JP2014524579A - 撮像システム用受動型検出装置 - Google Patents
撮像システム用受動型検出装置 Download PDFInfo
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- G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
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Abstract
Description
Claims (18)
- 基板と、基板上に配置された共振部材と、基板上に配置され且つ共振部材に機械的に連結され、フォトン露光に応答して機械的な歪みを生ずることにより共振部材に機械力を与えると共に該機械力に応答して共振部材の周波数を変化させる検出部材を有する受動型検出構造と、受動型検出構造が共振部材に与える機械力によって変化する共振部材の周波数を決定すると共に該決定された周波数に基づいて検出部材により吸収される入射フォトンエネルギー量を決定するために共振部材に接続されたデジタル回路と、を有することを特徴とするフォトン検出装置。
- 赤外エネルギーを検出するように設計された、請求項1のフォトン検出装置。
- 受動型検出構造がさらに第一支持部材を有し、検出部材がリボン部材を有し、受動型検出構造と共振部材とが橋梁構造体を形成し、該橋梁構造体が基板上において第一支持部材と共振部材との間に架設されたリボン部材を有し、リボン部材はフォトンエネルギー吸収による膨張収縮で共振部材に機械力を与えるような熱膨張係数を有する材料からなる、請求項1のフォトン検出装置。
- 第一支持部材が固定絶縁支持部材である、請求項3のフォトン検出装置。
- リボン部材の下方において基板上に配置されたリフレクターをさらに有する、請求項3のフォトン検出装置。
- 共振部材が圧電発振器である、請求項1のフォトン検出装置。
- 受動型検出構造がさらに第一支持部材を有し、検出部材が第一支持部材と共振部材との間に配置されたプレート部材を有し、プレート部材はフォトンエネルギー吸収による膨張収縮で共振部材に機械力を与えるような熱膨張係数を有する材料からなる、請求項1のフォトン検出装置。
- 第一支持部材が第一の溝を有し、共振部材が第二の溝を有し、これら第一および第二の溝にプレート部材の両端部が配置される、請求項7のフォトン検出装置。
- 受動型検出構造がさらに共振部材に近接して配置された第二支持部材を有し、第一部材が第一の溝を有し、第二支持部材が第二の溝を有し、これら第一および第二の溝にプレート部材の両端部が配置され、第二の溝はプレート部材がフォトン露光に応答して膨張したときにプレート部材が共振部材と接触して共振部材に機械力を与えることを可能にする、請求項7のフォトン検出装置。
- プレート部材が第一支持部材と共振部材との間にプレストレス状態で配置される、請求項7のフォトン検出装置。
- 共振部材がその表面に形成された凹部領域を有し、検出部材が共振部材の凹部領域内に配置されたプレート部材を有し、受動型検出構造が共振部材の表面上に配置され且つ凹部領域の少なくとも一部からオーバーラップしてプレート部材を凹部領域内に保持する第一支持部材を有し、プレート部材はフォトンエネルギー吸収による膨張収縮で共振部材に機械力を与えるような熱膨張係数を有する材料からなる、請求項1のフォトン検出装置。
- 第一支持部材が共振部材の表面に固着された連続フレーム構造であり、第一支持部材の一部が凹部領域の内壁面からオーバーラップしてプレート部材の表面周端部を被覆するリップ部を形成しながら、プレート部材の開口された表面領域でフォトンエネルギーを吸収するように形成された、請求項11のフォトン検出装置。
- プレート部材の膨張により共振部材に三方向から機械力を与える、請求項11のフォトン検出装置。
- プレート部材が共振部材の凹部領域内にプレストレス状態で配置される、請求項7のフォトン検出装置。
- 受動型検出部材を入射フォトンエネルギーに露光して該検出部材にフォトン露光に応じた機械的歪みを生じさせ、該受動型検出部材の機械的歪みに応じて共振部材に機械力を与え、該受動型検出部材が共振部材に与えた機械力によって変化する共振部材の周波数を決定し、この決定された周波数に基づいて検出部材により吸収された入射フォトンエネルギー量を決定する、五トンエネルギー決定方法。
- 熱膨張収縮により機械的歪みを生ずるような熱膨張係数を有する材料で検出部材が形成される、請求項15の方法。
- 前記決定された周波数を用いて画像データを生成する、請求項15の方法。
- 前記された周波数に基づいて検出部材により吸収された入射フォトンエネルギー量を決定するステップが、所定カウント時間の間に共振部材の出力信号に含まれるデジタルパルス数をカウントすることによりカウントデータを生成し、このカウントデータに基づいて検出部材のフォトン露光レベルを決定することによって行われる、請求項15の方法。
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US201161524669P | 2011-08-17 | 2011-08-17 | |
US61/524,669 | 2011-08-17 | ||
PCT/US2012/051376 WO2013026006A2 (en) | 2011-08-17 | 2012-08-17 | Passive detectors for imaging systems |
