JP2014238295A - Diffraction ring formation system and x-ray diffraction measurement system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily detect an X-ray irradiation direction capable of reducing lack of a diffraction ring as much as possible in a small amount of time even in an object having a complicated shape.SOLUTION: An inclination device 60 changes the posture of a measuring object OB and a moving device 70 moves the measuring object OB so that the measuring object OB can be moved to a position opposed to an X-ray diffraction measuring device 1 and a position opposed to a three-dimensional shape measuring device 2. When a shape of the measuring object OB is measured by the three-dimensional shape measuring device 2, a controller 101 processes inputted data and displays a three-dimensional shape image on a display device 103. An optical axis position of an X-ray in a coordinate system of the three-dimensional shape measuring apparatus 2 is previously stored in the controller 101, and when an X-ray irradiation point on the three-dimensional shape image is specified by an input from the input device 103, the controller 101 calculates and displays a shape of a diffraction ring by processing the stored optical axis position of the X-ray and the data inputted from the three-dimensional shape measuring device 2.

Description

  In order to measure the residual stress of the measurement object based on the X-ray diffraction ring formed on the surface of the imaging plate, the present invention irradiates the measurement object with X-rays and diffracts the measurement object. The present invention relates to a diffraction ring forming system including a diffraction ring forming apparatus that forms an image of an annular diffraction X-ray on the surface of an imaging plate, and an X-ray diffraction measurement system including the diffraction ring forming system.

  Conventionally, the residual stress of a measurement object is often measured by X-ray diffraction. In the field of measurement of residual stress, an X-ray diffraction measurement apparatus that is intended to reduce the size of the apparatus and shorten the measurement time of the residual stress of the measurement object is disclosed in Patent Document 1 below. In this X-ray diffractometer, X-rays irradiated on a measurement object at a predetermined incident angle (for example, 30 to 40 degrees) and diffracted on the upper surface of the measurement object (hereinafter referred to as diffracted X-rays). ) Is received by a photosensitive imaging plate, and an image of an annular diffraction X-ray (hereinafter simply referred to as a diffraction ring) is formed on the imaging plate. Then, after moving the imaging plate to another position, the imaging plate is rotated along with the movement, the laser beam is irradiated from the laser detection device, and the shape of the diffraction ring formed on the imaging plate is read. The residual stress of the measurement object is calculated by analyzing the shape using the cos α method.

JP 2012-225796 A

  In this type of X-ray diffraction measurement apparatus, if the point to which X-rays emitted from the apparatus are irradiated is known, the measurement object is staged so that the measurement location of the measurement object matches the X-ray irradiation point. If set to, measurement can be performed. The parameters necessary for calculating the residual stress from the shape of the diffraction ring formed on the imaging plate include the X-ray incident angle and the distance from the X-ray irradiation point to the imaging plate. You can get like that. The X-ray incident angle is a fixed value if the posture of the stage on which the X-ray diffraction measurement apparatus and the measurement object are set is constant, and can be set to an appropriate value at the design stage of the X-ray diffraction measurement apparatus. . The distance from the X-ray irradiation point to the imaging plate is obtained by mixing light of a wavelength that can be reflected in X-rays, receiving reflected light with a sensor, and detecting the light receiving position, as disclosed in Patent Document 1. Can do. The distance from the X-ray irradiation point to the imaging plate has a 1: 1 relationship with the value obtained by adding the thickness of the measurement object to the stage height (height of the measurement object surface). If it is obtained, it can be obtained by obtaining the thickness of the measurement object and the stage height.

  However, the method for obtaining the X-ray incident angle and the distance from the X-ray irradiation point to the imaging plate is based on the assumption that the measurement location of the measurement object is a plane and that the plane is parallel to the stage surface. Limited. That is, when the measurement object has a complicated shape such as a gear, the X-ray incident angle and the distance from the X-ray irradiation point to the imaging plate cannot be easily obtained. Therefore, when the measurement object has a complicated shape, there is a problem that it is difficult to obtain a precise residual stress from the obtained diffraction ring. In addition, before this problem, if the measurement object has a complicated shape, adjustment of the irradiation direction of the X-rays irradiated to the measurement object (when the optical axis of the X-ray is used as a reference, There is another problem that adjustment of the posture is difficult. That is, when the measurement object has a complicated shape, as shown in FIG. 15, the diffracted X-ray may be obstructed by a part of the measurement object, and the diffraction ring may not be formed on the imaging plate. If there are many missing diffraction rings, accurate residual stress cannot be obtained. Therefore, the X-ray irradiation direction of the object to be measured should be adjusted so that the number of missing diffraction rings is minimized before measurement. It needs to be adjusted. However, this adjustment can only be predicted visually by the operator, or every time the irradiation direction is changed, X-ray irradiation is used to form a diffraction ring several times. There is a problem that it takes time. For this reason, at the present time, the residual stress of an object having a complicated shape is hardly measured using an X-ray diffraction measurement apparatus.

  The present invention has been made to solve this problem, and its purpose is to form a diffraction ring on the surface of the imaging plate by irradiating the measurement object with X-rays and diffracting the X-ray with the measurement object. In a diffraction ring forming system equipped with a device and an X-ray diffraction measurement system equipped with the diffraction ring forming system, even if the object has a complicated shape, the chip of the diffraction ring is reduced as much as possible in a short time. The X-ray irradiation direction can be adjusted (attitude adjustment of the measurement object), and the X-ray incident angle and the distance from the X-ray irradiation point to the imaging plate can be obtained accurately. It is to provide a forming system and an X-ray diffraction measurement system.

  In order to achieve the above object, the present invention is characterized by an X-ray emitter that emits X-rays toward an object to be measured, a table in which a through-hole that allows X-rays to pass is formed in the center, and a table attached And an imaging plate that has a light-receiving surface that transmits X-rays diffracted by the measurement object and records a diffraction ring that is an image of the diffracted light. In a diffractive ring forming system including a diffractive ring forming device, the three-dimensional shape of the measurement object is measured by irradiating the measurement object with light and detecting reflected light or imaging the measurement object. A three-dimensional shape measuring device that outputs original data for creating data, the three-dimensional shape measuring device having a fixed position and orientation relative to the diffraction ring forming device, the diffraction ring forming device, and the three-dimensional shape measuring device Against Position and orientation changing means for changing the position and orientation of the measurement object in at least two directions and at least about one axis that can be at least a position facing the diffraction ring forming device and a position facing the three-dimensional shape measuring device. And shape data creating means for creating 3D shape data of the measurement object using the original data output from the 3D shape measuring device, and a measurement object using the 3D shape data created by the shape data creating means X-rays emitted from the X-ray emitter are included in the three-dimensional image display means for creating and displaying a three-dimensional shape image of the object, and the three-dimensional shape image of the measurement object displayed by the three-dimensional image display means. A point designating unit capable of designating the irradiated point and the optical axis position of the X-ray emitted from the X-ray emitter by the coordinate system of the three-dimensional shape measuring apparatus are stored. Using the storage means, the optical axis position of the X-ray stored in the storage means, and the three-dimensional shape data created by the shape data creation means, the position and orientation changing means changes the position of the measurement object. And diffractive ring shape calculating means for calculating the shape of the diffractive ring formed on the imaging plate when X-rays are irradiated to the point specified using the point specifying means.

  According to this, the measuring object is measured by the three-dimensional shape measuring apparatus, and the shape data creating means creates the three-dimensional shape data of the measuring object based on the original data output from the three-dimensional shape measuring apparatus. Then, since the 3D image display means creates and displays a 3D shape image of the measurement object using the 3D shape data, the operator looks at the displayed 3D shape image and uses the point designating means. In the three-dimensional shape image displayed in this way, a point to which X-rays emitted from the X-ray emitter are irradiated is designated. The diffraction ring shape calculation means uses the X-ray optical axis position and the three-dimensional shape data stored in the storage means to change the position of the measurement object by the position / orientation change means and specify the point The shape of the diffraction ring formed on the imaging plate when X-rays are irradiated is calculated. The operator can confirm the presence / absence of a diffracting ring chip and the degree of diffracting ring chipping by checking the calculated shape of the diffracting ring. According to this, even for a measurement object having a complicated shape, the shape of the diffraction ring can be confirmed for each posture of the measurement object (X-ray irradiation direction with respect to the measurement object). It is possible to find the posture of the measurement object (X-ray irradiation direction with respect to the measurement object) that can reduce the number of missing diffraction rings as much as possible. Note that a change in the position of the measurement target means that the measurement target is moved in parallel, and a change in the posture of the measurement target means that the measurement target is inclined around a predetermined rotation axis.

  Another feature of the present invention is that the storage means also stores the position of the rotation axis in the change in posture of the measurement object by the position and orientation changing means by the coordinate system of the three-dimensional shape measuring apparatus, and the shape data creating means Posture change that can specify the change direction and change amount of the posture when the posture is changed virtually using the position and posture change means for the three-dimensional shape based on the three-dimensional shape data of the measurement object created by When the posture change direction and the amount of change are designated by the posture change designation unit, the shape data creation unit includes the position of the rotation axis stored in the storage unit and the designated posture change direction. And using the change amount, the three-dimensional shape data of the measurement object created using the original data is changed to the three-dimensional shape data when the posture is changed.

  According to this, when the degree of chipping of the diffraction ring calculated by the diffraction ring shape calculation means is large, the position of the measurement object is actually changed by the position / orientation change means, and the measurement is performed again by the three-dimensional shape measurement apparatus. As long as the orientation change direction and the amount of change when the orientation of the measurement object is virtually changed using the orientation change designation means, the shape of the diffraction ring when the change is actually performed is specified. Can be calculated. Therefore, when the degree of chipping of the diffraction ring calculated by the diffraction ring shape calculation means is large, the posture of the measurement object (the X-ray irradiation direction with respect to the measurement object) that can minimize the chipping of the diffraction ring is virtually assumed. What is necessary is just to change it as much as the attitude | position which found it above and found the actual attitude | position by the position / orientation change means. According to this, even if the object has a complicated shape, the posture of the measurement object (X-ray irradiation direction with respect to the measurement object) can be reduced in a short time as much as possible. Can be found.

  Another feature of the present invention is that the position and orientation change means uses the X-ray optical axis position stored in the storage means and the three-dimensional shape data created by the shape data creation means to measure the object. The incident angle calculating means for calculating the incident angle of the X-ray when the point designated using the point designating means is irradiated with X-rays is provided. According to this, the incident angle of the X-ray when the X-ray is irradiated to the designated point can be obtained, and the accurate residual stress can be calculated from the read shape of the diffraction ring.

  Another feature of the present invention is that the storage means also stores the respective moving directions in the change of the position of the measurement object by the position and orientation change means by the coordinate system of the three-dimensional shape measuring apparatus, and stores them in the storage means. The X-ray optical axis position and the respective moving directions in the change in the position of the measurement object are used to irradiate the X-rays to the point specified using the point specifying means. It is provided with movement amount calculation means for calculating the movement amount in the respective movement direction in the change in position of the measurement object by the position and orientation change means. According to this, in order to irradiate the specified point of the measurement object with X-rays, the position and orientation change means can know how much the position of the measurement object should be changed in which direction, so that measurement can be performed easily. X-rays can be irradiated to designated points of the object.

  Another feature of the present invention is that the position / orientation changing means changes the position of the measurement object in at least three directions, and the movement amount calculating means is configured to detect X-rays at a point specified using the point specifying means. Calculates the amount of movement in the direction of movement when the position of the object is changed by the position and orientation change means so that X-rays are emitted so that the distance from the irradiation point to the imaging plate becomes the set value. There is in doing so. According to this, in order to irradiate the designated point of the measurement object with the X-ray so that the distance from the X-ray irradiation point to the imaging plate becomes a set value, the position / orientation changing means causes the measurement object Since it can be seen how much the position should be changed and in what direction, the distance from the X-ray irradiation point to the imaging plate can be easily set to the set value. Can be calculated.

  In addition, another feature of the present invention is designated by using the point designating means using the optical axis position of the X-ray stored in the memory means and the respective moving directions in the change in the position of the measurement object. A distance calculating means for calculating the distance from the X-ray irradiation point to the imaging plate when the point is irradiated with X-rays is provided. According to this, the distance from the X-ray irradiation point to the imaging plate can be obtained with high accuracy without setting the distance from the X-ray irradiation point to the imaging plate. Accurate residual stress can be calculated from the shape of the ring.

  Another feature of the present invention is that the diffractive ring forming apparatus is a parallel beam having the same optical axis as that of the X-ray emitted from the X-ray emitter in a state where the X-ray is not emitted from the X-ray emitter. A visible light emitter that emits visible light to the object to be measured, and is a first jig that can be attached to and detached from the diffraction ring forming device, and is emitted from the visible light emitter when attached to the diffraction ring forming device. A flat plate that is perpendicular to the optical axis of the visible light and has a through hole for allowing visible light to pass through, and the same angle as the angle at which diffracted X-rays are generated by entering visible light when mounted on the diffraction ring forming device A first jig including a conical mirror that reflects at an angle is provided. According to this, when the three-dimensional shape of the measurement object cannot be measured due to low reflectivity of the measurement object, the first jig is attached to the diffraction ring forming device and visible from the visible light emitter. If the cone mirror of the first jig is brought to the X-ray irradiation point position of the measurement object by irradiating light, the circular illumination that the visible light reflected by the cone mirror forms on the flat plate of the first jig By observing the traces, it is possible to confirm the presence / absence of a diffractive ring defect and the degree of diffractive ring defect.

  Another feature of the present invention is a second jig that can be attached to and detached from the diffraction ring forming device. The second jig is attached to the optical axis of visible light emitted from the visible light emitter when the diffraction jig is attached to the diffraction ring forming device. A flat plate with a through-hole for allowing visible light to pass through, and a conical inner surface shape that reflects visible light reflected by the measurement object when it is mounted on the diffraction ring forming device and reflects it at different angles depending on the incident angle A second jig including a mirror is provided. According to this, when the three-dimensional shape of the measurement object cannot be measured due to low reflectivity of the measurement object, the second jig is attached to the diffraction ring forming device and visible from the visible light emitter. If the tip of the conical inner surface shape mirror of the second jig is set to the X-ray irradiation point position of the measurement object by irradiating light, the visible light reflected by the measurement object and reflected by the conical inner surface shape mirror is the first. If the position of the dotted irradiation trace formed on the flat plate of the jig 2 is confirmed, and the distance from the flat plate of the second jig to the tip of the conical inner surface shape mirror is obtained, the X-ray incident angle on the measurement object can be determined. Can be sought.

  Another feature of the present invention is an X-ray diffraction measurement system including a diffraction ring forming system, wherein a laser light source for emitting laser light and light generated by the laser light are received in the diffraction ring forming apparatus. A laser detector that includes a light receiver, irradiates the light receiving surface of the imaging plate with laser light, receives light emitted from the imaging plate by irradiation of the laser light, and outputs a light receiving signal according to the light receiving intensity; A rotation mechanism that rotates the table about the central axis of the through-hole, and a movement mechanism that moves the table relative to the laser detection device in a direction parallel to the light receiving surface of the imaging plate, and controls the rotation mechanism. The table is rotated and the moving mechanism is controlled to move the table while the laser detector is controlled to receive the imaging plate. The surface is irradiated with laser light while detecting the irradiation position, and a light reception signal from the laser detection device is input, and the detected irradiation position and the input light reception signal are processed to read the diffraction ring formed on the imaging plate. A diffraction ring reading means is provided. According to this, since the shape of the diffraction ring can be read immediately after the diffraction ring is formed on the imaging plate, the residual stress of the measurement object can be measured in a short time. Note that even if the orientation of the measurement object (X-ray irradiation direction with respect to the measurement object) is adjusted so that the diffraction ring can be reduced as much as possible, the read diffraction ring may be defective. In this case, it is preferable to calculate the residual stress of the measurement object using the data of the location where the diffraction ring exists. In addition to the residual stress, the characteristic value of the measurement object that can be calculated from the diffraction ring includes the half width and the amount of retained austenite. What is the characteristic value that can be calculated from the diffraction ring? You may be made to calculate an appropriate value.

