JP2014217935A - Dressing tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dressing tool that can properly determine a usage limit.SOLUTION: The dressing tool 2 for dressing a grinding abrasive stone of a grinding wheel includes: a dressing board 4 for dressing the grinding abrasive stone; and a supporting plate 6 in which the dressing board 4 is fixed to a top face 6a. The dressing board 4 includes: a first layer 8 bonded to the supporting plate 6; and a second layer 10 ground by the grinding abrasive stone. The first layer 8 and the second layer 10 have respective hues different from each other, so that a usage limit can be determined by the hues when the first layer 8 is exposed to the outside by the wear-out of the second layer 10.

Description

  The present invention relates to a dressing tool used for dressing a grinding wheel of a grinding wheel.

  In recent years, in order to realize a small and light device, it is required to thinly grind a wafer made of a material such as silicon or sapphire. The grinding of the wafer is performed by, for example, a grinding apparatus equipped with a grinding wheel having a grinding wheel (grinding wheel) for grinding. The wafer is ground by holding the wafer on the holding table of the grinding apparatus and pressing the rotated grinding wheel against the processing surface of the wafer.

  The above-mentioned grinding wheel is formed, for example, by mixing and sintering abrasive grains such as diamond and CBN in a binder such as vitrified or resinoid. When the wafer is rubbed with the grinding wheel, a large number of abrasive grains exposed on the surface of the grinding wheel act as cutting edges, and the work surface of the wafer is scraped off.

  On the other hand, as the grinding progresses, the grinding wheel also wears, and new abrasive grains appear one after another on the surface of the grinding wheel that comes into contact with the work surface of the wafer. This action (called a self-generated blade action) suppresses a decrease in grinding performance due to abrasive grain clogging, clogging, crushing, and the like, thereby realizing good cutting.

  By the way, in the unused grinding wheel, the abrasive grains are not properly exposed, and the height of the grinding wheel varies. Therefore, a dressing process for grinding the dressing board is performed before grinding the wafer in order to properly express the abrasive grains and to make the height of the grinding wheel uniform (see, for example, Patent Document 1).

  The dressing board is formed to a thickness of about 1 mm to 5 mm, for example, and the back side is bonded to a resin support plate. The dressing board is worn by friction with the grinding wheel and is replaced when it becomes thin to a certain extent. The timing for changing the dressing board is determined by a method such as visual inspection.

JP 2009-142906 A

  However, with the method such as visual observation described above, it is not always possible to appropriately determine the replacement timing of the dressing board. Therefore, there is a possibility that the support plate is accidentally ground by using the dressing board worn to the limit (use limit) without being replaced, and the grinding wheel is damaged.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a dressing tool capable of appropriately identifying the use limit.

  According to the present invention, a dressing tool for dressing a grinding wheel of a grinding wheel, comprising: a dressing board for dressing the grinding wheel; and a support plate on which the dressing board is fixed to an upper surface, the dressing board comprising: A first layer bonded to the support plate and a second layer ground with the grinding wheel, the first layer and the second layer exhibit different hues, There is provided a dressing tool characterized in that the first layer is exposed by wear of the second layer so that the use limit can be identified by color.

  In the dressing tool, the second layer includes abrasive grains, the first layer includes an abrasive layer including abrasive grains in contact with the second layer, and a non-abrasive that does not include abrasive grains. It is preferable to be composed of a grain layer.

  Since the dressing tool of the present invention includes the dressing board composed of the first layer and the second layer exhibiting different hues, whether or not the dressing tool has reached the usage limit is appropriately determined based on the hue of the dressing board. Can be identified.

FIG. 1A is a perspective view schematically illustrating a configuration example of a dressing tool according to the present embodiment, and FIG. 1B schematically illustrates a configuration example of the dressing tool according to the present embodiment. It is sectional drawing shown. It is a side view which shows typically the use condition of the dressing tool which concerns on this Embodiment. FIG. 3A is a perspective view schematically illustrating a configuration example of the dressing tool according to the second aspect, and FIG. 3B schematically illustrates a configuration example of the dressing tool according to the second aspect. It is sectional drawing shown.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1A is a perspective view schematically illustrating a configuration example of a dressing tool according to the present embodiment, and FIG. 1B schematically illustrates a configuration example of the dressing tool according to the present embodiment. It is sectional drawing shown.

