JP2002228609A - Monochromatic x-ray photoelectron spectroscopic instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a monochromatic X-ray photoelectron spectroscopic instrument equipped with a sample positioning mechanism capable of forming the image of a line light source with a length of a little less than about 1 cm comprising soft X-rays within the measuring region of a sample using a condensing optical system. SOLUTION: The monochromatic X-ray photoelectron spectroscopic instrument is constituted by providing an anode 1 for monochromatic X-rays, a filament 2, a spectroscopic crystal 4, an optical lens 5, a detector 6, a sample stand 7, an input lens 8, a semispherical analyzer 9, a channel-tron 10, a monochromator or the like. The sample to be measured on the sample stand 7 is irradiated with soft X-rays as a probe to identify the sample. Accordingly, the sample stand 7 is made freely movable in x-, y- and z-axis directions by a moving means, and the operations of a coordinates detection means, a coordinates memory means and the moving means are automatically controlled to adjust the position of the sample stand so as to form the image of a monochromatic light source centering around the upper surface of the sample stand, and the sample stand is moved in the z-axis direction so that the image of the monochromatic light source is formed at the optimum position on the surface of the sample on the basis of the position coordinates of the sample stand after adjustment and the thickness of the sample to be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monochrome X-ray photoelectron spectroscopy apparatus, and more particularly to a sample positioning mechanism in the spectroscopy apparatus.

[0002]

2. Description of the Related Art In X-ray photoelectron spectroscopy, two types of X-ray light sources are usually used as soft X-ray light sources: a non-monochrome X-ray light source having two targets of magnesium and aluminum, and a monochrome X-ray light source having an aluminum target. Although a line light source is prepared, a non-monochrome light source has a structure in which the measurement sample is irradiated with soft X-rays directly from the light source.
The surface of the measurement sample is irradiated with diffused and substantially uniform soft X-rays.

However, in a monochrome light source, since it is necessary to monochromatic soft X-rays, an X-ray beam reflected by a concave mirror of a single crystal (often SiO ₂ ) on the circumference of Rowland and imaged is irradiated. This type of imaging is a point light source to increase the spatial resolution in the recent type that obtains a photoelectron image, but is simply a distant light source in the type that obtains the photoelectron spectrum of the sample (for a non-monochrome light source, the light source The distance is a few centimeters, whereas a monochrome light source is 1m
There is a close distance. ), It is designed as a linear light source to increase the brightness of the light source and to reduce the cost. In other words, the structure is such that the image of the filament formed by the collision of the thermoelectrons emitted from the linear filament with the target is condensed by the concave mirror and imaged on the sample surface.

This monochrome light source has a considerably high precision by adjusting the positioning mechanism (x-axis only) of the filament and the positioning mechanism (x, y, z-axis) of the concave mirror made of a single crystal on the Rowland circle with a micrometer. (A linear image with a length of less than 1 cm and a width of about 1 mm). For this reason, unlike a non-monochrome X-ray light source, when a monochrome X-ray light source is used, only a spectrum signal having an extremely poor S / N ratio can be obtained unless the sample completely enters the image forming position. In addition, the positioning adjustment of the sample was difficult due to the intuition of the measurer.

However, this monochrome light source has a high energy resolution of the obtained spectrum,
The fact that the sample is not thermally damaged due to structural reasons that the light source and the sample are far apart,
Due to the double merit, it is an indispensable light source especially when an organic substance is a measurement sample. For this reason, a technique for simplifying the positioning of the sample at the time of measurement of the monochrome X-ray light source has been indispensable.

[0006] Originally, the measurement light source is a point light source or a surface light source, and there are very few illumination systems composed of linear light sources. No adjustment technique exists. It is easy to use a pin light source to change the line light source to a point light source, but this is extremely inefficient and there is no point in using the line light source.

The invention disclosed in Japanese Patent Application Laid-Open No. HEI 5-126679 relates to a method that enables an optical focusing system for light in a vacuum ultraviolet to soft X-ray region to automatically focus on a sample. Basically, the same optical system is used for both the condensing optical system of the light source and the focusing optical system. Also,
In FIG. 6 of the above publication, the condensing optical system and the focusing optical system are separately provided, but the beam of light coming from the light source is a point light source, so that highly accurate focusing can always be performed. Not something.

