JP2014193450A - 光照射装置 - Google Patents

光照射装置 Download PDF

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Publication number
JP2014193450A
JP2014193450A JP2013071383A JP2013071383A JP2014193450A JP 2014193450 A JP2014193450 A JP 2014193450A JP 2013071383 A JP2013071383 A JP 2013071383A JP 2013071383 A JP2013071383 A JP 2013071383A JP 2014193450 A JP2014193450 A JP 2014193450A
Authority
JP
Japan
Prior art keywords
lamp
gas
ultraviolet lamp
ultraviolet
light irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013071383A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014193450A5 (cg-RX-API-DMAC7.html
Inventor
Kazunori Hiroi
和則 広井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GS Yuasa Corp
Original Assignee
GS Yuasa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GS Yuasa Corp filed Critical GS Yuasa Corp
Priority to JP2013071383A priority Critical patent/JP2014193450A/ja
Publication of JP2014193450A publication Critical patent/JP2014193450A/ja
Publication of JP2014193450A5 publication Critical patent/JP2014193450A5/ja
Pending legal-status Critical Current

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  • Cleaning In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2013071383A 2013-03-29 2013-03-29 光照射装置 Pending JP2014193450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013071383A JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013071383A JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Publications (2)

Publication Number Publication Date
JP2014193450A true JP2014193450A (ja) 2014-10-09
JP2014193450A5 JP2014193450A5 (cg-RX-API-DMAC7.html) 2015-09-24

Family

ID=51839135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013071383A Pending JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Country Status (1)

Country Link
JP (1) JP2014193450A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157458A (ja) * 2016-03-03 2017-09-07 ウシオ電機株式会社 紫外線照射装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976814A (ja) * 1982-10-22 1984-05-02 Mitsubishi Heavy Ind Ltd 冷却または加熱装置
JP2001300451A (ja) * 2000-04-25 2001-10-30 Hoya Schott Kk 紫外光照射装置
WO2010032852A1 (ja) * 2008-09-18 2010-03-25 株式会社ジーエス・ユアサコーポレーション 紫外線照射装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976814A (ja) * 1982-10-22 1984-05-02 Mitsubishi Heavy Ind Ltd 冷却または加熱装置
JP2001300451A (ja) * 2000-04-25 2001-10-30 Hoya Schott Kk 紫外光照射装置
WO2010032852A1 (ja) * 2008-09-18 2010-03-25 株式会社ジーエス・ユアサコーポレーション 紫外線照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157458A (ja) * 2016-03-03 2017-09-07 ウシオ電機株式会社 紫外線照射装置

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