  As shown in FIG. 1, a dressing tool 2 according to this embodiment includes a dressing board 4 formed in a flat disk shape. A support plate 6 that supports the dressing board 4 is bonded to the lower surface 4 b of the dressing board 4.

  The support plate 6 is formed of a material such as resin. Further, the support plate 6 is formed in a disk shape having a larger diameter than the dressing board 4 so that the entire dressing board 4 can be supported.

  The dressing board 4 includes at least two types of layers: a first layer 8 on the lower surface 4b side bonded to the upper surface 6a of the support plate 6 and a second layer 10 on the upper surface 4a side. The grinding wheel 26 is dressed by pressing the grinding wheel 26 (see FIG. 2) against the upper surface 4a of the dressing board 4 while rotating the dressing board 4 and the grinding wheel 18 (see FIG. 2).

  The second layer 10 on the upper surface 4a side is formed, for example, using a mixed material in which abrasives such as white alundum (WA) and green carbon (GC) are mixed with a binder such as vitrified or resinoid. However, the binder and the abrasive grains constituting the second layer 10 are changed according to the configuration of the grinding wheel 26 and the like.

  The first layer 8 on the lower surface 4b side has a configuration similar to that of the second layer 10 at least in a region in the vicinity of the interface with the second layer 10 (hereinafter referred to as an interface region). Specifically, the interface region of the first layer 8 is an abrasive layer containing the same abrasive grains as the second layer 10. However, the hue indicated by the abrasive layer is different from the hue indicated by the second layer 10. The other region of the first layer 8 is a non-abrasive layer that does not contain abrasive grains.

  Thus, by including abrasive grains in the interface region of the first layer 8, wear of the dressing board 4 progresses, and the first layer 8 is formed on the upper surface 4 a side of the dressing board 4 in contact with the grinding wheel 26. Even if exposed, the dressing process can be continued properly. The entire first layer 8 may contain abrasive grains.

  To one or both of the first layer 8 and the second layer 10, a pigment or the like that imparts a predetermined hue (color) is added. Specifically, a pigment or the like is added to one or both of the first layer 8 and the second layer 10 so that the hue indicated by the first layer 8 and the hue indicated by the second layer 10 are different. .

  Moreover, the thickness of the 1st layer 8 and the 2nd layer 10 will show the 1st layer 8 on the upper surface 4a side of the dressing board 4 which contacts the grinding stone 26, if the dressing tool 2 reaches | attains a use limit. Have been adjusted so that. Therefore, it can be easily identified that the dressing tool 2 has reached the use limit based on the hue of the first layer 8 exposed on the upper surface 4a side of the dressing board 4.

  It is preferable that at least one of the first layer 8 and the second layer 10 is configured to exhibit a bright color with high brightness. Moreover, it is preferable that at least one of the first layer 8 and the second layer 10 is configured to indicate any one of red, blue, and green. Since such a color has high visibility, it is suitable for an application for identifying a use limit.

  The above-described dressing board 4 can be manufactured by a manufacturing method similar to a conventional dressing board manufacturing method. For example, the first layer 8 and the second layer 10 are individually formed by adding an arbitrary pigment to the above-described mixed material, and these are joined and then sintered, thereby making the dressing board of the present embodiment 4 can be manufactured. Further, after the first layer 8 and the second layer 10 are individually molded and sintered, they may be bonded with an adhesive or the like.

  Next, the dressing process of the grinding wheel 26 using the dressing tool 2 of the present embodiment will be described. FIG. 2 is a side view schematically showing a use state of the dressing tool according to the present embodiment.

  As shown in FIG. 2, the grinding device 12 used in the dressing process includes a cylindrical spindle housing 16 that rotatably supports a spindle 14. The spindle housing 16 is attached to a support column (not shown) of the grinding device 12 via a moving mechanism (not shown), and moves in the vertical direction.

  A wheel mount 20 to which a grinding wheel 18 is attached is fixed to the lower end side of the spindle 14. A rotation mechanism 22 including a motor or the like is connected to the upper end side of the spindle 14, and the grinding wheel 18 attached to the wheel mount 20 rotates with the rotational force transmitted from the rotation mechanism 22.

  The grinding wheel 18 includes a cylindrical wheel base 24 made of a metal material such as aluminum or stainless steel. A plurality of grinding wheels 26 are fixed to the annular lower surface of the wheel base 24 over the entire circumference.