FIG. 1 of Japanese Patent Application Laid-Open No. 10-48165 shows a method of forming an image on a sample surface with a point light source made by combining a pinhole with a light source in the visible to vacuum ultraviolet region. Although the focusing technique is not particularly disclosed, it is presumed that a visible image is confirmed by using a visible / ultraviolet light source.

Further, FIG. 1 of Japanese Patent Application Laid-Open No. 9-105728 shows that a laser beam is passed in advance using a mirror to the optical axis of the analyzer system, and the excitation light ( A method of aligning an input optical axis of a probe or the like is shown. In this method, since a point light source is used, it is considered difficult to increase the accuracy of focusing on the sample surface so much.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide a light source having a length of less than about 1 cm made of soft X-ray and a condensing optical system. An object of the present invention is to provide a monochrome X-ray photoelectron spectroscopy device provided with a sample positioning mechanism that can be used to form an image (focus) within a measurement region of the sample.

[0011]

According to a first aspect of the present invention, there is provided a coordinate detecting means for detecting the position coordinates of the sample table in the x, y, and z-axis directions, and the position coordinates detected by the coordinate detecting means. Coordinate storage means for storing, and moving means for moving the sample stage in at least one of the x-axis, y-axis, and z-axis directions according to the position coordinate data stored in the coordinate storage means,
A monochrome X-ray photoelectron spectrometer comprising a sample positioning device having a controller for automatically controlling the operations of these coordinate detecting means, coordinate storing means and moving means, wherein the operation of the coordinate detecting means, coordinate storing means and moving means is performed. By automatically controlling with the controller, the position of the sample table is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample table, and the coordinate of the position of the sample table after the adjustment is detected by the coordinate detecting means. Appropriate means calculates the appropriate position coordinates of the sample table in the z-axis direction based on the thickness of the measurement sample, and a monochrome light source image is formed at the optimum position on the measurement sample surface according to the calculated value. A monochrome X-ray photoelectron spectroscopy apparatus characterized in that the sample stage is moved in the z-axis direction by automatically controlling the moving means by the controller so as to form an image.

The invention according to a second aspect is characterized in that x,
Coordinate detecting means for detecting the position coordinates in the y and z-axis directions, coordinate storing means for storing the position coordinates detected by the coordinate detecting means, and x-coordinate of the sample table according to the position coordinate data stored in the coordinate storing means. Monochrome X-ray provided with a sample positioning device having a moving means for moving in at least one of the directions of the axis, the y-axis and the z-axis, and a controller for automatically controlling the operations of the coordinate detecting means, the coordinate storing means and the moving means In a photoelectron spectroscopy device, a positioning sample is placed on a sample table, and the operations of a coordinate detection unit, a coordinate storage unit and a movement unit are controlled by a controller,
The position of the sample table is adjusted so that the monochrome light source image is formed at the center of the positioning sample, the position coordinates of the sample table after the adjustment are detected by the coordinate detecting means, stored in the coordinate storage means, and An appropriate position coordinate in the z-axis direction of the sample table is calculated by appropriate means based on the thickness, and the controller is moved according to the calculated value so that a monochrome light source image is formed at an optimum position on the surface of the measurement sample. A monochrome X-ray photoelectron spectroscopy apparatus characterized in that a sample stage is moved in a z-axis direction by automatically controlling means.

According to a third aspect of the present invention, in the sample positioning device, a three-dimensional tracer is provided outside a vacuum container that stores main components of the monochrome X-ray photoelectron spectroscopy device, and a sample to be measured by the three-dimensional tracer is previously provided. The shape and dimensions of the three-dimensional data are measured in a three-dimensional and non-contact manner, the three-dimensional data is stored in a coordinate storage means, and the three-dimensional data is transmitted to a moving means in response to a command from a controller. , The sample stage is moved along the x-axis, y-axis, z
The monochrome X-ray photoelectron spectrometer according to claim 1 or 2, wherein the controller automatically moves the moving unit in at least one of the axial directions.

According to a fourth aspect of the present invention, when the monochrome light source is a line light source, the sample positioning device is arranged such that the longitudinal direction of the linear monochrome light source image coincides with the longitudinal direction of the measurement sample. 2. The apparatus according to claim 1, further comprising a rotating means for rotating the table about the z-axis.
Or a monochrome X-ray photoelectron spectrometer according to item 2.

According to a fifth aspect of the present invention, when the monochrome light source is a linear light source, the sample stage is mounted on the sample positioning device such that a linear monochrome light source image is formed on the surface of the measurement sample. 3. The monochrome X-ray photoelectron spectroscopy apparatus according to claim 1, further comprising a rotation unit for rotating around the z-axis, wherein the operation of the rotation unit is automatically controlled by the controller. .

