a 2nd extended attitude | position appropriately. Similarly, the left second guide arm 53B has a curved portion 53Bb that is curved in the third direction opposite to the first direction X1. According to the present embodiment, the left second guide arm 53B can be prevented from interfering with the shaft portion along the left first intermediate axis 53Aa. Thereby, the left second guide arm 53B can be sufficiently extended. Therefore, it becomes possible for the conveyance apparatus 1 to take a 2nd extended attitude | position appropriately.

  In addition, the curved part formed in the arm is not limited to what was shown in FIG. 3 etc., For example, you may be like the curved parts 43Ab and 43Bb shown in FIG.

Second Embodiment
A second embodiment of the present invention will be described with reference to FIGS.

  FIG. 11 is a plan view showing a transport apparatus according to the second embodiment of the present invention. 12 is a schematic partial cross-sectional view taken along line XII-XII in FIG.

  In the following description, the same or similar components as those described above will be denoted by the same reference numerals as those described above, and description thereof will be omitted as appropriate.

  11 and 12 includes a base 11, a moving mechanism 13, a first wrist portion 14A, a second wrist portion 14B, a first holding portion 15A, a second holding portion 15B, and a drive. A portion 71 (see FIG. 12) and gears 721 to 724 are included. Since each structure of this embodiment other than the moving mechanism 13, the drive part 71, and the gears 721-724 is substantially the same as the structure in the conveying apparatus 1, description is abbreviate | omitted.

  The moving mechanism 13 in the transport apparatus 1β is different from the structure in the transport apparatus 1 in the specific configuration of the right side rotation member 41 and the left side rotation member 51. This will be specifically described below.

  Also in the present embodiment, the right rotation member 41 is supported by the base 11 so as to be rotatable with respect to the base 11. The right rotation member 41 is rotatable with respect to the base body 11 in a plane parallel to the first direction X1.

  In the present embodiment, the right rotating member 41 includes a right first rotating arm 41A, a right second rotating arm 41B, and a right connecting portion 418.

  Both the right first rotating arm 41A and the right second rotating arm 41B are rod-shaped extending along one direction. The rotation axis lines of the right first rotation arm 41A and the right second rotation arm 41B are located at different positions. Specifically, the right first rotation arm 41A is connected to the base 11 so as to be rotatable around the right first rotation axis 41Aa extending along the second direction X2 with respect to the base 11. On the other hand, the right second rotation arm 41B is connected to the base body 11 so as to be rotatable around the right second rotation axis 41Ba extending along the second direction X2 with respect to the base body 11. The right first rotation axis 41Aa is located closer to the first direction X1 than the right second rotation axis 41Ba. The second right rotation axis 41Ba and the first right rotation axis 41Aa are positioned side by side in the left-right direction in FIG.

  The right connecting portion 418 is connected to the right first rotating arm 41A and the right second rotating arm 41B so as to be rotatable about the right first rotating arm 41A and the right second rotating arm 41B, respectively. In the present embodiment, the right connecting portion 418 is connected to the right first rotating arm 41A so as to be rotatable around the right first intermediate axis 43Aa with respect to the right first rotating arm 41A. The right connecting portion 418 is connected to the right second rotating arm 41B so as to be rotatable around the right second intermediate axis 43Ba with respect to the right second rotating arm 41B.

  The right first guide arm 43A is connected to the right first rotation arm 41A so as to be rotatable around the right first intermediate axis 43Aa with respect to the right first rotation arm 41A. On the other hand, the right second guide arm 43B is connected to the right second rotating arm 41B so as to be rotatable around the right second intermediate axis 43Ba with respect to the right second rotating arm 41B.

  In the present embodiment, the separation distance L41 between the right second rotation axis 41Ba and the right first rotation axis 41Aa is the same as the separation distance L43 between the right second intermediate axis 43Ba and the right first intermediate axis 43Aa. . Unlike the present embodiment, the separation distance L41 may be smaller than the distance L43, or the separation distance L41 may be larger than the distance L43.

  Also in this embodiment, the left rotation member 51 is supported by the base 11 so as to be rotatable with respect to the base 11. The left rotation member 51 is rotatable with respect to the base body 11 in a plane parallel to the first direction X1.

  In the present embodiment, the left rotation member 51 includes a left first rotation arm 51A, a left second rotation arm 51B, and a left connection portion 518.

