JP2014219306A5 - - Google Patents
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- Publication number
- JP2014219306A5 JP2014219306A5 JP2013099245A JP2013099245A JP2014219306A5 JP 2014219306 A5 JP2014219306 A5 JP 2014219306A5 JP 2013099245 A JP2013099245 A JP 2013099245A JP 2013099245 A JP2013099245 A JP 2013099245A JP 2014219306 A5 JP2014219306 A5 JP 2014219306A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- electromagnetic wave
- terahertz electromagnetic
- photoconductive element
- elliptical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 65
- 238000007654 immersion Methods 0.000 claims description 22
- 239000007787 solid Substances 0.000 claims description 22
- 238000000605 extraction Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 239000000284 extract Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013099245A JP6286863B2 (ja) | 2013-05-09 | 2013-05-09 | 光学系、及びテラヘルツ放射顕微鏡 |
| CN201410162917.1A CN104142571B (zh) | 2013-05-09 | 2014-04-22 | 光学系统、太赫兹发射显微镜和用于制造器件的方法 |
| US14/268,768 US9354164B2 (en) | 2013-05-09 | 2014-05-02 | Optical system, terahertz emission microscope, and method of manufacturing a device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013099245A JP6286863B2 (ja) | 2013-05-09 | 2013-05-09 | 光学系、及びテラヘルツ放射顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014219306A JP2014219306A (ja) | 2014-11-20 |
| JP2014219306A5 true JP2014219306A5 (enExample) | 2016-03-10 |
| JP6286863B2 JP6286863B2 (ja) | 2018-03-07 |
Family
ID=51851793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013099245A Expired - Fee Related JP6286863B2 (ja) | 2013-05-09 | 2013-05-09 | 光学系、及びテラヘルツ放射顕微鏡 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9354164B2 (enExample) |
| JP (1) | JP6286863B2 (enExample) |
| CN (1) | CN104142571B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568818B (zh) * | 2015-01-20 | 2017-08-25 | 中国工程物理研究院流体物理研究所 | 一种基于光纤传导的主动式太赫兹光谱检测内窥探头 |
| DE202016008526U1 (de) | 2015-03-03 | 2018-05-22 | Sikora Ag | Vorrichtung zum Messen des Durchmessers und/oder der Wanddicke eines Strangs |
| JP6330703B2 (ja) * | 2015-03-20 | 2018-05-30 | ソニー株式会社 | テラヘルツ波顕微鏡および焦点制御方法 |
| CN105527265B (zh) * | 2016-01-22 | 2023-07-04 | 复旦大学 | 激光泵浦时间分辨上转换发光活体成像系统 |
| US20180217044A1 (en) * | 2017-02-02 | 2018-08-02 | Honeywell International Inc. | Forward scatter in particulate matter sensor |
| CN106932357B (zh) * | 2017-03-09 | 2020-08-11 | 南开大学 | 一种超衍射分辨极限太赫兹光谱成像系统 |
| CN106707490B (zh) * | 2017-03-17 | 2019-07-19 | 北京航空航天大学 | 一种载玻片型超半球固浸显微系统 |
| KR20190052516A (ko) * | 2017-11-08 | 2019-05-16 | 삼성전자주식회사 | 표면 검사 장치 |
| CN110197473B (zh) * | 2018-02-27 | 2021-12-03 | 国科赛思(北京)科技有限公司 | 塑封器件真伪识别方法及装置 |
| JP2020153761A (ja) * | 2019-03-19 | 2020-09-24 | 株式会社Ｓｃｒｅｅｎホールディングス | 検査装置、検査方法、電磁波情報処理装置、電磁波情報処理方法およびプログラム |
| CN110118645B (zh) * | 2019-04-19 | 2021-11-05 | 西北核技术研究所 | 一种半椭球反射面的光学性能综合评价方法 |
| DE102019135487A1 (de) * | 2019-12-20 | 2021-06-24 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Vorrichtung zum Senden und/oder Empfangen von Terahertz-Strahlung und Verwendung hiervon |
| DE102020113306A1 (de) * | 2020-05-15 | 2021-11-18 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Vorrichtung zum Senden und/oder Empfangen von Terahertz-Strahlung und Steuereinrichtung hierfür |
| JP2024081200A (ja) | 2022-12-06 | 2024-06-18 | 三星電子株式会社 | 測定装置及び検査装置 |
| US12339223B2 (en) | 2022-12-06 | 2025-06-24 | Samsung Electronics Co., Ltd. | Measuring apparatus and testing apparatus having the same |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6452726B1 (en) * | 1999-07-16 | 2002-09-17 | Michael J. Mandella | Collimators and collimator arrays employing ellipsoidal solid immersion lenses |
| GB2371618B (en) * | 2001-01-30 | 2004-11-17 | Teraprobe Ltd | A probe, apparatus and method for examining a sample |
| DE10121064A1 (de) * | 2001-04-28 | 2002-10-31 | Evotec Ag | Vorrichtung und Verfahren zur optischen Messung von chemischen und/oder biologischen Proben |
| WO2005022180A1 (ja) * | 2003-08-29 | 2005-03-10 | Aisin Seiki Kabushiki Kaisha | 半導体デバイスの電界分布測定方法と装置 |
| US7230245B2 (en) * | 2004-05-04 | 2007-06-12 | Rensselaer Polytechnic Institute | Field induced THz wave emission microscope |
| JP2006064679A (ja) * | 2004-08-30 | 2006-03-09 | Canon Inc | アンテナを備える電磁波素子 |
| JP4827490B2 (ja) | 2004-10-27 | 2011-11-30 | パナソニック株式会社 | 半導体装置の製造システム |
| US7406151B1 (en) * | 2005-07-19 | 2008-07-29 | Xradia, Inc. | X-ray microscope with microfocus source and Wolter condenser |
| JP2008089546A (ja) * | 2006-10-05 | 2008-04-17 | Canon Inc | 電磁波測定装置 |
| JP2013076618A (ja) * | 2011-09-30 | 2013-04-25 | Sony Corp | 光伝導素子、レンズ、テラヘルツ放射顕微鏡及びデバイスの製造方法 |
-
2013
- 2013-05-09 JP JP2013099245A patent/JP6286863B2/ja not_active Expired - Fee Related
-
2014
- 2014-04-22 CN CN201410162917.1A patent/CN104142571B/zh not_active Expired - Fee Related
- 2014-05-02 US US14/268,768 patent/US9354164B2/en not_active Expired - Fee Related
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