  Furthermore, in carrying out the present invention, the present invention is not limited to the diffraction ring formation system and the X-ray diffraction measurement system. And the invention of the method for obtaining the distance to the X-ray irradiation point.

1 is an overall schematic diagram showing an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus according to an embodiment of the present invention. It is an enlarged view of the X-ray-diffraction measuring apparatus of FIG. FIG. 2 is an external view when the X-ray diffraction measurement system of FIG. 1 is viewed from the right direction of FIG. 1. FIG. 2 is a diagram visually showing straight lines, vectors, and coordinate points corresponding to linear equations, vector components, and coordinate values stored in the controller of FIG. 1. It is the figure which showed visually the method of calculating | requiring the linear type | formula of the X-ray optical axis by the coordinate system of a three-dimensional shape measuring apparatus. It is the figure which showed the object attached to the metal surface, when calculating | requiring the linear type | formula of the X-ray optical axis by the coordinate system of a three-dimensional shape measuring apparatus. It is the figure which showed how to move the measuring object when measuring with the X-ray-diffraction measuring system of FIG. 1, (A) is a movement position when performing three-dimensional shape measurement, (B) is This is the moving position when the residual stress is measured by X-ray diffraction. It is a figure which illustrates visually the process which calculates | requires the shape of a diffraction ring from three-dimensional shape data. It is a figure which shows a mode that the shape of a diffraction ring changes, if the attitude | position of the measuring object mounted on the stage is changed. FIG. 2 is a process diagram illustrating an operation performed by an operator when measuring the residual stress shape of a measurement object using the X-ray diffraction measurement system of FIG. 1. FIG. 2 is a partial cross-sectional view showing an enlarged portion through which X-rays pass in the X-ray diffraction measurement apparatus of FIG. 1. It is an expansion perspective view of the LED irradiation mechanism part of FIG. In the X-ray diffractometer of the modification of the present invention, a jig attached to the X-ray exit of the X-ray diffractometer is shown in order to confirm the lack of a diffraction ring when measurement by a three-dimensional shape measuring device is impossible FIG. In the X-ray diffraction measurement apparatus according to the modification of the present invention, a jig is shown that is attached to the X-ray exit of the X-ray diffraction measurement apparatus in order to obtain the X-ray incident angle when measurement by a three-dimensional shape measurement apparatus is impossible. It is sectional drawing. It is a figure which shows that a diffraction ring may be missing when the measuring object has a complicated shape.

  A configuration of an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus according to an embodiment of the present invention will be described with reference to FIG. 1, FIG. 2, and FIG. An X-ray diffraction measurement system including this X-ray diffraction measurement apparatus irradiates a measurement object OB with X-rays, and forms the shape of a diffraction ring formed on an imaging plate by diffraction X-rays from the measurement object OB by the irradiation. This system reads and calculates the residual stress at the X-ray irradiation point of the measurement object OB, but accurately measures the residual stress at the specified point of the measurement object OB having a complicated shape by X-ray irradiation from the appropriate direction. A system is also provided. The measurement object OB having a complicated shape is, for example, a gear whose material is iron.

  The X-ray diffraction measurement apparatus 1 includes an X-ray emitter 10 that emits X-rays, a table 16 for mounting an imaging plate 15 on which a diffraction ring is formed by diffracted X-rays, and a table driving mechanism that rotates and moves the table 16. 20, a laser detection device 30 for measuring the shape of the diffraction ring formed on the imaging plate 15, and these X-ray emitter 10, imaging plate 15, table 16, table drive mechanism 20 and laser detection device 30. And a case 50 for housing. Then, the X-ray diffraction measurement system, together with the X-ray diffraction measurement device 1, has a three-dimensional shape measurement device 2 for measuring the three-dimensional shape of the measurement object OB and two measurement objects OB that are orthogonal to each other. A tilting device 60 that tilts around a rotation axis, a moving device 70 that moves a measurement object OB (tilting device 60) in three directions orthogonal to each other, a computer device 100, and a high-voltage power source 96 are provided. The case 50 also includes various circuits that are connected to the X-ray emitter 10, the table 16, the table drive mechanism 20, and the laser detection device 30 to control operation and to input detection signals. In FIG. 1, various circuits indicated by a two-dot chain line shown outside the case 50 are accommodated within a two-dot chain line in the case 50. In FIG. 1 and FIG. 2, circuit boards, electric wires, fixtures, air cooling fans, and the like are omitted.

  The case 50 is formed in a substantially rectangular parallelepiped shape, and is formed to have a cutout wall 50c provided so as to cut out corners of the bottom wall 50a and the side wall 50b from the front side to the back side of the paper surface. Yes. As shown in FIG. 3, the side wall of the case 50 is provided with a connecting portion 51 connected to the support arm 52, and the connecting portion is located around the horizontal direction in FIG. 3 (perpendicular to the plane of FIG. 1 and FIG. 2). It is possible to rotate around. The support arm 52 is a tip of an arm type moving device (not shown), and the case 50 can be brought to an arbitrary position and posture by operating the arm type moving device. Thereby, in the measurement of the measurement object OB, the position and orientation of the case 50 are adjusted so that the notch wall 50c faces the upper surface of the stage 61 described later.

  The three-dimensional shape measuring apparatus 2 may be anything as long as it can measure the shape of the measurement object OB without contact. For example, laser light is scanned in two directions while detecting the irradiation direction, and a part of the scattered light generated at the laser light irradiation point on the surface of the measurement object OB is received by a photosensor capable of detecting the light receiving position. An apparatus of a system that detects a light receiving position for each laser light irradiation direction may be used. In this case, the three-dimensional shape measuring apparatus 2 outputs the received light position data detected for each laser light irradiation direction to the controller 101 together with the laser light irradiation direction data. The controller 101 obtains the distance from the input data to the laser light irradiation point for each laser light irradiation direction based on the principle of the triangulation method, and the laser light irradiation direction is calculated from the laser light irradiation direction and the distance to the laser light irradiation point. The coordinate value (for each point on the surface of the measurement object OB) of the irradiation point is calculated. In addition, the measurement object OB is irradiated with light that can form a lattice pattern at an interval set at the irradiation location, and the image pickup device is arranged to shoot the measurement object OB every time the movement amount of the lattice pattern reaches a set value while moving the lattice pattern. You may use the apparatus of the system performed with the image sensor. In this case, the three-dimensional shape measuring apparatus 2 outputs brightness data of the shooting point set by the image sensor to the controller 101 for each shooting. The controller 101 calculates the distance for each imaging point set by the image sensor from the input data based on the principle of the phase shift method, and determines each point of the measurement object OB from the direction determined for each set imaging point and the calculated distance. The coordinate value of is calculated. In addition to this, photographing of the measurement object OB is performed from a plurality of directions by an image sensor in which image pickup devices are arranged, and the coordinate value of each point of the measurement object OB is obtained from the photographing data output to the controller 101 based on the principle of the stereo method. May be used, or the measurement object OB is irradiated with light capable of producing moire fringes and the measurement object OB is photographed by an image sensor in which image pickup elements are arranged, and output to the controller 101. Alternatively, an apparatus that calculates the coordinate value of each point of the measurement object OB from the captured data based on the principle of the moire method may be used. The coordinate value of each point on the surface of the measurement object OB can be obtained as three-dimensional shape data regardless of the measurement principle of the three-dimensional shape measuring apparatus 2. Hereinafter, the coordinate value of each point on the surface of the measurement object OB obtained as a result of the three-dimensional shape measurement is referred to as point group data.

  Although the three-dimensional shape measuring apparatus 2 is shown on the upper side of the X-ray diffraction measuring apparatus 1 in FIG. 1, it is actually attached to the side surface of the X-ray diffraction measuring apparatus 1 as shown in FIG. As a result, the coordinate origin and the direction of the coordinate axis (hereinafter referred to as coordinate system D) and the X-ray diffraction measurement device 1 as the basis of the point cloud data calculated by the controller 101 from the data output from the three-dimensional shape measurement device 2 are as follows. It has a fixed positional relationship.

  The tilting device 60 for placing and tilting the measurement object OB is obtained by stacking two gonio stages. An operation element 61a is assembled to the stage 61, and the rotation of the operation element 61a causes the first plate 62 to be perpendicular to the plane of FIG. 1 and FIG. 2 and in the lateral direction of FIG. Inclined around the rotation axis in the X direction). Further, an operation element 62a is assembled to the first plate 62, and the rotation of the operation element 62a causes the second plate 71 (to be described later) through a mechanism (not shown) and the lateral direction in FIG. 1 and FIG. It inclines around the rotation axis in the direction perpendicular to the paper surface (Y direction) in FIG. The horizontal surface of the stage 61 and the horizontal surface of the first plate 62 are provided with a scale for reading the inclination angle (rotation angle around the rotation axis), and by reading this, the inclination angle of the stage 61 can be detected. It has become. Further, the scale for reading the inclination angle is attached to the operation element 61a and the operation element 62a like a micrometer, and a structure for reading this may be used.

  The moving device 70 below the tilting device 60 is a mechanism that changes the rotational motion by manual rotation or motor rotation to linear motion. The height adjusting mechanism 72 has a jack structure, and the height of the tilting device 60 (stage 61) is changed by changing the distance between the second plate 71 and the third plate 73 by rotating the operation element 72a. The position (Z direction position) is changed. The second plate 71 has a micrometer 74 attached thereto. By rotating the rotating portion, the rod-shaped portion 74a extends while rotating, and rotates when the rod-shaped portion 74a comes into contact with the third plate 74 and does not move. The height position (Z direction position) of the stage 61 can be detected by reading the scale of the portion. After reading the height position, the micrometer 74 always keeps the rod-like portion 74a to the minimum length. The lower surface of the third plate 73 has a plurality of convex portions having a predetermined width in the X direction. The convex portions enter the plurality of concave portions formed on the upper surface of the fourth plate 75, and The third plate 73 can move in the Y direction with respect to the plate 75. An operating element 75a is fixed to the fourth plate 75. When the operating element 75a is rotated, the third plate 73 is moved in the Y direction by a mechanism (not shown). The operation element 75a is also graduated like the rotating part of the micrometer, and the amount of movement (Y direction position) of the stage 61 in the Y direction can be detected by reading this scale. The amount of movement increases as the stage 61 moves to the right in FIGS.

  Further, the lower surface of the fourth plate 75 has a plurality of convex portions having a predetermined width in the Y direction. The convex portions penetrate into the plurality of concave portions formed on the upper surface of the installation plate 76, so that the installation plate 76. In contrast, the fourth plate 75 can move in the X direction. A motor 77 having a rotation axis in the direction perpendicular to the paper surface of FIG. 1 is fixed to a side surface of the installation plate 76 in the horizontal direction of the paper surface of FIG. 1, and the rotation shaft of the motor 77 is coupled to a shaft on which a male screw is formed. Yes. Further, the shaft on which the male screw is formed is coupled to a rotating body fixed to the opposite side surface of the installation plate 76. The fourth plate 75 is formed with a female screw threadedly engaged with a shaft on which a male screw is formed. When the motor 77 rotates, the fourth plate 75 (the tilting device 60 and the stage 61) moves in the X direction. Moving. In this embodiment, since the three-dimensional shape measuring apparatus 2 is attached to the side surface of the X-ray diffraction measuring apparatus 1, the measurement object OB mounted on the stage 61 is moved within the measurable range of the three-dimensional shape measuring apparatus 2. The movement in the X direction is Y so that the measurement object OB can be moved to a position where the X-ray irradiated from the X-ray diffraction measurement apparatus 1 is irradiated onto the measurement object OB mounted on the stage 61. The movable range is longer than the movement in the direction and the Z direction.

  In the motor 77, an encoder 77a that detects the rotation of the motor 77 and outputs a rotation signal representing the rotation is incorporated. This rotation signal is a pulse train signal, and is composed of an A-phase signal and a B-phase signal that are shifted in phase by π / 2 to identify the rotation direction. The rotation signal is output to the X-direction movement amount detection circuit 95 and the X-direction motor control circuit 94. The X-direction movement amount detection circuit 95 counts up or down the number of pulses of the rotation signal according to the rotation direction of the motor 77, detects the movement amount (movement position) of the stage 61 by the motor 77 from the count value, The detected movement amount is output to the X direction motor control circuit 94 and a controller 101 described later. When the movement amount (movement position) is input from the input device 102 via the controller 101, the movement amount input from the X-direction movement amount detection circuit 95 becomes equal to the movement amount input from the controller 101. Until the motor 77 is rotated. When a movement direction command is input from the input device 102 via the controller 101, the motor 77 is rotated so that the movement direction of the stage 61 becomes the input movement direction. When a stop command is input from the input device 102 via the controller 101, the drive signal to the motor 77 is stopped. When the motor 77 rotates, the X-direction motor control circuit 94 causes the motor so that the rotation speed calculated from the number of pulses per unit time of the rotation signal input from the encoder 77a becomes a preset rotation speed. The rotational speed of 77 is controlled. Thereby, the stage 61 always moves at the set speed.

  The initial setting of the count value in the X-direction movement amount detection circuit 95 is performed according to an instruction from the controller 101 when the power is turned on. That is, the controller 101 instructs the X direction motor control circuit 94 to move to the drive limit position in the right direction in FIG. 3 and instructs the X direction movement amount detection circuit 95 to perform initial setting when the power is turned on. By this command, the X direction motor control circuit 94 drives the motor 77 to move the stage 61 to the drive limit position in the right direction of FIG. The X-direction movement amount detection circuit 95 continues to input a rotation signal from the encoder 77a in the motor 77 after the command is input. When the stage 61 reaches the drive limit position and the rotation of the motor 77 stops, the X-direction movement amount detection circuit 95 moves. The amount detection circuit 95 detects the stop of the rotation signal input from the encoder 77a and resets the count value to “0”. At the same time, a signal for stopping output is output to the X-direction motor control circuit 94. As a result, the X direction motor control circuit 94 stops outputting the drive signal to the motor 77. Thereafter, when the motor 77 is driven, the X-direction movement amount detection circuit 95 counts up or down the number of pulses of the rotation signal in accordance with the rotation direction of the motor 77, and the stage 61 is based on the count value. The movement amount (movement position) is calculated, and the calculated movement amount is continuously output to the X-direction motor control circuit 94 and the controller 101. Therefore, the drive limit position in the right direction in FIG. 3 is the movement amount 0 (movement position 0), and the movement in the direction from the three-dimensional shape measurement apparatus 2 toward the X-ray diffraction measurement apparatus 1 (the left direction in FIG. 3). The value increases.