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JP2014524579A true JP2014524579A (ja) | 2014-09-22 |
JP6336904B2 JP6336904B2 (ja) | 2018-06-06 |
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JP2014526248A Active JP6336904B2 (ja) | 2011-08-17 | 2012-08-17 | 撮像システム用受動型検出装置 |
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US (5) | US9012845B2 (ja) |
EP (1) | EP2745096B1 (ja) |
JP (1) | JP6336904B2 (ja) |
CN (1) | CN104040725B (ja) |
IL (1) | IL230895B (ja) |
WO (1) | WO2013026006A2 (ja) |
Cited By (4)
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JP2015194390A (ja) * | 2014-03-31 | 2015-11-05 | Tdk株式会社 | 赤外線検知装置 |
JP2018146294A (ja) * | 2017-03-02 | 2018-09-20 | 国立大学法人 東京大学 | テラヘルツ波検出装置 |
JP2019035739A (ja) * | 2017-08-10 | 2019-03-07 | ハネウェル・インターナショナル・インコーポレーテッドHoneywell International Inc. | Mems共振センサアレイのための装置及び方法 |
KR20220026918A (ko) * | 2020-08-26 | 2022-03-07 | 연세대학교 산학협력단 | 광반응성 복합 소재를 이용한 미세 전자 기계 시스템 기반 정전식 감응 센서 및 이의 센싱 방법 |
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EP2745096B1 (en) * | 2011-08-17 | 2016-10-12 | Public Service Solutions Inc | Passive detectors for imaging systems |
US10175114B2 (en) * | 2014-10-29 | 2019-01-08 | Digital Direct Ir, Inc. | Spherical detector arrays implemented using passive detector structures for thermal imaging applications |
US20170237911A1 (en) * | 2014-11-06 | 2017-08-17 | Siliconfile Technologies Inc. | Image sensor having improved spectral characteristics |
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US10175113B2 (en) * | 2017-04-12 | 2019-01-08 | Raytheon Company | Thermal protection mechanisms for uncooled microbolometers |
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IL230895B (en) | 2018-03-29 |
CN104040725A (zh) | 2014-09-10 |
IL230895A0 (en) | 2014-03-31 |
JP6336904B2 (ja) | 2018-06-06 |
EP2745096B1 (en) | 2016-10-12 |
US10247614B2 (en) | 2019-04-02 |
EP2745096A2 (en) | 2014-06-25 |
WO2013026006A2 (en) | 2013-02-21 |
CN104040725B (zh) | 2017-08-22 |
US20220146324A1 (en) | 2022-05-12 |
US20200096392A1 (en) | 2020-03-26 |
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US9523612B2 (en) | 2016-12-20 |
US11105685B2 (en) | 2021-08-31 |
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US20130214158A1 (en) | 2013-08-22 |
US20160047693A1 (en) | 2016-02-18 |
US20170343420A1 (en) | 2017-11-30 |
US9012845B2 (en) | 2015-04-21 |
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