JP2014533211A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014533211A5 JP2014533211A5 JP2014532052A JP2014532052A JP2014533211A5 JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5 JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5
- Authority
- JP
- Japan
- Prior art keywords
- flowable material
- providing
- substrate
- flowable
- stamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 36
- 238000000034 method Methods 0.000 claims 28
- 230000009969 flowable effect Effects 0.000 claims 21
- 239000000758 substrate Substances 0.000 claims 9
- 238000001816 cooling Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 claims 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161538489P | 2011-09-23 | 2011-09-23 | |
| US61/538,489 | 2011-09-23 | ||
| PCT/US2012/056769 WO2013044180A1 (en) | 2011-09-23 | 2012-09-22 | Techniques for improved imprinting of soft material on substrate using stamp including underfilling to leave a gap and pulsing stamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014533211A JP2014533211A (ja) | 2014-12-11 |
| JP2014533211A5 true JP2014533211A5 (enExample) | 2015-11-12 |
Family
ID=47914939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014532052A Pending JP2014533211A (ja) | 2011-09-23 | 2012-09-22 | 間隙を残して底部充填し、スタンプを脈動刷ることを含む、スタンプを用いた基板上の軟質材料のインプリントを向上させる技術 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150037922A1 (enExample) |
| EP (1) | EP2758999A4 (enExample) |
| JP (1) | JP2014533211A (enExample) |
| KR (1) | KR20140064981A (enExample) |
| CN (1) | CN103959485A (enExample) |
| SG (1) | SG11201400622SA (enExample) |
| TW (1) | TW201321167A (enExample) |
| WO (1) | WO2013044180A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5693445B2 (ja) * | 2008-04-18 | 2015-04-01 | マサチューセッツ インスティテュート オブ テクノロジー | 不規則表面のウェッジインプリントパターニング |
| JP2019527938A (ja) * | 2016-08-05 | 2019-10-03 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 導電性材料のインプリントリソグラフィの方法、インプリントリソグラフィのためのスタンプ、及びインプリントリソグラフィのための装置 |
| US10328635B1 (en) * | 2017-12-06 | 2019-06-25 | Massivit 3D Printing Technologies Ltd. | Complex shaped 3D objects fabrication |
| US11485052B2 (en) | 2018-07-30 | 2022-11-01 | Canon Kabushiki Kaisha | Resin product, method of making resin product, interchangeable lens, and optical device |
| JP7708424B2 (ja) * | 2019-11-29 | 2025-07-15 | 学校法人聖路加国際大学 | 薄肉成形品の製造方法及びウェルプレート |
| EP4468079A1 (en) * | 2023-05-22 | 2024-11-27 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | A stamp for use in imprint lithography, a method of manufacturing thereof, and a method for imprint lithography |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6099940A (en) * | 1997-07-16 | 2000-08-08 | The Procter & Gamble Company | Selectively-activatible three-dimensional sheet material having multi-stage progressive activation to deliver a substance to a target surface |
| US6517995B1 (en) * | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
| US7635262B2 (en) * | 2000-07-18 | 2009-12-22 | Princeton University | Lithographic apparatus for fluid pressure imprint lithography |
| JP5693445B2 (ja) * | 2008-04-18 | 2015-04-01 | マサチューセッツ インスティテュート オブ テクノロジー | 不規則表面のウェッジインプリントパターニング |
| SG172149A1 (en) * | 2009-01-06 | 2011-07-28 | 1366 Tech Inc | Dispensing liquid containing material to patterned surfaces using a dispensing tube |
-
2012
- 2012-09-22 WO PCT/US2012/056769 patent/WO2013044180A1/en not_active Ceased
- 2012-09-22 SG SG11201400622SA patent/SG11201400622SA/en unknown
- 2012-09-22 US US14/345,675 patent/US20150037922A1/en not_active Abandoned
- 2012-09-22 CN CN201280057845.3A patent/CN103959485A/zh active Pending
- 2012-09-22 EP EP12833705.2A patent/EP2758999A4/en not_active Withdrawn
- 2012-09-22 KR KR1020147010344A patent/KR20140064981A/ko not_active Withdrawn
- 2012-09-22 JP JP2014532052A patent/JP2014533211A/ja active Pending
- 2012-09-24 TW TW101134893A patent/TW201321167A/zh unknown
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| MX2015010273A (es) | Empaque con revestimiento de alta temperatura. | |
| EP2963144A3 (en) | Abrasive coating and manufacture and use methods | |
| JP2008517743A5 (enExample) | ||
| JP2012507607A5 (enExample) | ||
| HK1247892A1 (zh) | 形成多孔膜元件的方法 | |
| RU2016115071A (ru) | Клеи на основе сои, обладающие улучшенной пониженной вязкостью | |
| WO2015075471A3 (en) | Ultrasound transducer and method of manufacturing | |
| WO2010141836A3 (en) | Silicon pen nanolithography | |
| JP2016065297A5 (enExample) | ||
| JP2014150253A5 (enExample) | ||
| PE20210164A1 (es) | Metodos para dispensar y adherir polimeros arrastrados fusionados en caliente a sustratos | |
| JP2015530630A5 (enExample) | ||
| EP2372101A3 (en) | Method of forming a seal element | |
| WO2011021773A3 (ko) | 탄소나노튜브 마이크로볼의 제조방법, 이에 의해 제조된 탄소나노튜브 마이크로볼 및 이를 이용한 전극의 제조방법 | |
| JP2017529414A5 (enExample) | ||
| JP2011501006A5 (enExample) | ||
| JP2015191010A5 (ja) | 光学フィルムの製造方法及び光学フィルム | |
| JP2014240137A5 (enExample) | ||
| JP2017500738A5 (enExample) | ||
| CN105858595B (zh) | 平面度自补偿的大面积微加工用多针尖阵列制备方法 | |
| WO2014125515A3 (en) | Method for making an array of micro-needles | |
| CN106584872A (zh) | 一种风电叶片腹板粘接方法 | |
| CN204529721U (zh) | 一种热熔胶的熔化装置 | |
| EP2903043A3 (en) | Methods for thick film thermoelectric device fabrication | |
| JP2015080900A5 (enExample) |