  As will be described later, in this embodiment, there are several coordinate systems in addition to the coordinate system D of the three-dimensional shape measuring apparatus 2, and each coordinate system has an X direction, a Y direction, and a Z direction. Therefore, hereinafter, the X direction, the Y direction, and the Z direction, which are the movement directions of the stage, are distinguished by expressing them as the stage X direction, the stage Y direction, and the stage Z direction.

  The X-ray emitter 10 is formed in a long shape, extends in the left-right direction in the figure in the upper part of the case 50, and is fixed to the case 50. Then, the current is supplied and controlled by the X-ray control circuit 81 to emit X-rays downward (lower left direction in the figure) from the emission port 11. Since the case 50 is rotatably connected to the support arm 52 as described above, the emission direction of the X-rays emitted from the X-ray emitter 10 can be changed around the stage X direction. However, it is preferable to adjust so that the notch portion wall 50c of the case 50 and the connecting wall 50d of the side wall 50b are substantially parallel to the stage 61. The angle of the X-rays emitted at this time with respect to the stage Z direction (X-ray incident angle φ) is, for example, an angle within a range of 30 degrees to 45 degrees.

  The X-ray control circuit 81 is controlled by a controller 101 that configures the computer apparatus 100 to be described later, and a high-voltage power supply 96 is supplied to the X-ray emitter 10 so that X-rays with a certain intensity are emitted from the X-ray emitter 10. The drive current and the drive voltage supplied from are controlled. Further, the X-ray emitter 10 includes a cooling device (not shown), and the X-ray control circuit 81 also controls a drive signal supplied to the cooling device. Thereby, the temperature of the X-ray emitter 10 is kept constant.

  The table driving mechanism 20 includes a moving stage 21 below the X-ray emitter 10. The moving stage 21 is in a plane formed by an X-ray optical axis emitted from the X-ray emitter 10 by a feed motor 22 and a screw rod 23 and a line in the stage Z direction intersecting the X-ray optical axis. Thus, it can move in a direction perpendicular to the optical axis of the X-ray. The feed motor 22 is fixed in the table drive mechanism 20 and cannot move with respect to the case 50. The screw rod 23 extends in a direction perpendicular to the optical axis of the X-ray emitted from the X-ray emitter 10, and one end thereof is connected to the output shaft of the feed motor 22. The other end portion of the screw rod 23 is rotatably supported by a bearing portion 24 provided in the table drive mechanism 20. The moving stage 21 is sandwiched between a pair of opposed plate-like guides 25 and 25 fixed in the table driving mechanism 20, respectively, and can move along the axial direction of the screw rod 23. ing. That is, when the feed motor 22 is driven forward or backward, the rotational motion of the feed motor 22 is converted into the linear motion of the moving stage 21. An encoder 22 a is incorporated in the feed motor 22. The encoder 22a outputs a pulse train signal that alternately switches between a high level and a low level to the position detection circuit 86 and the feed motor control circuit 85 each time the feed motor 22 rotates by a predetermined minute rotation angle.

  The position detection circuit 86 and the feed motor control circuit 85 start to operate in response to a command from the controller 101. Immediately after the start of measurement, the feed motor control circuit 85 drives the feed motor 22 to move the moving stage 21 to the feed motor 22 side. When the pulse train signal output from the encoder 22a is not input, the position detection circuit 72 outputs a signal indicating that the movement stage 21 has reached the movement limit position to the feed motor control circuit 85, and sets the count value to “0”. Set to. When the feed motor control circuit 85 receives a signal indicating that the movement limit position has been reached from the position detection circuit 86, the feed motor control circuit 85 stops outputting the drive signal to the feed motor 22. The above movement limit position is set as the origin position of the moving stage 21. Accordingly, the position detection circuit 86 outputs a position signal indicating “0” when the moving stage 21 moves in the upper left direction in FIGS. 1 and 2 and reaches the movement limit position, and the movement stage 21 moves to the movement limit position. When moving to the lower right, the pulse train signal from the encoder 22a is counted, and a signal indicating the movement distance x from the movement limit position is output as a position signal.

  When the feed motor control circuit 85 receives a set value indicating the position of the moving stage 21 from the controller 101, the feed motor control circuit 85 drives the feed motor 22 to rotate forward or backward according to the set value. The position detection circuit 86 counts the number of pulses of the pulse signal output from the encoder 22a. Then, the position detection circuit 86 calculates the current position (movement distance x from the movement limit position) of the movement stage 21 using the counted number of pulses, and outputs it to the controller 101 and the feed motor control circuit 85. The feed motor control circuit 85 drives the feed motor 22 until the current position of the moving stage 21 input from the position detection circuit 86 matches the position of the moving destination input from the controller 101.

  Further, the feed motor control circuit 85 inputs a set value indicating the moving speed of the moving stage 21 from the controller 101. Then, the moving speed of the moving stage 21 is calculated using the number of pulses per unit time of the pulse signal input from the encoder 22a, and the calculated moving speed of the moving stage 21 becomes the moving speed input from the controller 101. The feed motor 22 is driven.

  The upper ends of the pair of guides 25 are connected by a plate-like upper wall 26. A through hole 26 a is provided in the upper wall 26, and the center position of the through hole 26 a faces the center position of the emission port 11 of the X-ray emitter 10. The line enters the table driving mechanism 20 through the emission port 11 and the through hole 26a.

  In a state where an imaging plate 15 to be described later is in the diffraction ring imaging position (the state shown in FIGS. 1 and 2), a through hole is formed at a position facing the through hole 26a of the moving stage 21 as shown in an enlarged view in FIG. 21a is formed. The moving stage 21 is assembled with a spindle motor 27 having an output shaft 27a whose center of rotation is the position of the central axis of the exit port 11 and the through holes 26a, 21a. The output shaft 27a is formed in a cylindrical shape and has a through-hole 27a1 having a circular cross section with the center of rotation as the central axis. On the opposite side of the spindle motor 27 from the output shaft 27a, a through hole 27b having the central position of the through hole 27a1 as a central axis is provided. A cylindrical passage member 28 for reducing the inner diameter of a part of the through hole 27b is fixed on the inner peripheral surface of the through hole 27b. In addition, although the location shown with the dashed-two dotted line in FIG. 11 is a part which provides an LED light irradiation mechanism in the modification of this invention, it is mentioned later.

  An encoder 27c similar to the encoder 22a is incorporated in the spindle motor 27. The encoder 27c outputs, to the spindle motor control circuit 82 and the rotation angle detection circuit 83, a pulse train signal that alternately switches between a high level and a low level every time the spindle motor 27 rotates by a predetermined minute rotation angle. Furthermore, the encoder 27c outputs an index signal that switches from a low level to a high level for a predetermined short period each time the spindle motor 27 rotates once, to the controller 101 and the rotation angle detection circuit 83.

  The spindle motor control circuit 82 and the rotation angle detection circuit 83 start to operate in response to a command from the controller 101. The spindle motor control circuit 82 inputs a setting value representing the rotational speed of the spindle motor 27 from the controller 101. Then, the rotational speed of the spindle motor 27 is calculated using the number of pulses per unit time of the pulse signal input from the encoder 27c, and the calculated rotational speed becomes the rotational speed (set value) input from the controller 101. A drive signal is supplied to the spindle motor 27. The rotation angle detection circuit 83 counts the number of pulses of the pulse train signal output from the encoder 27c, calculates the rotation angle of the spindle motor 27, that is, the rotation angle Θp of the imaging plate 15 using the count value, and sends it to the controller 101. Output. Then, when the rotation angle detection circuit 83 receives the index signal output from the encoder 27c, the rotation angle detection circuit 83 sets the count value to “0”. That is, the position where the index signal is input is the reference position with a rotation angle of 0 degree.

  The table 16 is formed in a circular shape, and is fixed to the tip of the output shaft 27 a of the spindle motor 27. The center axis of the table 16 coincides with the center axis of the output shaft of the spindle motor 27. The table 16 has a protrusion 17 that is provided integrally and protrudes downward from the central portion of the lower surface, and a thread is formed on the outer peripheral surface of the protrusion 17. The central axis of the protrusion 17 coincides with the central axis of the output shaft 27 a of the spindle motor 27. An imaging plate 15 is attached to the lower surface of the table 16. The imaging plate 15 is a circular plastic film whose surface is coated with a phosphor. A through-hole 15a is provided at the center of the imaging plate 15. By passing the protrusion 17 through the through-hole 15a and screwing a nut-shaped fixture 18 on the outer peripheral surface of the protrusion 17, the imaging plate 15 is fixed between the fixture 18 and the table 16. The fixture 18 is a cylindrical member, and a thread corresponding to the thread of the protrusion 17 is formed on the inner peripheral surface.

  The table 16, the projecting portion 17 and the fixture 18 are also provided with through holes 16a, 17a and 18a, respectively. The central axis of the through holes 16a, 17a and 18a is the same as the central axis of the table 16, and the through hole 18a. Is smaller than the through holes 16a and 17a, and is the same as the inner diameter of the passage member 28 described above. Accordingly, the X-ray emitted from the output shaft 27a of the spindle motor 27 passes through the through holes 16a, 17a, and 18a, and the measurement object is positioned below and outside via the circular hole 50c1 provided in the notch wall 50c. It is emitted toward OB. In this case, since the inner diameter of the passage member 28 and the inner diameter of the through hole 18a are small, the X-rays that have entered the through holes 27b, 27a1, 16a, and 17a through the passage member 28 are slightly diffused, but the through hole 18a. X-rays emitted from the light become parallel light parallel to the axis of the through hole 27a1 and are emitted from the circular hole 50c1. The inner diameter of the circular hole 50c1 is large in order to guide the diffracted light from the measurement object OB to the imaging plate 15.

  The imaging plate 15 is driven by the feed motor 22 and moves together with the moving stage 21, the spindle motor 27, and the table 16 from the origin position to the diffraction ring imaging position for imaging the diffraction ring. As described above, the X-ray emitted from the X-ray emitter 10 is irradiated on the measurement object OB on the stage 61 at the diffraction ring imaging position. In addition, the imaging plate 15 is driven by the feed motor 22 while being driven by the spindle motor 27 and rotated, together with the moving stage 21, the spindle motor 27, and the table 16, in the diffraction ring reading region for reading the imaged diffraction ring, And move in the diffractive ring erasing region to erase the diffractive ring. In this case, when the imaging plate 15 is moved, the central axis of the imaging plate 15 is kept within a plane formed by the optical axis of the X-ray emitted from the X-ray emitter 10 and the normal line of the measurement object OB. In a leaned state, it moves in a direction perpendicular to the optical axis of the X-ray.

  The laser detection device 30 detects the intensity of light incident from the imaging plate 15 by irradiating the imaging plate 15 that images the diffraction ring with laser light. The laser detection device 30 is sufficiently separated from the measurement object OB and the imaging plate 15 at the diffraction ring imaging position toward the feed motor 22. That is, when the imaging plate 15 is at the diffraction ring imaging position, the X-ray diffracted by the measurement object OB is not blocked by the laser detection device 30. The laser detection device 30 includes a laser light source 31, a collimating lens 32, a reflecting mirror 33, a dichroic mirror 34, and an objective lens 36.

  The laser light source 31 is controlled by the laser driving circuit 77 to emit laser light that irradiates the imaging plate 15. The laser drive circuit 77 is controlled by the controller 101 and controls and supplies a drive signal so that laser light having a predetermined intensity is emitted from the laser light source 31. The laser drive circuit 77 inputs a light reception signal output from the photodetector 42 described later, and controls a drive signal output to the laser light source 31 so that the intensity of the light reception signal becomes a predetermined intensity. Thereby, the intensity of the laser light applied to the imaging plate 15 is kept constant.

  The collimating lens 32 converts the laser light emitted from the laser light source 31 into parallel light. The reflecting mirror 33 reflects the laser light converted into parallel light by the collimating lens 32 toward the dichroic mirror 34. The dichroic mirror 34 transmits most of the laser light incident from the reflecting mirror 33 (for example, 95%) as it is. The objective lens 36 focuses the laser light incident from the dichroic mirror 34 on the surface of the imaging plate 15. The optical axis of the laser light emitted from the objective lens 36 is within a plane formed by the optical axis of the X-ray emitted from the X-ray emitter 10 and a line in the stage Z direction intersecting the optical axis of the X-ray. The direction parallel to the optical axis of the X-ray, that is, the direction perpendicular to the moving direction of the moving stage 21.

  A focus actuator 37 is assembled to the objective lens 36. The focus actuator 37 is an actuator that moves the objective lens 36 in the optical axis direction of the laser light. The objective lens 36 is located at the center of the movable range when the focus actuator 37 is not energized.

  When the laser beam condensed by the objective lens 36 is irradiated on the surface of the imaging plate 15 where the diffraction ring is imaged, a photo-stimulated luminescence phenomenon occurs. That is, after imaging the diffraction ring, when the imaging plate 15 is irradiated with laser light, the phosphor of the imaging plate 15 is light corresponding to the intensity of the diffracted X-ray and has a wavelength shorter than the wavelength of the laser light. To emit. The reflected light of the laser beam irradiated on the imaging plate 15 and the light emitted from the phosphor pass through the objective lens 36, and most of the reflected light of the laser beam passes through the dichroic mirror 34, and the phosphor. Most of the light emitted from is reflected by the dichroic mirror 34. In the reflection direction of the dichroic mirror 34, a condenser lens 38, a cylindrical lens 39, and a photodetector 40 are provided. The condensing lens 38 condenses the light incident from the dichroic mirror 34 on the cylindrical lens 39. The cylindrical lens 39 causes astigmatism in the transmitted light. The photodetector 40 is composed of four divided light receiving elements composed of four light receiving elements having the same square shape divided by dividing lines, and the light incident on the light receiving areas A, B, C, and D arranged in the clockwise direction. A detection signal having a magnitude proportional to the intensity is output to the amplifier circuit 88 as a light reception signal (a, b, c, d).

  The amplifying circuit 88 amplifies the light reception signals (a, b, c, d) output from the photodetector 40 with the same amplification factor to generate light reception signals (a ′, b ′, c ′, d ′), The data is output to the focus error signal generation circuit 91 and the SUM signal generation circuit 89. In this embodiment, focus servo control based on the astigmatism method is used. The focus error signal generation circuit 91 generates a focus error signal by calculation using the amplified light reception signals (a ′, b ′, c ′, d ′). That is, the focus error signal generation circuit 79 calculates (a ′ + c ′) − (b ′ + d ′) and outputs the calculation result to the focus servo circuit 92 as a focus error signal. The focus error signal (a ′ + c ′) − (b ′ + d ′) represents the amount of deviation of the focal position of the laser beam from the surface of the imaging plate 15.

  The focus servo circuit 92 is controlled by the controller 101, generates a focus servo signal based on the focus error signal, and outputs the focus servo signal to the drive circuit 93. The drive circuit 93 drives the focus actuator 37 in accordance with the focus servo signal to displace the objective lens 36 in the optical axis direction of the laser light. In this case, the focus servo signal is generated so that the value of the focus error signal (a ′ + c ′) − (b ′ + d ′) is always a constant value (for example, zero), so that the laser is applied to the surface of the imaging plate 15. The light can be continuously collected.