  Both the left first rotating arm 51A and the left second rotating arm 51B are rod-shaped extending along one direction. The rotation axes of the left first rotation arm 51A and the left second rotation arm 51B are located at different positions. Specifically, the left first rotation arm 51A is connected to the base 11 so as to be rotatable around the left first rotation axis 51Aa extending along the second direction X2 with respect to the base 11. On the other hand, the second left rotation arm 51B is connected to the base body 11 so as to be rotatable around the second left rotation axis 51Ba extending along the second direction X2 with respect to the base body 11. The left first rotation axis 51Aa is located closer to the first direction X1 than the left second rotation axis 51Ba. The left second rotation axis 51Ba and the left first rotation axis 51Aa are positioned side by side in the left-right direction in FIG.

  In the present embodiment, the left first rotation axis 51Aa is located at the same position as the right first rotation axis 41Aa. The left second rotation axis 51Ba is located at the same position as the right second rotation axis 41Ba. Unlike the present embodiment, the left first rotation axis 51Aa may be located at a different position from the right first rotation axis 41Aa. Similarly, the left second rotation axis 51Ba may be located at a position different from the right second rotation axis 41Ba.

  The left connecting portion 518 is connected to the left first rotating arm 51A and the left second rotating arm 51B so as to be rotatable about the left first rotating arm 51A and the left second rotating arm 51B. In the present embodiment, the left connecting portion 518 is connected to the left first rotating arm 51A so as to be rotatable around the left first intermediate axis 53Aa with respect to the left first rotating arm 51A. The left connecting portion 518 is connected to the left second rotating arm 51B so as to be rotatable around the left second intermediate axis 53Ba with respect to the left second rotating arm 51B.

  The left first guide arm 53A is connected to the left first rotation arm 51A so as to be rotatable around the left first intermediate axis 53Aa with respect to the left first rotation arm 51A. On the other hand, the left second guide arm 53B is connected to the left second rotary arm 51B so as to be rotatable around the left second intermediate axis 53Ba with respect to the left second rotary arm 51B.

  In the present embodiment, the separation distance L51 between the left second rotation axis 51Ba and the left first rotation axis 51Aa is the same as the separation distance L53 between the left second intermediate axis 53Ba and the left first intermediate axis 53Aa. . Unlike the present embodiment, the separation distance L51 may be smaller than the distance L53, or the separation distance L51 may be larger than the distance L53.

  In the present embodiment, one of the right first rotation arm 41A and the right second rotation arm 41B is a drive arm that is rotated by the drive unit 71 shown in FIG. 12, and the right first rotation arm 41A. The other of the right second rotating arm 41B is a driven arm that rotates following one rotation. One of the left first rotating arm 51A and the left second rotating arm 51B is a driving arm that is rotated by the driving unit 71, and includes a left first rotating arm 51A and a left second rotating arm 51B. The other is a driven arm that rotates following one rotation.

  In particular, in the present embodiment, the right first rotating arm 41A and the left second rotating arm 51B are drive arms, and the right second rotating arm 41B and the left first rotating arm 51A are driven arms. That is, the drive unit 71 rotates the right first rotation arm 41A and the left second rotation arm 51B. On the other hand, the driving force of the driving unit 71 is not directly transmitted to the right second rotating arm 41B and the left first rotating arm 51A. Therefore, the turning motion of the right first turning arm 41A is transmitted to the right second turning arm 41B via the right connecting portion 418. As a result, the right second rotating arm 41B rotates following the rotation of the right first rotating arm 41A. Similarly, the turning motion of the left second turning arm 51B is transmitted to the left first turning arm 51A via the left connecting portion 518. Therefore, the left first rotating arm 51A rotates following the rotation of the left second rotating arm 51B.

  In the present embodiment, the right first rotating arm 41A and the left second rotating arm 51B are drive arms, and the right second rotating arm 41B and the left first rotating arm 51A are driven arms. However, unlike the present embodiment, the right first rotating arm 41A and the left second rotating arm 51B are driven arms, and the right second rotating arm 41B and the left first rotating arm 51A are drive arms. May be. The right first rotating arm 41A and the left first rotating arm 51A may be drive arms, and the right second rotating arm 41B and the left second rotating arm 51B may be driven arms. Furthermore, the right first rotation arm 41A and the left first rotation arm 51A may be driven arms, and the right second rotation arm 41B and the left second rotation arm 51B may be drive arms.