According to a sixth aspect of the present invention, when the monochrome light source is a line light source, the sample positioning device is further provided with a tilting means for tilting the sample stage, and the operation of the tilting means is automatically controlled by the controller. The monochrome X-ray photoelectron spectroscopy device according to claim 1 or 2, wherein the device is controlled.

According to a seventh aspect of the present invention, the tilting means tilts the sample stage so that the longitudinal direction of the linear monochrome light source image coincides with the longitudinal direction of the measurement sample. Is a monochrome X-ray photoelectron spectrometer.

The invention according to claim 8 is characterized in that the tilting means tilts the sample stage so that a linear monochrome light source image is formed on the surface of the measurement sample. It is an X-ray photoelectron spectroscopy device.

According to a ninth aspect of the present invention, the sample positioning device is further provided with an optical detecting means for detecting an image of the monochrome light source image as a fluorescent image, and a fluorescent paint is applied to the surface of the sample table or the positioning sample. Then, the controller automatically controls the operations of the coordinate detecting means, the coordinate storing means and the moving means so that the size of the fluorescent image is minimized, so that the monochrome light source image is formed at the center of the upper surface of the sample table. The monochrome X-ray photoelectron spectrometer according to claim 1 or 2, wherein the position of the sample stage is adjusted.

According to a tenth aspect of the present invention, the sample positioning device is further provided with optical detecting means for detecting the image of the monochrome light source image as a fluorescent image, and a fluorescent paint is applied to the surface of the sample table or the positioning sample. Then, the controller automatically controls the operations of the coordinate detecting means, the coordinate storing means and the moving means so that the fluorescence intensity of the fluorescent image takes the maximum value, so that a monochrome light source image is formed at the center of the upper surface of the sample table. The monochrome X-ray photoelectron spectroscopy apparatus according to claim 1 or 2, wherein the position of the sample stage is adjusted as described above.

According to an eleventh aspect of the present invention, there is provided a monochrome light source, further comprising an attachment for restricting a visual field, and an attachment moving means for moving the attachment, wherein the operation of the attachment moving means is automatically controlled by the controller. When the image is formed outside the measurement sample, the operation of the attachment moving means is automatically controlled by the controller so that the photoelectrons from the outside of the measurement sample are attached so that they do not enter the analyzer of the monochrome X-ray photoelectron spectroscope. The monochrome X according to claim 1 or 2, wherein the monochrome X is cut off.
It is a line photoelectron spectrometer.

According to a twelfth aspect of the present invention, the sample positioning device uses photoelectron counting means for detecting the formation of a monochrome light source image as the number of photoelectrons so that the number of photoelectrons takes a maximum value. Coordinate detecting means,
The position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage by automatically controlling the operations of the coordinate storage unit and the moving unit by the controller. The monochromatic X-ray photoelectron spectroscopy apparatus described in 1).

According to a thirteenth aspect of the present invention, the sample positioning device is further provided with a rotating means according to the fourth or fifth aspect and a tilting means according to the sixth, seventh or eighth aspect, and these operations are performed. Is automatically controlled by the controller, and when the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage (in the positioning operation of the measurement sample), the x-axis and the y-axis are used. 3. The monochrome X-ray photoelectron spectroscopy device according to claim 1, wherein the movement in the direction, the rotation about the z-axis, the inclination of the sample stage, and the movement in the z-axis direction are performed in this order.

According to a fourteenth aspect of the present invention, the rotating operation of the sample stage about the z-axis can be manually performed by a program stored in a computer for controlling the operation of the entire monochrome X-ray photoelectron spectrometer. The monochrome X-ray photoelectron spectroscopy device according to claim 13, wherein

[0025]

Embodiments of the present invention will be described below with reference to the drawings. First Embodiment FIG. 1 is a schematic configuration diagram of a monochrome X-ray photoelectron spectroscopy apparatus, wherein reference numeral 1 denotes an anode for monochrome X-ray, reference numeral 2 denotes a filament (hot cathode), reference numeral 3 denotes a Roland circle, and reference numeral 4 denotes spectral light. Crystal, 5 is a normal optical lens, 6 is a detector, 7 is a sample stage, 8 is an input lens,
Reference numeral 9 denotes a hemisphere analyzer, and reference numeral 10 denotes a channeltron (a vacuum vessel is not shown). The spectrometer is provided with a monochromator (not shown) having a predetermined structure.