  The SUM signal generation circuit 89 generates the SUM signal (a ′ + b ′ + c ′ + d ′) by adding the received light signals (a ′, b ′, c ′, d ′), and outputs it to the A / D conversion circuit 90. To do. The intensity of the SUM signal corresponds to the intensity of the laser light reflected by the imaging plate 15 and the intensity of the light generated by the stimulated light emission, but the intensity of the laser light reflected by the imaging plate 15 is substantially constant. Therefore, the intensity of the SUM signal corresponds to the intensity of light generated by the stimulated light emission. That is, the intensity of the SUM signal corresponds to the intensity of the diffracted X-ray incident on the imaging plate 15. The A / D conversion circuit 90 is controlled by the controller 101, receives the SUM signal from the SUM signal generation circuit 89, converts the instantaneous value of the input SUM signal into digital data, and outputs the digital data to the controller 101.

  Further, the laser detection device 30 includes a condenser lens 41 and a photodetector 42. The condenser lens 41 is a part of the laser light emitted from the laser light source 31, and condenses the laser light reflected without passing through the dichroic mirror 34 on the light receiving surface of the photodetector 42. The photodetector 42 is a light receiving element that outputs a light receiving signal corresponding to the intensity of light collected on the light receiving surface. Accordingly, the photodetector 42 outputs a light reception signal corresponding to the intensity of the laser light emitted from the laser light source 31 to the laser driving circuit 87.

  Further, an LED light source 43 is provided adjacent to the objective lens 36. The LED light source 43 is controlled by the LED drive circuit 84 to emit visible light and erase the diffraction ring imaged on the imaging plate 15. The LED drive circuit 84 is controlled by the controller 101 and supplies a drive signal for generating visible light having a predetermined intensity to the LED light source 43.

  The computer device 100 includes a controller 101, an input device 102, and a display device 103. The controller 101 is an electronic control unit mainly including a microcomputer having a CPU, ROM, RAM, a large capacity storage device, etc. 1. The operation of the three-dimensional shape measuring device 2 and the moving device 70 is controlled. In addition, it processes data input from the X-ray diffraction measurement apparatus 1 and the three-dimensional shape measurement apparatus 2 and outputs an image signal to the display apparatus 103 described later. The input device 102 is connected to the controller 101 and is used by an operator for inputting various parameters, work instructions, and the like. The display device 103 visually notifies the operator of various setting situations, operating situations, measurement results, and the like.

When the controller 101 is instructed to start the shape measurement by the input device 102 and the data is input from the three-dimensional shape measuring device 2, the point cloud data is calculated. A program for creating three-dimensional shape image data of the measurement object OB and outputting it to the display device 103 is installed. In addition, when an arbitrary point on the displayed three-dimensional shape image is designated by the input from the input device 102 to the controller 101 and the designated point is determined as an X-ray irradiation point, the following (A) to (C) ) A program for calculating and displaying is installed.
(A) The shape of the diffraction ring formed on the imaging plate when the determined point is irradiated with X-rays.
(B) X-ray incident angle when the determined point is irradiated with X-rays.
(C) The amount of movement in the stage X direction, the stage Y direction, and the stage Z direction so that the determined point is irradiated with X-rays and the distance from the X-ray irradiation point to the imaging plate 15 becomes a set value.
Further, when the controller 101 is designated by the input from the input device 102 with the tilt direction and the tilt amount (the tilt amount with a sign) of the stage 61 (the tilt amount with the sign), the above (A) to (A) to FIG. A program for calculating and displaying (C) is also installed. In addition, the controller 101 receives X-rays emitted from the X-ray emitter 10 through the table 20 in the X-ray diffraction measurement device 1 through the through-holes 27b, 27a1, 16a, 17a, and 18a. X-rays are emitted for a set time after being set to the position where the light is emitted from the emission port 51C, the shape of the diffraction ring formed on the imaging plate 15 is read by the laser detection device 30, and the shape of the read diffraction ring is determined. A program for calculating residual stress is also installed. The details of the control and data processing executed by these programs will be described later in the operations performed by the operator for measuring the residual stress of the measurement object OB in the X-ray diffraction measurement system configured as described above. It explains along. Before that, after adjusting the position of the X-ray diffraction measurement apparatus 1 with respect to the stage 61 by the arm type moving device to which the X-ray diffraction measurement apparatus 1 is connected, the controller 101 previously stores the above (A) to (C). Since various values and expressions need to be stored as values used when calculating the shape of the diffraction ring, the incident angle of X-rays, and the amount of movement of the stage 61, those values and expressions are obtained. A method will be described.

The controller 101 stores the following values (1) to (4) and expressions in the coordinate system D of the three-dimensional shape measuring apparatus 2. These are shown visually in FIG. Since the values of (3) and (4) are constant as long as the positional relationship between the X-ray diffraction measurement device 1 and the three-dimensional shape measurement device 2 does not change, the position of the X-ray diffraction measurement device 1 is adjusted. You don't have to do it every time.
(1) Components of unit vectors Vx, Vy, Vz in the three movement directions of the stage 61.
(2) When the movement position of the stage 61 is at a set position (for example, the drive limit position, that is, the position of the movement position 0), the rotation axes Rx and Ry in the inclination around the X axis and the inclination around the Y axis of the stage 61 A linear expression to represent.
(3) A linear expression representing the optical axis Xa of X-rays.
(4) Coordinate values of the point Xi where the surface of the imaging plate 15 and the optical axis of the X-ray intersect.
Hereinafter, a method of obtaining the values and expressions of (1) to (4) using the three-dimensional shape measuring apparatus 2, the X-ray diffraction measuring apparatus 1, the moving apparatus 70, and the tilting apparatus 60 will be described.

(1) Components of unit vectors Vx, Vy, Vz in the three movement directions of the stage 61.
A reference object capable of defining a fixed point (for example, a sphere) is placed on the stage 61 so as not to move, the stage 61 is moved in the direction of the stage X by the moving device 70, and the shape can be measured by the three-dimensional shape measuring device 2. To do. Then, a measurement command is input from the input device 102 and shape measurement is performed by the three-dimensional shape measurement device 2. The controller 101 performs data processing using data input from the three-dimensional shape measuring apparatus 2 to calculate point cloud data. This point cloud data includes the point cloud data of the stage 61 in addition to the point cloud data of the reference object. And the point cloud data of the object around it, so only the point cloud data of the reference object is extracted from this point cloud data, and the fixed point coordinates defined in the reference object (if it is a sphere) Calculate the coordinate value of the center of the sphere. A data processing method for extracting only the point cloud data of the reference object from the point cloud data is an existing technology, and is described in, for example, Japanese Patent No. 3951467. Next, in response to an input from the input device 102, the stage 61 is moved in the direction of the stage X within a range where the shape can be measured by the three-dimensional shape measuring device 2, and the shape is measured by the three-dimensional shape measuring device 2 in the same manner as described above. Then, the controller 101 processes the point cloud data to calculate the coordinate values of fixed point coordinates (in the case of a sphere, the center of the sphere) defined in the reference object. As a result, two fixed point coordinates are obtained. Therefore, a vector component in a direction connecting the two fixed point coordinates is calculated, and the vector component is divided by the magnitude of the vector to calculate the component of the unit vector Vx. As shown in FIG. 4, the unit vector Vx has a positive direction from the three-dimensional shape measuring apparatus 2 to the X-ray diffraction measuring apparatus 1 (ie, the stage X direction). Next, similarly, the reference object is moved in the stage Y direction by the moving device 70 within the range in which the shape can be measured by the three-dimensional shape measuring device 2, and the shape is measured by the three-dimensional shape measuring device 2 at two different points in the stage Y direction. Measurement is performed, the point cloud data is processed to obtain two fixed point coordinates, and the component of the unit vector Vy is calculated from the two fixed point coordinates. The direction of the unit vector Vy is positive in the forward direction of the X-ray diffraction measurement apparatus 1 (ie, the stage Y direction) as shown in FIG. Similarly, the reference object is moved in the direction of the stage Z by the moving device 70 within the range in which the shape can be measured by the three-dimensional shape measuring apparatus 2, and the shape is measured by the three-dimensional shape measuring apparatus 2 at two different points in the stage Z direction. The point cloud data is processed to obtain two fixed point coordinates, and the component of the unit vector Vz is calculated from the two fixed point coordinates. The direction of the unit vector Vz is positive in the direction in which the stage 61 rises (that is, the stage Z direction) as shown in FIG. Thereby, the components of the unit vectors Vx, Vy, Vz are obtained.

(2) A linear expression representing the rotation axes Rx and Ry of the tilt around the X axis and the tilt around the Y axis of the stage 61 when the moving position of the stage 61 is at the set position.
A reference object capable of defining a fixed point (for example, a sphere) is placed on the stage 61 so as not to move, and the stage 61 is moved to preset movement positions Xstd, Ystd, Zstd by the moving device 70. If shape measurement by the three-dimensional shape measuring apparatus 2 is possible, it is preferable to set the movement position to a drive limit position where Xstd = 0, Ystd = 0, and Zstd = 0 because the calculation described later becomes simple. Next, as in the case of obtaining the components of the unit vectors Vx, Vy, and Vz in (1) above, shape measurement is performed by the three-dimensional shape measurement apparatus 2, and point cloud data is processed to obtain fixed point coordinates. Next, the tilt around the X axis of the stage 61 is changed by the tilting device 60, the shape is measured by the three-dimensional shape measuring device 2 in the same manner, the point cloud data is processed to obtain the fixed point coordinates, and the tilting device 60 The fixed point coordinates are similarly obtained by changing the inclination of the stage 61 around the X axis. That is, the fixed point coordinates when the inclination around the X axis is at three inclination angles are obtained. The three inclination angles may be, for example, the maximum inclination angle in the negative direction, the inclination angle near 0, and the maximum inclination angle in the positive direction. Next, calculation is performed in the following order from the three fixed point coordinates obtained, and a linear expression representing the rotation axis Rx is calculated.
By substituting the three fixed point coordinates into the plane equation a · X + b · Y + c · Z + d = 0 and solving the simultaneous equations, the plane equation a1 · X + b1 · Y + c1 · Z + d1 = 0 is obtained including the three coordinates.
・ Of the three fixed point coordinates, subtract the two fixed point coordinate values to calculate the vector component in the direction connecting the two fixed point coordinates, add the two fixed point coordinate values, and divide by two. Calculate the coordinate value of the midpoint of the fixed point coordinates. Then, this vector is a normal vector, and a plane expression a2 · X + b2 · Y + c2 · Z + d2 = 0 is obtained.
A3 · X + b3 · Y + c3 · Z + d3 = 0 is obtained by the same calculation from the fixed point coordinate not selected earlier and the other fixed point coordinate value among the three fixed point coordinates. • Three plane formulas a1 · X + b1 · Y + c1 · Z + d1
By solving the simultaneous equations of 0, a2 · X + b2 · Y + c2 · Z + d2 = 0, and a3 · X + b3 · Y + c3 · Z + d3 = 0, the center coordinate value (xc, yc) of the circle having three fixed point coordinates on the circumference , Zc). The linear equation representing the rotation axis Rx is (X−xc) / a1 = (Y−yc) / b1 = (Z−zc) / c1. In order to distinguish from a linear expression representing the rotation axis Ry described later, the linear expression representing the rotation axis Rx is (X−xcx) / ax = (Y−ycx) / bx = (Z−zcx) / cx. .

  Next, the inclination of the stage 61 around the Y axis is changed, and the shape is measured by the three-dimensional shape measuring apparatus 2 as in the case of the inclination around the X axis, and the point cloud data is processed to obtain three fixed point coordinates. . Next, calculation is performed in the same procedure as the case where the linear expression representing the rotation axis Rx is calculated from the three fixed point coordinates obtained, and the linear expression representing the rotation axis Ry is calculated. A linear expression representing the rotation axis Ry is (X−xcy) / ay = (Y−ycy) / by = (Z−zcy) / cy.

(3) A linear formula Xa representing the optical axis of the X-ray.
The notch wall 50c of the case 50 of the X-ray diffraction measurement apparatus 1 is removed, the fixture 18 for attaching the imaging plate 15 to the table 16 is removed, and the X-ray emitted from the X-ray emitter 10 passes therethrough. A rod 111 having an outer diameter substantially the same as that of the through hole 27a1 is inserted into the hole 27a1. The rod 111 has a pointed tip, and a liquid (for example, ink) for coloring a thing in contact with the tip. Next, when the stage 61 is moved in the direction of the stage X by the moving device 70 and the rod 111 is moved in the X-ray irradiation direction, the tip is brought into a position where it hits the central portion of the stage 61. Then, as shown in FIG. 5, a plate-like metal (iron is best) 110 capable of forming a diffraction ring by X-ray irradiation is placed on the stage 61, and the tip of the rod 111 is brought into contact with the plate-like metal. Mark 110. Next, as shown in FIG. 6, a tip 115 of an object that can be bonded to the tip 115 with an object through which a pin 112 is passed is attached to the center of the two spheres 113 and 114, as shown in FIG. 6. After detecting the moving position in the stage X direction in this state, the stage 61 is moved in the stage X direction to a position where the shape can be measured by the three-dimensional shape measuring apparatus 2, and the moving position in the stage X direction is detected again and moved. A movement distance Lx in the X direction is calculated by subtracting from the previous movement position. Next, shape measurement is performed by the three-dimensional shape measurement apparatus 2, and calculation is performed in the following order from the point cloud data input to the controller 101 and calculated to obtain the coordinate value of one point on the optical axis of the X-ray.
-Only the point cloud data of the sphere 113 is extracted, and the center coordinates of the sphere 113 are calculated from the extracted point cloud data. The diameter values of the spheres 113 and 114 are stored in advance, and the point cloud data of the sphere 113 is extracted from the limitation of the sphere and the limitation of the diameter value of the sphere 113. As described above, this technique is described in detail in Japanese Patent No. 3952467.
Similarly, only the point cloud data of the sphere 114 is extracted, and the center coordinates of the sphere 114 are calculated from the extracted point cloud data.
A unit vector component from the center of the sphere 113 to the center of the sphere 114 is obtained by subtracting the center coordinate value of the sphere 114 from the center coordinate value of the sphere 113 and dividing by the distance between the sphere 113 and the sphere 114. Multiply the distance from the center of the sphere 113 (or sphere 114) stored in advance in the vector component to the tip 115 and add it to the center coordinates of the sphere 113 (or sphere 114) to obtain the position of the tip 115 (on the metal 110). The coordinate value of the marked position and the position where the emitted X-ray hits the metal 110 is obtained.
A vector component obtained by multiplying the component of the unit vector Vx obtained in 1) by the movement distance Lx is added to the obtained coordinate value. The obtained coordinate value is the coordinate value of one point on the optical axis of the X-ray.

In the embodiment, the coordinates of the position of the tip 115 from the center coordinates of the sphere 113 and the sphere 114 obtained from the point cloud data and the distance from the center of the sphere 113 (or the sphere 114) stored in advance to the tip 115. Although the value is obtained, the coordinate value of the position of the tip 115 can be obtained by performing another process from the point cloud data. This processing is the same as the processing until the center coordinates of the sphere 113 and the sphere 114 are obtained, but the following processing is performed thereafter.
A coordinate value that is separated from the center of the sphere 113 by the same distance as the size of the line segment in the direction of the line segment connecting the centers of the sphere 113 and the sphere 114 is obtained, and a point within the sphere having a set radius centered on this coordinate value Extract group data.
・ Calculate a plane equation from the extracted point cloud data by the least square method, extract point cloud data within the set distance from the calculated plane, and use the extracted point cloud data to obtain a plane again by the least square method Calculate the equation. This is performed until the point cloud data to be extracted does not change.
An equation of a straight line passing through the centers of the sphere 113 and the sphere 114 is obtained, and a coordinate value where the straight line intersects the plane is obtained by solving simultaneous equations with the plane equation created from the extracted point cloud data. The obtained coordinate value is the coordinate value of one point on the optical axis of the X-ray.