  A drive unit 71 shown in FIG. 12 is a drive source for rotating the right rotation member 41 and the left rotation member 51. The drive unit 71 is disposed, for example, inside the base body 11 (specifically, the body).

  As shown in FIG. 12, in the present embodiment, the drive unit 71 is a single motor 716. A gear 721 is fixed to the drive shaft 711 of the motor 716. The gear 721 meshes with the gear 722. The gear 722 is fixed to the rotation shaft of the left second rotation arm 51B. A gear 723 is fixed to the rotation shaft of the left second rotation arm 51B. The gear 723 is in mesh with the gear 724. The gear 724 is fixed to the rotation shaft of the right first rotation arm 41A.

  When the drive shaft 711 of the motor 716 rotates, the gear 721 rotates. When the gear 721 rotates, it is transmitted to the rotating shaft of the left second rotating arm 51B via the gear 722, and the rotating shaft rotates. As a result, the left second rotation arm 51B rotates. On the other hand, when the rotation shaft of the left second rotation arm 51B rotates, the gear 723 also rotates. The rotation of the gear 723 is transmitted to the rotation shaft of the right first rotation arm 41A via the gear 724, and the rotation shaft rotates. As a result, the right first rotating arm 41A rotates.

  The rotation axis of the right first rotation arm 41A rotates in the opposite direction to the rotation axis of the left second rotation arm 51B. Therefore, the rotation directions of the right first rotation arm 41A and the left second rotation arm 51B are opposite to each other. For example, when the right first rotation arm 41A rotates clockwise, the left second rotation arm 51B rotates counterclockwise. Alternatively, when the right first rotating arm 41A rotates counterclockwise, the left second rotating arm 51B rotates clockwise.

  Next, the operation of the transport device 1β will be described.

[Orientation]
As in the first embodiment, the posture of the transport device 1β shown in FIG. 11 is referred to as an origin posture.

[Origin posture to first extension posture]
FIG. 13 is a plan view showing a first extension posture of the transport apparatus 1 shown in FIG. FIG. 14 is a plan view in which the right second rotating arm, the left second rotating arm, the second wrist, and the like are omitted from FIG. 13. FIG. 15 is a plan view in which the right first rotating arm, the left first rotating arm, the first wrist, and the like are omitted from FIG.

  Next, by driving the drive unit 71, the right rotation member 41 is rotated counterclockwise with respect to the base body 11, and the left rotation member 51 is rotated clockwise with respect to the base body 11, as shown in FIG. Turn to. Specifically, the right first rotation arm 41A of the right rotation member 41 is rotated counterclockwise.

  When the right first rotating arm 41A rotates counterclockwise, as described above, the right second rotating arm 41B also rotates counterclockwise following the rotation of the right first rotating arm 41A. . On the other hand, the left second rotation arm 51B of the left rotation member 51 is rotated clockwise. When the left second rotating arm 51B rotates clockwise, as described above, the left first rotating arm 51A also rotates clockwise following the rotation of the left second rotating arm 51B. The right first guide arm 43A rotates relative to the right rotation member 41 (specifically, the right first rotation arm 41A) by the rotation of the right first rotation arm 41A and the left first rotation arm 51A. The left first guide arm 53A rotates relative to the left rotation member 51 (specifically, the left first rotation arm 51A). As a result, the first holding portion 15A and the first wrist portion 14A advance in the third direction X3.

  On the other hand, the right rotation member 41 (right first rotation arm 41A and right second rotation arm 41B) and left rotation member 51 (left first rotation arm 51A and left second rotation arm 51B) are rotated. Accordingly, the right second guide arm 43B rotates relative to the right rotation member 41 (specifically, the right second rotation arm 41B), and the left second guide arm 53B corresponds to the left rotation member 51 (specifically). Specifically, it rotates with respect to the left second rotating arm 51B). By this rotation, the second holding portion 15B and the second wrist portion 14B also move in the third direction X3. The moving speed (retracting speed) of the second holding part 15B and the second wrist part 14B is relatively low compared to the traveling speed of the first holding part 15A and the first wrist part 14A.