FIG. 2 is an explanatory view showing the structure of a monochrome X-ray tube. Reference numeral 11 denotes an aluminum-coated anode (aluminum-coated copper tube);
2 is an insulating shield (not shown), 13 is an electrode, 14
Is a filament (hot cathode).

The X-ray photoelectron spectrometer (X-ray Photoe) shown in FIG.
In electron spectroscopy, the sample is identified by irradiating a measurement sample (not shown) on the sample stage 7 with a probe using soft X-rays and dispersing the excited photoelectrons, but when high energy resolution is required. For example, a monochrome X-ray light source is often used to prevent sample damage. This method is particularly advantageous when the sample to be measured is an organic substance.

X-rays emitted from a normally used non-monochrome light source are diffused light directly emitted from the light source without passing through any light-collecting system. Therefore, there is no problem if they are adjusted to the focal position of the photoelectron spectroscopy system. However, in the measurement method using a monochrome X-ray light source, it is very difficult to adjust the position of the sample stage, and there is a problem that the operator must rely exclusively on the experience and intuition of the operator. In a recently developed photoelectron spectrometer using a cold cathode type monochrome X-ray light source requiring high spatial resolution, the X-ray irradiated to the sample is a point light source, so that the sample stage can be easily adjusted. It is devised as follows.

However, although a conventional photoelectron spectroscopy apparatus using a hot cathode type monochrome X-ray light source has an advantage of low cost, the light irradiated on the surface of the measurement sample is imaged as a straight line, so In order to adjust the measurement sample to a certain time, considerable skill was required.

The reason is that the monochrome X-ray tube is shown in FIG.
The thermoelectrons emitted from the filament 14 collide with the anode 11 by the acceleration voltage applied between the filament 14 and the anode 11, and at this time, the characteristics emitted from the coated aluminum surface Single crystal concave mirror whose X-rays are on Roland circle 3 (reference numeral 4 in FIG. 1)
Only the monochromatic X-rays are imaged on the surface of the sample. However, since the filament 14 is almost linear (accurately, an elongated coil shape) with respect to the anode 11, the An image is formed into a straight line having a length of less than 1 cm and a width of about 1 mm. Further, since the optical path length (distance between the anode and the sample) of this monochrome optical system is close to 1 m, the attenuation of X-rays is large even if it is simply considered, and if the image is not completely captured on the sample surface, almost no measurement sample is obtained. There was a problem that the spectrum data of the sample could not be obtained.

FIG. 3 is a system block diagram of the manual adjustment according to the present invention. The probe light emitted from the X-ray light source 15 is made monochromatic by the monochromator optical system 16 and
An image is formed on the surface of the sample 20 on the sample 5, and inner-shell electrons up to a very shallow depth (about 30 °) of the sample surface are excited and emitted into a vacuum region. The photoelectrons are condensed by an input lens 21 and input into an analyzer 22. Only the target photoelectrons are electrostatically passed through, counted by a channeltron 23, and sent to a computer 28 via a data processor 24. And display it on the monitor 29.
Further, at this time, weak fluorescence is emitted at the probe light imaging portion on the sample surface, and is observed through the condenser lens 17. If it cannot be confirmed, the fluorescent plate may be picked up by the detector 18 at an appropriate image forming position. The detector 18 is a device such as a photodiode array or a CCD. The signal captured by the detector 18 may be processed by a signal processor 19, sent to a computer 28, displayed on a monitor 29, and fed back. In FIG. 3, reference numeral 26 denotes a sample stage drive system, and reference numeral 27 denotes its controller.

If a non-contact type three-dimensional tracer is prepared to measure the sample shape and the shape data of the measured sample is transmitted to the computer 28, a strong fluorescent substance is placed on the sample stage in advance, and the image forming position of the probe light source is set. Can be determined exactly. In many cases, the measurement sample handled by the photoelectron spectrometer is generally a simple one with few irregularities on the surface and a flat surface due to the nature of the spectrometer. Therefore, the three-dimensional tracer is a simple optical type. It is sufficient that the shape and the average height in the x and y directions are known. Therefore, an acoustic three-dimensional tracer using ultrasonic waves is sufficient. However, care must be taken because if not in contact, the sample surface is contaminated and cannot be used for photoelectron spectroscopy.

