JP6044877B1 - X-ray diffractometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To confirm whether a missing part is generated in a diffraction ring before X-ray diffraction measurement of a measurement object OB having a complicated shape. SOLUTION: A visible light emitter that irradiates a measurement symmetrical object OB with parallel visible light having the same optical axis as that of an X-ray, and a table 16 at a position where a diffraction ring is formed. A part of the generated scattered light is received by a photo detector 57 via an imaging lens 56, and a light receiving device 55 for detecting the received light intensity is provided. Before performing X-ray diffraction measurement, visible light is irradiated onto the measurement object OB, the spindle motor 27 is rotated, and the received light intensity detected by the light receiving device 55 is acquired according to the rotation angle. The missing information of the diffraction ring is calculated on the assumption that the rotation angle with the received light intensity smaller than the set value causes the diffraction ring to be missing. [Selection] Figure 5

Description

  The present invention relates to an X-ray diffraction measurement apparatus that irradiates a measurement object with X-rays and detects the shape of an X-ray diffraction ring formed by the X-rays diffracted by the measurement object.

  Conventionally, for example, as shown in Patent Document 1, an X-ray diffraction ring (hereinafter referred to as a diffraction ring) is formed by X-rays diffracted by a measurement object by irradiating the measurement object with X-rays at a predetermined incident angle. There is known an X-ray diffraction measurement apparatus that forms a diffraction ring, detects the shape of the formed diffraction ring, performs analysis by a cos α method, and measures a residual stress of a measurement object. The apparatus disclosed in Patent Document 1 includes an X-ray emitter, a diffraction ring imaging means such as an imaging plate, a diffraction ring reading means such as a laser detection device and a laser scanning mechanism, and a diffraction ring erasing means such as an LED irradiator. Are provided in one housing. An imaging step of imaging the diffraction ring on the imaging plate by diffracted X-rays generated by irradiating the measurement object with X-rays, and irradiating the imaging plate with laser light from a laser detection device while irradiating the diffraction ring A reading process for detecting the shape of the diffraction grating and an erasing process for erasing the diffraction ring by irradiating the LED light can be performed continuously. If this X-ray diffractometer is used, the residual stress of the measurement object can be measured in a short time. Moreover, the apparatus shown in Patent Document 1 has a function of irradiating LED light parallel to the same optical axis as the X-ray emitted from the X-ray emitter, and a camera function of imaging the vicinity of the LED light irradiation point. The measurement object is irradiated with LED light, imaged by a camera function, and the position and posture of the X-ray diffraction measurement apparatus with respect to the measurement object can be adjusted. By this adjustment, the X-ray diffraction measurement can be performed after setting the X-ray irradiation point position to a desired position, setting the distance from the X-ray irradiation point to the diffraction ring imaging means and the X-ray incident angle as set values.

  When a measurement object having a complicated shape is measured by such an X-ray diffraction measurement apparatus, a diffracted X-ray is obstructed by the measurement object as shown in FIG. There is a case. In order to cope with this problem, there is a system disclosed in Patent Document 2 as an X-ray diffraction measurement system capable of performing X-ray diffraction measurement after confirming whether a missing portion is generated in the diffraction ring. This X-ray diffraction measurement system includes an X-ray diffraction measurement device and a three-dimensional shape measurement device. When a three-dimensional shape of a measurement object is measured and an X-ray diffraction measurement location is designated on a three-dimensional image, The missing state of the diffraction ring when X-rays are irradiated to the place can be obtained by calculation processing. In addition, every time the posture of the measurement object (the X-ray irradiation direction with respect to the measurement object) is changed, the missing state of the diffraction ring can be obtained by arithmetic processing, and a missing part is generated in the diffraction ring. In this case, the posture of the measurement object can be adjusted so that no missing part is generated.

JP 2014-98677 A JP 2014-238295 A

  However, the X-ray diffraction measurement system disclosed in Patent Document 2 performs a three-dimensional shape measurement with an object to be measured facing a three-dimensional shape measurement device, designates an X-ray irradiation point on a three-dimensional image, and sets a diffraction ring. Since the X-ray diffraction measurement is performed with the object to be measured facing the X-ray diffraction measurement device after confirming the shape, it takes time until the measurement result is obtained, and there is a problem that the measurement efficiency is poor. In addition, since the three-dimensional shape measuring apparatus is provided, there is a problem that the cost of the entire apparatus increases.

  The present invention has been made to solve this problem. The purpose of the present invention is to reduce the measurement efficiency and minimize the cost of the apparatus when measuring an X-ray diffraction measurement object having a complicated shape. In addition, an object of the present invention is to provide an X-ray diffraction measurement apparatus capable of confirming whether a missing portion is generated in a diffraction ring before X-ray diffraction measurement.

  In order to achieve the above object, the present invention is characterized by an X-ray emitter that emits X-rays toward an object to be measured, and an X-ray emitted from the X-ray emitter toward the object to be measured. The diffracted X-rays generated at the X-ray irradiation location of the measurement object are received by the imaging surface perpendicular to the optical axis of the X-ray emitted from the X-ray emitter, and diffracted X on the imaging surface. In an X-ray diffraction measurement apparatus including a diffraction ring formation detection unit that forms a diffraction ring that is an image of a line and detects the shape of the diffraction ring, X-rays are not emitted from the X-ray emitter. A visible light emitter that emits visible light, which is parallel light having the same optical axis as the X-ray emitted from the line emitter, to the measurement object, and a measurement object by the visible light emitted from the visible light emitter. Receives a part of the scattered light generated by the light receiver through the imaging lens and detects the received light intensity. The optical axis of the imaging lens is set at an angle set with respect to the optical axis of the X-ray emitted from the X-ray emitter and intersects at a set distance from the imaging surface. Rotating means for rotating the light receiving means around the optical axis of the X-ray emitted from the X-ray emitter, rotation angle detecting means for detecting a rotation angle by the rotating means, rotating the light receiving means by the rotating means, A control means for acquiring the received light intensity detected by the light receiving means in correspondence with the rotation angle detected by the detection means, and calculating the missing information of the diffraction ring using the received light intensity corresponding to the acquired rotation angle. There is.

  According to this, before emitting X-rays from the X-ray emitter toward the measurement object to form a diffraction ring, visible light is emitted from the visible light emitter to the measurement object, and the light receiving means is rotated. The missing information of the diffraction ring can be obtained only by obtaining one light rotation intensity for each rotation angle and obtaining the received light intensity for each rotation angle. That is, the measurement efficiency is not deteriorated, and it is possible to confirm whether a missing portion is generated in the diffraction ring while suppressing the cost increase of the apparatus as much as possible. In this case, the position of the distance set from the imaging surface, which is the position where the optical axis of the imaging lens intersects the optical axis of the X-ray emitted from the X-ray emitter, is the X-ray toward the measurement object. Is a position on the X-ray emission direction side from a position to be an X-ray irradiation point when a diffraction ring is formed. The set angle, which is the angle at which the optical axis of the imaging lens intersects the optical axis of the X-ray emitted from the X-ray emitter, means that the diffracted X-ray forming the diffraction ring is the light of the X-ray. It is an angle greater than the angle that intersects the axis. If the set distance is the distance from the imaging surface to the position to be the X-ray irradiation point, X-ray diffraction measurement is performed without moving the X-ray diffraction measurement device after obtaining missing information of the diffraction ring. be able to. Further, if the set distance is set to a distance from the imaging surface to a position far from the position to be the X-ray irradiation point, after obtaining the missing information of the diffraction ring, the position of the X-ray diffraction measurement apparatus is set to X-ray. Although it is necessary to move to the emission direction side, the light receiving means can be arranged at a position far from the optical axis of the emission X-ray. If the set angle is equal to the angle at which the diffracted X-ray forming the diffraction ring intersects the optical axis of the X-ray, the light receiving means receives scattered light having the same optical path as the diffracted X-ray forming the diffractive ring. And the missing information of the diffraction ring can be calculated. Further, if the set angle is made larger than the angle at which the diffracted X-ray forming the diffraction ring intersects the optical axis of the X-ray, the light-receiving means will generate the diffraction X that forms the diffractive ring with respect to the optical axis of the X-ray. It is possible to receive the scattered light in the optical path outside the line, and to calculate the missing information of the diffraction ring more strictly than in practice.

  Further, in this case, a table for attaching the imaging surface is provided, the light receiving means is attached to the table, and the rotating means rotates the table around the optical axis of the X-ray emitted from the X-ray emitter. Good. According to this, as shown in the prior art document, the X-ray diffraction measurement apparatus has an imaging plate as an imaging surface attached to a table, images a diffraction ring, and then moves the table while rotating the laser detection apparatus. If the apparatus reads the diffraction ring, the visible light emitter, the rotation means, and the rotation angle detection means are already provided, so that the cost of the apparatus can be suppressed.

  In addition, when the light receiving means is attached to the table, the light receiving means sets the distance from the X-ray irradiation point of the measurement object to the imaging surface, and sets the X-ray from the X-ray emitter to be measured. When irradiating an object, it is attached to a position where a diffraction ring is formed, and the image pickup surface attached to the table is preferably configured such that a portion of the light receiving means is removed. According to this, the light receiving means can receive the scattered light of the same optical path as the diffraction X-ray forming the diffraction ring, and can calculate the missing information of the diffraction ring with high accuracy. Further, after obtaining the missing information of the diffraction ring, the X-ray diffraction measurement can be performed without moving the X-ray diffraction measurement apparatus. In addition, although the part removed on the imaging surface cannot image the diffraction ring, since it is a part of the whole, it hardly affects the measurement accuracy of the residual stress calculated based on the shape of the diffraction ring.

Another feature of the present invention includes a display means for displaying the missing information of the calculated diffraction circles by control means, the control means, when to emit visible light from the visible light emitting device, missing diffraction rings The calculation of information is repeatedly performed, and the display means displays the missing information of the diffraction ring in real time. According to this, since the position and posture of the X-ray diffraction measurement device with respect to the measurement object can be adjusted while observing the display device, and the position and posture at which the diffraction ring is not lost can be determined, the measurement object is extremely Even in the case of a complicated shape, the adjustment can be performed in a short time.

  Another feature of the present invention is that an X-ray emitter that emits X-rays toward a target measurement object, and an X-ray that is emitted from the X-ray emitter toward the measurement object, The diffracted X-rays generated at the X-ray irradiation site are received by an imaging surface perpendicular to the optical axis of the X-rays emitted from the X-ray emitter, and the image of the diffracted X-rays is captured on the imaging surface. In an X-ray diffraction measurement apparatus including a diffraction ring formation detection unit that forms a certain diffraction ring and detects the shape of the diffraction ring, the X-ray emitter emits the X-ray in a state where X-rays are not emitted. A visible light emitter that emits visible light, which is parallel light having the same optical axis as that of the emitted X-ray, to the measurement object, and an optical axis that is arranged around the optical axis of the X-ray emitted from the X-ray emitter and is visible A part of the scattered light generated by the measurement object by the visible light emitted from the light emitter is received through the imaging lens. A plurality of light receiving means for detecting the received light intensity, wherein each of the optical axes of the imaging lenses is at the same set angle with respect to the optical axis of the X-rays emitted from the X-ray emitter, Provided with a plurality of light receiving means intersecting at a set distance from the imaging surface, and a calculation means for calculating the missing information of the diffraction ring using the received light intensity detected by the plurality of light receiving means It is in.

