JP2014533211A5 - - Google Patents

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Publication number
JP2014533211A5
JP2014533211A5 JP2014532052A JP2014532052A JP2014533211A5 JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5 JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5
Authority
JP
Japan
Prior art keywords
flowable material
providing
substrate
flowable
stamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014532052A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014533211A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2012/056769 external-priority patent/WO2013044180A1/en
Publication of JP2014533211A publication Critical patent/JP2014533211A/ja
Publication of JP2014533211A5 publication Critical patent/JP2014533211A5/ja
Pending legal-status Critical Current

Links

JP2014532052A 2011-09-23 2012-09-22 間隙を残して底部充填し、スタンプを脈動刷ることを含む、スタンプを用いた基板上の軟質材料のインプリントを向上させる技術 Pending JP2014533211A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161538489P 2011-09-23 2011-09-23
US61/538,489 2011-09-23
PCT/US2012/056769 WO2013044180A1 (en) 2011-09-23 2012-09-22 Techniques for improved imprinting of soft material on substrate using stamp including underfilling to leave a gap and pulsing stamp

Publications (2)

Publication Number Publication Date
JP2014533211A JP2014533211A (ja) 2014-12-11
JP2014533211A5 true JP2014533211A5 (enExample) 2015-11-12

Family

ID=47914939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014532052A Pending JP2014533211A (ja) 2011-09-23 2012-09-22 間隙を残して底部充填し、スタンプを脈動刷ることを含む、スタンプを用いた基板上の軟質材料のインプリントを向上させる技術

Country Status (8)

Country Link
US (1) US20150037922A1 (enExample)
EP (1) EP2758999A4 (enExample)
JP (1) JP2014533211A (enExample)
KR (1) KR20140064981A (enExample)
CN (1) CN103959485A (enExample)
SG (1) SG11201400622SA (enExample)
TW (1) TW201321167A (enExample)
WO (1) WO2013044180A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2280813B1 (en) * 2008-04-18 2017-06-07 Massachusetts Institute Of Technology Imprint patterning of irregular surface
KR20190027389A (ko) * 2016-08-05 2019-03-14 어플라이드 머티어리얼스, 인코포레이티드 전도성 재료들의 임프린트 리소그래피 방법, 임프린트 리소그래피용 스탬프 및 임프린트 리소그래피용 장치
US10328635B1 (en) * 2017-12-06 2019-06-25 Massivit 3D Printing Technologies Ltd. Complex shaped 3D objects fabrication
US11485052B2 (en) * 2018-07-30 2022-11-01 Canon Kabushiki Kaisha Resin product, method of making resin product, interchangeable lens, and optical device
JP7708424B2 (ja) * 2019-11-29 2025-07-15 学校法人聖路加国際大学 薄肉成形品の製造方法及びウェルプレート
EP4468079A1 (en) * 2023-05-22 2024-11-27 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO A stamp for use in imprint lithography, a method of manufacturing thereof, and a method for imprint lithography

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099940A (en) * 1997-07-16 2000-08-08 The Procter & Gamble Company Selectively-activatible three-dimensional sheet material having multi-stage progressive activation to deliver a substance to a target surface
US6517995B1 (en) * 1999-09-14 2003-02-11 Massachusetts Institute Of Technology Fabrication of finely featured devices by liquid embossing
US7635262B2 (en) * 2000-07-18 2009-12-22 Princeton University Lithographic apparatus for fluid pressure imprint lithography
EP2280813B1 (en) * 2008-04-18 2017-06-07 Massachusetts Institute Of Technology Imprint patterning of irregular surface
EP2386118A4 (en) * 2009-01-06 2013-09-04 1366 Tech Inc APPLICATION OF A LIQUID-RELATED MATERIAL TO STRUCTURED SURFACES USING AN OUTLET TUBE

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