JP2014232009A5 - - Google Patents

Download PDF

Info

Publication number
JP2014232009A5
JP2014232009A5 JP2013111978A JP2013111978A JP2014232009A5 JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5 JP 2013111978 A JP2013111978 A JP 2013111978A JP 2013111978 A JP2013111978 A JP 2013111978A JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5
Authority
JP
Japan
Prior art keywords
lens group
optical system
lens
light
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013111978A
Other languages
English (en)
Japanese (ja)
Other versions
JP6251982B2 (ja
JP2014232009A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013111978A priority Critical patent/JP6251982B2/ja
Priority claimed from JP2013111978A external-priority patent/JP6251982B2/ja
Publication of JP2014232009A publication Critical patent/JP2014232009A/ja
Publication of JP2014232009A5 publication Critical patent/JP2014232009A5/ja
Application granted granted Critical
Publication of JP6251982B2 publication Critical patent/JP6251982B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013111978A 2013-05-28 2013-05-28 光学系、および面形状測定装置 Active JP6251982B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Publications (3)

Publication Number Publication Date
JP2014232009A JP2014232009A (ja) 2014-12-11
JP2014232009A5 true JP2014232009A5 (enrdf_load_stackoverflow) 2016-07-14
JP6251982B2 JP6251982B2 (ja) 2017-12-27

Family

ID=52125484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013111978A Active JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Country Status (1)

Country Link
JP (1) JP6251982B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2017616B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Apparatus for detecting condensation and sterilizer with such apparatus
NL2017617B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Sterilizer apparatus with measurement chamber having orifice

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166913A (ja) * 1983-10-07 1985-08-30 Sankyo Seiki Mfg Co Ltd 等速度走査用高解像力レンズ
US5155554A (en) * 1990-12-20 1992-10-13 General Signal Corporation Large aperture reflective interferometer for measuring convex spherical surfaces
JP3455264B2 (ja) * 1993-12-28 2003-10-14 ペンタックス株式会社 干渉計
JPH11108624A (ja) * 1997-10-03 1999-04-23 Nikon Corp 面形状測定装置および方法、並びに波面収差測定装置および方法
JP2009145724A (ja) * 2007-12-17 2009-07-02 Canon Inc 投影光学系及びそれを有する露光装置

Similar Documents

Publication Publication Date Title
JP2016024009A5 (enrdf_load_stackoverflow)
JP2012058068A5 (enrdf_load_stackoverflow)
JP2013511041A5 (enrdf_load_stackoverflow)
WO2014176479A8 (en) Surface roughness measurement device
JP2013242565A5 (enrdf_load_stackoverflow)
JP2014153719A5 (enrdf_load_stackoverflow)
JP2015500492A5 (enrdf_load_stackoverflow)
JP2015200745A5 (enrdf_load_stackoverflow)
JP2011232610A5 (enrdf_load_stackoverflow)
JP2014232009A5 (enrdf_load_stackoverflow)
JP2013029654A5 (enrdf_load_stackoverflow)
CN106802232B (zh) 一种基于全反射的显微物镜数值孔径测量方法及系统
CN102012554A (zh) 输出光垂直于像面的大口径F-Theta扫描透镜
CN104315973A (zh) 一种双波长斐索激光干涉仪标准参考镜
JP2013037099A5 (enrdf_load_stackoverflow)
CN103499872A (zh) 一种用于激光光束质量测量的超消色差光学系统
CN101000232A (zh) 利用干涉仪精确测量望远系统物镜和目镜间距偏差的方法
RU163268U1 (ru) Двухлинзовый объектив
JP6251982B2 (ja) 光学系、および面形状測定装置
JP2014126801A5 (enrdf_load_stackoverflow)
WO2016200802A1 (en) Backscatter reductant anamorphic beam sampler
RU153917U1 (ru) Объектив
JP2014199461A5 (enrdf_load_stackoverflow)
JP6131596B2 (ja) 光学系、および面形状測定装置
RU142867U1 (ru) Объектив