  Next, the stage 61 is moved in the direction of the stage Z (upward in FIG. 5) by the moving device 70, and the tip of the bar 111 is brought into contact with the flat metal 110 in the same manner as described above to mark the mark. The tip end 115 of the object including the sphere 113 and the sphere 114 shown in FIG. 6 is attached, and the stage 61 is moved in the stage X direction to a position where the shape can be measured by the three-dimensional shape measuring apparatus 2. Then, the shape is measured by the three-dimensional shape measuring apparatus 2 in the same manner as described above, and the point cloud data is processed by the controller 101 to obtain the coordinate value of another point on the optical axis of the X-ray. As a result, coordinate values of two points on the optical axis of the X-ray are obtained, and from this, (X−xr) / ar = (Y−yr) / br = (Z−) is expressed as a linear expression representing the optical axis Xa of the X-ray. zr) / cr is calculated. In order to obtain a coordinate value Xi of a point where the surface of the imaging plate 15 and an optical axis of the X-ray intersect later, the stage 61 is moved in the direction of the stage Z, and then the height position of the stage 61 and the stage 61 are mounted. The position of the placed flat metal 110 is fixed.

(4) Coordinate values of the point Xi where the surface of the imaging plate 15 and the optical axis of the X-ray intersect.
The imaging plate 15 is attached to the table 16 of the X-ray diffractometer 1 and fixed with the fixture 18, and the case 50 of the X-ray diffractometer 1 removed when obtaining the linear expression representing the optical axis Xa of the X-ray. The notch wall 50c is attached. Then, the stage 61 is returned to the position before the stage 61 is moved in the direction of the stage X (the position where the metal 110 is marked with the tip of the rod 111), and iron powder is applied to the metal 110. This is because when X-rays are irradiated with iron having no residual stress, diffracted X-rays are generated at a theoretical diffraction angle. Next, in response to an input of a measurement start command from the input device 102, X-rays are emitted from the X-ray emitter to form a diffraction ring on the imaging plate 15, and the formed diffraction ring is read by laser irradiation from the optical head. At this time, the program executed by the controller 101 is as described in Patent Document 1 of the background art, and will be described in the residual stress measurement of the measurement object OB described later. The read diffraction ring is substantially circular because the residual stress is zero. A radius value of the diffraction ring is obtained, and a distance from the X-ray irradiation point to the imaging plate 15 is obtained from the radius value and a theoretical value of a diffraction angle in iron having no residual stress. Then, it is obtained by subtracting the first coordinate value from the second coordinate value in the two coordinate values obtained when obtaining the linear expression Xa representing the optical axis of the X-ray and dividing by the distance between the two coordinate values. A vector component is obtained by multiplying this unit vector component by this distance, and this vector component is added to the second coordinate value. The obtained coordinate value is the coordinate value of the point Xi where the surface of the imaging plate 15 and the X-ray optical axis Xa intersect.

As described above, when the values (1) to (4) are obtained or changed, the controller 101 calculates and stores three coordinate transformation coefficients. The method of calculating these coordinate conversion coefficients will be described in the following (5) to (7).
(5) The coordinate values of the coordinate system D of the three-dimensional shape measuring apparatus 2 are the same as the X axis, the Y axis, and the Z axis. Coordinate conversion coefficient Mds for converting into coordinate values of coordinate system S.
The coordinate transformation coefficient Mds is a 3 × 3 determinant. When the components of this determinant are g11 to g33, the coordinate transformation equation is as follows. Substituting (1, 0, 0) into (x ′, y ′, z ′) of the following formula 1, and (x, y, z)
Substituting the component of the unit vector Vx into (x ′, y ′, z ′) and substituting (0, 1, 0) into (x, y, z)
Substituting the component of the unit vector Vy into (x ′, y ′, z ′) and substituting (0, 0, 1) into (x, y, z)
An expression is created by substituting the component of the unit vector Vy into.
When each determinant is expanded and the components of the same determinant are collected, the simultaneous equations of three expressions having g11, g12, and g13 as unknowns, and the simultaneous equations of three expressions having g21, g22, and g23 as unknowns. , G31, g32, and g33 are created as three simultaneous equations. By solving the simultaneous equations, the determinants g11 to g33 can be obtained as the coordinate conversion coefficient Mds.

(6) A coordinate conversion coefficient Mdi for converting the coordinate value by the coordinate system D of the three-dimensional shape measuring apparatus 2 into the coordinate value of the coordinate system I having the following coordinate axes while leaving the origin of the coordinate system as it is.
-The Z direction is parallel to the X-ray optical axis and is opposite to the X-ray irradiation direction-The X direction is the direction in which the stage X direction is projected onto the plane of the imaging plate 15-The Y direction is the Z axis direction, the X axis direction The coordinate conversion coefficient Mdi is also a 3 × 3 determinant, and the components of the determinant are g11 to g33. In order to obtain the components g11 to g33 of this determinant, vector components in the coordinate system D of the unit vectors Vxi, Vyi, Vzi in the X direction, Y direction, and Z direction of the coordinate system I are obtained. The component of the unit vector Vzi by the coordinate system D is obtained by dividing a vector (ar, br, cr) parallel to the optical axis Xa of the X-ray by the vector size. ar, br, cr are linear coefficients (X-xr) / ar = (Y-yr) / br = (Z-zr) / cr representing the optical axis Xa of X-rays obtained in (3) above. is there. Note that at this time, the direction of the vector is opposite to the X-ray irradiation direction. The component of the unit vector Vyi by the coordinate system D is obtained by dividing the vector component obtained by the outer product of the unit vector Vzi and the unit vector Vx by the magnitude of the vector. The outer product is such that the direction of the unit vector Vyi is the forward direction of the X-ray diffraction apparatus 1 by setting the unit vector Vzi to the front side. The component of the unit vector Vxi by the coordinate system D is obtained by the outer product of the unit vector Vyi and the unit vector Vzi. The outer product is set so that the direction of the unit vector Vxi is substantially the same as the direction of the stage X by leading the unit vector Vyi. Then, (1, 0, 0) is substituted into (x ′, y ′, z ′) of the above formula 1, and (x, y, z)
Substituting the component of the unit vector Vxi for (x ', y', z '), substituting (0, 1, 0) for (x, y, z) and substituting the component of the unit vector Vyi for (x, y, z) An equation and an equation in which (0, 0, 1) is substituted into (x ′, y ′, z ′) and a component of the unit vector Vyi is substituted into (x, y, z) are created, and the coordinate conversion coefficient Mds The coordinate conversion coefficient Mdi is obtained by the same calculation method as that for obtaining.

(7) A coordinate conversion coefficient Msi for converting the coordinate value by the coordinate system S to the coordinate value of the coordinate system I.
This coordinate conversion coefficient Msi is also a 3 × 3 determinant, and can be obtained by the following equation 2 from the coordinate conversion coefficient Mds and the coordinate conversion coefficient Mdi obtained above.
(Equation 2)
Msi = Mdi · Mds ⁻¹

Further, when the controller 101 calculates the coordinate conversion coefficients (5) to (7), the controller 101 calculates and stores the following values (8) to (10).
(8) The coordinate value of the X-ray irradiation point Xm whose distance from the surface of the imaging plate 15 by the coordinate system S is the set value Ls. (9) The origin of the coordinate system D by the coordinate system S around the X axis of the stage 61. Amount of movement in the Y and Z directions for inclusion in the rotation axis Rx at the tilt (10) X, for including the origin of the coordinate system D by the coordinate system S in the rotation axis Ry at the tilt around the Y axis of the stage 61 Amount of movement in the Z direction Hereinafter, a method of calculating these (8) to (10) values will be described.

(8) The coordinate value of the X-ray irradiation point Xm whose distance from the surface of the imaging plate 15 by the coordinate system S is the set value Ls. The surface of the imaging plate 15 obtained in (4) above intersects with the X-ray optical axis. The vector component obtained by multiplying the coordinate value of the point Xi to be multiplied by the set value Ls by the unit vector component parallel to the linear expression representing the optical axis Xa of the X-ray obtained in (3) and the direction being the X-ray irradiation direction. Is added. Since the obtained coordinate value is the coordinate value of the irradiation point Xm of the X-ray by the coordinate system D, the coordinate value is converted by the coordinate conversion coefficient Mds obtained in the above (5) to convert the X-ray by the coordinate system S. The coordinate value of the irradiation point Xm.

(9) Amount of movement in the Y and Z directions so that the origin of the coordinate system D by the coordinate system S is included in the rotation axis Rx in the tilt around the X axis of the stage 61. Rotation with a plane perpendicular to the rotation axis Rx and including the origin The coordinate value of the intersection point of the axis Rx is composed of a plane equation ax · X + bx · Y + cx · Z = 0 and a linear equation (X−xcx) / ax = (Y−ycx) / bx = (Z−zcx) / cx. Obtained by solving simultaneous equations. Since the obtained coordinate value is a coordinate value by the coordinate system D, the coordinate value by the coordinate system S is obtained by performing coordinate conversion by the coordinate conversion coefficient Mds. Since the direction of the rotation axis Rx is substantially the same as the direction of the stage X, the obtained X coordinate value is close to zero. The Y coordinate value and the Z coordinate value are the amounts of movement in the Y and Z directions. These values are assumed to be Yfst and Zfst1.

(10) Amount of movement in the X and Z directions to include the origin of the coordinate system D by the coordinate system S in the rotation axis Ry in the inclination around the Y axis of the stage 61. Rotation with a plane perpendicular to the rotation axis Ry and including the origin The coordinate value of the intersection point of the axis Ry is expressed as a system consisting of a planar expression ay.X + by.Y + cy.Z = 0 and a linear expression (X-xcy) / ay = (Y-ycy) / by = (Z-zcy) / cy. Obtained by solving the equation. Since the obtained coordinate value is a coordinate value by the coordinate system D, the coordinate value by the coordinate system S is obtained by performing coordinate conversion by the coordinate conversion coefficient Mds. Since the direction of the rotation axis Ry is substantially the same as the stage Y direction, the Y coordinate value obtained is close to zero. Then, the X coordinate value and the Z coordinate value become the amount of movement in the X and Z directions. Let these values be Xfst and Zfst2.

  As described above, various values and expressions are used as values used when calculating the shape of the diffraction ring, the X-ray incident angle, and the amount of movement of the stage 61 shown in the above (A) to (C) in the controller 101. When stored, the measurement object OB can be measured. Hereinafter, a program executed by the controller 101 will be described together with an operation performed by the operator for measuring the residual stress of the measurement object OB.

  The operator performs input from the input device 102, screen confirmation of the display device 103, and manual operation of the tilting device 60 and the moving device 70 according to the process diagram shown in FIG. 10. The operator first sets the measurement object OB on the stage 61 after setting the inclination amount to 0 while observing the scale shown on the inclination apparatus 60 in S10, and the material of the measurement object OB from the input device 102. Enter (for example, iron). Next, in S <b> 11, the operator moves the stage 61 to a position at which the shape of the measurement object OB can be measured by the three-dimensional shape measurement device 2 in accordance with an input from the input device 102. This state is shown in FIG. What is input from the input device 102 may be a movement amount (movement position) or a movement direction command and a stop command. Next, in S12, the operator inputs a three-dimensional shape measurement start command from the input device 102. As a result, the three-dimensional shape measuring apparatus 2 is activated, and the original data of the three-dimensional shape is input from the three-dimensional shape measuring apparatus 2 to the controller 101, and point group data and three-dimensional shape image data are processed by the controller 101. Is created, and a three-dimensional shape image of the measurement object OB is displayed on the display device 103. Next, in step S <b> 13, the operator determines an X-ray irradiation point on the three-dimensional shape image displayed on the display device 103 by an input from the input device 102.

When the X-ray irradiation point is determined, the controller 101 calculates the shape of the diffraction ring, the incident angle of the X-ray, and the amount of movement of the stage 61 shown in (A) to (C) above. Hereinafter, this data processing method will be described.
(A) The shape of the diffraction ring formed on the imaging plate when the determined point is irradiated with X-rays.
The controller 101 performs data processing in the following order [1] to [9].
[1] The point cloud data is coordinate-transformed by a pre-stored coordinate transformation coefficient Mdi to obtain point cloud data (xi, yi, zi) by the coordinate system I. [2] The point specified as the X-ray irradiation point The coordinate value (xp, yp, zp) is coordinate-transformed by the coordinate transformation coefficient Mdi to obtain the coordinate value (xpi, ypi, zpi) by the coordinate system I.
[3] The coordinate value (xpi, ypi, zpi) is subtracted from the coordinate value of the point group data by the coordinate system I to obtain new point group data (xi ′, yi ′, zi ′). This point group data is the point group data of the coordinate system I ′ with the coordinate value (xpi, ypi, zpi) in the coordinate system I as the coordinate origin.
[4] An angle Θn for rotating the coordinate system I ′ around the Z axis is set to 0 °.
[5] From the point cloud data (xi ′, yi ′, zi ′), those whose absolute value of the Y coordinate value is the minute value A or less and whose X coordinate value is positive are extracted, and tan ⁻¹ (xi ′ / zi ′) is calculated to extract the maximum value.
[6] It is determined whether or not the maximum value of tan ⁻¹ (xi ′ / zi ′) is equal to or greater than (90 ° −theoretical diffraction angle). = 1 and stored in correspondence with the value of the rotation angle Θn. If the object to be measured OB is iron, the theoretical diffraction angle can be obtained by substituting the interatomic distance of iron and the wavelength of X-rays into the black conditional expression.
[7] Add Θs to the rotation angle Θn to obtain a new Θn, and perform coordinate transformation of the point cloud data (xi ′, yi ′, zi ′) by the following equation (3). Θs has a value of about 2 to 5 °, for example.
[8] The processing of [5] to [7] is repeatedly performed on the point cloud data (xi ″, yi ″, zi ″). When performing the processing of [7], the rotation angle Θn exceeds 360 °. Then, the process [7] is not executed, and the next process [9] is performed.
[9] Display dots on the circumference of the display device 103 such that dots are displayed at locations where the rotation angle Θn is Ex = 1 and dots are not displayed at locations where Ex = 0. The displayed image of the circumference is the shape of the diffraction ring formed on the imaging plate. The image of the circumference may be an image in which dots are connected by a line.

  When the above data processing is shown visually, as shown in FIG. 8, the object to be measured is between the position where the diffracted X-rays are generated (X-ray irradiation position) and the position where the diffraction ring is formed on the imaging plate 15 as shown in FIG. This is a process for determining whether or not the object OB exists and the diffracted X-rays are blocked in each direction of generation of the diffracted X-rays. More specifically, a plane including the optical axis Xa of the X-ray is rotated around the optical axis Xa of the X-ray, and the diffraction of the imaging plate 15 from the generation point of the diffracted X-rays (X-ray irradiation point) in each plane. This is a process of determining whether or not a point group that is a plurality of points on the surface of the measurement object OB exists on the optical axis Xa side of the X-ray with respect to the line connecting the ring formation locations. It is assumed that a diffractive ring is not formed when it exists, and a diffractive ring is formed when it does not exist.