  According to this, before emitting X-rays from the X-ray emitter toward the measurement object to form a diffraction ring, visible light is emitted from the visible light emitter to the measurement object, and the plurality of light receiving means The missing information of the diffraction ring can be obtained only by obtaining each received light intensity. That is, the measurement efficiency is not deteriorated, and it is possible to confirm whether a missing portion is generated in the diffraction ring while suppressing the cost increase of the apparatus as much as possible. In this case, since the rotating means and the rotation angle detecting means are unnecessary, if the X-ray diffraction measuring apparatus is an apparatus using a semiconductor element such as an X-ray CCD as the diffraction ring formation detecting means, the apparatus remains compact. Can be. In this case as well, the distance set from the imaging surface and the set angle at the position and angle where the optical axis of the imaging lens intersects the optical axis of the X-ray emitted from the X-ray emitter are This is the same as described above.

  Further, in this case, a housing including an X-ray emitter, a diffraction ring formation detection unit, a visible light emitter and a light receiving unit is provided, and the housing is centered on the optical axis of the X-ray emitted from the X-ray emitter. The plurality of light receiving means may be arranged around the opening or the window. According to this, the structure of the X-ray diffraction measurement device can be prevented from becoming complicated.

1 is an overall schematic diagram showing an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus used in an embodiment of the present invention. It is an enlarged view of the X-ray-diffraction measuring apparatus of FIG. It is a fragmentary sectional view which expands and shows the part through which the X-ray passes in the X-ray-diffraction measuring apparatus of FIG. It is an expansion perspective view of the plate part of FIG. FIG. 3 is an enlarged view around an imaging plate in the X-ray diffraction measurement apparatus of FIG. 2. It is a flowchart of the program which determines the presence or absence of the missing of a diffraction ring which the controller of the X-ray-diffraction measurement system of FIG. 1 performs. It is an enlarged view around the imaging plate in the X-ray-diffraction measuring apparatus of a modification. It is an enlarged view around the imaging plate in the X-ray-diffraction measuring apparatus of another modification. It is a figure which shows the relationship between the rotation angle of a diffraction ring, and intensity | strength. It is a figure explaining the reason which the relationship of FIG. 9 arises. It is a figure which shows a mode that a missing part generate | occur | produces in a diffraction ring by the shape of a measuring object.

  A configuration of an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus according to an embodiment of the present invention will be described with reference to FIGS. Note that this X-ray diffraction measurement system is different from the X-ray diffraction measurement system disclosed in Patent Document 1 of the prior art document in order to determine the lack of a diffraction ring before performing X-ray diffraction measurement. Patents of prior art documents include: a unit provided with a unit, a circuit, and a program; a point provided with an arm mechanism that makes it easy to adjust the position and posture of a measurement object having a complicated shape in the object setting device 60; It is the point connected with the arm type moving device as shown in Document 2, and the other configuration is the same. Therefore, the part already demonstrated by the X-ray-diffraction measurement system shown by patent document 1 is only demonstrated briefly.

  In this X-ray diffraction measurement system, the measurement object OB is set on the object setting device 60, X-ray diffraction measurement is performed, and the residual stress of the measurement object OB is measured. The X-ray diffraction measurement apparatus can adjust the position and orientation with respect to the measurement object OB by an arm type moving device. The object setting device 60 includes an arm mechanism, a triaxial moving mechanism, and a biaxial tilting mechanism, and the position and orientation of the X-ray diffraction measurement apparatus with respect to the measurement object OB can be adjusted by these mechanisms. Can be adjusted. When X-ray diffraction measurement of the measurement object OB is performed with this X-ray diffraction measurement system, first, the X-ray diffraction on the measurement object OB is adjusted by adjusting the position and orientation of the X-ray diffraction measurement device with respect to the measurement object OB. The irradiation point, the X-ray irradiation direction with respect to the measurement object OB, and the distance from the X-ray irradiation point to the imaging plate 15 where the diffraction ring is formed are set as set values. Next, it is determined whether or not the diffraction ring is missing, and it is confirmed that there is no missing or that the missing is less than allowable. Then, X-ray diffraction measurement is performed by irradiating the measurement object OB with X-rays. In the present embodiment, the measurement object OB is an iron gear.

  The X-ray diffraction measurement apparatus includes an X-ray emitter 10, a table 16 to which the imaging plate 15 is attached, a table driving mechanism 20 that rotates and moves the table 16, a laser detection device 30 that detects a diffraction ring, and the like. I have. The X-ray diffraction measurement system includes an arm-type moving device (not shown), a computer device 90, a high-voltage power supply 95, and an object setting device 60 together with the X-ray diffraction measurement device. Various types of circuits for controlling operation and inputting detection signals are connected to the above-described apparatus and mechanism, and are shown in FIG. Various circuits indicated by the dotted line are accommodated in a two-dot chain line in the housing 50.

  The casing 50 is formed in a substantially rectangular parallelepiped shape, and includes a bottom wall 50a, a front wall 50b, a rear wall 50e, a top wall 50f, a side wall (not shown), and corners of the bottom wall 50a and the front wall 50b. It is formed to have a notch wall 50c and a connecting wall 50d provided so as to be cut out from the front side to the back side of the sheet. The notch wall 50c is composed of a flat plate perpendicular to the bottom wall 50a and a parallel plate, and the connecting wall 50d is perpendicular to the side wall and has a predetermined angle with the bottom wall 50a. This predetermined angle is, for example, 30 to 45 degrees. One of the side walls is provided with a connection portion (not shown) connected to the support arm 51, and the connection portion is rotatable about the vertical direction of the paper surface of FIGS. The support arm 51 is a tip of an arm type moving device, and the case 50 (X-ray diffraction measuring device) can be set to an arbitrary position and posture by operating the arm type moving device.

  The object setting device 60 includes a so-called goniometer, and moves the stage 61 in the X, Y, and Z axis directions of FIGS. 1 and 2, respectively, and rotates (tilts) around the illustrated X axis and Y axis. ) One end of an arm mechanism 69 is fixed in the vicinity of the corner of the upper surface of the stage 61, and the other end of the arm mechanism 69 is fixed to a fixed plate PL having a square surface. The arm mechanism 69 of the fixed plate PL is The surface opposite the fixed surface is made of magnets. Therefore, as shown in FIGS. 1 and 2, if the measurement object OB is made of iron or stainless steel, the measurement object OB is set on the object setting device 60 by being adsorbed to the surface of the fixed plate PL. can do. The arm mechanism 69 has a plurality of joints, and can roughly adjust the position and posture of the fixed plate PL, that is, the set measurement object OB. Further, in the object setting device 60, the height adjusting mechanism 63, the first to fifth plates 64 to 68, and the stage 61 are respectively placed on the installation plate 62 formed in a flat plate shape placed on the installation surface. It is placed in order from top to bottom. The height adjustment mechanism 63 has an operation element 63a, and moves the first plate 64 up and down (that is, moves in the Z-axis direction) relative to the installation plate 62 by rotating the operation element 63a. By changing the vertical distance between the first plates 64, the height of the first plate 64, that is, the height of the stage 61 is changed.

  An operating element 65a is assembled to the second plate 65, and the third plate 66 is rotated about the X axis with respect to the second plate 65 by a rotation operation of the operating element 65a via a mechanism (not shown). The inclination angle of the third plate 66 around the X axis relative to the second plate 65, that is, the inclination angle of the stage 61 around the X axis is changed. An operation element 66a is assembled to the third plate 66, and the fourth plate 67 is rotated around the Y axis with respect to the third plate 66 by a rotation operation of the operation element 66a via a mechanism (not shown). The inclination angle of the fourth plate 67 around the Y axis relative to the third plate 66, that is, the inclination angle of the stage 61 around the Y axis is changed. An operating element 67a is assembled to the fourth plate 67, and the fifth plate 68 is moved in the X-axis direction with respect to the fourth plate 67 by a rotation operation of the operating element 67a. The position of the fifth plate 68 in the X-axis direction with respect to the fourth plate 67, that is, the position of the stage 61 in the X-axis direction is changed. An operation element 68a is assembled to the fifth plate 68, and the stage 61 is moved in the Y-axis direction with respect to the fifth plate 68 by a rotation operation of the operation element 68a. The position of the fifth plate 68 in the Y axis direction, that is, the position of the stage 61 in the Y axis direction is changed. That is, the object setting device 60 can roughly adjust the position and posture of the measurement object OB by the arm mechanism 69, and can finely adjust the position and posture of the measurement object OB by the operating elements 63a and 65a to 68a. ing.

  The X-ray emitter 10 extends in the left-right direction in the figure at the upper part in the case 50 and is fixed to the case 50. The X-ray emitter 10 is supplied with a high voltage from a high-voltage power supply 95 and receives X-rays at the bottom. Emits in the direction. In the present embodiment, the X-ray emitter 10 is an X-ray tube whose target for hitting electrons is chromium. This X-ray emitter 10 emits CrKα rays having a wavelength of 2.291 nm as characteristic X-rays having the highest intensity. When a command is input from the controller 91, the X-ray control circuit 71 outputs a driving current supplied to the X-ray emitter 10 from the high voltage power supply 95 so that X-rays with a constant intensity are emitted from the X-ray emitter 10. Control drive voltage. In addition, the X-ray emitter 10 includes a cooling device (not shown), and the X-ray control circuit 71 also controls a drive signal supplied to the cooling device.

  The table driving mechanism 20 is fixed to the housing 50 and includes a moving stage 21 below the X-ray emitter 10. The moving stage 21 is sandwiched between a pair of opposed plate-like guides 25, 25 in the table driving mechanism 20, and is output by a feed motor 22, a screw rod 23, and a bearing portion 24 fixed to the table driving mechanism 20. It moves in a plane parallel to the side wall of the housing 50 including the X-ray optical axis and in a direction perpendicular to the optical axis of the outgoing X-ray. An encoder 22a is incorporated in the feed motor 22, and the encoder 22a outputs a pulse train signal that alternately switches between a high level and a low level each time the feed motor 22 rotates by a predetermined minute rotation angle. And output to the feed motor control circuit 73.

  The position detection circuit 72 and the feed motor control circuit 73 operate according to commands from the controller 91. Immediately after the start of measurement, the feed motor control circuit 73 outputs a drive signal to the feed motor 22 so as to move the moving stage 21 toward the feed motor 22, and the position detection circuit 72 causes the stage 21 to reach the movement limit position. When the pulse train signal is no longer input from the encoder 22a, a signal indicating stop of the drive signal is output to the feed motor control circuit 73, and the count value is set to “0”. Thus, the feed motor control circuit 73 stops outputting the drive signal. This movement limit position becomes the origin position of the moving stage 21, and the position detection circuit 72 thereafter counts the pulse train signal from the encoder 22a every time the moving stage 21 moves, and adds or subtracts the count value depending on the moving direction. The movement distance x from the movement limit position is output as a position signal. When the feed motor control circuit 73 inputs the destination position of the moving stage 21 from the controller 91, the feed motor 22 is driven forward or backward until the position signal input from the position detection circuit 72 becomes equal to the input destination position. To do. Further, when the moving speed of the moving stage 21 is input from the controller 91, the feed motor control circuit 73 calculates the moving speed of the moving stage 21 using the number of pulses per unit time of the pulse train signal input from the encoder 22a. The feed motor 22 is driven so that the calculated movement speed becomes the input movement speed.

