JP2014218740A - 蒸着源アセンブリー - Google Patents
蒸着源アセンブリー Download PDFInfo
- Publication number
- JP2014218740A JP2014218740A JP2014088321A JP2014088321A JP2014218740A JP 2014218740 A JP2014218740 A JP 2014218740A JP 2014088321 A JP2014088321 A JP 2014088321A JP 2014088321 A JP2014088321 A JP 2014088321A JP 2014218740 A JP2014218740 A JP 2014218740A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- deposition source
- insulator
- chamber
- source assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000012212 insulator Substances 0.000 claims description 70
- 238000000151 deposition Methods 0.000 claims description 65
- 230000008021 deposition Effects 0.000 claims description 60
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 229910052749 magnesium Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000000615 nonconductor Substances 0.000 abstract 5
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 28
- 239000010408 film Substances 0.000 description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 239000007769 metal material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000011368 organic material Substances 0.000 description 7
- 239000012044 organic layer Substances 0.000 description 6
- 239000003517 fume Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- YOZHUJDVYMRYDM-UHFFFAOYSA-N 4-(4-anilinophenyl)-3-naphthalen-1-yl-n-phenylaniline Chemical compound C=1C=C(C=2C(=CC(NC=3C=CC=CC=3)=CC=2)C=2C3=CC=CC=C3C=CC=2)C=CC=1NC1=CC=CC=C1 YOZHUJDVYMRYDM-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- IYSYLWYGCWTJSG-UHFFFAOYSA-N n-tert-butyl-1-phenylmethanimine oxide Chemical compound CC(C)(C)[N+]([O-])=CC1=CC=CC=C1 IYSYLWYGCWTJSG-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
Abstract
Description
110 チャンバ、
120 蒸着源、
130 電極、
140 絶縁体、
150 絶縁体キャップ。
Claims (10)
- チャンバ内に配された基板に蒸着物質を蒸着するための蒸着源アセンブリーにおいて、
前記チャンバ内に配されて、蒸着物質を放射する蒸着源と、
前記チャンバを貫通するように形成され、前記蒸着源を加熱するための電源を供給する電極と、
前記電極と前記チャンバが相互に接触しないように、前記電極と前記チャンバとの間に介在される絶縁体と、
前記絶縁体の一側に、前記絶縁体を覆うように形成される絶縁体キャップと、を備える蒸着源アセンブリー。 - 前記蒸着物質は、負極電極を形成するための金属であることを特徴とする請求項1に記載の蒸着源アセンブリー。
- 前記蒸着物質は、Li、Ca、LiF/Ca、LiF/Al、Al、Ag、Mg、及びそれらの化合物のうち一つ以上を含むことを特徴とする請求項2に記載の蒸着源アセンブリー。
- 前記絶縁体は、前記チャンバに形成されたホールにはめ込まれ、前記電極が前記絶縁体を貫通するように形成されることを特徴とする請求項1に記載の蒸着源アセンブリー。
- 前記絶縁体は、前記チャンバの内面及び外面と密着して結合するように形成されることを特徴とする請求項4に記載の蒸着源アセンブリー。
- 前記絶縁体キャップは、前記絶縁体と面接触するベースと、前記ベースから一方向に突設される突出部と、を備えることを特徴とする請求項1に記載の蒸着源アセンブリー。
- 前記突出部は、前記チャンバの下面方向に突設されることを特徴とする請求項6に記載の蒸着源アセンブリー。
- 前記突出部は、前記チャンバと所定間隔ほど離隔するように形成されることを特徴とする請求項6に記載の蒸着源アセンブリー。
- 前記絶縁体キャップは、前記蒸着物質が前記絶縁体に蒸着されることを防止することを特徴とする請求項1に記載の蒸着源アセンブリー。
- 前記絶縁体キャップは、セラミックを含むことを特徴とする請求項1に記載の蒸着源アセンブリー。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020130050805A KR102086549B1 (ko) | 2013-05-06 | 2013-05-06 | 증착원 어셈블리 |
KR10-2013-0050805 | 2013-05-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014218740A true JP2014218740A (ja) | 2014-11-20 |
JP6378922B2 JP6378922B2 (ja) | 2018-08-22 |
Family
ID=51840740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014088321A Active JP6378922B2 (ja) | 2013-05-06 | 2014-04-22 | 蒸着源アセンブリー |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140326183A1 (ja) |
JP (1) | JP6378922B2 (ja) |
KR (1) | KR102086549B1 (ja) |
CN (1) | CN104141114B (ja) |
TW (1) | TWI649441B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102379184B1 (ko) * | 2015-07-30 | 2022-03-25 | 엘지디스플레이 주식회사 | 유기발광소자의 상향식 증착장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52100052U (ja) * | 1976-01-26 | 1977-07-28 | ||
JP2003313654A (ja) * | 2001-12-12 | 2003-11-06 | Semiconductor Energy Lab Co Ltd | 成膜装置および成膜方法およびクリーニング方法 |
JP2010255019A (ja) * | 2009-04-21 | 2010-11-11 | Sumitomo Electric Ind Ltd | 成膜装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2079784A (en) * | 1933-01-19 | 1937-05-11 | Robley C Williams | Plating by thermal evaporation |
US2554902A (en) * | 1948-03-25 | 1951-05-29 | Nat Res Corp | Thermionic discharge device control |
US3344505A (en) * | 1964-09-22 | 1967-10-03 | Westinghouse Electric Corp | Method of bonding a boron nitride body to a refractory metal |
JPS61242631A (ja) * | 1985-04-20 | 1986-10-28 | Nippon Soken Inc | 化合物超微粒子の作製方法および作製装置 |
DE4015385A1 (de) * | 1990-05-14 | 1991-11-21 | Leybold Ag | Reihenverdampfer fuer vakuumbedampfungsanlagen |
US8608855B2 (en) * | 2006-04-28 | 2013-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Electrode cover and evaporation device |
US20100089319A1 (en) * | 2008-10-09 | 2010-04-15 | Applied Materials, Inc. | Rf return path for large plasma processing chamber |
-
2013
- 2013-05-06 KR KR1020130050805A patent/KR102086549B1/ko active IP Right Grant
- 2013-09-17 US US14/029,268 patent/US20140326183A1/en not_active Abandoned
- 2013-12-09 CN CN201310659801.4A patent/CN104141114B/zh active Active
-
2014
- 2014-03-03 TW TW103107001A patent/TWI649441B/zh active
- 2014-04-22 JP JP2014088321A patent/JP6378922B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52100052U (ja) * | 1976-01-26 | 1977-07-28 | ||
JP2003313654A (ja) * | 2001-12-12 | 2003-11-06 | Semiconductor Energy Lab Co Ltd | 成膜装置および成膜方法およびクリーニング方法 |
JP2010255019A (ja) * | 2009-04-21 | 2010-11-11 | Sumitomo Electric Ind Ltd | 成膜装置 |
Also Published As
Publication number | Publication date |
---|---|
CN104141114A (zh) | 2014-11-12 |
JP6378922B2 (ja) | 2018-08-22 |
TWI649441B (zh) | 2019-02-01 |
TW201502300A (zh) | 2015-01-16 |
KR102086549B1 (ko) | 2020-03-10 |
US20140326183A1 (en) | 2014-11-06 |
KR20140131773A (ko) | 2014-11-14 |
CN104141114B (zh) | 2018-12-21 |
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