  A holding table 28 is provided below the wheel mount 20. The holding table 28 is connected to a rotation mechanism (not shown) such as a motor, and rotates around a rotation axis parallel to the axial direction of the spindle 14.

  A surface 28a of the holding table 28 serves as a holding surface for sucking and holding a workpiece such as a wafer. A negative pressure of a suction source (not shown) acts on the holding surface through a flow path (not shown) formed inside the holding table 22 to generate a suction force for sucking the workpiece.

  In a state where the lower surface 6b side of the support plate 6 is attracted to the holding table 28, the grinding wheel 18 and the holding table 28 are rotated, and the spindle housing 16 is lowered. If the lowering amount of the spindle housing 16 is adjusted so that the lower surface (tip) of the grinding wheel 26 is pressed against the upper surface 4a of the dressing board 4, the grinding wheel 26 is dressed.

  When the dressing board 4 is worn by the dressing of the grinding wheel 26 described above, the second layer 10 is gradually thinned. When the dressing tool 2 reaches the use limit and the second layer 10 is completely lost, the first layer 8 having a different hue from the second layer 10 is exposed on the upper surface 4a side of the dressing board 4.

  As described above, the dressing tool 2 according to the present embodiment is composed of the first layer 8 and the second layer 10 showing different hues and includes the dressing board 4, so that the dressing tool 2 reaches the use limit. It can be appropriately identified based on the hue of the dressing board 4.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, when the dressing tool 2 reaches the use limit, the first layer 8 and the second layer 10 are made the same so that the first layer 8 is exposed on the entire upper surface 4a side. Although the diameter is set, the configuration of the dressing tool 2 is not limited to this.

  FIG. 3A is a perspective view schematically illustrating a configuration example of the dressing tool according to the second aspect, and FIG. 3B schematically illustrates a configuration example of the dressing tool according to the second aspect. It is sectional drawing shown. In FIG. 3A, the outline and the like of the first layer 8 are indicated by broken lines so that the shape and the like of the first layer 8 can be understood. FIG. 3B shows a cross section taken along the line AA ′ of FIG.

  As shown in FIG. 3, the dressing tool 2 according to the second aspect is a dressing including three disc-shaped first layers 8 and a disc-shaped second layer 10 covering the first layers 8. A board 4 is provided. The second layer 10 is thicker than the first layer 8 and has a large diameter.

  The first layer 8 is disposed on the lower surface 4b side of the dressing board 4 so as to come into contact with the front surface 6a side of the support board 6. In this configuration, when the dressing board 4 is worn, the first layer 8 is exposed only in a part on the upper surface 4a side.

  Although FIG. 3 shows the dressing tool 2 including the three first layers 8, the number of the first layers 8 included in the dressing board 4 is not particularly limited. Further, the planar shapes of the first layer 8 and the second layer 10 are not particularly limited, and may be, for example, an ellipse or a polygon.

  The dressing tool 2 according to the present invention may be used for the purpose of shaping the grinding wheel 26 or may be used for the purpose of sharpening the grinding wheel 26. For the purpose of shaping the grinding wheel 26, the dressing board 4 containing relatively large size abrasive grains is used, and for the purpose of sharpening the grinding wheel 26, the dressing board 4 containing relatively small size abrasive grains is used. good.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be changed as appropriate without departing from the scope of the object of the present invention.

2 dressing tool 4 dressing board 4a upper surface 4b lower surface 6 support plate 6a upper surface 6b lower surface 8 first layer 10 second layer 12 grinding device 14 spindle 16 spindle housing 18 grinding wheel 20 wheel mount 22 rotating mechanism 24 wheel base 26 grinding Grinding stone 28 Holding table 28a Surface

Claims (2)

A dressing tool for dressing a grinding wheel of a grinding wheel,
A dressing board for dressing the grinding wheel;
A support plate having the dressing board fixed to the upper surface;
The dressing board
A first layer adhered to the support plate;
A second layer to be ground with the grinding wheel,
The first layer and the second layer exhibit different hues;
A dressing tool characterized in that the use limit can be identified by a color when the first layer is exposed by wear of the second layer. The second layer includes abrasive grains,
2. The dressing tool according to claim 1, wherein the first layer includes an abrasive layer including abrasive grains in contact with the second layer, and a non-abrasive layer not including abrasive grains. .

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