JP2014533211A5 - - Google Patents
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- Publication number
- JP2014533211A5 JP2014533211A5 JP2014532052A JP2014532052A JP2014533211A5 JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5 JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014532052 A JP2014532052 A JP 2014532052A JP 2014533211 A5 JP2014533211 A5 JP 2014533211A5
- Authority
- JP
- Japan
- Prior art keywords
- flowable material
- providing
- substrate
- flowable
- stamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 36
- 238000000034 method Methods 0.000 claims 28
- 230000009969 flowable effect Effects 0.000 claims 21
- 239000000758 substrate Substances 0.000 claims 9
- 238000001816 cooling Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 claims 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161538489P | 2011-09-23 | 2011-09-23 | |
| US61/538,489 | 2011-09-23 | ||
| PCT/US2012/056769 WO2013044180A1 (en) | 2011-09-23 | 2012-09-22 | Techniques for improved imprinting of soft material on substrate using stamp including underfilling to leave a gap and pulsing stamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014533211A JP2014533211A (ja) | 2014-12-11 |
| JP2014533211A5 true JP2014533211A5 (enExample) | 2015-11-12 |
Family
ID=47914939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014532052A Pending JP2014533211A (ja) | 2011-09-23 | 2012-09-22 | 間隙を残して底部充填し、スタンプを脈動刷ることを含む、スタンプを用いた基板上の軟質材料のインプリントを向上させる技術 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150037922A1 (enExample) |
| EP (1) | EP2758999A4 (enExample) |
| JP (1) | JP2014533211A (enExample) |
| KR (1) | KR20140064981A (enExample) |
| CN (1) | CN103959485A (enExample) |
| SG (1) | SG11201400622SA (enExample) |
| TW (1) | TW201321167A (enExample) |
| WO (1) | WO2013044180A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101724075B1 (ko) * | 2008-04-18 | 2017-04-06 | 메사추세츠 인스티튜트 오브 테크놀로지 | 불규칙한 표면의 웨지 임프린트 패터닝 |
| JP2019527938A (ja) * | 2016-08-05 | 2019-10-03 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 導電性材料のインプリントリソグラフィの方法、インプリントリソグラフィのためのスタンプ、及びインプリントリソグラフィのための装置 |
| US10328635B1 (en) * | 2017-12-06 | 2019-06-25 | Massivit 3D Printing Technologies Ltd. | Complex shaped 3D objects fabrication |
| US11485052B2 (en) * | 2018-07-30 | 2022-11-01 | Canon Kabushiki Kaisha | Resin product, method of making resin product, interchangeable lens, and optical device |
| US20230008034A1 (en) * | 2019-11-29 | 2023-01-12 | St. Luke's International University | Method for manufacturing thin-walled molded article, and well plate |
| EP4468079A1 (en) * | 2023-05-22 | 2024-11-27 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | A stamp for use in imprint lithography, a method of manufacturing thereof, and a method for imprint lithography |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6099940A (en) * | 1997-07-16 | 2000-08-08 | The Procter & Gamble Company | Selectively-activatible three-dimensional sheet material having multi-stage progressive activation to deliver a substance to a target surface |
| US6517995B1 (en) * | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
| US7635262B2 (en) * | 2000-07-18 | 2009-12-22 | Princeton University | Lithographic apparatus for fluid pressure imprint lithography |
| KR101724075B1 (ko) * | 2008-04-18 | 2017-04-06 | 메사추세츠 인스티튜트 오브 테크놀로지 | 불규칙한 표면의 웨지 임프린트 패터닝 |
| JP5852444B2 (ja) * | 2009-01-06 | 2016-02-03 | １３６６ テクノロジーズ インク． | 分配管を使用した、パターン化表面への液体含有材料の分配 |
-
2012
- 2012-09-22 SG SG11201400622SA patent/SG11201400622SA/en unknown
- 2012-09-22 EP EP12833705.2A patent/EP2758999A4/en not_active Withdrawn
- 2012-09-22 WO PCT/US2012/056769 patent/WO2013044180A1/en not_active Ceased
- 2012-09-22 US US14/345,675 patent/US20150037922A1/en not_active Abandoned
- 2012-09-22 CN CN201280057845.3A patent/CN103959485A/zh active Pending
- 2012-09-22 KR KR1020147010344A patent/KR20140064981A/ko not_active Withdrawn
- 2012-09-22 JP JP2014532052A patent/JP2014533211A/ja active Pending
- 2012-09-24 TW TW101134893A patent/TW201321167A/zh unknown
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