JP2014222751A - Sn膜におけるウイスカの軽減 - Google Patents
Sn膜におけるウイスカの軽減 Download PDFInfo
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- JP2014222751A JP2014222751A JP2014095711A JP2014095711A JP2014222751A JP 2014222751 A JP2014222751 A JP 2014222751A JP 2014095711 A JP2014095711 A JP 2014095711A JP 2014095711 A JP2014095711 A JP 2014095711A JP 2014222751 A JP2014222751 A JP 2014222751A
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- tin
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- concentration
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- 230000000116 mitigating effect Effects 0.000 title 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 155
- 238000000034 method Methods 0.000 claims abstract description 26
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 18
- 229910000679 solder Inorganic materials 0.000 claims abstract description 11
- 229910052718 tin Inorganic materials 0.000 claims description 144
- 239000013078 crystal Substances 0.000 claims description 42
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 229910000765 intermetallic Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 4
- 150000002602 lanthanoids Chemical class 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 239000002019 doping agent Substances 0.000 abstract description 72
- 230000015572 biosynthetic process Effects 0.000 abstract description 19
- 230000002401 inhibitory effect Effects 0.000 abstract description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000011135 tin Substances 0.000 description 147
- 239000010408 film Substances 0.000 description 101
- 238000009792 diffusion process Methods 0.000 description 23
- 239000010949 copper Substances 0.000 description 15
- 230000007246 mechanism Effects 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- 238000005324 grain boundary diffusion Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 239000002244 precipitate Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 238000011534 incubation Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000001186 cumulative effect Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- 229910017482 Cu 6 Sn 5 Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Landscapes
- Electroplating Methods And Accessories (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
【解決手段】電気リードを覆うはんだ前コーティングを形成する方法であって、表面を有する導電性金属リードを提供することを含む。金属リード表面を覆うスズ層を形成し、このスズ層は、結晶粒界領域によって分離された結晶粒を含む。このスズ層に、Alまたは希土類元素から選択された1種または数種の平均濃度のドーパントを、結晶粒界領域におけるこの1種または数種のドーパントの濃度が平均濃度よりも相当に高くなるようにドープする。
【選択図】図1
Description
Aは、経験的な物質係数(empirical materials coefficient)、
μは、温度に依存するせん断弾性率、
Rは、気体定数、
Tは、絶対温度、
bは、ベルガーのベクトル(Berger’s vector)、
GSは、平均結晶粒度、
pは、ある定数、
Eaは、有効活性化エネルギー、
σは、加えられた応力、
nは、応力べき指数(stress exponent)である。
Claims (4)
- 電気リードの上にはんだ前コーティングを形成する方法であって、
表面を有する導電性金属リードを提供すること、
結晶粒界領域によって分離された結晶粒を含むスズ層を前記表面を覆って形成すること、および
前記スズ層に、アルミニウムまたは1種もしくは数種のランタノイド希土類元素を平均濃度でドープすることを含み、
前記はんだ前コーティングが本質的にスズ、およびアルミニウムまたは1種もしくは数種のランタノイド希土類元素からなり、前記アルミニウムまたは1種もしくは数種のランタノイド希土類元素は前記スズとの金属間化合物を形成可能であり、
前記結晶粒界領域における前記アルミニウムまたは前記1種もしくは数種のランタノイド希土類元素の濃度が前記平均濃度よりも相当に高い
方法。 - 前記はんだ前コーティングが、本質的に、前記スズおよび前記1種もしくは数種のランタノイド希土類元素からなる、請求項1に記載の方法。