Second Embodiment FIG. 4 shows that a monitor device is connected to a computer.
It is a block diagram of a non-contact three-dimensional monitor apparatus. In this three-dimensional monitor device, an optical distance sensor provided with an irradiation means (light emitting means) 32 such as a semiconductor laser or a light emitting diode, and a light receiving means 33 such as a CCD at the tip of the tracer head 30; Distance sensor
A tracer control system 35 for performing feedback control for keeping the distance between the sample surfaces constant is provided. In the three-dimensional monitor, the tracer drive system 31 is moved by the tracer control system 35, and the shape of the sample 34 is detected while scanning the tracer head 30.

Third Embodiment FIG. 5A is a diagram of a monitoring system in the case where an image of a probe light protrudes from the surface of a measurement sample (an explanatory diagram in the case where a limited field of view is provided in an optoelectronic analyzer). In this figure, reference numeral 36 denotes a view restriction attachment, reference numeral 37 denotes a rotation control system, and reference numeral 38 denotes a drive system. The detector 18
Has a structure that can detect fluorescence. Since the imaging length of the probe light is known in advance from the sample or the like, when the length of the fluorescent image is not enough no matter how the sample stage is driven, the computer 28 determines that the spectrum signal of the sample stage is not input. Therefore, the determination is generally made based on time.

As the view restriction attachment 36, a disk-shaped attachment having a plurality of view restriction through holes 36a having different diameters as shown in FIG. 5B is provided. The attachment 36 is rotatable about a center point of the disk by a drive system 38. That is, since the attachment 36 is often operated manually,
The rotation control system 37 and the drive system 38 are attached, and the rotation operation of the attachment 36 is controlled by a computer.

Fourth Embodiment FIG. 6 is a block diagram of a system for automatically controlling sample setting when a monochrome light source is used by a computer, that is, a block diagram of a system having an automatic position control mechanism for a sample stage. The fluorescence emitted from the surface of the sample 20 or the fluorescent coating applied to the sample table 25 is captured by the detector 18 via the condenser lens 17, and the data of the fluorescence intensity processed by the signal processor 19 is displayed on the monitor 29. Display.
In this case, the sample stage drive system 26 moves the sample stage 25 so that the fluorescence intensity data takes the maximum value. For this purpose, the computer 28 is controlled by the sample stage drive system controller 27.
To the sample stage drive system 26 to operate the sample stage 25
To the correct position.

The movement at this time is preferably performed in the order of movement in the xy plane direction (horizontal direction) (moving the sample in the horizontal direction), rotation movement, tilt movement, and movement in the z-axis direction (vertical direction). In moving the sample stage 25 to an appropriate position, the maximum value of the photoelectron count of the channeltron 23 may be determined by the computer instead of the intensity of the fluorescence by the detector 18. In addition, since it takes a considerable time to determine all adjustments of the sample position by the computer 28, the rotation in the z-axis direction (or the rotation in the xy plane) is removed from the automatic control, and the sample 20 shown on the monitor 29 is removed.
May be visually determined, and the sample table 25 may be rotated by manual operation.

[0038]

As is apparent from the above description, claim 1
In the monochrome X-ray photoelectron spectroscopy apparatus, the operation of the coordinate detecting means, the coordinate storing means and the moving means is automatically controlled by the controller, so that the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage. Is adjusted, the coordinate of the adjusted position of the sample table is detected by the coordinate detecting means and stored in the coordinate storage means, and the appropriate position coordinate of the sample table in the z-axis direction is appropriately determined based on the thickness of the measurement sample. In accordance with the calculated value, the controller automatically controls the moving means by the controller so as to move the sample stage in the z-axis direction so that a monochrome light source image is formed at an optimum position on the surface of the measurement sample. Therefore, the sample stage can be reliably moved to the optimum position so that the monochrome light source image is formed on the surface of the measurement sample.

In the monochrome X-ray photoelectron spectroscopy apparatus according to the second aspect, the monochrome light source image is positioned by placing the positioning sample on the sample table and controlling the operations of the coordinate detecting means, the coordinate storing means and the moving means by the controller. Adjust the position of the sample stage so that it forms an image at the center of the sample
The position coordinates of the sample table after the adjustment are detected by the coordinate detection means and stored in the coordinate storage means, and the appropriate position coordinates of the sample table in the z-axis direction are appropriately calculated based on the thickness of the measurement sample. In accordance with the calculated value, the controller automatically controls the moving means to move the sample stage in the z-axis direction so that the monochrome light source image is formed at the optimum position on the surface of the measurement sample. The sample stage can be reliably moved to the optimum position so that a monochrome light source image is formed on the surface of the sample.