  The upper ends of the pair of guides 25, 25 are connected by a plate-like upper wall 26, and a through hole 26 a is provided in the upper wall 26, and the center position of the through hole 26 a is the emission of the X-ray emitter 10. Opposite the center position of the mouth 11, the outgoing X-rays enter the table drive mechanism 20 through the outgoing opening 11 and the through hole 26a. In a state where an imaging plate 15 to be described later is in the diffraction ring imaging position (the state shown in FIGS. 1 to 3), a through hole is formed at a position facing the through hole 26a of the moving stage 21 as shown in an enlarged view in FIG. 21a is formed. The moving stage 21 is assembled with a spindle motor 27 whose center of rotation is the position of the central axis of the emission port 11 and the through holes 26a, 21a. The output shaft 27a of the spindle motor 27 is cylindrical and has a circular cross section. Have A through hole 27b is provided on the opposite side of the output shaft 27a of the spindle motor 27, and a cylindrical passage member 28 for reducing the inner diameter of a part of the through hole 27b is provided on the inner peripheral surface of the through hole 27b. Is fixed. A slip ring 29 is attached to the output shaft 27a of the spindle motor 27, and wiring from a light receiving device 55 described later is connected thereto. The slip ring 29 is commercially available, and enables energization between a rotating one and a fixed one. Therefore, even if the light receiving device 55 is rotated by the rotation of the spindle motor 27, a signal output from the light receiving device 55 is input to the light receiving intensity detection circuit 88 described later via the slip ring 29.

  An encoder 27c is incorporated in the spindle motor 27. The encoder 27c controls a pulse train signal that alternately switches between a high level and a low level every time the spindle motor 27 rotates by a predetermined minute rotation angle. It outputs to the circuit 74 and the rotation angle detection circuit 75. Furthermore, the encoder 27c outputs an index signal that switches from the low level to the high level for a predetermined short period of time for each rotation of the spindle motor 27 to the controller 91 and the rotation angle detection circuit 75.

  When the rotation speed is input from the controller 91, the spindle motor control circuit 74 outputs a drive signal so that the rotation speed calculated from the number of pulses per unit time of the pulse train signal input from the encoder 27c becomes the input rotation speed. Output to the spindle motor 27. The rotation angle detection circuit 75 counts the number of pulses of the pulse train signal input from the encoder 27c, calculates the rotation angle θp from the count value, and outputs it to the controller 91. In addition, when the index signal is input from the encoder 27c, the rotation angle detection circuit 75 resets the count value to “0”. This is the position at a rotation angle of 0 °. Note that the position of the imaging plate 15 at a rotation angle of 0 ° means that the laser beam is irradiated when an index signal is input when a diffraction ring formed on the imaging plate 15 is read by laser irradiation from a laser detection device 30 described later. It is a position that has been. Since this position is at each radial position of the imaging plate 15, it is a line.

  The table 16 has a circular shape and is fixed to the tip of the output shaft 27 a of the spindle motor 27. The table 16 has a protruding portion 17 that protrudes downward from the central portion of the lower surface, and a thread is formed on the outer peripheral surface of the protruding portion 17. An imaging plate 15 is attached to the lower surface of the table 16. A through hole 15 a is provided in the center of the imaging plate 15, and the projection 17 is passed through the through hole 15 a, and a nut-shaped fixture 18 is screwed onto the outer peripheral surface of the projection 17, thereby imaging plate 15. Is fixed between the fixture 18 and the table 16. The fixture 18 is a cylindrical member, and a thread corresponding to the thread of the protrusion 17 is formed on the inner peripheral surface.

  The table 16, the protruding portion 17, and the fixture 18 are also provided with through holes 16 a, 17 a, and 18 a, and the inner diameter of the through hole 18 a is the same as the inner diameter of the passage member 28. That is, the emitted X-rays are emitted through the through holes 26a and 21a, the passage member 28, the through holes 27b, 27a1, 16a, 17a and 18a, and the inner diameter of the passage member 28 and the inner diameter of the through hole 18a are small. The X-ray emitted from the hole 18a becomes parallel light parallel to the axis of the through hole 27a1, and is emitted from the circular hole 50c1 of the housing 50.

  The imaging plate 15 moves to the diffraction ring imaging position together with the moving stage 21, the spindle motor 27, and the table 16, and also includes a diffraction ring reading region for reading the imaged diffraction ring, which will be described later, and a diffraction ring erasing region for erasing the diffraction ring. Move to. In this movement, the central axis of the imaging plate 15 is maintained in a plane formed by the optical axis of the outgoing X-ray and the position (line) at a rotation angle of 0 ° in the imaging plate 15, and the optical axis of the outgoing X-ray. Move in a direction perpendicular to.

  The laser detection device 30 irradiates the imaging plate 15 that images the diffraction ring with laser light, and detects the intensity of the light emitted from the imaging plate 15. The laser detection device 30 is sufficiently separated from the imaging plate 15 at the diffraction ring imaging position toward the feed motor 22 so that the X-ray diffracted by the measurement object OB is not blocked by the laser detection device 30. . The laser detection device 30 is an optical head including a laser light source 31, a collimating lens 32, a reflecting mirror 33, a dichroic mirror 34, an objective lens 36, and the like, and has the same configuration as that used for recording and reproduction of an optical disc. When a command is input from the controller 91, the laser drive circuit 77 outputs a drive signal to the laser light source 31 so that the intensity of the signal input from the photodetector 42 becomes a predetermined intensity. Laser light with a constant intensity is emitted from the laser light source 31. The photodetector 42 reflects a small amount by a dichroic mirror 34 to be described later, and outputs a signal having an intensity corresponding to the intensity of the laser beam received through the condenser lens 41, but the ratio of reflection at the dichroic mirror 34 is constant. Therefore, it can be considered that a signal having an intensity corresponding to the intensity of the emitted laser light is output. The collimating lens 32 collimates the laser light, the reflecting mirror 33 reflects the laser light toward the dichroic mirror 34, and the dichroic mirror 34 transmits most of the incident laser light (for example, 95%) as it is. The objective lens 36 focuses the laser light on the surface of the imaging plate 15. A focus actuator 37 is assembled to the objective lens 36. The focus of the laser light always matches the surface of the imaging plate 15 by a focus servo described later.

  When the focused laser beam is applied to the portion of the imaging plate 15 where the diffractive ring is imaged, a photo-stimulated luminescence phenomenon occurs, corresponding to the intensity of the diffracted X-ray at the time of diffractive ring imaging. Light is generated. The light generated by the stimulated light emission has a wavelength shorter than that of the laser light and passes through the objective lens 36 together with the reflected light of the laser light, but most of the light is reflected by the dichroic mirror 34, and the reflected light of the laser light is Most are transparent. The light reflected by the dichroic mirror 34 enters the photodetector 40 via the condenser lens 38 and the cylindrical lens 39. The photodetector 40 includes a four-part light receiving element including four light receiving elements having the same square shape, and outputs four light receiving signals (a, b, c, d) to the amplifier circuit 78. The cylindrical lens 39 is used to cause astigmatism.

  The amplification circuit 78 amplifies the four received light signals (a, b, c, d) and outputs them to the focus error signal generation circuit 79 and the SUM signal generation circuit 80. The focus error signal generation circuit 79 generates a focus error signal in the astigmatism method and outputs the focus error signal to the focus servo circuit 81. The focus servo circuit 81 starts to operate when a command is input from the controller 91, generates a focus servo signal based on the input focus error signal, and outputs the focus servo signal to the drive circuit 82. The drive circuit 82 drives the focus actuator 37 in accordance with the input focus servo signal to displace the objective lens 36 in the direction of the optical axis of the laser beam, so that the focal point of the laser beam is always on the surface of the imaging plate 15. Match.

  The SUM signal generation circuit 80 adds the four received light reception signals to generate a SUM signal and outputs it to the A / D conversion circuit 83. The intensity of the SUM signal is equivalent to the intensity of a small amount of laser light reflected by the imaging plate 15 and reflected by the dichroic mirror 34 and the intensity of light generated by the stimulated emission. Since the intensity of the reflected laser beam is substantially constant, the intensity of the SUM signal corresponds to the intensity of the light generated by the stimulated emission. That is, the intensity of the SUM signal corresponds to the intensity of diffracted X-rays in the imaged diffraction ring. When a command is input from the controller 91, the A / D conversion circuit 83 converts the instantaneous value of the input SUM signal into digital data and outputs it to the controller 91.

  Further, an LED light source 43 is provided adjacent to the objective lens 36. The LED light source 43 is controlled by the LED drive circuit 84 to emit visible light and erase the diffraction ring imaged on the imaging plate 15. When the LED drive circuit 84 receives a command from the controller 91, the LED drive circuit 84 supplies the LED light source 43 with a drive signal for generating visible light having a predetermined intensity.

  The X-ray diffraction measurement apparatus has an LED light source 44. As shown in FIGS. 2 to 4, the LED light source 44 is fixed to the lower surface of one end portion of the plate 45 disposed between the X-ray emitter 10 and the upper wall 26 of the table driving mechanism 20. The plate 45 is fixed to the output shaft 46 a of the motor 46 fixed in the housing 50 at the other end upper surface, and rotates in a plane parallel to the upper wall 26 by the rotation of the motor 46. Stopper members 47a and 47b are provided on the upper wall 26. When the plate 45 is rotated in the direction D1 in FIG. 4, the LED light source 44 is connected to the exit port 11 and the table of the X-ray emitter 10 when the stopper member 47a is rotated. The rotation of the plate 45 is regulated so that it stops at a position (position A) facing the through hole 26a of the upper wall 26 of the drive mechanism 20. On the other hand, when the plate 45 is rotated in the direction D2 in FIG. 4, the stopper member 47b is formed between the emission port 11 of the X-ray emitter 10 and the through hole 26a of the upper wall 26 of the table driving mechanism 20. The rotation of the plate 45 is restricted so that it stops at a position (B position) that is not blocked. In other words, the A position is a position where the plate 45 is in the state shown in FIGS. 2 and 3, and the LED light emitted from the LED light source 44 enters the passage of the passage member 28 provided in the through hole 27 a 1 of the spindle motor 27. This is the incident position. The B position is a position where X-rays emitted from the X-ray emitter 10 are not blocked by the plate 45. The LED light source 44 emits LED light according to a drive signal from an LED drive circuit 85 that is controlled by the controller 91. Although LED light is diffused visible light, when the plate 45 is at position A, a part of the light is emitted from the through-hole 18a through the same path as that of the outgoing X-ray. Becomes parallel light parallel to the axis.

  The motor 46 includes an encoder 46b. The encoder 46b outputs a pulse train signal that alternately switches between a high level and a low level to the rotation control circuit 86 every time the motor 46 rotates by a predetermined minute rotation angle. When a rotation direction and a rotation start command are input from the controller 91, the rotation control circuit 86 outputs a drive signal to the motor 46 to rotate the motor 46 in the indicated direction. When the input of the pulse train signal from the encoder 46b is stopped, the output of the drive signal is stopped. Thereby, the plate 45 can be rotated to the A position and the B position, respectively.

