JP2014511433A - 三次元構造を製造する方法及び三次元構造 - Google Patents
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Abstract
【選択図】図1
Description
Claims (19)
- 三次元構造を製造する方法であって、
複数の粒子が担体要素に配置又は塗布され、前記複数の粒子の間に形成される複数の空洞が少なくとも一部相互結合され、前記複数の粒子が互いに接点において接触する段階と、
前記複数の粒子及び前記担体要素を被覆する被覆工程によって、前記複数の粒子を互いに前記接点において接続させる段階とを備え、
前記被覆工程で形成される層が、前記複数の空洞の少なくとも一部に入り込む方法。 - 前記被覆工程が、化学気相成長法法(CVD)、特に、原子層成長法(ALD)又は原子気相成長法(AVD)によって実行される請求項1に記載の方法。
- 前記層が、1原子層から5μmの間の厚み、望ましくは、5nmから1μmの間の厚み、より望ましくは、50nmから300nmの間の厚みを有する請求項1又は2に記載の方法。
- 前記複数の粒子は、ランダムな方向及びランダムな配列で塗布される又は配置される請求項1から3の何れか一項に記載の方法。
- 前記複数の粒子及び/又は前記担体要素は、少なくとも100℃、望ましくは、150℃又は200℃の耐熱性を有する請求項1から4の何れか一項に記載の方法。
- 前記複数の粒子が接続される時に、前記複数の粒子が基本的に不可逆的に変形しない請求項1から5の何れか一項に記載の方法。
- 少なくとも2つの異なる材料で形成される前記複数の粒子の混合物が配置される請求項1から6の何れか一項に記載の方法。
- 塗布された又は配置された前記複数の粒子の基本的に全てが、前記層によって互いに接続される請求項1から7の何れか一項に記載の方法。
- 前記被覆工程の前に、前記複数の粒子が互いにゆるく接触した状態に配置される請求項1から8の何れか一項に記載の方法。
- 配置された又は塗布された高さ構造を有する基板を用意する段階を更に備え、
凹部もしくは空洞部、及び/又は、基板に設けられた構造化層が、前記担体要素として使用される請求項1から9の何れか一項に記載の方法。 - 前記基板は、シリコン、ガラス又はセラミックで形成されている請求項10に記載の方法。
- 前記複数の粒子の一粒子あたりの平均体積の少なくとも10倍の大きさの要素を埋め込む段階を更に備え、
前記被覆工程の間に、前記要素が、前記複数の粒子及び前記担体要素と接続される請求項1から11の何れか一項に記載の方法。 - 前記複数の粒子及び前記担体要素が被覆された後に、カバー層を設ける段階を更に備え、
前記カバー層の少なくとも一部は、望ましくは、浅い前記複数の空洞を完全に閉じ、
前記カバー層は、望ましくは、後で平坦化される請求項1から12の何れか一項に記載の方法。 - 前記複数の粒子が被覆され接続された後に、前記担体要素、及び、場合によっては被覆されずに残っている前記複数の粒子を、望ましくはエッチングによって、少なくとも部分的に取り除く段階を更に備える請求項1から13の何れか一項に記載の方法。
- 前記担体要素の一部が取り除かれた後に、接続された前記複数の粒子が、前記担体要素の残りの部分上で自己支持構造を形成する、又は、自己支持膜を形成する請求項14に記載の方法。
- 前記担体要素が完全に取り除かれ、接続された前記複数の粒子が、異なる基板に移される段階を更に備える請求項14に記載の方法。
- 別の材料を、接続された前記複数の粒子に塗布する段階を更に備え、
接続された前記複数の粒子の少なくとも一部が、望ましくはエッチングにより、後で取り除かれる請求項1から16の何れか一項に記載の方法。 - 前記被覆工程の間に、安定した不揮発性層が形成され、
前記不揮発性層は、望ましくは、ALD又はAVDのようなCVD法を使用して形成される材料から構成され、特に望ましくは、金属又は酸化アルミニウムのような無機酸化物から形成されている請求項1から17の何れか一項に記載の方法。 - 請求項1から17の何れか一項に記載の方法によって製造される三次元構造。
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DE102011010899.8 | 2011-02-04 | ||
DE201110010899 DE102011010899A1 (de) | 2011-02-04 | 2011-02-04 | Verfahren zum Erzeugen einer dreidimensionalen Struktur sowie dreidimensionale Struktur |
PCT/EP2012/000696 WO2012104106A1 (de) | 2011-02-04 | 2012-02-03 | Verfahren zum erzeugen einer dreidimensionalen struktur sowie dreidimensionale struktur |
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US (1) | US9221217B2 (ja) |
EP (1) | EP2670880B1 (ja) |
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DE102014226138A1 (de) * | 2014-12-16 | 2016-06-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer Vorrichtung mit einer dreidimensionalen magnetischen Struktur |
DE102015206377A1 (de) | 2015-04-09 | 2016-10-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einer vielzahl von partikeln und verfahren zum herstellen derselben |
DE102016106841B3 (de) * | 2015-12-18 | 2017-03-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Konverter zur Erzeugung eines Sekundärlichts aus einem Primärlicht, Leuchtmittel, die solche Konverter enthalten, sowie Verfahren zur Herstellung der Konverter und Leuchtmittel |
DE102016215616B4 (de) * | 2016-08-19 | 2020-02-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer magnetischen Struktur und Vorrichtung |
DE102016215617A1 (de) | 2016-08-19 | 2018-02-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Hohlraums mit poröser Struktur |
DE102016119031A1 (de) | 2016-10-07 | 2018-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Wärmeisoliertes Mikrosystem |
US10886437B2 (en) | 2016-11-03 | 2021-01-05 | Lumileds Llc | Devices and structures bonded by inorganic coating |
DE102019201744B4 (de) | 2018-12-04 | 2020-06-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mems-schallwandler |
DE102019201889A1 (de) | 2019-02-13 | 2020-08-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS und Verfahren zum Herstellen desselben |
DE102019210177B4 (de) | 2019-07-10 | 2021-05-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen einer gegenläufig magnetisierten Magnetstruktur |
DE102019212091A1 (de) | 2019-08-13 | 2021-02-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikrosystem und verfahren zum herstellen desselben |
DE102020209525A1 (de) | 2020-07-29 | 2022-02-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Verfahren zum Befüllen von Mikrokavitäten |
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US20080254312A1 (en) * | 2005-10-11 | 2008-10-16 | Nv Bekaert Sa | Coated Porous Metal Medium |
US20080193739A1 (en) * | 2007-02-12 | 2008-08-14 | Dickey Eric R | Fabrication of composite materials using atomic layer deposition |
WO2008100963A1 (en) * | 2007-02-12 | 2008-08-21 | Lotus Applied Technology, Llc | Fabrication of composite materials using atomic layer deposition |
US20140011014A1 (en) * | 2011-01-06 | 2014-01-09 | The Board Of Trustees Of The University Of Illinois | Three-dimensional (3d) porous device and method of making a 3d porous device |
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EP2670880A1 (de) | 2013-12-11 |
JP6141197B2 (ja) | 2017-06-07 |
EP2670880B1 (de) | 2018-07-18 |
US9221217B2 (en) | 2015-12-29 |
WO2012104106A1 (de) | 2012-08-09 |
DE102011010899A1 (de) | 2012-08-09 |
US20140023849A1 (en) | 2014-01-23 |
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