In the monochrome X-ray photoelectron spectrometer according to the third aspect, the sample stage is moved along the x-axis, the y-axis, and the z-axis so that a monochrome light source image is formed at an optimum position on the surface of the measurement sample according to the three-dimensional data on the sample. Since the sample table is moved in at least one of the directions by automatic control, the sample table can be reliably moved to the optimum position so that the monochrome light source image is formed on the surface of the measurement sample.

In the monochrome X-ray photoelectron spectroscopy apparatus according to the fourth aspect, when the monochrome light source is a line light source, the longitudinal direction of the linear monochrome light source image is matched with the longitudinal direction of the measurement sample by the sample positioning device. Since the rotating means for rotating the sample stage about the z-axis is provided, the sample stage can be set at the optimum position by aligning the longitudinal direction of the measurement sample with the image formed by the linear monochrome light source. it can.

In the monochrome X-ray photoelectron spectrometer according to the fifth aspect, when the monochrome light source is a line light source, a linear monochrome light source image is formed on the sample positioning device such that the image is formed on the surface of the measurement sample. A rotating means for rotating the sample stage about the z-axis is further provided, and the operation of the rotating device is automatically controlled by the controller, so that the sample stage can be reliably set at the optimum position.

In the monochrome X-ray photoelectron spectrometer of the sixth aspect, when the monochrome light source is a line light source, the sample positioning device is provided with a tilting means for tilting the sample stage, and the operation of the tilting means is controlled by the controller. Since the automatic control is performed, the sample stage can be reliably set at the optimum position.

In the monochrome X-ray photoelectron spectrometer according to the seventh aspect, the sample stage is tilted so that the longitudinal direction of the linear monochrome light source image coincides with the longitudinal direction of the measurement sample. Can be set to the optimal position.

In the monochrome X-ray photoelectron spectrometer according to the eighth aspect, the sample stage is inclined so that a linear monochrome light source image is formed on the surface of the sample to be measured. Can be set in position.

In the monochrome X-ray photoelectron spectrometer according to the ninth aspect, the sample positioning device is further provided with optical detection means for detecting an image of the monochrome light source image as a fluorescent image.
By applying a fluorescent paint to the surface of the sample table or the surface of the positioning sample and automatically controlling the operations of the coordinate detecting means, the coordinate storing means and the moving means by the controller so that the size of the fluorescent image is minimized, Since the position of the sample stage is adjusted so that the light source image is focused on the center of the upper surface of the sample stage, the monochrome light source image can be easily checked, so that the sample stage can be set at the optimum position. Can be.

In the monochrome X-ray photoelectron spectroscopy apparatus according to the tenth aspect, the sample positioning device is further provided with optical detection means for detecting the image of the monochrome light source image as a fluorescent image, and the fluorescent light is provided on the surface of the sample table or the positioning sample. By applying paint, the controller automatically controls the operations of the coordinate detecting means, the coordinate storing means and the moving means so that the fluorescence intensity of the fluorescent image takes the maximum value, so that the monochrome light source image is centered on the upper surface of the sample stage. Since the position of the sample stage is adjusted so as to form an image, the sample stage can be easily and reliably set at the optimum position.

In the monochrome X-ray photoelectron spectrometer according to the eleventh aspect, when the monochrome light source image protrudes outside the surface of the measurement sample, photoelectrons from outside the measurement sample can be prevented by inserting an attachment serving as a limited field of view. And highly accurate measurement data can be easily obtained.

[0049] In the monochrome X-ray photoelectron spectrometer according to the twelfth aspect, a photoelectron counting means for detecting an image of a monochrome light source image as the number of photoelectrons is used for the sample positioning device, and the count of the photoelectrons is reduced to a maximum value. By automatically controlling the operation of the coordinate detecting means, the coordinate storing means and the moving means by the controller as described above, the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage. In addition, the sample stage can be set at the optimum position.

In the monochrome X-ray photoelectron spectrometer according to the thirteenth aspect, when the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage, the x-axis and the y-axis are adjusted.
Axial movement, rotation about z-axis, tilt of sample stage,
Since the movement is performed in the order of the movement in the z-axis direction, the sample stage can be positioned at the optimum position in the shortest time.

