JP2014215300A5 - - Google Patents
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- JP2014215300A5 JP2014215300A5 JP2014090746A JP2014090746A JP2014215300A5 JP 2014215300 A5 JP2014215300 A5 JP 2014215300A5 JP 2014090746 A JP2014090746 A JP 2014090746A JP 2014090746 A JP2014090746 A JP 2014090746A JP 2014215300 A5 JP2014215300 A5 JP 2014215300A5
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- JP
- Japan
- Prior art keywords
- laser emitter
- laser
- emitter
- wavelength
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 claims 8
- 238000005286 illumination Methods 0.000 claims 4
- 239000006185 dispersion Substances 0.000 claims 2
- 238000000572 ellipsometry Methods 0.000 claims 1
- 238000005305 interferometry Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13165409.7A EP2796938B1 (de) | 2013-04-25 | 2013-04-25 | Vorrichtung zum Erfassen einer 3D-Struktur eines Objekts |
| EP13165409.7 | 2013-04-25 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014215300A JP2014215300A (ja) | 2014-11-17 |
| JP2014215300A5 true JP2014215300A5 (enExample) | 2018-02-01 |
| JP6283562B2 JP6283562B2 (ja) | 2018-02-21 |
Family
ID=48288781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014090746A Active JP6283562B2 (ja) | 2013-04-25 | 2014-04-24 | 物体の3次元構造を検出する装置 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9297647B2 (enExample) |
| EP (1) | EP2796938B1 (enExample) |
| JP (1) | JP6283562B2 (enExample) |
| KR (1) | KR102069904B1 (enExample) |
| CN (1) | CN104121851B (enExample) |
| AU (1) | AU2014202103B2 (enExample) |
| BR (1) | BR102014009312A2 (enExample) |
| CA (1) | CA2849502A1 (enExample) |
| TW (1) | TWI618915B (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2947417B1 (de) * | 2014-05-23 | 2019-12-18 | VOCO GmbH | Vorrichtung und Verfahren zum Erfassen einer 3D-Struktur eines Objekts |
| WO2016031424A1 (ja) * | 2014-08-25 | 2016-03-03 | 株式会社東京精密 | 距離測定装置、及び距離測定方法 |
| KR101628730B1 (ko) * | 2015-04-30 | 2016-06-21 | 주식회사 투아이스펙트라 | 치과용 3차원 이미징 방법 및 그 시스템 |
| EP3322340B1 (en) * | 2015-07-14 | 2019-06-19 | Koninklijke Philips N.V. | Imaging with enhanced x-ray radiation |
| TWI564772B (zh) * | 2015-07-31 | 2017-01-01 | Infilm Optoelectronic Inc | An apparatus for detecting an object and a light guide plate touch device using the same |
| US10510624B2 (en) | 2016-03-29 | 2019-12-17 | Applied Materials, Inc. | Metrology systems with multiple derivative modules for substrate stress and deformation measurement |
| EP3242107B1 (de) | 2016-05-04 | 2020-04-08 | VOCO GmbH | Optische interferometrische vorrichtung zum erfassen einer 3d-struktur eines objekts |
| DE102016220468B4 (de) * | 2016-10-19 | 2025-12-11 | Robert Bosch Gmbh | Lidar-Sensor zur Erfassung eines Objektes |
| FR3064354B1 (fr) | 2017-03-24 | 2021-05-21 | Univ Du Mans | Systeme de projection pour la mesure de vibrations |
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| DE102017210101A1 (de) * | 2017-06-16 | 2018-12-20 | Robert Bosch Gmbh | Filtereinrichtung für einen optischen Sensor |
| DE102018200363B3 (de) * | 2018-01-11 | 2019-03-21 | Robert Bosch Gmbh | Messvorrichtung zur Füllstandüberwachung und differenziellen Messung des optischen Brechungsindex |
| CN108413872B (zh) * | 2018-04-10 | 2020-03-10 | 天津科技大学 | 基于法布里-珀罗多光束干涉的三维尺寸精密测量方法 |
| TWI663376B (zh) * | 2018-06-26 | 2019-06-21 | 宏碁股份有限公司 | 三維感測系統 |
| TWI805795B (zh) * | 2018-07-20 | 2023-06-21 | 美商應用材料股份有限公司 | 基板定位設備與方法 |
| DE102018118501A1 (de) * | 2018-07-31 | 2020-02-06 | Precitec Gmbh & Co. Kg | Messvorrichtung zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück |
| WO2020089900A1 (en) * | 2018-10-30 | 2020-05-07 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| CN109506599A (zh) * | 2018-12-21 | 2019-03-22 | 天活松林光学(广州)有限公司 | 一种非接触式平面度测量装置及测量方法 |
| DE102019103814B3 (de) * | 2019-02-14 | 2020-07-02 | Hochschule Trier - Trier University of Applied Sciences | Vorrichtung zum optischen Messen einer Oberfläche |