  An imaging lens 48 is provided on the notch wall 50 c of the housing 50, and an imager 49 is provided inside the housing 50. The image pickup device 49 is constituted by a CCD light receiver or a CMOS light receiver, and outputs a signal having an intensity corresponding to the light reception intensity of each image pickup device to the sensor signal extraction circuit 87. The imaging lens 48 and the imager 49 function as a digital camera that captures an image of a region around the irradiation point of the LED light on the measurement object OB located at a position set with respect to the imaging plate 15. The position set with respect to the imaging plate 15 is a position where the vertical distance L from the irradiation point of the X-ray and LED light on the measurement object OB to the imaging plate 15 is a predetermined distance. In this case, the depth of field by the imaging lens 48 and the imager 49 is set in a range before and after the irradiation point. The sensor signal extraction circuit 87 outputs the signal intensity data for each image pickup device of the image pickup device 49 to the controller 91 together with data for knowing the position (that is, pixel position) of each image pickup device.

  The optical axis of the imaging lens 48 is included in a plane including the optical axis of the X-rays emitted from the X-ray emitter 10 and the rotation reference position line of the imaging plate 15. The point at which the optical axes of the X-rays and LED light irradiated on the OB intersect is adjusted to be the irradiation point of the X-rays and LED light on the measurement object OB at the position set with respect to the imaging plate 15. Yes. Furthermore, when the incident angle of the X-ray and LED light with respect to the measurement object OB is a set value, the optical axis of the imaging lens 48 and the normal direction at the irradiation point of the X-ray and LED light of the measurement object OB are formed. The angle is made equal to the incident angle. Therefore, when the irradiation point of the X-ray and LED light on the measurement object OB is at a position set with respect to the imaging plate 15, and the LED light is irradiated at the incident angle set on the measurement object OB, The irradiation point of the LED light in the photographed image and the reception point of the LED light reflected by the measurement object OB are generated at the same position. Since the LED light applied to the measurement object OB is parallel light, the LED light generates scattered light and reflected light that is reflected substantially as parallel light at the irradiation point. The incident light is imaged at the position of the image pickup device 49 to form an image of the irradiation point, and the reflected light incident on the image forming lens 48 is collected by the image forming lens 48 and received by the image pickup device 49. It becomes an image. And when the irradiation point of LED light exists in the position set with respect to the imaging plate 15, and LED light is irradiated with the incident angle set to the measuring object OB, the scattered light which injects into the imaging lens 48 is shown. Since both the optical axis and the optical axis of the reflected light coincide with the optical axis of the imaging lens 48, the image of the irradiation point and the image of the light receiving point are at the same position.

  As shown in FIG. 5, the light receiving device 55 is attached to the table 16 so that the tip of the light receiving device 55 slightly protrudes from the surface of the table 16. The light receiving device 55 has an imaging lens 56 and a photo detector 57 attached to both ends of a cylindrical housing, respectively, and scattered light generated at the LED light irradiation point when the measurement object OB is irradiated with LED light. Is received to detect the intensity of the received light. The optical axis of the imaging lens 56 intersects the optical axis of the X-rays emitted from the X-ray emitter 10 (the optical axis of the LED light). It is the same as the position that intersects the optical axis of (the optical axis of the LED light). In addition, the angle at which the optical axis of the imaging lens 56 intersects the optical axis of the X-ray (LED optical axis) is such that a diffraction ring is formed between the optical axis of the X-ray (LED optical axis) and the imaging plate 15. In this embodiment, the X-ray emitter 10 emits 2.291Å CrKα rays as characteristic X-rays, and since the material of the measurement object OB is iron, it is 23.6 degrees. Is the value of That is, as shown in FIG. 5, when the X-ray irradiation point is at a set distance with respect to the imaging plate 15, the light receiving device 55 has an optical axis of the imaging lens 56 at a radial position where a diffraction ring is formed. Is attached so as to intersect the X-ray irradiation point. The attached circumferential position is the position of the line with the rotation angle 0 described above. The imaging plate 15 has a hole that is slightly larger than the tip of the light receiving device 55 around the position where the diffraction ring is formed. When the imaging plate 15 is attached to the table 16, this hole is the tip of the light receiving device 55. It is designed to fit in. The diffractive ring is not imaged in the portion of the imaging plate 15 where the hole is made, but does not affect the measurement accuracy of the residual stress because it is a part of the entire diffractive ring.

  The photodetector 57 is attached to a position where an image of the X-ray irradiation point is formed by the imaging lens 56 when the X-ray irradiation point is at a set distance from the imaging plate 15. The photodetector 57 has a small area attached to the center of a circular frame, and this frame is attached to a cylindrical casing. Therefore, the photodetector 57 has an optical axis (cylindrical shape) of the imaging lens 56. Only light that is substantially parallel to the central axis of the housing and incident on the imaging lens 56 is received. That is, when the X-ray irradiation point (LED light irradiation point) is at a set distance from the imaging plate 15, the light received by the photodetector 57 is almost the scattered light of the LED light. The photodetector 57 is connected to the slip ring 29 and a signal line, and outputs a signal having an intensity corresponding to the intensity of the received light to the received light intensity detection circuit 88 via the slip ring 29. When a command is input from the controller 91, the received light intensity detection circuit 88 converts the instantaneous value of a signal corresponding to the received light intensity output from the photodetector 57 into digital data at a set time interval and outputs the digital data to the controller 91.

  When the table 16 is rotated by the spindle motor 27, the light receiving device 55 rotates around the optical axis of the X-rays emitted from the X-ray emitter 10 (the optical axis of the LED light). The position where the axis intersects the optical axis of the X-ray (the optical axis of the LED light) and the intersecting angle do not change. That is, when the table 16 is rotated, the light receiving device 55 detects scattered light having the same optical path as that of the diffracted X-ray forming the diffraction ring over the entire circumference of the diffraction ring. Therefore, when the diffracted X-rays forming the diffraction ring are disturbed by the measurement object OB, the scattered light in the same optical path as the diffracted X-rays is also disturbed, and the received light intensity of the scattered light at each rotation angle. Can be obtained.

  The computer device 90 includes a controller 91, an input device 92, and a display device 93. The controller 91 is an electronic control unit mainly including a microcomputer including a CPU, ROM, RAM, a large capacity storage device, and the like, and executes various programs stored in the large capacity storage device to perform an X-ray diffraction measurement device. Control the operation of The input device 92 is connected to the controller 91 and is used by an operator to input various parameters, work instructions, and the like. The display device 93 includes the position and orientation of the X-ray diffraction measurement device (housing 50) with respect to the measurement location of the measurement object OB, in addition to the image including the irradiation point and the light receiving point imaged by the imaging device 49 on the display screen. A mark for properly setting is also displayed. Further, the display device 93 visually notifies the operator of various setting situations, operating situations, measurement results, and the like. The high voltage power supply 95 supplies the X-ray emitter 10 with a high voltage and current for X-ray emission.

  Next, using the X-ray diffraction measurement system including the X-ray diffraction measurement apparatus configured as described above, the position and orientation of the X-ray diffraction measurement apparatus with respect to the measurement object OB are adjusted, and then the measurement object OB is adjusted. A specific method for performing X-ray diffraction measurement will be described. The operator adsorbs the measurement object OB to the plate PL of the object setting device 60, moves the arm type moving device, moves the X-ray diffraction measurement device (housing 50) to the vicinity of the measurement object OB, and supplies power. To activate the X-ray diffraction measurement system. Thereafter, the X-ray diffraction measurement is performed in the order of the position and orientation adjustment step S1, the diffraction ring missing determination step S2, the diffraction ring imaging step S3, the diffraction ring reading step S4, the diffraction ring elimination step S5, and the residual stress calculation step S6. The portions already described in detail in Patent Document 1 of the prior art document will be simply described.

  The position and orientation adjustment step S1 is a step of adjusting the position and orientation of the X-ray diffraction measurement apparatus (housing 50) with respect to the measurement object OB. First, the operator operates the arm mechanism 69 of the arm-type moving device and the object setting device 60 and some of the five operators 63a, 65a, 66a, 67a, 68a, and the X-ray diffraction measurement device (housing 50). By adjusting the position and orientation of the measurement object OB with respect to the measurement object OB, the X-ray irradiation point on the measurement object OB is set to the target measurement position, and the X-ray incident direction, X-ray incident angle, and X The distance from the irradiation point of the line to the imaging plate 15 is set to a set distance. Next, the operator inputs to adjust the position and orientation from the input device 92. With this input, the controller 91 outputs a command to each circuit, moves the imaging plate 15 to the diffraction ring imaging position (the state shown in FIGS. 1 to 3), and drives the motor 46 to rotate the plate 45 to the A position. The LED light source 44 is turned on. As a result, LED light, which is parallel light, is emitted from the circular hole 50c1 of the housing 50 to the outside, and is irradiated near the target measurement position of the measurement object OB. Furthermore, the controller 91 causes the image pickup signal from the image pickup device 49 to be output from the sensor signal extraction circuit 87 to the controller 91 and causes the display device 93 to display an image near the irradiation position of the LED light created from this image pickup signal. At this time, the displayed image has a cross mark at a position on the captured image corresponding to the position where the optical axis of the imaging lens 48 intersects the image pickup device 49 independently of the image displayed by the imaging signal. Is displayed.

  In this case, the cross point of the cross mark is located at the center of the screen of the display device 93, the X-axis direction of the cross mark corresponds to the horizontal direction of the screen, and the Y-axis direction of the cross mark corresponds to the vertical direction of the screen. The cross point of the cross mark is a position where the irradiation point is imaged when the distance L from the irradiation point of the LED light to the imaging plate 15 is a set value, and at the same time, the distance L is the set value. When the LED light is incident on the measurement object OB at the incident angle set, the light receiving point is a position to be imaged. Further, the Y-axis direction of the cross mark is the irradiation direction of the LED light and the X-ray, and the direction in which this direction is projected onto the measurement object OB is the measurement direction of the residual normal stress.

  The operator operates the arm mechanism 69 of the object setting device 60 and the five operators 63a, 65a, 66a, 67a, 68a while viewing the image displayed on the display device 93, and performs X-rays on the measurement object OB. The position and orientation of the diffraction measurement device (housing 50) are adjusted so that the irradiation point of the LED light on the screen becomes the target measurement position of the measurement object OB and coincides with the cross point of the cross mark, and the light receiving point To match the cross point of the cross mark. As a result, the X-ray emitted from the X-ray emitter 10 is irradiated to the target measurement position of the measurement object OB, the distance from the X-ray irradiation point to the imaging plate 15 becomes a set value, and the measurement object OB. The incident angle of X-rays with respect to is a set value. If the LED light irradiation point and the light receiving point cannot be matched with the cross mark cross point due to obstruction due to the unevenness of the measurement object OB, only the LED light irradiation point is set as the cross mark cross point. Try to match. At this time, since the incident angle of the X-ray with respect to the measurement object OB does not become a set value, the incident angle of the X-ray is calculated from the diffraction ring detected in the diffraction ring reading step S4 described later. This calculation will be described in detail in the residual stress calculation step S6 described later.

