JP2014520258A - 平面基板における干渉法 - Google Patents

平面基板における干渉法 Download PDF

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JP2014520258A
JP2014520258A JP2014513013A JP2014513013A JP2014520258A JP 2014520258 A JP2014520258 A JP 2014520258A JP 2014513013 A JP2014513013 A JP 2014513013A JP 2014513013 A JP2014513013 A JP 2014513013A JP 2014520258 A JP2014520258 A JP 2014520258A
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interferogram
interferometer
sample
optical signal
received
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JP2014520258A5 (enExample
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ニコースキー，アーサー
ハジアン，アーセン
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トルネード メディカル システムズ，インコーポレイテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/40—Non-mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J2003/451—Dispersive interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2014513013A 2011-05-31 2012-05-30 平面基板における干渉法 Pending JP2014520258A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161491620P 2011-05-31 2011-05-31
US61/491,620 2011-05-31
PCT/CA2012/000525 WO2012162809A1 (en) 2011-05-31 2012-05-30 Interferometery on a planar substrate

Publications (2)

Publication Number Publication Date
JP2014520258A true JP2014520258A (ja) 2014-08-21
JP2014520258A5 JP2014520258A5 (enExample) 2015-07-09

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JP2014513013A Pending JP2014520258A (ja) 2011-05-31 2012-05-30 平面基板における干渉法

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US (1) US20140125983A1 (enExample)
EP (1) EP2715277A4 (enExample)
JP (1) JP2014520258A (enExample)
WO (1) WO2012162809A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020514690A (ja) * 2016-12-21 2020-05-21 ミダイアグノスティクス・エヌブイｍｉＤｉａｇｎｏｓｔｉｃｓ ＮＶ 媒体中の粒子によって放出される蛍光を収集するための装置
WO2023153077A1 (ja) * 2022-02-08 2023-08-17 古河電気工業株式会社 光干渉断層計

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US9683928B2 (en) 2013-06-23 2017-06-20 Eric Swanson Integrated optical system and components utilizing tunable optical sources and coherent detection and phased array for imaging, ranging, sensing, communications and other applications
US9464883B2 (en) 2013-06-23 2016-10-11 Eric Swanson Integrated optical coherence tomography systems and methods
WO2015052071A1 (en) 2013-10-09 2015-04-16 Carl Zeiss Meditec Ag Improved line-field imaging systems and methods
EP3106828B1 (en) * 2015-06-16 2023-06-07 Academisch Medisch Centrum Common-path integrated low coherence interferometry system and method therefor
GB2545912A (en) * 2015-12-29 2017-07-05 Nokia Technologies Oy Interferometry
CN110312918B (zh) 2016-09-26 2021-08-31 学术医疗中心 基于高分辨率集成光学器件的光谱仪
US10907951B2 (en) * 2016-09-26 2021-02-02 Academisch Medisch Centrum Single-chip optical coherence tomography device
EP3415887B1 (en) * 2017-06-14 2020-03-18 IMEC vzw A force sensing device and a force sensing system
EP3531063B1 (en) 2018-02-26 2022-03-09 Nokia Technologies Oy Apparatus for optical coherence tomography
GB2580652A (en) * 2019-01-21 2020-07-29 Res & Innovation Uk Infrared spectrometer
CN115039022A (zh) * 2019-12-11 2022-09-09 洛克利光子有限公司 用于外差干涉测量的移频器以及具有此类移频器的用于外差干涉测量的装置
WO2021201966A1 (en) * 2020-04-02 2021-10-07 Massachusetts Institute Of Technology A chip-scale optical coherence tomography engine
US11802759B2 (en) * 2020-05-13 2023-10-31 Eric Swanson Integrated photonic chip with coherent receiver and variable optical delay for imaging, sensing, and ranging applications
US11994718B2 (en) * 2020-05-20 2024-05-28 Lumentum Operations Llc Mach-Zehnder interferometer with mirrored facet
US20230024072A1 (en) * 2021-07-13 2023-01-26 The Trustees Of Columbia University In The City Of New York Millimeter-Scale Chip-Based Supercontinuum Generation For Optical Coherence Tomography
US12320704B2 (en) * 2022-03-14 2025-06-03 Obsidian Sensors, Inc. Fourier transform spectrometer
US12085387B1 (en) 2023-09-23 2024-09-10 Hamamatsu Photonics K.K. Optical coherence tomography system for subsurface inspection