(B) X-ray incident angle when the determined point is irradiated with X-rays.
Within the range in which the distance from the origin (0, 0, 0) is set from the point cloud data (xi ', yi', zi ') obtained by the data processing of [3] above in the coordinate system I'. To extract point cloud data. This is a process of visually extracting a point group in a sphere having a set radius value centered on a point designated as an X-ray irradiation point. Next, a plane expression am · X + bm · Y + cm · Z + dm = 0 is calculated from the extracted point group data by the least square method. This is a process for visually obtaining a plane having the smallest total distance from the extracted point group. Then, the angle formed by the vector (am, bm, cm) and the vector (0, 0, 1) is obtained from the inner product equation. Since the direction of the vector (am, bm, cm) may be opposite to the direction toward the imaging plate 15, 90 ° is subtracted when the obtained angle exceeds 90 °. The obtained angle is an incident angle of the X-ray to the specified point.

(C) The amount of movement in the stage X direction, the stage Y direction, and the stage Z direction so that the determined point is irradiated with X-rays and the distance from the X-ray irradiation point to the imaging plate 15 becomes a set value.
The coordinate value (xp, yp, zp) of the point designated as the X-ray irradiation point is coordinate-transformed by the coordinate transformation coefficient Mds to obtain the coordinate value (xps, yps, zps) by the coordinate system S. Then, the coordinate value (xps, yps, zps) is subtracted from the coordinate value (see (8) above) of the X-ray irradiation point Xm stored in advance to obtain a vector component (xfs, yfs, zfs). xfs is a movement amount in the stage X direction, yfs is a movement amount in the stage Y direction, and zfs is a movement amount in the stage Z direction. It should be noted that these movement amounts are added to the movement position (movement amount from the origin) of the stage 61 at this time to obtain the movement positions (movement amounts from the origin) in the stage X direction, the stage Y direction, and the stage Z direction. Good. In this case, since the moving positions in the stage Y direction and the stage Z direction are visually read, the operator is instructed to input on the display device 103.

  When the shape of the diffraction ring, the X-ray incident angle, and the amount of movement of the stage 61 shown in (A) to (C) above are calculated by the controller 101 and displayed on the display device 103, the operator diffracts in S14. Check the shape of the ring. If there is no chip in the diffraction ring, S15 is “Yes” and S18 is “No”, so that the process proceeds to S20, and the moving device 70 is operated as will be described later to display the stage X direction displayed on the display device 103 The stage 61 is moved by the amount of movement in the stage Y direction and the stage Z direction. If the diffraction ring is chipped, the current stage Y direction movement amount Yst and stage Z direction movement amount Zst are input from the input device 102 in S16, and then the stage 61 is virtually moved in S17. The amount of tilt around the two rotation axes Rx and Ry when tilted by the tilting device 60 (value indicated by the sign of the tilting direction) is input, and the missing diffraction ring displayed on the display device 103 in S14. Check. Then, S14 and S17 are repeated until there is no chipping in the diffraction ring or until there are as few chippings as possible. At this time, the controller 101 displays the tilt amount input to the display device 103 every time the tilt amount is input, and also the shape of the diffraction ring, the X-ray incident angle, and the stage 61 shown in (A) to (C) above. Is calculated again and displayed on the display device 103. A data processing method executed by the controller 101 will be described below.

(A ′) The shape of the diffraction ring formed on the imaging plate when the determined point is irradiated with X-rays.
The controller 101 performs data processing in the following order [1] to [11].
[1] The stage X-direction movement amount Xst of the current stage 61 is input from the movement amount detection circuit 33, and the stage X-direction movement amount Xstd stored in advance (movement when obtaining a linear expression representing the rotation axes Rx, Ry) The position, see (2) above) is subtracted to obtain the difference movement amount Xde. Similarly, the stage X direction movement amount Ystd stored in advance is subtracted from the stage Y direction movement amount Yst input by the operator from the input device 102 to obtain a difference movement amount Yde, and the stage Z direction movement amount input by the operator. The stage Z direction movement amount Zstd stored in advance is subtracted from Zst to obtain a difference movement amount Zde. If the stage X-direction movement amount Xstd, the stage Y-direction movement amount Ystd, and the stage Z-direction movement amount Zstd are all 0 (a linear expression representing the rotation axes Rx and Ry is obtained at the drive limit position of the moving device 70). Xst = Xde, Yst = Yde, Zst = Zde.
[2] The point cloud data is subjected to coordinate transformation using a pre-stored coordinate transformation coefficient Mds to obtain point cloud data (xs, ys, zs) based on the coordinate system S.
[3] From the Y coordinate value of the point group data (xs, ys, zs), the movement amount Yfst in the Y direction for including the origin of the coordinate system D by the coordinate system S stored in advance in the rotation axis Rx, Then, the difference movement amount Yde obtained in [1] of this data processing is subtracted, and the movement amount Zfst1 in the Z direction for including the origin of the coordinate system D by the coordinate system S in the rotation axis Rx from the Z coordinate value, The difference movement amount Zde obtained in [1] is subtracted. That is, the point group data (xs, ys, zs) is changed to point group data (xs, ys-Yfst-Yde, zs-Zfst1-Zde).
[4] The point cloud data obtained by the subtraction is subjected to coordinate transformation by the following equation 4 using the inclination amount Θx around the rotation axis Rx input from the input device 102 by the operator.
In this case, the tilt amount Θx around the rotation axis Rx is positive in the left direction when viewed in the stage X direction (X direction of the coordinate system S).
[5] If the coordinate-converted point group data is (xsa, ysa, zsa), the Y-direction movement amount Yfst and the difference movement amount Yde subtracted in [3] of this data processing are added to this Y-coordinate value. Addition is made, and the movement amount Zfst1 in the Z direction and the difference movement amount Zde subtracted in [3] of this data processing are added to the Z coordinate value. That is, the point group data (xsa, ysa, zsa) is changed to point group data (xsa, ysa + Yfst + Yde, zsa + Zfst1 + Zde).
[6] If the point group data obtained by the addition is (xsb, ysb, zsb), the origin of the coordinate system D by the coordinate system S stored in advance is included in the rotation axis Ry from the X coordinate value. For subtracting the movement amount Xfst in the X direction from the difference movement amount Xde obtained in [1] of this data processing, the origin of the coordinate system D by the coordinate system S is included in the rotation axis Ry from the Z coordinate value. Is subtracted from the movement amount Zfst2 in the Z direction and the difference movement amount Zde obtained in [1] above. That is, the point group data (xsb, ysb, zsb) is converted into point group data (xsb-Xfst-Xde, ysb, zsb-Zfst2-Zde).
[7] The point cloud data obtained by the subtraction is subjected to coordinate transformation by the following equation 5 using the inclination amount Θy around the rotation axis Ry input from the input device 102 by the operator.
In this case, the amount of inclination Θy about the rotation axis Ry is positive in the left direction when viewed in the stage Y direction (Y direction of the coordinate system S).
[8] Assuming that the coordinate-converted point group data is (xsc, ysc, zsc), the movement amount Xfst in the X direction and the difference movement amount Xde subtracted in [6] of this data processing are added to this X coordinate value. The movement amount Zfst2 in the Z direction and the difference movement amount Zde, which are subtracted in [6] of this data processing, are added to the Z coordinate value. That is, the point group data (xsc, ysc, zsc) is changed to point group data (xsc + Xfst + Xde, ysc, zsc + Zfst2 + Zde).
[9] The obtained point cloud data is subjected to coordinate transformation using a previously stored coordinate transformation coefficient Msi, and converted into point cloud data (xsi, ysi, zsi) based on the coordinate system I.
[10] For the coordinate values (xp, yp, zp) of the point designated as the X-ray irradiation point, the same processing as [2] to [9] of this data processing is performed, and the coordinate point (xpi, ypi, zpi). The coordinate values (xps, yps, zps) obtained by the process [8] are stored for the calculation of the X-ray incident angle described later.
[11] The same processing as [3] to [9] of the data processing in the shape of the diffraction ring formed on the imaging plate when the determined point (A) is irradiated with X-rays is performed.

(B ′) An incident angle of X-rays when X-rays are irradiated to the determined points.
Of the data processing of (A) described above in the processing of [11] in the data processing of the shape of the diffraction ring formed on the imaging plate when X-rays are irradiated to the determined point (A ′), Using the point cloud data (xi ′, yi ′, zi ′) obtained by the coordinate system I ′ obtained in the data processing of [3], the above-described (B) X when the determined point is irradiated with X-rays The same processing as the data processing at the incident angle of the line is performed.
(C ′) A movement amount in the stage X direction, the stage Y direction, and the stage Z direction so that the determined point is irradiated with X-rays, and the distance from the X-ray irradiation point to the imaging plate 15 at that time becomes a set value. .
The coordinate values (xps, yps, zps) stored in the process [10] of the data processing in the shape of the diffraction ring formed on the imaging plate when the determined point (A ′) is irradiated with X-rays. Is subtracted from the stored coordinate value of the X-ray irradiation point Xm (see (8) above) to obtain a vector component (xfs, yfs, zfs). xfs is a movement amount in the stage X direction, yfs is a movement amount in the stage Y direction, and zfs is a movement amount in the stage Z direction. As described above, the movement position (movement amount from the origin) may be obtained.

In the data processing of (A ′) to (C ′) described above, visually, a plurality of point groups on the surface of the measurement object OB are rotated about the rotation axis Rx and the rotation axis Ry by angles Θx and Θy. The same processing as (A) to (C) described above is performed. As shown in FIG. 9, when the tilt amount of the stage 61 is different, the way in which the diffracted X-ray is obstructed by a part of the measurement object OB is different, and the shape of the formed diffraction ring is different. Therefore, the operator confirms the shape of the diffraction ring every time the rotation amount Rx and the tilt amounts Θx and Θy around the rotation axis Ry are input from the input device 102, and the diffraction ring is not chipped or chipped as little as possible. Find the state. At this time, in addition to the above-described data processing (A ′) to (C ′), the controller 101 performs data processing for changing the three-dimensional shape image displayed on the display device 103 according to the input tilt amounts Θx and Θy. May be performed. In this data processing, the point group data obtained by the data processing of [8] in the data processing of the shape of the diffraction ring formed on the imaging plate when X-rays are irradiated to the determined point (A ′) described above. Is converted by coordinate conversion according to Equation 6 below, and a three-dimensional shape image is created from the converted point cloud data.

  The operator repeats the operations of S14 and S17, and when there is no chipping in the diffraction ring or the chipping is reduced as much as possible, S15 and S18 are “Yes”. The tilting device 60 is tilted while reading, and the tilt amount is the same as the tilt amount displayed on the display device 103 (the tilt amount input from the input device 102). Then, the operator moves the stage 61 in the direction of the stage X by the value displayed on the display device 103 by the input from the input device 102 in S20. Further, the operator 75 a of the moving device 70 is rotated while looking at the scale, and the stage 61 is moved in the stage Y direction by the value displayed on the display device 103. Further, the operator 72 a of the moving device 70 is rotated and the micrometer 74 is moved to read the scale, and the stage 61 is moved in the stage Z direction by the value displayed on the display device 103. Thereby, the X-rays emitted from the X-ray diffraction measurement apparatus 1 are irradiated to the determined points. This state is shown in FIG.

  Next, the operator inputs a command to start residual stress measurement in S21. At this time, the program executed by the controller 101 and the operation of each device and circuit in the X-ray diffraction measurement apparatus 1 will be described. However, as described above in (4) above, when an X-ray diffraction measurement start command is input, the program executed by the controller 101 and the operation of each device and circuit are described in Patent Document 1 of the background art. Is the same. Therefore, this will only be explained briefly.

  First, the controller 101 controls the spindle motor control circuit 82 in a state where the imaging plate 15 is at the imaging position, rotates the imaging plate 15 at a low speed, and rotates the imaging plate 15 when an index signal is input from the encoder 27c. Stop. Thereby, the rotation angle of the imaging plate 15 is set to 0 degree.

  Next, the controller 101 controls the X-ray control circuit 81 to cause the X-ray emitter 10 to start emitting X-rays. After a predetermined time has elapsed, the controller 101 controls the X-ray control circuit 81 to control the X-ray emitter 10. X-ray emission is stopped. As a result, the X-rays emitted from the X-ray emitter 10 are emitted to the outside through the through holes 26a and 21a, the passage member 28, the through holes 27b, 27a1, 16a, 17a, and 18a, and the circular hole 50c1, and measured. The measurement location of the object OB is irradiated for a predetermined time. Due to this X-ray irradiation, diffraction X-rays are generated from the X-ray irradiation of the measurement object OB, and a diffraction ring is imaged on the imaging plate 15.

  Next, the controller 101 controls the feed motor control circuit 85 to move the imaging plate 15 to the reading start position in the diffraction ring reading region. The reading start position of the imaging plate 15 is a position where the center of the objective lens 36, that is, the irradiation position of the laser beam is slightly inside the circle of the diffraction ring reference radius Ro. In this case, the position signal output from the position detection circuit 86 represents the moving distance x that the moving stage 21 has moved from the state in which the moving stage 21 is at the movement limit position, and the moving stage 21, that is, the table 16 (imaging plate 15). ) Is at the movement limit position, the distance from the center of the table 16 (imaging plate 15) to the center position of the objective lens 36 is a predetermined value. Therefore, the movement of the imaging plate 15 to the reading start position is performed using the position signal from the position detection circuit 86.

  The diffraction ring reference radius Ro is the radius of the diffraction ring formed on the imaging plate 15 by X-ray irradiation to the measurement object OB when the residual stress of the measurement object OB is “0”. It is determined according to the X-ray diffraction angle φx of the object OB and the distance L from the imaging plate 15 to the measurement object OB. The X-ray diffraction angle φx is determined by the material of the measurement object OB, and the distance L is a preset distance. Accordingly, if the diffraction angle φx is stored in advance for each material of the measurement object OB, the controller 101 sets the diffraction ring reference radius Ro to Ro = L · tan (by using the input material of the measurement object OB. It is automatically calculated by the calculation of φx).

  Next, the controller 101 instructs the spindle motor control circuit 82 to rotate the imaging plate 15 at a predetermined rotation speed, and instructs the laser drive circuit 87 to emit laser light from the laser light source 31. Thereby, the laser beam is irradiated onto the rotating imaging plate 15. Next, the controller 101 instructs the focus servo circuit 81 to start focus servo control so that the objective lens 36 is driven and controlled in the optical axis direction so that the focus of the laser light is on the surface of the imaging plate 15. To do.

  Next, the controller 101 operates the rotation angle detection circuit 83 and the A / D conversion circuit 90 to start inputting the rotation angle θp from the reference position of the spindle motor 27 (imaging plate 15) from the rotation angle detection circuit 83. At the same time, the controller 101 starts to output the digital data of the instantaneous value of the SUM signal from the A / D conversion circuit 90. Next, the controller 101 controls the feed motor control circuit 85 to rotate the feed motor 22 to move the imaging plate 15 from the reading start position in the lower right direction in FIGS. 1 and 2 at a constant speed. Thereby, the irradiation position of the laser beam starts to move relative to the imaging plate 15 from the position slightly inside the diffraction ring reference radius Ro toward the outside at a constant speed.