In the monochrome X-ray photoelectron spectrometer according to claim 14, the rotation of the sample stage about the z-axis is performed by:
When the size of the sample surface is larger than the image length of the monochrome light source in any direction, the sample stage is optimized. Positioning can be performed in a shorter time and automatically.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a monochrome X-ray photoelectron spectroscopy apparatus according to a first embodiment of the present invention.

FIG. 2 is an explanatory view showing the structure of a monochrome X-ray tube provided in the monochrome X-ray photoelectron spectroscopy apparatus of FIG.

FIG. 3 is a system block diagram of a manual adjustment according to the present invention.

FIG. 4 is a block diagram of a non-contact three-dimensional monitor device according to a second embodiment of the present invention, in which the monitor device is connected to a computer.

FIG. 5 relates to a third embodiment of the present invention,
(A) is a diagram of a monitoring system in the case where an image of the probe light protrudes from the surface of the measurement sample (an explanatory diagram in the case where a limited field of view is provided in the photoelectric analyzer). (B) is explanatory drawing which shows an example of a visual field limitation attachment.

FIG. 6 relates to a fourth embodiment of the present invention, and is a system configuration diagram for automatically controlling sample setting when a monochrome light source is used by a computer, that is, a block of a system having an automatic position control mechanism for a sample stage. FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Monochrome X-ray anode 2 Filament (hot cathode) 3 Rowland circle 4 Dispersion crystal 5 Optical lens 6 Detector 7 Sample stand 8 Input lens 9 Hemisphere analyzer 10 Channeltron 11 Anode 12 Insulation shield 13 Electrode 14 Filament 15 X-ray light source Reference Signs List 16 Monochromator optical system 17 Condensing lens 18 Detector 19 Signal processing device 20 Sample 21 Input lens 22 Analyzer 23 Channeltron 24 Data processing device 25 Sample stage 26 Sample stage drive system 27 Sample stage drive system controller 28 Computer 29 Monitor Reference Signs List 30 tracer head 31 tracer drive system 32 irradiation means 33 light receiving means 34 sample 35 tracer control system 36 view restriction attachment 36a through hole 37 rotation control system 38 drive system

Claims (14)