  In the next diffraction ring missing determination step S <b> 2, the operator inputs from the input device 92 that the diffraction ring missing determination is performed. With this input, the controller 91 starts the program of the flow shown in FIG. Hereinafter, it demonstrates along the flow of FIG. First, in step S12, the variables n and m are set to zero. The variable n is a variable assigned to data corresponding to the intensity of scattered light input from the received light intensity detection circuit 88, and the variable m is when the data is greater than or equal to a set value (when the intensity of scattered light is greater than or equal to the set intensity). ) Is a variable that increases by one. Next, in step S14, an operation start command is output to the received light intensity detection circuit 88, and in step S16, an operation start command is output to the rotation angle detection circuit 75. As a result, data corresponding to the intensity of scattered light and rotation angle data of the table 16 are input to the controller 91 at time intervals set in the received light intensity detection circuit 88 and the rotation angle detection circuit 75. Next, at step 18, an operation start command and a rotation speed are output to the spindle motor control circuit 74. As a result, the spindle motor 27 starts rotating at the rotation speed set in the controller 91, and the light receiving device 55 also rotates around the optical axis of the emitted X-ray. Next, in step S20, the process waits for an index signal to be input from the encoder 27C. If the index signal is input, it is determined Yes and the process proceeds to step S22. In step S22, the digital data (light reception intensity) input from the light reception intensity detection circuit 88 is captured and stored in the memory. Next, in step S24, if the acquired digital data (light reception intensity) is greater than or equal to the set value, it is determined Yes, and in step S26, 1 is input to R (n) and m is incremented. If the acquired digital data (light reception intensity) is smaller than the set value, No is determined, and 0 is input to R (n) in step S28.

  Next, in step S30, n is incremented, and in step S32, it is determined whether or not n · ΔΘ, which is the rotation angle at which digital data (light reception intensity) is next taken, is not 360 ° or more. ΔΘ is a preset minute interval of rotation angle for taking in digital data (light reception intensity). Since n · ΔΘ is a minute value at the start of data capture, it is determined No and the process proceeds to step S34, and the digital data (rotation angle) input from the rotation angle detection circuit 75 in step S34 is obtained. The determination is No until the difference between the digital data acquired in step S36 and n · ΔΘ is within an allowable value, and step S34 and step S36 are repeated. This is to wait until the acquired digital data (rotation angle) is approximately n · ΔΘ. When the acquired digital data (rotation angle) is approximately n · ΔΘ, the determination is Yes, the process returns to step S22, and the digital data (received light intensity) input from the received light intensity detection circuit 88 is acquired and stored in the memory. In this way, the processing from step S22 to step S36 is repeated, and corresponding to the rotation angles 0 °, ΔΘ, 2, · ΔΘ... Is input, and when it is less than the predetermined value, “0” is input. This is a process of storing “1” in a place where a diffraction ring is formed and “0” in a place where a diffraction ring is not formed. Further, when the received light intensity is equal to or greater than a predetermined value, m is incremented, whereby the number of data whose received light intensity is equal to or greater than the predetermined value is counted.

  Then, when the processes of steps S22 to S36 are repeated and n is incremented in step S30, n · ΔΘ becomes 360 ° or more, that is, the light receiving device 55 makes one rotation, and Yes in step S32. The determination is made and the process goes to step S38. In step S38, an operation stop command is output to the spindle motor control circuit 74, the light reception intensity detection circuit 88, and the rotation angle detection circuit 75 to stop the rotation of the spindle motor 27 and to output digital data of the light reception intensity and the rotation angle. Stop. Next, in step S40, the diffraction ring image is displayed on the display device 93 using “1” or “0” stored for each rotation angle. This is a process of adding a color to a dot on the circumference at a location “1” and not adding a color to a location “0”. Thus, the operator can determine whether or not the diffraction ring is missing by looking at the display device 93. Next, in step S42, it is determined whether or not the ratio of the number of data m whose received light intensity is greater than or equal to a predetermined value with respect to the total number of data (n + 1) is greater than or equal to an allowable value. In S44, “no missing diffraction ring” is displayed on the display device 93. On the other hand, if it is less than the allowable value, it is determined as No, and “diffractive ring missing” is displayed on the display device 93 in step S46. The operator can determine whether or not a defect occurs in the diffraction ring by looking at the display displayed on the display device 93. The allowable value at this time is a value close to 1. Then, the program ends at step S48.

  When there is a missing portion in the diffraction ring, the operator identifies the uneven portion of the measurement object OB that causes the missing portion from the missing portion of the diffraction ring image, and operates the arm mechanism 69 of the object setting device 60 and the five operations. The children 63a, 65a, 66a, 67a, 68a are operated to adjust the position and posture of the X-ray diffraction measurement apparatus (housing 50) with respect to the measurement object OB so as not to be lost in the diffraction ring. In this adjustment, the receiving point of the reflected light of the LED light is ignored, and the incident direction of the LED light is changed while the irradiation point of the LED light matches the target position of the measurement object OB and the cross point of the cross mark. It is adjustment. Also at this time, since the incident angle of the X-ray with respect to the measurement object OB does not become a set value, the incident angle of the X-ray is calculated from the diffraction ring detected in the diffraction ring reading step S4 described later. When the adjustment is completed, the operator performs the diffraction ring missing determination step S2 described above again, and confirms whether or not the diffraction ring is missing. The operator can execute the position / orientation adjustment step S1 and the diffraction ring missing determination step S2 any number of times when the diffraction ring is missing. If it is determined that the measurement accuracy does not deteriorate, the next diffraction ring imaging step S3 can be performed even if there is a missing portion in the diffraction ring image.

  If the operator determines that the next diffraction ring imaging step S <b> 3 may be performed, the operator inputs an end of position and orientation adjustment from the input device 92. Thus, the controller 91 outputs a command to each circuit, turns off the LED light source 44, stops outputting the imaging signal, drives the motor 46, and rotates the plate 45 to the B position. As a result, the X-ray from the X-ray emitter 10 can enter the through hole 26a in the upper wall 26 of the table drive mechanism 20.

  In the next diffraction ring imaging step S3, the operator inputs the material of the measurement object OB (iron in the present embodiment) from the input device 92 and inputs the measurement start. In the adjustment of the position and orientation of the X-ray diffraction measurement device (housing 50) with respect to the measurement object OB described above, the incident angle of the X-ray (LED light) cannot be set to the set value (light receiving point of the LED light) Is not matched with the cross point of the captured image), “X-ray incident angle calculation” is input. This is because the X-ray incident angle is calculated from the diffraction ring detected in the diffraction ring reading step S4 described later as described above. Accordingly, the controller 91 controls the spindle motor control circuit 74 to rotate the imaging plate 15 at a low speed, and stops the rotation of the imaging plate 15 when the index signal is input from the encoder 27c. Thereby, the diffraction ring is imaged on the imaging plate 15 in a state where the rotation angle is 0 ° at the time of reading the diffraction ring. Next, the controller 91 controls the X-ray control circuit 71 to cause the X-ray emitter 10 to start emitting X-rays. Thereby, the diffraction ring is imaged on the imaging plate 15 by the diffracted X-rays generated at the X-ray irradiation point in the measurement object OB. Then, after a predetermined time has elapsed, the X-ray control circuit 71 is controlled to cause the X-ray emitter 10 to stop emitting X-rays.

  Next, the controller 91 executes the diffraction ring reading step S4 automatically or by operator input. The controller 91 controls the feed motor control circuit 73 to move the imaging plate 15 to the reading start position in the diffraction ring reading region. The reading start position is a position where the irradiation position of the laser beam is slightly inside the circle with the diffraction ring reference radius Ro. The diffraction ring reference radius Ro is the radius of the diffraction ring formed on the imaging plate 15 when the residual stress of the measurement object OB is “0”, and the X-ray diffraction angle 2Θx of the measurement object OB. (Θx is a Bragg angle) and the distance L from the X-ray irradiation point to the imaging plate 15 are calculated by the following formula: Ro = L · tan (2Θx). The X-ray diffraction angle 2Θx is determined by the material of the measurement object OB, and the distance L is adjusted to a set value. Therefore, if the diffraction angle 2Θx is stored in advance for each material of the measurement object OB, the measurement is performed. The diffraction ring reference radius Ro can be calculated by inputting the material of the object OB.

  Next, the controller 91 controls the spindle motor control circuit 74 to rotate the spindle motor 27 at a predetermined rotation speed, and controls the laser drive circuit 77 to irradiate the imaging plate 15 with laser light from the laser detection device 30. The focus servo circuit 81 is controlled to start focus servo. Further, the rotation angle detection circuit 75 is controlled to start the output of the rotation angle θp of the spindle motor 27 (imaging plate 15), and the A / D conversion circuit 83 is controlled to output the data of the instantaneous value I of the SUM signal. , And the feed motor control circuit 73 is controlled to rotate the feed motor 22 to move the imaging plate 15 from the reading start position in the lower right direction in FIGS. 1 and 2 at a constant speed. Thereby, the irradiation position of the laser beam starts to rotate relatively spirally on the imaging plate 15. Thereafter, every time the imaging plate 15 rotates by a predetermined small angle, the controller 91 outputs the data of the instantaneous value I of the SUM signal output from the A / D conversion circuit 83 and the rotation angle θp output from the rotation angle detection circuit 75. And the data of the movement distance x output from the position detection circuit 72 are input and stored in correspondence with each other. The moving distance x is stored after being converted into a radial distance r (radius value r) of the laser beam irradiation position. As a result, the data representing the instantaneous value I, the rotation angle θp, and the radius value r of the SUM signal are sequentially stored for each predetermined rotation angle with respect to the irradiation position of the laser beam rotating in a spiral.

  In parallel with the storing operation for each predetermined rotation angle of the data representing the instantaneous value I, the rotation angle θp, and the radius value r of the SUM signal, the controller 91 sets the instantaneous value I of the SUM signal with respect to the radius value r for each rotation angle θp. A curve is created, and a radius value rα and a SUM signal intensity value Iα corresponding to the peak of the curve are stored. This is a process of obtaining the intensity distribution of the diffracted X-rays in the radial direction for each rotation angle α of the diffraction ring, and obtaining the radius value rα at the location where the intensity of the diffracted X-rays peaks and the intensity Iα corresponding to the intensity of the diffracted X-rays. It is. Then, the radius value rα and the intensity Iα are acquired at all the rotation angles θp (rotation angle α), and when the instantaneous value I of the SUM signal to be detected becomes sufficiently smaller than the intensity Iα, the data storage is finished. . As a result, the intensity distribution corresponding to the intensity of the diffracted X-rays in the diffraction ring is detected by the data group of the instantaneous value I, the rotation angle θp and the radius value r, and the shape of the diffraction ring is detected by the radius value rα for each rotation angle α. It will be done. Thereafter, the controller 91 outputs a command to each circuit, stops the focus servo, stops the irradiation of the laser beam, stops the operation of the A / D conversion circuit 83 and the rotation angle detection circuit 75, and Stop operation. The rotation of the imaging plate 15 is continued.