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JPS62288802A (ja) * 1986-06-09 1987-12-15 Nippon Telegr & Teleph Corp <Ntt> 石英系光導波路の製造方法
JPH04506705A (ja) * 1990-02-09 1992-11-19 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 干渉計
US5289256A (en) * 1992-02-15 1994-02-22 Daimler-Benz Ag Integrated-optics expansion interferometer in an extension-metrological neutral environment
US5301010A (en) * 1989-02-18 1994-04-05 Cambridge Consultants Limited Interferometer having a short coherence length light source and means for identifying interference fringes
US5710629A (en) * 1992-12-10 1998-01-20 Schneider Electric S.A. Interferometric measuring device forming a spacial interference pattern
JP2001255567A (ja) * 2000-03-09 2001-09-21 Nippon Telegr & Teleph Corp <Ntt> 光信号処理装置
US6887359B2 (en) * 2001-06-08 2005-05-03 The Regents Of The University Of California Chemical micro-sensor
JP2005516187A (ja) * 2002-01-24 2005-06-02 ザ ジェネラル ホスピタル コーポレーション スペクトル帯域の並列検出による測距並びに低コヒーレンス干渉法（ｌｃｉ）及び光学コヒーレンス断層撮影法（ｏｃｔ）信号の雑音低減のための装置及び方法
US7116429B1 (en) * 2003-01-18 2006-10-03 Walecki Wojciech J Determining thickness of slabs of materials by inventors
US20070055117A1 (en) * 2004-05-14 2007-03-08 Alphonse Gerard A Low coherence interferometry utilizing phase
US7301644B2 (en) * 2004-12-02 2007-11-27 University Of Miami Enhanced optical coherence tomography for anatomical mapping
US20090022443A1 (en) * 2007-07-18 2009-01-22 Wei Chen Thermo-Optic Devices Providing Thermal Recirculation
JP2010122688A (ja) * 2008-11-21 2010-06-03 Ofs Fitel Llc 光ファイバモード結合器

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US5301010A (en) * 1989-02-18 1994-04-05 Cambridge Consultants Limited Interferometer having a short coherence length light source and means for identifying interference fringes
JPH04506705A (ja) * 1990-02-09 1992-11-19 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 干渉計
US5289256A (en) * 1992-02-15 1994-02-22 Daimler-Benz Ag Integrated-optics expansion interferometer in an extension-metrological neutral environment
US5710629A (en) * 1992-12-10 1998-01-20 Schneider Electric S.A. Interferometric measuring device forming a spacial interference pattern
JP2001255567A (ja) * 2000-03-09 2001-09-21 Nippon Telegr & Teleph Corp <Ntt> 光信号処理装置
US6887359B2 (en) * 2001-06-08 2005-05-03 The Regents Of The University Of California Chemical micro-sensor
JP2005516187A (ja) * 2002-01-24 2005-06-02 ザ ジェネラル ホスピタル コーポレーション スペクトル帯域の並列検出による測距並びに低コヒーレンス干渉法（ｌｃｉ）及び光学コヒーレンス断層撮影法（ｏｃｔ）信号の雑音低減のための装置及び方法
US7116429B1 (en) * 2003-01-18 2006-10-03 Walecki Wojciech J Determining thickness of slabs of materials by inventors
US20070055117A1 (en) * 2004-05-14 2007-03-08 Alphonse Gerard A Low coherence interferometry utilizing phase
US7301644B2 (en) * 2004-12-02 2007-11-27 University Of Miami Enhanced optical coherence tomography for anatomical mapping
US20090022443A1 (en) * 2007-07-18 2009-01-22 Wei Chen Thermo-Optic Devices Providing Thermal Recirculation
JP2010122688A (ja) * 2008-11-21 2010-06-03 Ofs Fitel Llc 光ファイバモード結合器

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JPN6016010636; ＤＡＮＩＥＬ　ＨＯＦＳＴＥＴＴＥＲ　ｅｔ　ａｌ．: 'Ｏｐｔｉｃａｌ　ｄｉｓｐｌａｃｅｍｅｎｔ　ｍｅａｓｕｒｅｍｅｎｔ　ｗｉｔｈ　ＧａＡｓ／ＡｌＧａＡｓ-ｂａｓｅｄ　ｍｏｎｏｌｉｔｈｉｃａｌｌｙ　ｉｎｔｅｇｒａｔｅｄ　Ｍｉｃｈｅｌｓｏｎ　ｉｎｔｅｒｆｅｒ' Ｊｏｕｒｎａｌ　ｏｆ　Ｌｉｇｈｔｗａｖｅ　Ｔｅｃｈｎｏｌｏｇｙ ｖｏｌ．　１５，　ｎｏ．　４, 199704, ｐｐ．　６６３-６７０, ＩＥＥＥ *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020514690A (ja) * 2016-12-21 2020-05-21 ミダイアグノスティクス・エヌブイｍｉＤｉａｇｎｏｓｔｉｃｓ ＮＶ 媒体中の粒子によって放出される蛍光を収集するための装置
JP7183160B2 (ja) 2016-12-21 2022-12-05 ミダイアグノスティクス・エヌブイ 媒体中の粒子によって放出される蛍光を収集するための装置
US11686682B2 (en) 2016-12-21 2023-06-27 miDiagnostics NV Device for collecting fluorescent light emitted by particles in a medium
WO2023153077A1 (ja) * 2022-02-08 2023-08-17 古河電気工業株式会社 光干渉断層計
JP2023115662A (ja) * 2022-02-08 2023-08-21 古河電気工業株式会社 光干渉断層計

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EP2715277A1 (en) 2014-04-09
US20140125983A1 (en) 2014-05-08
EP2715277A4 (en) 2015-02-11
WO2012162809A1 (en) 2012-12-06

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