  Thereafter, every time the imaging plate 15 rotates by a predetermined small angle, the controller 101 inputs the digital data of the instantaneous value of the SUM signal via the A / D conversion circuit 90 and rotates from the rotation angle detection circuit 83. The angle θp and the movement distance x from the position detection circuit 86 are input, and the digital data of the instantaneous value of the SUM signal is converted into the laser beam from the center of the imaging plate 15 based on the rotation angle θp from the reference position and the movement distance x. Are sequentially stored in correspondence with the radial distance r (radius value r) of the irradiation position. Also in this case, the distance from the center of the table 16 (imaging plate 15) to the center position of the objective lens 36 in a state where the moving stage 21, that is, the table 16 (imaging plate 15) is at the movement limit position, is a predetermined value determined in advance. Therefore, the radius value r is calculated using the movement distance x. As a result, with respect to the irradiation position of the laser beam rotating in a spiral shape, data representing the instantaneous value of the SUM signal, the rotation angle θp, and the radius value r are sequentially stored and accumulated for each predetermined rotation angle.

  In parallel with the storage operation for each predetermined rotation angle of the data representing the instantaneous value of the SUM signal, the rotation angle θp, and the radius value r, the controller 101 performs a radius corresponding to the peak of the instantaneous value of the SUM signal for each predetermined angle. The value r is the radius value of the diffraction ring. Specifically, the peak of the instantaneous values of the plurality of SUM signals is detected by detecting a state in which the instantaneous values of the plurality of SUM signals having the same rotation angle θp increase and then decrease. The radius value r stored corresponding to the instantaneous value of the SUM signal is acquired. When all the radius values r for each predetermined rotation angle are acquired, the processing for detecting and storing the data representing the instantaneous value of the SUM signal, the rotation angle θp, and the radius value r for each predetermined rotation angle is completed. Thereby, the shape of the diffraction ring is detected.

  Thereafter, the controller 101 stops the focus servo control by the focus servo circuit 91, and stops the irradiation of the laser light from the laser light source 31 by the laser drive circuit 87. Further, the controller 101 stops the operation of the A / D conversion circuit 90 and the rotation angle detection circuit 83 and also stops the operation of the feed motor 22 by the feed motor control circuit 85. This completes the diffraction ring reading. In this state, the operation of the position detection circuit 86 and the rotation of the imaging plate 15 are continued as before.

  Next, the controller 101 controls the feed motor control circuit 85 to move the imaging plate 15 to the erase start position in the diffraction ring erase region. The erase start position of the imaging plate 15 is a position at which the center of the visible light output from the LED light source 43 is further inside than the read start position with respect to the circle having the diffraction ring reference radius Ro. . Also in this case, as in the case of the reading start position, the imaging plate 15 is moved using the position signal from the position detection circuit 86.

  Next, the controller 101 controls the LED drive circuit 84 to start irradiation of the visible light to the imaging plate 15 by the LED light source 43 and also controls the feed motor control circuit 85 to move the imaging plate 15 to the erasing start position. The feed motor 22 is rotated so as to move at a constant speed in the lower right direction in FIGS. The erasure end position is a position where the center of the LED light from the LED light source 43 is outside the diffraction ring reference radius Ro by the same distance as the erasure start position. As a result, visible light from the LED light source 43 is irradiated spirally onto the imaging plate 15 from the erase start position to the erase end position, and the diffraction ring formed by the diffraction X-rays is erased.

  Next, the controller 101 controls the feed motor control circuit 85 to stop the movement of the imaging plate 15 and also controls the LED drive circuit 84 to stop the irradiation of visible light from the LED light source 43. The controller 101 also stops the operation of the position detection circuit 86 and controls the spindle motor control circuit 82 to stop the rotation of the imaging plate 15 by the spindle motor 27. Thereby, the diffraction ring erasure is completed.

  In addition, the controller 101 calculates residual stress simultaneously with the above-described diffraction ring elimination. This residual stress calculation is based on the data representing the shape of the diffraction ring obtained in the above-described reading of the diffraction ring, that is, the radius value r of the diffraction ring for each rotation angle and the calculated diffraction ring which is a value obtained in advance. Using the reference radius Ro, the pre-measured incident angle φo of the X-ray, the distance Lo from the measurement object OB to the imaging plate 15 as the set value, the material of the input measurement object OB, and the like, the measurement object The residual compressive stress, residual shear stress, etc. at the X-ray irradiation position of OB are calculated. These residual compressive stress and residual shear stress are calculated using cos α, which is well known in the art. At this time, if the generation of the diffraction ring is reduced as much as possible by adjusting the amount of inclination of the measurement object OB described above, that is, if the diffraction ring is not completely eliminated, the diffraction ring has a defect. Is calculated using the data of the location where the diffraction ring is formed. Then, the controller 101 displays the calculated residual stress on the display device 103. The operator looks at the residual compressive stress and the residual shear stress displayed in S22, and evaluates the degree of fatigue of the measurement object OB. In addition to the residual stress, the controller 101 calculates other characteristic values that can be calculated from the read diffraction ring such as the amount of retained austenite and the half-value width of the diffraction ring, and displays them on the display device 103. The measurement object OB may be evaluated including other characteristic values.

  As described above, in the above-described embodiment, X-rays having a function of emitting X-rays from the X-ray emitter 10 and irradiating the object OB to be measured and recording a diffraction ring as an image of diffracted light on the imaging plate 15. The position and orientation of the diffraction measurement apparatus 1 and the X-ray diffraction measurement apparatus 1 are fixed, and the three-dimensional shape of the measurement object OB is measured and the original data for generating the three-dimensional shape data is output. And a moving device 70 and a tilting device 60 that change the position and orientation of the measurement object OB in at least two directions and around one axis. Then, the controller 101 creates three-dimensional shape data of the measurement object OB using data input from the three-dimensional shape measurement apparatus 2 according to a program to be executed, and uses the created three-dimensional shape data to measure the measurement object. An OB three-dimensional shape image is created and displayed on the display device 103. In addition, the controller 101 has a function capable of designating a point to be irradiated with X-rays emitted from the X-ray emitter 10 in a three-dimensional shape image displayed on the display device 103 by an input from the input device 102. And storing the optical axis position of X-rays emitted from the X-ray emitter 10 by the coordinate system of the three-dimensional shape measuring apparatus 10. When the X-ray irradiation point is designated in the three-dimensional shape image displayed on the display device 103, the controller 101 stores the X-ray optical axis position stored and the created measurement by the program to be executed. Using the three-dimensional shape data of the object OB, when the X-ray is irradiated to the designated point by changing the position of the measurement object OB by the moving device 70, the diffraction ring formed on the imaging plate 15 The shape is calculated and displayed on the display device 103. Therefore, according to the above-described embodiment, the operator can confirm the presence or absence of a diffraction ring and the extent of the diffraction ring when there is a defect by looking at the shape of the diffraction ring displayed on the display device 103. it can. According to this, even if the measurement object OB has a complicated shape, the tilting device 60 changes the shape of the diffraction ring for each posture of the measurement object OB (X-ray irradiation direction with respect to the measurement object OB). It can be confirmed, and the posture of the measurement object OB (the X-ray irradiation direction with respect to the measurement object OB) can be found in which the missing of the diffraction ring can be reduced as much as possible in a short time.

  In the above embodiment, the controller 101 also stores the position of the rotation axis in the change in the posture of the measuring object OB by the tilting device 60 by the coordinate system of the three-dimensional shape measuring device 2. When the change direction and change amount of the posture when changing the posture using the tilting device 60 are input (that is, the signed tilt amount), the input value and the stored position of the rotating shaft are used. The three-dimensional shape data of the measurement object OB obtained by the measurement of the three-dimensional shape measuring apparatus 2 can be changed to the three-dimensional shape data when the posture is changed. The shape of the diffraction ring can also be calculated using the changed three-dimensional shape data. Therefore, according to the above-described embodiment, when the degree of chipping is large in the shape of the diffraction ring displayed on the display device 103, the inclination of the measuring object OB is actually changed by the tilting device 60 and the three-dimensional shape measurement is performed again. Even if the measurement is not performed by the apparatus 2, if the change direction and the change amount of the posture when the posture of the measurement object OB is virtually changed by the tilt device 60 are input from the input device 102, the change is actually performed. You can see the shape of the diffractive ring as it is done. Therefore, when the degree of the diffraction ring chipping is large, the posture of the measurement object OB (the tilt amount of the tilting device 60) that can reduce the chipping of the diffraction ring as much as possible is repeated by repeating the input from the input device 102. What is necessary is just to change it so that it may become the same as the amount of inclination which found the amount of inclination of the inclination apparatus 60 found above. According to this, even if the measurement object OB has a complicated shape, the posture of the measurement object OB (X-rays with respect to the measurement object OB) can be reduced in a shorter time as much as possible. Irradiating direction).

  In the above embodiment, the controller 101 uses the moving device 70 to measure the X-ray optical axis position and the three-dimensional shape data obtained by the measurement by the three-dimensional shape measuring device 2. The position of the object OB is changed, and the incident angle of the X-ray when the X-ray is irradiated to the point designated in the three-dimensional shape image displayed on the display device 103 is calculated. Therefore, according to the above embodiment, the residual stress can be calculated using the calculated incident angle of the X-ray, so that the residual stress can be calculated with high accuracy.

  In the above-described embodiment, the controller 101 also stores the respective moving directions in the change of the position of the measurement object OB by the moving device 70 by the coordinate system of the three-dimensional shape measuring apparatus 2, and the moving direction is stored. The X-ray optical axis position is used to irradiate X-rays to the designated points in the three-dimensional shape image displayed on the display device 103. The amount of movement in the movement direction is calculated and displayed on the display device 103. Therefore, according to the above-described embodiment, in order to irradiate the designated point in the three-dimensional shape image with X-rays, the moving device 70 can know how much and in what direction it should be moved. The point can be irradiated with X-rays. More specifically, the moving device 70 can be moved in three directions, and the controller 101 sets the distance from the X-ray irradiation point to the imaging plate 15 to a set point at a specified point. The amount of movement in the direction of movement for irradiating X-rays is calculated. Therefore, according to the above embodiment, the distance from the X-ray irradiation point to the imaging plate 15 can always be set to a set value regardless of the measurement object OB.

  Furthermore, in carrying out the present invention, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the object of the present invention.

  The above embodiment can be implemented when the measurement object OB can measure a three-dimensional shape. However, there are cases where the measurement object OB has a very low reflectance and cannot measure a three-dimensional shape. In such a case, the above embodiment cannot be implemented. Therefore, in this case, as shown below, another function is provided in the X-ray diffraction measurement apparatus 1, and the shape of the diffraction ring shown in the above (A) and (B), the incident angle of the X-ray, Instead of the above (C), the distance from the X-ray irradiation point to the imaging plate 15 is obtained.

  In this embodiment, the X-ray diffraction measurement apparatus 1 can emit LED light with the same optical axis as the X-ray emitted from the X-ray emitter. Specifically, as shown by a two-dot chain line in FIG. 11, the LED light source 44 is fixed to the lower surface of one end portion of the plate 45 disposed between the X-ray emitter 10 and the upper wall 26 of the table driving mechanism 20. Yes. FIG. 12 shows the two-dot chain line portion in three dimensions. The plate 45 is fixed to the output shaft 46 a of the motor 46 fixed in the case 50 at the other end upper surface, and is rotated in a plane parallel to the upper wall 26 of the table driving mechanism 20 by the rotation of the motor 46. Rotate. Stopper members 47 a and 47 b are provided on the upper wall 26 of the table driving mechanism 20. When the plate 45 is rotated in the direction D <b> 1 in FIG. 4, the LED light source 44 is connected to the X-ray emitter 10. The rotation of the plate 45 is restricted so that it stops at a position (position A) opposite to the exit hole 11 and the through hole 26 a of the upper wall 26 of the table drive mechanism 20. On the other hand, when the plate 45 is rotated in the direction D2 in FIG. 4, the stopper member 47b is formed between the emission port 11 of the X-ray emitter 10 and the through hole 26a of the upper wall 26 of the table driving mechanism 20. The rotation of the plate 45 is restricted so that it stops at a position (B position) that is not blocked. In other words, the A position is a position where the plate 45 is in the state shown in FIG. 12, and the LED light emitted from the LED light source 44 enters the passage of the passage member 28 provided in the through hole 27 a 1 of the spindle motor 27. It is. The B position is a position where X-rays emitted from the X-ray emitter 10 are not blocked by the plate 45.

  The LED light source 44 emits LED light in accordance with a drive signal from a drive circuit that is controlled by the controller 101. LED light is diffused visible light, and when the plate 45 is in the A position, a part of the plate 45 passes through the through holes 26a and 21a, the passage of the passage member 28 and the through hole 27b, and the output shaft 27a of the spindle motor 27. Is incident on the through hole 27a1 and emitted from the through holes 16a, 17a, 18a and the circular hole 50c1 of the notch wall 50c. Also in the case of this LED light, since the inner diameter of the passage member 28 and the inner diameter of the through hole 18a are small, the LED light incident into the through holes 27b, 27a1, 16a, and 17a through the passage member 28 is slightly diffused. The LED light emitted from the through hole 18a becomes parallel light parallel to the axis of the through hole 27a1, and is emitted from the circular hole 50c1.

  The motor 46 includes an encoder 46a, and the encoder 46a outputs a pulse train signal that alternately switches between a high level and a low level each time the motor 46 rotates by a predetermined minute rotation angle. The drive circuit that supplies a drive signal to the motor 46 rotates when the rotation direction and rotation start instruction are input from the controller 101, and rotates when the motor 46 rotates in the specified direction and the input of the pulse train signal from the encoder 46a stops. Stop signal output. Accordingly, when an LED irradiation command is input from the input device 102, the plate 45 is rotated to the position A described above, and then LED light is emitted from the LED light source 44. When an LED irradiation stop command is input, the LED light source 44 After stopping the light emission, the plate 45 can be rotated to the B position described above.

  If the operator determines that the shape measurement is impossible as a result of the measurement of the measurement object OB by the three-dimensional shape measurement apparatus, the operator moves the stage 61 by the moving device 70 and moves the measurement object OB from the X-ray diffraction measurement apparatus 1 to the X-ray. Set the position to be irradiated. Then, an LED light irradiation start command is input from the input device 102, and LED light having an optical axis equal to the optical axis of the X-ray is irradiated from the X-ray diffraction measurement device 1. Since the irradiation point of the LED light is the X-ray irradiation point, the operator adjusts the irradiation point of the LED light to be a measurement location of the measurement object by the movement by the moving device 70. Thereafter, the operator once erases the LED light by the input from the input device 102, attaches the jig 200 shown in FIG. 13 to the circular hole 50c1 portion of the X-ray diffraction measurement apparatus 1, and cures the measurement object OB at the measurement location. The tip portion 209 of the tool 200 is brought into contact. The jig 200 has magnets 201a attached to four locations of the circular portion 201 of the frame portion to which the disc 203 is attached, and can be attached to the housing of the X-ray diffraction measurement apparatus 1 by magnetic force. Further, the jig 200 includes expander lenses 205 and 206 in the cylindrical portion 204 at the center of the radius portion 202 of the skeleton portion so that the LED light goes to the tip even if the attachment position to the circular hole 50c1 is slightly shifted. . Since the jig 200 has a structure in which the circular pipe portions 207 and 208 can be expanded and contracted, the jig 200 is first contracted and then attached to the circular hole 50c1 portion of the X-ray diffraction measuring apparatus 1, and the circular pipe portion is extended to extend the tip portion. 209 is brought into contact with the measurement location. In this state, when the LED light is irradiated by the input from the input device 102, the LED light is reflected by the conical mirror 210 at the tip portion 209 of the jig 200 as shown in FIG. Irradiation traces are formed. Since this irradiation trace corresponds to a diffraction ring, it is possible to check the degree of chipping of the diffraction ring by confirming the degree of chipping of the irradiation trace. Further, since the distance from the imaging plate 15 to the LED light irradiation point (that is, the X-ray irradiation point) has a 1: 1 relationship with the diameter of the ring-shaped irradiation mark formed on the disk 203, this relationship is previously determined. This distance can be obtained from the ring-shaped irradiation mark by obtaining a scale on the disk 203. In addition, since it is often difficult to visually observe the ring-shaped irradiation trace formed on the flat plate 203 of the jig 200, it is preferable to visually observe using a mirror.