  Next, the controller 91 executes the diffraction ring elimination step S5 automatically or by operator input. The controller 91 controls the feed motor control circuit 73 to move the imaging plate 15 to the erase start position in the diffraction ring erase region. The erasure start position of the imaging plate 15 is a position where the center of the LED light output from the LED light source 43 is further inside than the reading start position with respect to the circle having the diffraction ring reference radius Ro. Next, the controller 91 controls the LED drive circuit 84 to irradiate the imaging plate 15 with the LED light from the LED light source 43 and controls the feed motor control circuit 73 so that the imaging plate 15 is moved from the erasing start position. The feed motor 22 is rotated so as to move at a constant speed in the lower right direction in FIGS. 1 and 2 to the erase end position. The erase end position is a position where the center of the LED light is outside the diffraction ring reference radius Ro by the same distance as the erase start position. Thereby, LED light is irradiated spirally on the imaging plate 15, and the imaged diffraction ring is erased.

  When the imaging plate 15 reaches the erasing end position, the controller 91 controls the feed motor control circuit 73 to stop the movement of the imaging plate 15 and controls the LED drive circuit 84 to stop the irradiation of the LED light to detect the position. The operation of the circuit 72 is stopped, and the spindle motor control circuit 74 is controlled to stop the rotation of the spindle motor 27 (imaging plate 15).

  Next, the controller 91 executes the residual stress calculation step S6 automatically or by operator input. This is a calculation using the cos α method using the data of the radius value rα for each rotation angle α which is the shape of the diffraction ring, the distance L from the X-ray irradiation point to the imaging plate 15 and the X-ray incident angle ψ. This is a calculation process for calculating the residual stress. This calculation is a well-known technique and is described in detail in, for example, Japanese Patent Laid-Open No. 2005-241308 [0026] to [0044], and thus the description thereof is omitted. As described above, in the adjustment of the position and orientation of the X-ray diffraction measurement apparatus (housing 50) with respect to the measurement object OB, the incident angle ψ of X-rays (LED light) cannot be set to the set value (LED In the case where the light receiving point is not aligned with the cross point of the photographed image), it is necessary to calculate the X-ray incident angle ψ before calculating the residual stress. The calculation method will be described below.

  The incident angle of the X-ray can be obtained from a relational value or a relational curve between a pre-stored computed value and the incident angle ψ of the X-ray by obtaining a calculation value to be described later from the relationship of the intensity Iα to the rotation angle α. Before explaining this calculation, the relationship between the intensity of diffracted X-rays in the circumferential direction of the diffraction ring and the incident angle ψ of X-rays will be described. FIG. 9 shows the change in the intensity of the diffracted X-ray with respect to the circumferential direction of the diffraction ring (relation between the rotation angle α and the intensity Iα) when the X-ray incident angle ψ is 0 °, 20 °, and 45 °. It is. The intensity is the highest near the rotation angle of 0 ° (360 °), the intensity is the lowest near the rotation angle of 180 °, and the difference in the intensity decreases as the X-ray incident angle ψ decreases. . The reason is considered as follows. The X-rays incident on the measurement object OB penetrate to a certain depth from the surface of the measurement object OB, but are diffracted. And the intensity | strength becomes weak, so that the diffracted X-ray travels the measurement object OB long. FIG. 10 shows X-ray diffraction in the measurement object OB with exaggerated diffracting depth. As shown in FIG. 10A, the rotation angle is 0 ° (360 °). The distance that the X-ray whose position is diffracted travels in the OB in the measurement object is the shortest, and the distance that the X-ray diffracted at the rotation angle of 180 ° travels in the measurement object is the longest. Then, as shown in FIGS. 10A to 10C, as the incident angle ψ of the X-ray becomes smaller (the angle formed by the optical axis of the X-ray and the surface of the measurement object becomes larger), the rotation angle becomes 0 °. The difference in the distance traveled by the diffracted X-ray at 180 ° in the measurement object OB is small. As a result, an intensity change in the circumferential direction as shown in FIG. 9 occurs in the diffraction ring, and the degree of this intensity change becomes smaller as the X-ray incident angle ψ becomes smaller.

Therefore, for each material of the measurement object OB, obtaining an intensity change in the circumferential direction of the diffraction ring of the diffraction ring imaged by irradiating X-rays with a known incident angle ψ If a calculated value representing the degree of intensity change is calculated from the obtained intensity change, and a relation table or a relation curve in which the calculated value is made to correspond to the incident angle ψ of X-rays is stored, imaging is performed in the measurement. The incident angle ψ of the X-ray can be obtained from the diffracted ring. That is, if a calculation value representing the degree of intensity change is calculated from the relationship of the intensity Iα with respect to the rotation angle α obtained as described above, and this calculation value is applied to a stored relationship table or relationship curve, the X-ray Can be obtained. Any of the following may be used as a calculated value representing the degree of intensity change. Alternatively, a plurality of relational tables or relational curves may be created using a plurality of calculated values below, and the X-ray incident angles obtained from each may be averaged.
-The value obtained by dividing the difference between the peak value and bottom value of intensity Iα after smoothing the intensity change curve by the average intensity (ratio of fluctuation range)
-The value obtained by adding the absolute value of the difference from the average intensity of the intensity Iα in the intensity change curve, dividing by the number of data, and further dividing by the average intensity (ratio of average deviation)
-The square of the difference from the average intensity of the intensity Iα in the intensity change curve is added and divided by the number of data to obtain the positive square root value, and further divided by the average intensity (ratio of standard deviation)
If an average value of the instantaneous value I of the SUM signal when the diffraction ring is not formed is obtained, and an arithmetic value obtained by subtracting this value from the intensity Iα is used as the intensity Iα, a small amount is used. However, the influence of the background can be excluded, and the detection accuracy of the X-ray incident angle ψ can be improved.

  Although the X-ray incident angle ψ can be calculated by the above-described calculation, the optical axis of the X-ray and the X-ray are further calculated using the intensity Iα (intensity change with respect to the circumferential direction of the diffraction ring) for each rotation angle α. The rotation angle of the portion where the plane including the normal line of the measurement object at the irradiation point of the line intersects the imaged diffraction ring is obtained. This is to obtain an angle formed by the plane including the optical axis of the X-ray and the line including the normal line of the measurement object with respect to the plane including the line of the rotation angle 0 °. If the normal line of the measurement object is included in a plane including the X-ray optical axis and a line with a temporary rotation angle of 0 °, the curve of the intensity change with respect to the circumferential direction of the diffraction ring, as shown in FIG. The rotation angle 0 ° (360 °) is the peak point, and the rotation angle 180 ° is the bottom point. However, since the LED light receiving point is not adjusted to match the cross point of the photographed image, the angle formed by the normal line of the measurement object with respect to the plane including the optical axis of the X-ray and the line having a rotation angle of 0 ° is It becomes a certain numerical value, and the peak point and the bottom point deviate from the positions of the rotation angle 0 ° (360 °) and the rotation angle 180 °. And the amount of deviation from 0 ° (360 °) and 180 ° of the rotation angle at the peak point and the bottom point is the X-ray light with respect to the plane including the X-ray optical axis and the rotation angle 0 ° line. The angle formed by the axis and the plane including the normal line of the measurement object, and the rotation angle of 0 °, 180 at the point where the X-ray optical axis and the plane including the normal line of the measurement object intersect the imaged diffraction ring. Deviation from °.

If the residual stress is calculated while this deviation is left as it is, the accuracy of the residual stress becomes worse. Therefore, the residual stress is calculated after correcting the rotation angle α so that the rotation angle at the peak point and the bottom point is 0 ° (360 °) and 180 °. The amount of deviation from 0 ° (360 °) and 180 ° of the rotation angle of the peak point and the bottom point in the curve of the intensity change with respect to the circumferential direction of the diffraction ring is calculated as follows. The intensity Iα ′ obtained by performing the smoothing process using the data of the intensity Iα for each rotation angle α is obtained, and the minimum value of the intensity Iα ′ is subtracted from the intensity Iα ′ and divided by the difference between the maximum value and the minimum value of the intensity Iα ′. Then, the numerical value is set to a value Iα ″ from 0 to 1 (that is, a normalized value). Next, a value near 0 is determined for Θd of I = cos (α + Θd), and I = cos ( When the rotation angle α is applied to α + Θd), the square of the deviation of Iα ″ from I is calculated and added to the intensity Iα ″ for every rotation angle α, and divided by the number of data obtaining sigma ^2. Repeat this calculation each time changing the [theta] d, sigma ² to seek the smallest [theta] d. this is visually, with respect to the curve of intensity variation relative to the circumferential direction of the diffraction rings, the curve of cosα And move the curve of cos α laterally to the circumferential direction of the diffraction ring This is a process for obtaining a movement amount Θd when it most closely matches the degree change curve, where Θd is 0 ° (360 °) of the rotation angle of the peak point and the bottom point in the curve of the intensity change with respect to the circumferential direction of the diffraction ring. °), the deviation amount Θd from 180 ° The correction of the rotation angle α is performed by adding the deviation amount Θd obtained as described above to the rotation angle α, and the rotation angle based on the normal rotation angle 0 °. After that, the residual stress may be calculated by a calculation using a normal cos α method.

  When the calculation of the residual stress is completed, the controller 91 displays the calculation result of the residual stress on the display device 93. In addition to the residual stress, measurement conditions such as the distance L from the X-ray irradiation point to the imaging plate 15, the incident angle ψ of the X-ray, and the shape curve of the diffraction ring (curve obtained from the radius value rα for each rotation angle α) The intensity distribution image of the diffraction ring (the instantaneous value Iα is converted into the lightness, and the image created from the data group of the lightness, the rotation angle θp and the radius value r corresponding to the instantaneous value Iα) may be displayed. . By looking at the result, the operator can evaluate the fatigue level of the measurement object OB, evaluate the processing result by shot peening, and the like.

  As can be understood from the above description, in the above embodiment, the X-ray emitter 10 that emits X-rays toward the target measurement object OB, and the X-ray emitter 10 toward the measurement object OB. X-rays are emitted, and the diffracted X-rays generated at the X-ray irradiation spot of the measurement object OB are reflected on the imaging plate 15 that intersects the optical axis of the X-rays emitted from the X-ray emitter 10 perpendicularly. It includes an X-ray diffraction measurement device that receives a light and forms a diffraction ring as an image of a diffraction X-ray on the imaging plate 15 and detects the shape of the diffraction ring, a table driving mechanism 20 and various circuits. In the X-ray diffraction measurement system, LED light that is parallel light having the same optical axis as that of the X-ray emitted from the X-ray emitter 10 in a state where the X-ray is not emitted from the X-ray emitter 10 is measured. Output to object OB LED light emitter 44 comprising a passage such as the LED light source 44 and the through hole 26a, the passage member 28, the through hole 27b, etc., and a part of the scattered light generated in the measurement object OB by the LED light emitted from the LED light emitter Is received by a photodetector 57 through an imaging lens 56, and the light receiving device 55 detects the received light intensity. The optical axis of the imaging lens 56 is relative to the optical axis of the X-ray emitted from the X-ray emitter 10. A light receiving device 55 intersecting at a set angle at a set distance from the imaging plate 15, and a spindle motor that rotates the light receiving device 55 around the optical axis of the X-ray emitted from the X-ray emitter 10 27, an encoder 27a for detecting a rotation angle by the spindle motor 27 and a rotation angle detection circuit 75, and the spindle motor 27 rotates the light receiving device 55 to The received light intensity detected by the light receiving device 55 is acquired in correspondence with the rotation angle detected by the driver 27a and the rotation angle detection circuit 75, and the missing information of the diffraction ring is obtained using the received light intensity corresponding to the acquired rotation angle. An X-ray diffraction measurement system including a program of the controller 91 for calculating.