| GB2581834A (en) * | 2019-03-01 | 2020-09-02 | Elident Gmbh | Process and apparatus for intra-oral holography imaging |
| CN109828261B (zh) * | 2019-04-01 | 2022-02-01 | 南昌航空大学 | 大气激光雷达的探测方法及装置 |
| CN109967388B (zh) * | 2019-04-23 | 2024-03-01 | 无锡奥特维科技股份有限公司 | 检测装置和硅片分选设备 |
| DE102019209213A1 (de) * | 2019-06-26 | 2020-12-31 | Q.ant GmbH | Sensoranordnung zur Charakterisierung von Partikeln |
| TWI740224B (zh) * | 2019-10-01 | 2021-09-21 | 台灣海博特股份有限公司 | 光資訊三維空間量測方法 |
| CN111308547B (zh) * | 2020-03-21 | 2022-09-27 | 哈尔滨工程大学 | 一种基于复合干涉仪的六维地震波测量装置 |
| CN111721236B (zh) * | 2020-05-24 | 2022-10-25 | 奥比中光科技集团股份有限公司 | 一种三维测量系统、方法及计算机设备 |
| CN112097679B (zh) * | 2020-09-10 | 2022-04-19 | 厦门海铂特生物科技有限公司 | 一种基于光信息三维空间测量方法 |
| DE102020124521B3 (de) | 2020-09-21 | 2021-09-30 | Agrippa Holding & Consulting Gmbh | Optische Vorrichtung und Verfahren zur Untersuchung eines Gegenstandes |
| JP7442145B2 (ja) * | 2021-02-25 | 2024-03-04 | Ckd株式会社 | 三次元計測装置 |
| CN113899320B (zh) * | 2021-09-30 | 2023-10-03 | 中国科学院光电技术研究所 | 一种基于空间结构光场的高精度微纳三维形貌测量方法 |
| GB202214343D0 (en) * | 2022-09-30 | 2022-11-16 | Univ Nottingham | Optical path length characterisation |
| US12487075B2 (en) | 2024-04-18 | 2025-12-02 | Saudi Arabian Oil Company | Characterizing rock properties with optical energy sources in a wellbore |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3541238A (en) * | 1968-11-29 | 1970-11-17 | Bell Telephone Labor Inc | Real time three dimensional television system utilizing wave front reconstruction techniques |
| DE2546007B2 (de) * | 1975-10-14 | 1977-12-29 | Siemens AG, 1000 Berlin und 8000 München | Faelschungssichere ausweiskarte und verfahren zu ihrer herstellung |
| US4583228A (en) * | 1983-11-21 | 1986-04-15 | At&T Bell Laboratories | Frequency stabilization of lasers |
| US5127731A (en) * | 1991-02-08 | 1992-07-07 | Hughes Aircraft Company | Stabilized two-color laser diode interferometer |
| KR100896227B1 (ko) * | 2001-03-30 | 2009-05-08 | 소니 가부시끼 가이샤 | 광학픽업 및 광디스크 드라이브장치 |
| US6809845B1 (en) | 2002-09-25 | 2004-10-26 | University Of South Florida | Phase imaging using multi-wavelength digital holography |
| WO2004094942A2 (en) * | 2003-04-23 | 2004-11-04 | Ut-Battelle, Llc | Recording multiple spatially-heterodyned direct to digital holograms in one digital image |
| JP4919790B2 (ja) * | 2006-12-15 | 2012-04-18 | シャープ株式会社 | 波長制御方法、ホログラム情報処理装置およびホログラム記録媒体 |
| US20090040527A1 (en) * | 2007-07-20 | 2009-02-12 | Paul Dan Popescu | Method and apparatus for speckle noise reduction in electromagnetic interference detection |
| US8068235B1 (en) | 2007-07-24 | 2011-11-29 | Lockheed Martin Corporation | Systems and methods for multi-function coherent imaging |
| EP3064895B1 (en) * | 2010-09-07 | 2020-04-15 | Dai Nippon Printing Co., Ltd. | Linear illumination device |
| JP2012104586A (ja) * | 2010-11-09 | 2012-05-31 | Elpida Memory Inc | 半導体計測装置 |
| KR20130039005A (ko) * | 2011-10-11 | 2013-04-19 | (주)미래컴퍼니 | 3차원 형상 및 두께 측정 장치 |
| CN102508362A (zh) * | 2011-11-15 | 2012-06-20 | 深圳市光大激光科技股份有限公司 | 一种双光束耦合装置 |
-
2013
- 2013-04-25 EP EP13165409.7A patent/EP2796938B1/de active Active
-
2014
- 2014-04-14 TW TW103113537A patent/TWI618915B/zh not_active IP Right Cessation
- 2014-04-15 AU AU2014202103A patent/AU2014202103B2/en not_active Ceased
- 2014-04-16 BR BR102014009312-5A patent/BR102014009312A2/pt active Search and Examination
- 2014-04-16 CA CA2849502A patent/CA2849502A1/en not_active Abandoned
- 2014-04-16 KR KR1020140045594A patent/KR102069904B1/ko active Active
- 2014-04-23 US US14/259,942 patent/US9297647B2/en active Active
- 2014-04-24 JP JP2014090746A patent/JP6283562B2/ja active Active
- 2014-04-25 CN CN201410170082.4A patent/CN104121851B/zh not_active Expired - Fee Related
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