  Next, the operator once erases the LED light by the input from the input device 102, removes the jig 200 from the X-ray diffraction measurement apparatus 1 after shrinking the circular tube portions 207 and 208, and the jig shown in FIG. Similarly to the jig 200, 250 is attached after shrinking the circular pipe portions 207 and 208. The jig 250 is obtained by changing the tip portion 209 of the jig 200 to a tip portion 220. The tip portion 220 has a shape in which a cylindrical portion and a conical portion are combined and divided in half at the center, The contact portion 220a is a conical mirror on the inner surface. After the jig 250 is attached, the circular tube portions 207 and 208 are extended to bring the tip portion 220 into contact with the measurement location of the measurement object OB, and the LED light is irradiated by the input from the input device 102. As shown in FIG. 14, the LED light is reflected by the measurement object OB, is reflected by the mirror on the inner surface of the contact portion 220a, and is irradiated onto the disk 203, thereby forming an irradiation trace. The position of the irradiation trace (distance from the center of the disk 203, that is, distance from the X-ray optical axis) is determined by the incident angle of the LED light to the measurement object OB and the LED light irradiation of the measurement object OB from the disk 203. Although the distance from the imaging plate 15 to the disk 203 is constant, the distance from the disk 203 to the LED light irradiation point of the measurement object OB is obtained using the jig 200. The distance from the obtained imaging plate 15 to the LED light irradiation point can be obtained. Therefore, if the relationship between the incident angle of the LED light and the position of the irradiation trace for each distance from the disk 203 to the LED light irradiation point of the measurement object OB is obtained in advance, the incident angle of the LED light (that is, the X-ray angle) (Incident angle) can be obtained. Since the change in the position of the irradiation mark on the disk 203 is large with respect to the change in the incident angle of the LED light, it is impossible to deal with all the possible incident angles of the LED light with the single contact portion 220a. It is. Therefore, there are several tip portions 220 with different angles of the conical shape of the contact portion 220a. If the LED light irradiation trace is not formed, the tip portion 220 of the jig 250 is appropriately replaced. Good.

Furthermore, the present invention can be variously modified in addition to this. In the above embodiment, the coordinate value of the X-ray irradiation point Xm whose distance from the surface of the imaging plate 15 is the set value Ls is obtained, and the stage 61 for matching the designated point with the X-ray irradiation point Xm. The amount of movement in the stage X direction, stage Y direction, and stage Z direction is calculated. However, if the distance from the surface of the imaging plate 15 to the X-ray irradiation point does not change greatly due to the measurement object OB, the coordinate value of the X-ray irradiation point Xm is not obtained, and it is specified without moving in the stage Z direction. Only the amount of movement in the stage X direction and stage Y direction for the point to be on the optical axis of the X-ray is calculated, the distance from the surface of the imaging plate 15 to the X-ray irradiation point at that time is calculated, and the diffraction ring It may be used when calculating the residual stress of the object to be measured from the shape (used when calculating the diffraction ring reference radius). In this case, the data processing executed by the controller 101 is as follows. Coordinate values of designated points by the coordinate system D of the three-dimensional shape measuring apparatus 2 in X, Y, Z of the plane equation of a · X + b · Y + c · Z + d = 0 where the components of the unit vector Vz are coefficients a, b, c ( xp, yp, zp) is substituted to obtain d, and a coordinate value (xm, ym, zm) is obtained from this plane equation and a linear simultaneous equation representing the optical axis of the X-ray. This coordinate is converted into a coordinate conversion coefficient Mds.
Then, the coordinate value of the designated point by the coordinate system S (xps, yps, zps) is subtracted from this coordinate value. The X component and Y component of the obtained vector component are the movement amounts in the stage X direction and the stage Y direction. Further, the Z component of the vector component is zero. Then, if the distance between the obtained coordinate value (xm, ym, zm) and the coordinate value of the point Xi where the surface of the imaging plate 15 stored in advance and the optical axis of the X-ray intersect is obtained, imaging is performed. The distance from the surface of the plate 15 to the X-ray irradiation point is obtained.

  In the above embodiment, the moving device 70 can be moved in three orthogonal directions. However, as described above, the distance from the surface of the imaging plate 15 does not change significantly due to the measurement object OB. If the distance from the surface of the imaging plate 15 to the X-ray irradiation point is calculated, the movement may be made only in two directions. In the above embodiment, the tilting device 60 can be tilted around two orthogonal rotation axes. However, if the measuring object OB is limited to a limited shape, the tilting device 60 can be rotated around one rotation axis. It may be possible to incline.

  Further, in the above-described embodiment, the tilt amount of the stage 61 is input from the input device 102, and the shape of the diffraction ring, the X-ray incident angle, and the like when the measurement object OB is virtually tilted using the three-dimensional shape data The amount of movement of the stage 61 was calculated. However, if the three-dimensional shape measurement is completed in a short time, the stage 61 is actually tilted to perform the three-dimensional shape measurement, and the shape of the diffraction ring, the X-ray incident angle, and the amount of movement of the stage 61 are calculated. May be. In this case, it is not necessary to obtain and store a linear expression representing the rotation axes Rx and Ry.

  In the above embodiment, the X-ray diffraction measurement apparatus 1 and the three-dimensional shape measurement apparatus 2 are fixed, and the stage 61 is moved in three directions and inclined around the two-direction axes. The X-ray diffraction measurement apparatus 1 and the three-dimensional shape measurement apparatus 2 may be moved and the posture may be changed. Alternatively, the moving device 70 and the tilting device 60 may perform part of the movement and posture change, and the rest may be performed by the X-ray diffraction measuring device 1 and the three-dimensional shape measuring device 2. A structure in which both the apparatus 1 and the three-dimensional shape measuring apparatus 2 perform movement and posture change may be employed.

  In the above embodiment, the three-dimensional shape measuring device 2 is fixed to the side surface of the X-ray diffraction measuring device 1, but the positional relationship between the X-ray diffraction measuring device 1 and the three-dimensional shape measuring device 2 is fixed. If so, various structures can be made in consideration of ease of work. For example, the three-dimensional shape measuring apparatus 2 may be fixed to the front surface of the X-ray diffraction measuring apparatus 1, or the X-ray diffraction The three-dimensional shape measuring device 2 may be included in the housing of the measuring device 1, or the three-dimensional shape measuring device 2 may be attached to another part of the arm moving device to which the X-ray diffraction measuring device 1 is attached. May be.

  Further, in the above embodiment, only the movement of the moving device 70 in the direction of the stage X is automatically moved by the rotation of the motor 77, and the movement of the moving device 70 in the other direction and the tilting by the tilting device 60 are performed. However, if there is no problem even if the cost of the product according to the present invention is increased, some or all of the manual movement and inclination can be automatically moved and inclined. Also good.

  In the above-described embodiment, the X-ray diffraction measurement apparatus is configured to read the diffraction ring by irradiation with laser light from the laser detection device 30 after the diffraction ring is formed on the imaging plate 15. However, even in a device that separately reads the diffraction ring, the present invention is applicable to any device that emits X-rays through a through-hole in the center of the imaging plate 15 and forms a diffraction ring in the imaging plate 15. is there.

DESCRIPTION OF SYMBOLS 1 ... X-ray-diffraction measuring apparatus, 2 ... Three-dimensional shape measuring apparatus, 10 ... X-ray emitter, 15 ... Imaging plate, 15a, 16a, 17a, 18a, 21a, 26a, 27a1, 27b ... Through-hole, 16 ... Table , 18 ... Fixing tool, 20 ... Table drive mechanism, 21 ... Moving stage, 22 ... Feed motor, 23 ... Screw rod, 27 ... Spindle motor, 28 ... Path member, 30 ... Laser detector, 31 ... Laser light source, 36 ... Objective lens 50 ... Case 50c ... Notch wall 52 ... Arm tip 60 ... Tilt device 61 ... Stage 70 ... Moving device 74 ... Micrometer, moving device 61a, 62a, 72a, 75a ... Operating element, 77 ... motor, 96 ... high voltage power supply, 100 ... computer device, 101 ... controller, 102 ... input device, 103 ... table Equipment

Claims (10)

An X-ray emitter that emits X-rays toward the measurement object;
A table formed with a through-hole through which X-rays pass in the center;
Mounted on the table, allows X-rays to pass through the central portion, and has a light-receiving surface for receiving X-ray diffracted light diffracted by the measurement object, and records a diffraction ring that is an image of the diffracted light. In a diffractive ring forming system comprising a diffractive ring forming device with an imaging plate,
A three-dimensional shape that irradiates the measurement object with light and detects reflected light or images the measurement object to measure the three-dimensional shape of the measurement object and outputs the original data for creating three-dimensional shape data A measuring device, a three-dimensional shape measuring device having a fixed position and orientation relative to the diffraction ring forming device;
The position and orientation of the measurement object relative to the diffraction ring forming device and the three-dimensional shape measuring device can be at least a position facing the diffraction ring forming device and a position facing the three-dimensional shape measuring device. Position and orientation changing means for changing in two directions and at least one axis;
Shape data creating means for creating three-dimensional shape data of a measurement object using original data output from the three-dimensional shape measuring apparatus;
3D image display means for creating and displaying a 3D shape image of the measurement object using the 3D shape data created by the shape data creating means;
Point designation means capable of designating a point irradiated with X-rays emitted from the X-ray emitter in a three-dimensional shape image of the measurement object displayed by the three-dimensional image display means;
Storage means for storing the optical axis position of the X-ray emitted from the X-ray emitter by the coordinate system of the three-dimensional shape measuring apparatus;
Using the X-ray optical axis position stored in the storage means and the three-dimensional shape data created by the shape data creating means, the position / orientation changing means changes the position of the measurement object, and A diffraction ring comprising: a diffraction ring shape calculation means for calculating a shape of a diffraction ring formed on the imaging plate when X-rays are irradiated to a point specified using the point specification means Forming system. The diffractive ring forming system according to claim 1,
The storage means also stores the position of the rotation axis in the change in posture of the measurement object by the position and orientation change means by the coordinate system of the three-dimensional shape measuring apparatus,
Specify the direction and amount of change in posture when changing the posture using the position and orientation change means virtually on the three-dimensional shape based on the three-dimensional shape data of the measurement object created by the shape data creation means. Equipped with posture change designation means that can
When the posture change direction and the amount of change are designated by the posture change designation unit, the shape data creating unit, the position of the rotation axis stored in the storage unit, and the designated posture change direction and A diffraction ring forming system characterized in that, using a change amount, the three-dimensional shape data of the measurement object created using the original data is changed to the three-dimensional shape data when the posture is changed. In the diffractive ring formation system according to claim 1 or 2,
Using the X-ray optical axis position stored in the storage means and the three-dimensional shape data created by the shape data creating means, the position / orientation changing means changes the position of the measurement object, and A diffraction ring forming system, comprising: an incident angle calculating means for calculating an incident angle of X-rays when an X-ray is irradiated to a point specified by using the point specifying means. The diffractive ring forming system according to claim 1, wherein:
The storage means also stores the respective moving directions in the change in position of the measurement object by the position and orientation changing means by the coordinate system of the three-dimensional shape measuring apparatus,
Using the X-ray optical axis position stored in the storage means and the respective moving directions in the change in the position of the measurement object, the X-ray is irradiated to the point specified by the point specifying means. A diffractive ring forming system comprising: a moving amount calculating unit for calculating a moving amount in the moving direction of the change in the position of the measurement object by the position and orientation changing unit. The diffractive ring formation system according to claim 4,
The position and orientation change means changes the position of the measurement object in at least three directions,
The movement amount calculation unit is configured to irradiate the point specified by the point specifying unit with X-rays so that a distance from the X-ray irradiation point to the imaging plate becomes a set value. A diffractive ring forming system characterized in that the movement amount in the moving direction of each change in the position of the measurement object by the position and orientation changing means is calculated. The diffractive ring formation system according to claim 4,
Using the optical axis position of the X-ray stored in the storage means and the respective moving directions in the change of the position of the measurement object, the point designated by the point designation means was irradiated with X-rays A diffraction ring forming system comprising a distance calculating means for calculating a distance from an X-ray irradiation point to the imaging plate. The diffractive ring forming system according to any one of claims 1 to 6,
The diffractive ring forming device measures visible light which is parallel light having the same optical axis as that of the X-ray emitted from the X-ray emitter in a state where the X-ray is not emitted from the X-ray emitter. A visible light emitting device that emits light to
A first jig detachably attached to the diffractive ring forming device, which is perpendicular to an optical axis of visible light emitted from the visible light emitter when attached to the diffractive ring forming device; And a conical mirror that reflects the visible light incident at the same angle as the angle at which the diffracted X-rays are generated when mounted on the diffraction ring forming device. A diffraction ring forming system comprising a jig. The diffractive ring forming system according to claim 7,
A second jig attachable to and detachable from the diffractive ring forming device, wherein the second jig is perpendicular to an optical axis of visible light emitted from the visible light emitter when the diffractive ring forming device is mounted; A flat plate having a through-hole for allowing the light to pass through, and a conical inner surface-shaped mirror that receives the visible light reflected by the measurement object when it is attached to the diffraction ring forming device and reflects it at a different angle depending on the incident angle. A diffraction ring forming device comprising a second jig. An X-ray diffraction measurement system comprising the diffractive ring forming system according to claim 1,
In the diffraction ring forming device,
A laser light source that emits laser light and a light receiver that receives light generated by the laser light are emitted to the light receiving surface of the imaging plate and emitted from the imaging plate by laser light irradiation. A laser detector that receives light and outputs a received light signal corresponding to the received light intensity;
A rotation mechanism for rotating the table around the central axis of the through hole;
A moving mechanism for moving the table relative to the laser detection device in a direction parallel to the light receiving surface of the imaging plate;
The rotation mechanism is controlled to rotate the table, and the movement mechanism is controlled to move the table, while the laser detection device is controlled to detect the irradiation position of the light receiving surface of the imaging plate. Diffracting ring reading means for reading the diffracting ring formed on the imaging plate by inputting the light receiving signal from the laser detector and processing the detected irradiation position and the inputted light receiving signal. An X-ray diffraction measurement system comprising: The X-ray diffraction measurement system according to claim 9,
Characteristic value calculation means for calculating the characteristic value of the measurement object from the diffraction ring read by the diffraction ring reading means,
An X-ray diffraction measurement system characterized in that the characteristic value calculation means calculates a characteristic value of a measurement object using data of a location where a diffraction ring exists when the read diffraction ring is missing.