  According to this, before emitting X-rays from the X-ray emitter 10 toward the measurement object OB to form a diffraction ring, visible light is emitted from the LED light source 44 and the LED light emitter comprising the LED light path. The missing information of the diffraction ring can be obtained simply by emitting the light to the measurement object and rotating the light receiving device 55 once by the spindle motor 27 to obtain the received light intensity for each rotation angle. That is, the measurement efficiency is not deteriorated, and it is possible to confirm whether a missing portion is generated in the diffraction ring while suppressing the cost increase of the apparatus as much as possible. In this case, the position of the distance set from the imaging plate 15 that is the position where the optical axis of the imaging lens 56 intersects the optical axis of the X-ray emitted from the X-ray emitter 10 is the object to be measured OB. This is a position that becomes an X-ray irradiation point when a diffraction ring is formed by emitting X-rays. Further, the set angle, which is an angle at which the optical axis of the imaging lens 56 intersects the optical axis of the X-ray emitted from the X-ray emitter 10, means that the diffracted X-ray forming the diffraction ring is the X-ray. This is the angle that intersects the optical axis.

  In the above embodiment, the table 16 to which the imaging plate 15 is attached is provided, the light receiving device 55 is attached to the table 16, and the spindle motor 27 is the X-ray emitted from the X-ray emitter 10. It is made to rotate around the optical axis. According to this, in the X-ray diffraction measurement system including the X-ray diffraction measurement device, the imaging plate 15 is attached to the table 16 as shown in the prior art document, and after imaging the diffraction ring, the table 16 is rotated. If it is a device that reads the diffraction ring by the laser detection device 30, the LED light emitter comprising the LED light source 44 and the LED light path, the spindle motor 27, the encoder 27a, and the rotation angle detection circuit 75 are already provided. Cost up.

  In the above embodiment, the light receiving device 55 sets the distance from the X-ray irradiation point of the measurement object OB to the imaging plate 15 on the table 16 to a preset distance, and then from the X-ray emitter 10. When the measurement object OB is irradiated with X-rays, it is attached at a position where a diffraction ring is formed, and the imaging plate 15 attached to the table 16 has the light receiving device 55 removed. According to this, the light receiving device 55 can receive the scattered light having the same optical path as that of the diffracted X-ray forming the diffraction ring, and can calculate the missing information of the diffraction ring with high accuracy. Further, although the portion removed from the imaging plate 15 cannot image the diffraction ring, it is a part of the whole, and therefore has little influence on the measurement accuracy of the residual stress calculated based on the shape of the diffraction ring.

(Modification 1)
The above embodiment can be variously modified without departing from the object of the present invention. In the above embodiment, the light receiving device 55 is a position where the diffraction ring is formed on the table 16 when the distance from the X-ray irradiation point to the imaging plate 15 is the set distance. However, if it does so, the imaging plate 15 attached to the table 16 removes the portion of the light receiving device 55 and cannot image a part of the diffraction ring. In addition, it is necessary to accurately remove a predetermined portion of the imaging plate 15 attached to the table 16. On the other hand, the missing information of the diffraction ring is strictly determined, but it is possible to image all of the diffraction rings, and FIG. 7 shows that it is not necessary to remove a part of the imaging plate 15. It is a modification. In this modification, since the light receiving device 55 is attached to the outer peripheral edge portion of the table 16, the imaging plate 15 has no place to be removed, so that the entire diffraction ring is imaged. Also in this modified example, the optical axis of the imaging lens 56 of the light receiving device 55 intersects with the optical axis of the X-ray emitted from the X-ray emitter 10, and the intersecting position is a place to be an X-ray irradiation point, that is, This is the position where the distance to the imaging plate 15 is the set distance. Therefore, the scattered light of the LED light received by the light receiving device 55 is an optical path outside the optical path of the diffracted X-rays forming the diffractive ring, and the determination of the missing diffractive ring becomes severe. That is, there are cases where it is determined that the diffraction ring is missing even when the diffraction ring is not missing. However, in this modified example, it is not necessary to remove a part of the imaging plate 15 and the entire diffractive ring can be imaged. In addition, the lack of a weak diffractive ring that occurs outside the normal diffractive ring is eliminated. There is also an advantage that the presence or absence can also be determined. In this modification, only the mounting position of the light receiving device 55 is different, and all other descriptions in the above embodiment can be applied.

  In addition, a modification in which the mounting position of the light receiving device 55 is an intermediate radial position between the above embodiment and the above modification is also conceivable. In this modified example, if the mounting position of the light receiving device 55 is set to a radial position slightly outside the radial position where the diffraction ring is formed when the distance from the X-ray irradiation point to the imaging plate 15 is the set distance, diffraction is performed. The entire ring can be imaged, and the determination of the missing diffractive ring is only as severe as having virtually no effect.

(Modification 2)
The embodiment described above can be further modified. In the above embodiment, the light receiving device 55 is attached to the table 16, and the light receiving device 55 is also rotated around the optical axis of the X-ray emitted from the X-ray emitter 10 by the rotation of the table 16. However, if the scattered light intensity of the LED light can be obtained for each rotation angle, it is possible to determine whether or not the diffraction ring is missing. Therefore, without rotating the light receiving device 55, the plurality of light receiving devices 55 can be moved to a plurality of rotation angles. You may make it attach to the position corresponded to. In this case, a plurality of light receiving devices 55 may be attached around the circular hole 50c1 of the housing 50 of the X-ray diffraction measurement device as in the modification shown in FIG. Although FIG. 8 is a cross-sectional view, six or more light receiving devices 55 are attached around the circular hole 50c1 at the same rotation angle interval. In this case, all the optical axes of the imaging lenses 56 of the plurality of light receiving devices 55 intersect with the optical axis of the X-ray emitted from the X-ray emitter 10, and the intersecting positions are X-ray irradiation points. That is, it is a position where the distance to the imaging plate 15 is a set distance. In this case as well, the optical path is outside the optical path of the diffracted X-rays forming the diffraction ring, and the determination of the lack of the diffraction ring becomes severe. Further, in this case, a point that is changed in the above embodiment by attaching a plurality of light receiving devices 55 instead of rotating the light receiving device 55 is that the slip ring 29 is not required, and from the plurality of light receiving devices 55. A signal switching circuit for switching the signals in steps and inputting them to the received light intensity detection circuit 85 is provided, and steps S16 to S36 of the flow program shown in FIG. Thus, the processing is performed to obtain digital data of the received light intensity of each of the plurality of light receiving devices 55. All other descriptions in the above-described embodiment can be applied.

  The modification shown in FIG. 8 is an example applied to an X-ray diffraction measurement device that images a diffraction ring on the imaging plate 15 and rotates the imaging plate 15 to detect the shape of the diffraction ring by the laser detection device 30. However, since it is not necessary to rotate the light receiving device 55, if the X-ray diffraction measurement device for detecting the diffraction ring is applied to an X-ray diffraction measurement device that does not require a rotation mechanism, the device can be made compact as it is. There is. An X-ray diffraction measurement apparatus that does not require a rotating mechanism includes, for example, a semiconductor element such as an X-ray CCD having a plane as wide as the imaging plate 15, and when X-ray irradiation from the X-ray emitter 10 is performed, This is an apparatus for detecting the intensity distribution of diffracted X-rays in the diffraction ring by means of electrical signals output from each pixel of the line CCD. Further, a semiconductor element such as a small-sized X-ray CCD is scanned in two directions while detecting the position, and the diffracted X-rays in the diffraction ring are obtained from the electrical signal output from each pixel of the X-ray CCD and the scanning position of the X-ray CCD. It may be an apparatus that detects the intensity distribution. In addition, a device using a scintillation counter that detects fluorescence emitted from the scintillator with a photomultiplier tube (PMT) instead of a semiconductor element such as an X-ray CCD may be used.

  As can be understood from the second modification, in the second modification, the LED light is emitted around the optical axis of the X-ray emitted from the X-ray emitter 10 and includes the LED light source 44 and the LED light passage. A plurality of light receiving devices 55 for detecting a received light intensity by receiving a part of scattered light generated by the measurement object OB from the LED light emitted from the detector by the photodetector 57 through the imaging lens 56, and forming an image. Each of the optical axes of the lenses 56 intersects the X-ray optical axis emitted from the X-ray emitter 10 at the same set angle at a distance set from the imaging surface of the diffraction ring. A plurality of light receiving devices 55 and a program of the controller 91 for calculating missing information of the diffraction ring using the received light intensity detected by the plurality of light receiving devices 55.

  According to this, before emitting X-rays from the X-ray emitter 10 toward the measurement object OB and forming a diffraction ring, LED light is emitted from the LED light emitter comprising the LED light source 44 and the LED light path. The missing information of the diffraction ring can be obtained only by emitting the light to the measurement object OB and obtaining the respective light receiving intensities of the plurality of light receiving devices 55. That is, the measurement efficiency is not deteriorated also by the second modification, and it is possible to confirm whether a missing portion is generated in the diffraction ring while suppressing the cost increase of the apparatus as much as possible. In this case, since the rotation means and the rotation angle detection means are not required, if the X-ray diffraction measurement device is a device using a semiconductor element such as an X-ray CCD as a means for detecting the shape of the diffraction ring, the device is used. Can remain compact.

  Moreover, in the said modification 2, the several light-receiving device 55 is arrange | positioned around the circular hole 50c1 which is a hole which the X-ray of the housing | casing 50 of an X-ray-diffraction measuring apparatus passes. According to this, the structure of the X-ray diffraction measurement device can be prevented from becoming complicated.

  Furthermore, in carrying out the present invention, the present invention is not limited to the above-described embodiments and modifications, and various modifications can be made without departing from the object of the present invention.

  In the embodiment and the modified example, after the position / orientation adjustment step S <b> 1 is finished, the diffraction ring missing determination step S <b> 2 is performed by inputting that the diffraction ring missing determination is performed from the input device 92. The adjustment step S1 and the diffraction ring missing determination step S2 may be performed simultaneously, and the diffraction ring missing determination step S2 may be performed repeatedly. In this case, when the position / orientation adjustment is input from the input device 92, the LED light is emitted from the LED light source 44 and an image near the irradiation position of the LED light is displayed on the display device 93 as in the above embodiment. And the program of the flow shown in FIG. 6 is started. Further, the program of the flow shown in FIG. 6 eliminates step S38, and after step S44 or step S46, when the end of the position / orientation adjustment is not input from the input device 92, the process returns to step S12. Further, after step S44 or step S46, when the end of the position and orientation adjustment is input from the input device 92, step S38 is performed to end the program. As a result, the display device 93 repeatedly displays the diffraction ring image and the diffraction ring missing determination result. That is, the diffraction ring missing information is displayed in real time. Therefore, the operator adjusts the position and orientation of the X-ray diffraction measurement device (housing 50) with respect to the measurement object OB while viewing the image near the irradiation position of the LED light as in the above embodiment, and the diffraction ring. It can be confirmed whether there is any omission. According to this, when the shape of the measurement object OB is extremely complicated, and it is difficult to determine the position and orientation of the X-ray diffraction measurement apparatus (housing 50) with respect to the measurement object OB in which the diffraction ring is not missing. However, adjustments can be made in a short time.