- 前記はんだ前コーティングにおける前記1種もしくは数種のランタノイド希土類元素の全濃度が1.5重量%から3.5重量%の範囲である、請求項3に記載の方法。
- 前記スズ層がドープ前に形成される、請求項1、2又は3に記載の方法。
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JP2014095711A JP5922702B2 (ja) | 2014-05-07 | 2014-05-07 | Sn膜におけるウイスカの軽減 |
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JP2014095711A JP5922702B2 (ja) | 2014-05-07 | 2014-05-07 | Sn膜におけるウイスカの軽減 |
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JP2011523783A Division JP2012500493A (ja) | 2008-08-21 | 2008-08-21 | Sn膜におけるウイスカの軽減 |
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JP5922702B2 JP5922702B2 (ja) | 2016-05-24 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11011476B2 (en) | 2018-03-12 | 2021-05-18 | Stmicroelectronics International N.V. | Lead frame surface finishing |
CN116417099A (zh) * | 2023-04-04 | 2023-07-11 | 哈尔滨工业大学 | 一种马氏体钢蠕变过程中晶界处孔洞形核和长大的分子动力学模拟方法 |
US11735512B2 (en) | 2018-12-31 | 2023-08-22 | Stmicroelectronics International N.V. | Leadframe with a metal oxide coating and method of forming the same |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07266080A (ja) * | 1994-03-25 | 1995-10-17 | Toyota Central Res & Dev Lab Inc | はんだ材料およびその製造方法 |
JPH091383A (ja) * | 1995-06-12 | 1997-01-07 | Honda Motor Co Ltd | 被接合部材の接合方法およびろう材 |
JP2000015478A (ja) * | 1998-06-30 | 2000-01-18 | Toshiba Corp | ハンダ材 |
JP2000271785A (ja) * | 1999-03-25 | 2000-10-03 | Okano Valve Mfg Co | 高Crフェライト系耐熱鋼用溶接材料、該材料からなるテイグ溶接棒、サブマージアーク溶接棒、溶接用ワイヤ及び被覆アーク溶接棒 |
JP2001358303A (ja) * | 2000-06-14 | 2001-12-26 | Nec Corp | 薄膜キャパシタおよびその製造方法 |
JP2002339097A (ja) * | 2001-05-11 | 2002-11-27 | Lucent Technol Inc | 近表面をドープしたスズまたはスズ合金で被覆された金属製品 |
JP2005002368A (ja) * | 2003-06-09 | 2005-01-06 | Ishihara Chem Co Ltd | ホイスカー防止用スズメッキ浴 |
-
2014
- 2014-05-07 JP JP2014095711A patent/JP5922702B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07266080A (ja) * | 1994-03-25 | 1995-10-17 | Toyota Central Res & Dev Lab Inc | はんだ材料およびその製造方法 |
JPH091383A (ja) * | 1995-06-12 | 1997-01-07 | Honda Motor Co Ltd | 被接合部材の接合方法およびろう材 |
JP2000015478A (ja) * | 1998-06-30 | 2000-01-18 | Toshiba Corp | ハンダ材 |
JP2000271785A (ja) * | 1999-03-25 | 2000-10-03 | Okano Valve Mfg Co | 高Crフェライト系耐熱鋼用溶接材料、該材料からなるテイグ溶接棒、サブマージアーク溶接棒、溶接用ワイヤ及び被覆アーク溶接棒 |
JP2001358303A (ja) * | 2000-06-14 | 2001-12-26 | Nec Corp | 薄膜キャパシタおよびその製造方法 |
JP2002339097A (ja) * | 2001-05-11 | 2002-11-27 | Lucent Technol Inc | 近表面をドープしたスズまたはスズ合金で被覆された金属製品 |
JP2005002368A (ja) * | 2003-06-09 | 2005-01-06 | Ishihara Chem Co Ltd | ホイスカー防止用スズメッキ浴 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11011476B2 (en) | 2018-03-12 | 2021-05-18 | Stmicroelectronics International N.V. | Lead frame surface finishing |
US11756899B2 (en) | 2018-03-12 | 2023-09-12 | Stmicroelectronics S.R.L. | Lead frame surface finishing |
US11735512B2 (en) | 2018-12-31 | 2023-08-22 | Stmicroelectronics International N.V. | Leadframe with a metal oxide coating and method of forming the same |
CN116417099A (zh) * | 2023-04-04 | 2023-07-11 | 哈尔滨工业大学 | 一种马氏体钢蠕变过程中晶界处孔洞形核和长大的分子动力学模拟方法 |
CN116417099B (zh) * | 2023-04-04 | 2024-01-26 | 哈尔滨工业大学 | 马氏体钢蠕变过程中晶界处孔洞形核和长大的模拟方法 |
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