  In this way, the transport device 1β assumes the posture shown in FIG. The posture of the transport apparatus 1β shown in FIG. 13 is referred to as a first extended posture as in the first embodiment. In a state where the transport device 1β is in the first extension posture, the workpiece 89 is held (placed) on the first holding portion 15A, for example, by moving the moving mechanism 13 and the first holding portion 15A.

[First extension posture-Origin posture]
Next, although not shown, the right rotation member 41 (right first rotation arm 41A and right second rotation arm 41B) and left rotation member 51 (left first rotation arm 51A and left second rotation). By rotating the moving arm 51B) in the reverse direction, the transfer device 1β returns to the home position shown in FIG. 11 while the work 89 is held by the first holding portion 15A.

[after that]
After that, as described in the first embodiment, the work 89 is transported by moving the transport device 1β to the second extended posture, for example.

  According to the present embodiment, in addition to the operational effects described in the first embodiment, the following operational effects are achieved.

  In the present embodiment, the right first rotation axis 41Aa is located on the first direction X1 side with respect to the right second rotation axis 41Ba. The right connecting portion 418 is connected to the right first rotating arm 41A so as to be rotatable around the right first intermediate axis 43Aa extending along the second direction X2 with respect to the right first rotating arm 41A. And connected to the right second rotating arm 41B so as to be rotatable around the right second intermediate axis 43Ba extending along the second direction X2 with respect to the right second rotating arm 41B. According to such a configuration, according to the distance between the right first intermediate axis 43Aa and the right second intermediate axis 43Ba, the right first intermediate axis 43Aa and the right second intermediate axis 43Ba during the operation of the transport device 1β. It is possible to make the inclination of the connecting straight line a desired inclination. For example, by setting the distance between the right first intermediate axis 43Aa and the right second intermediate axis 43Ba to be the same as the distance between the right first rotating arm 41A and the right second rotating arm 41B, During operation, a straight line connecting the right first intermediate axis 43Aa and the right second intermediate axis 43Ba can be maintained parallel to the first direction X1. If the straight line connecting the right first intermediate axis 43Aa and the right second intermediate axis 43Ba can be maintained parallel to the first direction X1 during the operation of the transport apparatus 1β, for example, a curved portion is provided on the right first guide arm 43A. Even if the shape extends along one direction without being formed, the right first guide arm 43A can be prevented from interfering with the shaft portion along the right second intermediate axis 43Ba. The same applies to the right second guide arm 43B, the left first guide arm 53A, and the left second guide arm 53B.

  Further, by making the distance between the right first intermediate axis 43Aa and the right second intermediate axis 43Ba larger than the distance between the right first rotating arm 41A and the right second rotating arm 41B, the transfer device 1β is set to the origin. The first wrist portion 14A and the second wrist portion 14B in the posture can be positioned further in the backward direction.

  In the present embodiment, one of the right first rotation arm 41A and the right second rotation arm 41B is a drive arm that is rotated by the drive unit 71, and the right first rotation arm 41A and the right first rotation arm 41B. The other of the two rotating arms 41B is a driven arm that rotates following one rotation. One of the left first rotating arm 51A and the left second rotating arm 51B is a driving arm that is rotated by the driving unit 71, and includes a left first rotating arm 51A and a left second rotating arm 51B. The other is a driven arm that rotates following one rotation. Furthermore, in the present embodiment, the two rotating arms (the right first rotating arm 41A and the left second rotating arm 51B) are directly rotated by using one motor 716 as the drive unit 71. The fact that there is no need to prepare a plurality of motors contributes to cost reduction. Unlike the present embodiment, the present invention can be applied to a configuration in which two rotating arms (the right first rotating arm 41A and the left second rotating arm 51B) are directly rotated using a plurality of motors. Is included.

  The present invention is not limited to the embodiment described above. The specific configuration of each part of the present invention can be changed in various ways.

  In the above description, the wrist portion is shown as an example of the moving portion, and the holding portion is attached to the wrist portion. However, the present invention is not limited to this. For example, the moving unit may perform a function of holding a workpiece such as placing the workpiece.