  In the embodiment and the modification described above, the light receiving device 55 has a structure in which the imaging lens 56 and the photodetector 57 are attached to the cylindrical housing. However, the photodetector 56 emits X-rays emitted from the X-ray emitter 10. The casing may have any shape as long as only visible light scattered light generated at a set angle with respect to the optical axis is received through the imaging lens 56. For example, it may be attached to a prismatic casing, or may be attached to a trapezoidal casing whose section along the central axis. Further, if the photodetector 56 receives only the scattered light via the imaging lens 56, the imaging lens 56 and the photodetector 57 may not be attached to a common casing.

  In the embodiment and the modification described above, the controller 91 is provided with a calculation program for calculating the residual stress. However, if X-ray diffraction measurement may take a long time, the X-ray diffraction measurement system can obtain the shape of the diffraction ring, input the diffraction ring data to another computer device, and execute the same calculation program. Similar processing may be performed. In this case, as a method for inputting diffraction ring data to another computer device, various methods such as a method through a recording medium and a method of transferring using a net line or the like are conceivable. Also, some or all of the calculations may be performed artificially.

  In the embodiment and the modification, the housing 50 of the X-ray diffraction measurement apparatus is connected to the arm type moving device, and the object set 60 is provided with the arm mechanism 69, the three-direction moving mechanism, and the two-direction rotating mechanism. However, any configuration may be used as long as the position and posture of the housing 50 of the X-ray diffraction measurement apparatus with respect to the measurement object OB can be adjusted. For example, if the size of the measurement object OB does not change significantly, the housing 50 of the X-ray diffraction measurement apparatus may be fixed and the position and orientation may be adjusted only by the object setting apparatus 60. If the size of the measurement object OB is substantially constant, the measurement object OB may be placed on the stage 61 by removing the arm mechanism 69 from the object setting device 60.

  In the embodiment and the modification, the imaging system including the imaging lens 48, the imaging device 49, the sensor signal extraction circuit 87, the controller 91, and the display device 93 is provided. If the distance up to can be set as a set distance, another system may be provided instead of the imaging system. For example, another system irradiates another parallel LED light from another direction and crosses this LED light at a position where the distance from the optical axis of the emitted X-ray to the imaging plate 15 is a set distance. It is a system to make it. In this case, what is necessary is just to adjust the position and attitude | position of the X-ray-diffraction apparatus (casing 50) with respect to the measuring object OB so that the irradiation point of two LED light may become one. Further, the incident angle of the X-ray with respect to the measurement object may be calculated from the diffraction ring detected as described above.

  In the embodiment and the first modification, the digital data of the intensity of the scattered light detected by the light receiving device 55 is captured every time the detected rotation angle becomes n · ΔΘ. However, the scattering is performed in accordance with the rotation angle. As long as the intensity of light can be captured, the digital data may be captured in any way. For example, the digital data of the rotation angle and the digital data of the intensity of scattered light may be taken in at a minute time interval.

  Moreover, in the said embodiment and modification, it was set as the structure which moves the LED light source 44 on the optical axis of a X-ray with the plate 45, the motor 46, and the stopper member 47a, and irradiates the measurement object OB. However, instead of this, any structure may be used as long as it can emit visible parallel light having the same optical axis as that of the emitted X-ray. For example, the beam splitter may be disposed on the optical axis of the outgoing X-ray, and the LED light may be reflected by the beam splitter so that the outgoing X-ray and the optical axis are the same.

  Further, in the above embodiment and the modified example, the passage member 28 having a small inner diameter is provided in the through hole 27b of the spindle motor 27, and the inner diameter of the through hole 18a of the fixture 18 is reduced to reduce the LED emitted from the LED light source 44. Although parallel light having a small cross-sectional diameter can be obtained from light, another structure may be used as long as visible parallel light having a small cross-sectional diameter can be obtained. For example, by increasing the axial length of the passage member 28, parallel light having a small cross-sectional diameter may be obtained from the LED light from the LED light source 44. Further, a collimating lens and an expander lens are arranged near the laser light source that emits visible laser light, and the optical axis of the emitted laser light having a small cross-sectional diameter is the center of the through hole 27a1 of the output shaft 27a of the spindle motor 27. You may make it correspond with an axis line.

  In the first and second modified examples, the optical axis of the imaging lens 56 is emitted at the position where the distance to the imaging plate 15 is a set distance, that is, at the position where the X-ray irradiation point is set. It intersects with the optical axis of X-rays emitted from the vessel 10. However, if a mechanism for moving the X-ray diffractometer (housing 50) in the optical axis direction of the outgoing X-ray can be provided, a diffraction ring is formed on the optical axis of the imaging lens 56 on the optical axis of the outgoing X-ray. The diffracted X-rays that intersect may intersect at an angle equal to the angle formed with the optical axis of the outgoing X-ray. In this case, it is necessary to set the distance from the LED light irradiation point to the imaging plate 15 to a value larger than the set value at the stage of determining whether or not the diffraction ring is missing. For this reason, after determining whether or not the diffraction ring is missing, it is necessary to move the X-ray diffractometer (housing 50) in the direction of the optical axis of the outgoing X-ray and readjust the distance to the set value. Measurement efficiency is slightly reduced. However, since the LED light having the same optical path as that of the diffracted X-ray forming the diffraction ring can be detected, it is possible to accurately determine whether or not the diffraction ring is missing.

  Moreover, in the said modification 2, X-rays radiate | emitted from the X-ray emitter 10 were radiate | emitted outside from the opening 50c1 of the housing | casing 50, However, The opening 50c1 was made of a material with a high X-ray transmittance. You may change to a window. Examples of the material having a high X-ray transmittance include carbon fiber reinforced plastic (CFRP).

DESCRIPTION OF SYMBOLS 10 ... X-ray emitter, 15 ... Imaging plate, 15a, 16a, 17a, 18a, 21a, 26a, 27a1, 27b ... Through-hole, 16 ... Table, 18 ... Fixing tool, 20 ... Table drive mechanism, 21 ... Moving stage , 22 ... feed motor, 23 ... screw rod, 27 ... spindle motor, 28 ... passage member, 29 ... slip ring, 30 ... laser detector, 31 ... laser light source, 36 ... objective lens, 44 ... LED light source, 45 ... plate , 46: Motor, 47a, 47b ... Stopper member, 48 ... Imaging lens, 49 ... Imager, 50 ... Housing, 50a ... Bottom wall, 50c ... Notch wall, 50d ... Connecting wall, 51 ... Support arm, 55 ... Light receiving device, 56 ... Imaging lens, 57 ... Photo detector, 60 ... Object setting device, 61 ... Stage, 63a, 65a, 6a, 67a, 68a ... operator, 69 ... arm mechanism, 90 ... computer device, 91 ... controller, 92 ... input apparatus, 93 ... display, 95 ... high voltage power supply, OB ... measurement object, PL ... fixing plate

Claims (6)

An X-ray emitter that emits X-rays toward a target measurement object;
X-rays emitted from the X-ray emitter toward the measurement object and diffracted X-rays generated at the X-ray irradiation point of the measurement object are emitted from the X-ray emitter. Diffractive ring formation detecting means for receiving light at an imaging surface perpendicular to the axis and forming a diffraction ring as an image of the diffraction X-ray on the imaging surface and detecting the shape of the diffraction ring. In the X-ray diffraction measurement device,
Visible light emission in which visible light, which is parallel light having the same optical axis as that of the X-ray emitted from the X-ray emitter, is emitted to the measurement object in a state where X-rays are not emitted from the X-ray emitter. And
A light receiving means for detecting a received light intensity by receiving a part of scattered light generated by the measurement object by the visible light emitted from the visible light emitting device through an imaging lens, and detecting the received light intensity; An optical axis of the lens at a set angle with respect to the optical axis of the X-ray emitted from the X-ray emitter and intersecting at a set distance from the imaging surface;
Rotating means for rotating the light receiving means around the optical axis of X-rays emitted from the X-ray emitter;
Rotation angle detection means for detecting a rotation angle by the rotation means;
The light receiving means is rotated by the rotating means, the received light intensity detected by the light receiving means is acquired in correspondence with the rotation angle detected by the rotation angle detecting means, and the received light intensity corresponding to the acquired rotation angle is obtained. And an X-ray diffraction measuring apparatus comprising: a control means for calculating missing information of the diffraction ring. The X-ray diffraction measurement apparatus according to claim 1,
A table for mounting the imaging surface;
The X-ray diffraction measuring apparatus, wherein the light receiving means is attached to the table, and the rotating means rotates the table around an optical axis of X-rays emitted from the X-ray emitter. The X-ray diffraction measurement apparatus according to claim 2,
The light receiving means irradiates the measurement object with X-rays from the X-ray emitter after setting the distance from the X-ray irradiation position of the measurement object to the imaging surface on the table to a preset distance. In this case, the X-ray diffraction measurement apparatus is attached to a position where the diffraction ring is formed, and an image pickup surface attached to the table has a portion of the light receiving means removed. The X-ray diffraction measurement apparatus according to claim 1, wherein
Display means for displaying missing information of the diffraction ring calculated by the control means ;
When the control means emits visible light from the visible light emitter, it repeatedly performs the calculation of the missing information of the diffraction ring,
The X-ray diffraction measurement apparatus, wherein the display means displays missing information of a diffraction ring in real time. An X-ray emitter that emits X-rays toward a target measurement object;
X-rays emitted from the X-ray emitter toward the measurement object and diffracted X-rays generated at the X-ray irradiation point of the measurement object are emitted from the X-ray emitter. Diffractive ring formation detecting means for receiving light at an imaging surface perpendicular to the axis and forming a diffraction ring as an image of the diffraction X-ray on the imaging surface and detecting the shape of the diffraction ring. In the X-ray diffraction measurement device,
Visible light emission in which visible light, which is parallel light having the same optical axis as that of the X-ray emitted from the X-ray emitter, is emitted to the measurement object in a state where X-rays are not emitted from the X-ray emitter. And
Arranged around the optical axis of the X-ray emitted from the X-ray emitter, a part of the scattered light generated by the measurement object by the visible light emitted from the visible light emitter is received through the imaging lens A plurality of light receiving means for receiving light by the detector and detecting received light intensity, wherein each of the optical axes of the imaging lenses is set to be the same as the optical axis of the X-ray emitted from the X-ray emitter A plurality of light receiving means intersecting at an angle and at a distance set from the imaging surface;
An X-ray diffraction measurement apparatus comprising: an arithmetic unit that calculates missing information of the diffraction ring using received light intensities detected by the plurality of light receiving units. In the X-ray-diffraction measuring apparatus of Claim 5,
A housing including the X-ray emitter, the diffraction ring formation detection means, the visible light emitter and the light receiving means;
The housing has an opening centered on the optical axis of the X-ray emitted from the X-ray emitter or a window capable of X-ray transmission,
The X-ray diffraction measuring apparatus, wherein the plurality of light receiving means are disposed around the opening or the window.