[Claims] 1. Coordinate detecting means for detecting the position coordinates of the sample stage in the x, y, and z-axis directions, coordinate storing means for storing the position coordinates detected by the coordinate detecting means, and storing in the coordinate storing means. The sample stage in the x-axis according to the position coordinate data
Monochrome X-ray photoelectron spectroscopy provided with a sample positioning device having moving means for moving in at least one of the y-axis and z-axis directions, and a controller for automatically controlling the operations of these coordinate detecting means, coordinate storing means and moving means. An apparatus, by automatically controlling the operation of the coordinate detection means, the coordinate storage means and the movement means by the controller, adjust the position of the sample stage so that a monochrome light source image is formed at the center of the upper surface of the sample stage, The position coordinates of the sample table after the adjustment are detected by the coordinate detection means and stored in the coordinate storage means. Based on the thickness of the measurement sample, appropriate position coordinates of the sample table in the z-axis direction are calculated by appropriate means. In accordance with the calculated value, the controller automatically controls the moving means so that the sample stage is moved in the z-axis direction so that a monochrome light source image is formed at an optimum position on the surface of the measurement sample. Monochrome X-ray photoelectron spectrometer, which comprises causing. 2. A coordinate detecting means for detecting the position coordinates of the sample table in the x, y, and z-axis directions, a coordinate storing means for storing the position coordinates detected by the coordinate detecting means, and a coordinate storing means. The sample stage in the x-axis according to the position coordinate data
Monochrome X-ray photoelectron spectroscopy provided with a sample positioning device having moving means for moving in at least one of the y-axis and z-axis directions, and a controller for automatically controlling the operations of these coordinate detecting means, coordinate storing means and moving means. An apparatus for mounting a positioning sample on a sample table and controlling the operations of a coordinate detecting means, a coordinate storage means and a moving means by a controller so that a monochrome light source image is formed at the center of the positioning sample. The position of the sample stage is adjusted. The coordinate of the position of the sample stage after the adjustment is detected by the coordinate detecting means and stored in the coordinate storage means. The position coordinates are calculated by appropriate means, and the controller automatically controls the moving means according to the calculated values so that the monochrome light source image is formed at the optimum position on the surface of the measurement sample. Monochrome X-ray photoelectron spectroscopy apparatus characterized by moving the sample stage in the z-axis direction by. 3. The sample positioning apparatus according to claim 1, further comprising a three-dimensional tracer provided outside of a vacuum container accommodating main components of the monochrome X-ray photoelectron spectroscopy apparatus. The non-contact measurement is performed, the three-dimensional data is stored in the coordinate storage means, and the three-dimensional data is transmitted to the moving means in accordance with a command from the controller. The apparatus according to claim 1, wherein the controller automatically controls the moving means by at least one of the x-axis, the y-axis, and the z-axis so that the monochrome light source image is formed at the position. 3. The monochrome X-ray photoelectron spectrometer according to 1 or 2. 4. In the case where the monochrome light source is a line light source, the sample stage is set on the sample positioning device so that the longitudinal direction of the linear monochrome light source image coincides with the longitudinal direction of the measurement sample. The monochrome X-ray photoelectron spectroscopy device according to claim 1 or 2, further comprising a rotating means for rotating. 5. When the monochrome light source is a line light source, the sample stage is moved to the sample positioning device so that a linear monochrome light source image is formed on the surface of the measurement sample.
In addition to further providing a rotating means for rotating about the axis,
3. The monochrome X-ray photoelectron spectroscopy device according to claim 1, wherein the operation of the rotating means is automatically controlled by the controller. 6. When the monochrome light source is a line light source, the sample positioning device is further provided with a tilting means for tilting the sample stage, and the operation of the tilting means is automatically controlled by the controller. The monochrome X-ray photoelectron spectroscopy device according to claim 1 or 2, wherein: 7. The monochromatic X-ray photoelectron spectroscopy according to claim 6, wherein the tilting means tilts the sample stage so that the longitudinal direction of the linear monochrome light source image coincides with the longitudinal direction of the measurement sample. apparatus. 8. The monochrome X-ray photoelectron spectroscopy apparatus according to claim 6, wherein the tilting means tilts the sample stage so that a linear monochrome light source image is formed on the surface of the measurement sample. 9. A sample positioning apparatus further comprising an optical detecting means for detecting an image of a monochrome light source image as a fluorescent image, applying a fluorescent paint to a surface of a sample stage or a surface of a positioning sample, and measuring the size of the fluorescent image. The controller automatically controls the operations of the coordinate detecting means, the coordinate storing means and the moving means so that the monochrome light source image is formed at the center of the upper surface of the sample stage. The monochrome X-ray photoelectron spectroscopy device according to claim 1 or 2, wherein: 10. A sample positioning apparatus further comprising an optical detecting means for detecting an image of a monochrome light source image as a fluorescent image, applying a fluorescent paint to a surface of a sample stage or a surface of a positioning sample, and By automatically controlling the operations of the coordinate detecting means, the coordinate storing means and the moving means so that the intensity takes the maximum value, the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage. The monochrome X-ray photoelectron spectroscopy device according to claim 1, wherein adjustment is performed. 11. An attachment for limiting a visual field and an attachment moving means for moving the attachment, and the operation of the attachment moving means is automatically controlled by the controller. If it protrudes, the operation of the attachment moving means is automatically controlled by the controller,
The monochrome X-ray photoelectron spectrometer according to claim 1 or 2, wherein photoelectrons from outside the measurement sample are blocked by an attachment so that the photoelectrons do not enter the analyzer of the monochrome X-ray photoelectron spectrometer. 12. A sample positioning device, comprising: a photoelectron counting means for detecting an image of a monochrome light source image as a photoelectron count; and a coordinate detection means and a coordinate storage means so that the photoelectron count takes a maximum value. The position of the sample stage is adjusted so that a monochrome light source image is formed at the center of the upper surface of the sample stage by automatically controlling the operation of the moving unit and the controller by the controller. Monochrome X-ray photoelectron spectrometer. 13. A sample positioning apparatus further comprising a rotating means according to claim 4 or 5, and a tilting means according to claim 6, 7 or 8, and these operations can be automatically controlled by the controller. When the position of the sample stage is adjusted so that the monochrome light source image is formed at the center of the upper surface of the sample stage, movement in the x-axis and y-axis directions, z
The monochrome X-ray photoelectron spectroscopy device according to claim 1, wherein the rotation is performed about an axis, the sample table is tilted, and the z-axis direction is moved in this order. 14. The apparatus according to claim 13, wherein the rotation of the sample stage about the z-axis can be manually performed by a computer program for controlling the entire operation of the monochrome X-ray photoelectron spectrometer. Monochrome X-ray photoelectron spectrometer.