1,1β conveying device 11 base 13 moving mechanism 14A first wrist (first moving unit)
14B Second wrist (second moving part)
153A 1st end effector 153B 2nd end effector 15A 1st holding | maintenance part 15B 2nd holding | maintenance part 41 Right side rotation member 411 Right side rotation arm 411a Right side rotation axis 418 Right side connection part 41A Right side 1st rotation arm 41Aa Right side 1st Rotation axis 41B Right second rotation arm 41Ba Right second rotation axis 43A Right first guide arm 43Aa Right first intermediate axis 43Ab Curved portion 43Ac Right first wrist axis 43B Right second guide arm 43Ba Right second intermediate axis 43Bb Curved portion 43Bc Right second wrist axis 51 Left rotation member 511 Left rotation arm 511a Left rotation axis 518 Left connection 51A Left first rotation arm 51Aa Left first rotation axis 51B Left second rotation arm 51Ba Left second rotation axis 53A Left first guide arm 53Aa Left first intermediate axis 5 Ab curved portion 53Ac Left first wrist axis 53B Left second guide arm 53Ba Left second intermediate axis 53Bb Curved portion 53Bc Left second wrist axis 71 Drive unit 711 Drive shafts 714 to 716 Motor 721 to 724 Gear 89 Work L41, L43, L51, L53 Distance R1 Turning range X1 First direction X2 Second direction X3 Third direction

Claims (11)

A substrate;
A first moving unit;
A second moving unit located on the first direction side with respect to the first moving unit;
A moving mechanism for moving the first moving unit and the second moving unit relative to the base body along a plane parallel to the first direction;
The moving mechanism includes a rotating member, a first guide arm, and a second guide arm,
The rotating member is supported by the base so as to be rotatable with respect to the base.
The first guide arm is connected to the first moving unit and is connected to the rotating member so as to be rotatable around a first intermediate axis extending along a second direction orthogonal to the first direction. And
The second guide arm is connected to the second moving part and is connected to the rotating member so as to be rotatable around a second intermediate axis extending along the second direction.
The conveying device, wherein the first intermediate axis is located on the first direction side with respect to the second intermediate axis in plan view.   The transfer device according to claim 1, wherein the first guide arm intersects the second guide arm in plan view.   The transfer device according to claim 1, wherein the first guide arm has a curved portion that is curved toward the first direction.   The transport apparatus according to claim 3, wherein the second guide arm has a curved portion that is curved in a third direction opposite to the first direction.   5. The transport device according to claim 1, wherein the rotation member is coupled to the base body so as to be rotatable around a rotation axis extending along the second direction. 6. The rotating member is one rotating arm,
The transport apparatus according to claim 5, wherein both the first guide arm and the second guide arm are coupled to the rotating arm. The rotating member includes a first rotating arm and a second rotating arm,
The first rotation arm and the second rotation arm are connected to the base body so as to be rotatable with respect to the base body,
The first guide arm is connected to the first rotation arm so as to be rotatable about the first intermediate axis with respect to the first rotation arm,
The said 2nd guide arm is connected with the said 2nd rotation arm so that rotation with respect to the said 2nd rotation arm around the said 2nd intermediate axis is possible. The conveying apparatus as described in. The rotating member, the first guide arm, the second guide arm, the first intermediate axis, and the second intermediate axis are respectively connected to the right rotating member, the right first guide arm, the right second guide arm, and the right side 1 intermediate axis and right second intermediate axis,
The moving mechanism includes a left rotation member, a left first guide arm, and a left second guide arm,
The left rotation member is disposed on the opposite side of the right rotation member with respect to the base body,
The left side rotation member is supported by the base body so as to be rotatable with respect to the base body.
The left first guide arm is connected to the first moving part, and is connected to the left rotating member so as to be rotatable around a left first intermediate axis extending in the second direction.
The left second guide arm is connected to the second moving part and connected to the left rotating member so as to be rotatable around a second intermediate axis on the left extending in the second direction;
The transport device according to any one of claims 1 to 7, wherein the left first intermediate axis is located on the first direction side with respect to the left second intermediate axis in plan view.   The transfer device according to claim 8, wherein the left first guide arm intersects the left second guide arm in plan view. A drive unit disposed inside the substrate;
The transport device according to claim 8 or 9, wherein the driving unit rotates the left-side rotation member and the right-side rotation member with respect to the base body. Each further includes a first holding part and a second holding part for holding a workpiece,
The conveyance according to any one of claims 8 to 10, wherein the first holding unit is attached to the first moving unit, and the second holding unit is attached to the second moving unit. apparatus.

Images